JPS62184667U - - Google Patents
Info
- Publication number
- JPS62184667U JPS62184667U JP7341786U JP7341786U JPS62184667U JP S62184667 U JPS62184667 U JP S62184667U JP 7341786 U JP7341786 U JP 7341786U JP 7341786 U JP7341786 U JP 7341786U JP S62184667 U JPS62184667 U JP S62184667U
- Authority
- JP
- Japan
- Prior art keywords
- light
- holder
- substrate
- light emitter
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000005468 ion implantation Methods 0.000 description 1
Description
第１図は、この考案の一実施例に係る基板検出
装置を示す概略断面図である。第２図は、この考
案の他の実施例に係る基板検出装置を示す概略断
面図であり、第１図の線―方向に見たものに
相当する。第３図は、イオン注入装置のホルダ回
りの一例を部分的に示す平面図である。第４図は
、第３図の線―に沿う概略断面図である。
２……基板、６……ホルダ、１６……貫通穴、
１８……光センサ、１８ａ……発光器、１８ｂ…
…受光器、２０……光。
FIG. 1 is a schematic cross-sectional view showing a substrate detection device according to an embodiment of this invention. FIG. 2 is a schematic cross-sectional view showing a substrate detection device according to another embodiment of the invention, and corresponds to the view taken along the line - in FIG. 1. FIG. 3 is a plan view partially showing an example of the holder and surroundings of the ion implantation device. FIG. 4 is a schematic sectional view taken along the line - in FIG. 3. 2... Board, 6... Holder, 16... Through hole,
18... Optical sensor, 18a... Light emitter, 18b...
...Receiver, 20...Light.
Claims (1)
れた貫通穴と、発光器の受光器の組み合わせから
成る光センサであつて発光器からの光がホルダの
貫通穴を通過して受光器に入射可能なように配置
されたものとを備えることを特徴とする基板検出
装置。 An optical sensor consisting of a combination of a through hole provided in the substrate holding part of a holder that holds a substrate, and a light emitter and a light receiver, in which light from the light emitter can pass through the through hole in the holder and enter the light receiver. 1. A substrate detection device comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986073417U JPH0723899Y2 (en) | 1986-05-15 | 1986-05-15 | Substrate detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986073417U JPH0723899Y2 (en) | 1986-05-15 | 1986-05-15 | Substrate detection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62184667U true JPS62184667U (en) | 1987-11-24 |
| JPH0723899Y2 JPH0723899Y2 (en) | 1995-05-31 |
Family
ID=30917730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986073417U Expired - Lifetime JPH0723899Y2 (en) | 1986-05-15 | 1986-05-15 | Substrate detection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0723899Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60193250A (en) * | 1984-03-15 | 1985-10-01 | Toshiba Corp | Ion implantation device |
-
1986
- 1986-05-15 JP JP1986073417U patent/JPH0723899Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60193250A (en) * | 1984-03-15 | 1985-10-01 | Toshiba Corp | Ion implantation device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0723899Y2 (en) | 1995-05-31 |