JPH0723538B2 - 無電解銅めっきのプロセス水から連続的にエチレンジアミン四酢酸を除去しそして取得する方法 - Google Patents

無電解銅めっきのプロセス水から連続的にエチレンジアミン四酢酸を除去しそして取得する方法

Info

Publication number
JPH0723538B2
JPH0723538B2 JP2201590A JP20159090A JPH0723538B2 JP H0723538 B2 JPH0723538 B2 JP H0723538B2 JP 2201590 A JP2201590 A JP 2201590A JP 20159090 A JP20159090 A JP 20159090A JP H0723538 B2 JPH0723538 B2 JP H0723538B2
Authority
JP
Japan
Prior art keywords
electrodialysis
edta
chamber
anion
exchange membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2201590A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0397874A (ja
Inventor
ベルント・バウアー
ヴオルフガング・エアルマン
ハイナー・シユトラートマン
Original Assignee
インターナシヨナル・ビジネス・マシーンズ・コーポレーション
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by インターナシヨナル・ビジネス・マシーンズ・コーポレーション filed Critical インターナシヨナル・ビジネス・マシーンズ・コーポレーション
Publication of JPH0397874A publication Critical patent/JPH0397874A/ja
Publication of JPH0723538B2 publication Critical patent/JPH0723538B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1617—Purification and regeneration of coating baths
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/469—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S204/00—Chemistry: electrical and wave energy
    • Y10S204/13—Purification and treatment of electroplating baths and plating wastes

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)
  • Chemically Coating (AREA)
JP2201590A 1989-09-01 1990-07-31 無電解銅めっきのプロセス水から連続的にエチレンジアミン四酢酸を除去しそして取得する方法 Expired - Lifetime JPH0723538B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3929137A DE3929137C1 (enExample) 1989-09-01 1989-09-01
DE3929137.5 1989-09-01

Publications (2)

Publication Number Publication Date
JPH0397874A JPH0397874A (ja) 1991-04-23
JPH0723538B2 true JPH0723538B2 (ja) 1995-03-15

Family

ID=6388464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2201590A Expired - Lifetime JPH0723538B2 (ja) 1989-09-01 1990-07-31 無電解銅めっきのプロセス水から連続的にエチレンジアミン四酢酸を除去しそして取得する方法

Country Status (4)

Country Link
US (1) US5091070A (enExample)
EP (1) EP0416312B1 (enExample)
JP (1) JPH0723538B2 (enExample)
DE (2) DE3929137C1 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3929121C1 (enExample) * 1989-09-01 1991-02-28 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De
US5160417A (en) * 1991-09-11 1992-11-03 Environmental Systems (International) Ltd. Electrolytic process for treatment of photographic wastewater effluent
US5472585A (en) * 1994-11-30 1995-12-05 At&T Corp. Regeneration of spent electroless copper plating solution
US5792315A (en) * 1995-02-27 1998-08-11 Eka Chemicals Ab Purifying aqueous effluent from a pulp mill using electro chemical membrane device
SE9500732L (sv) * 1995-02-27 1996-08-28 Eka Chemicals Ab Förfarande för behandling av vätskor
US6596148B1 (en) 1999-08-04 2003-07-22 Mykrolis Corporation Regeneration of plating baths and system therefore
US6391209B1 (en) 1999-08-04 2002-05-21 Mykrolis Corporation Regeneration of plating baths
US6942779B2 (en) * 2000-05-25 2005-09-13 Mykrolis Corporation Method and system for regenerating of plating baths
US6733679B2 (en) * 2001-11-06 2004-05-11 Intel Corporation Method of treating an electroless plating waste
US7211682B2 (en) 2003-07-21 2007-05-01 Akzo Nobel N.V. Aqueous solution of a sodium salt of HEDTA
EP2559666B1 (en) * 2007-08-27 2014-07-23 Technion Research & Development Foundation Ltd. pH gradients controlled by electrolysis, and their use in isoelectric focusing
JP5553492B2 (ja) * 2008-07-31 2014-07-16 キヤノン電子株式会社 無電解めっき液の再生方法および再生装置
JP5550729B2 (ja) * 2009-08-18 2014-07-16 テクニオン リサーチ アンド ディベロップメント ファウンデーション リミテッド プロトン濃度トポグラフィーならびにその生成方法および生成デバイス
DE102009037954A1 (de) * 2009-08-18 2011-02-24 Voith Patent Gmbh Verfahren zur Rückgwinnung von Chemikalien aus bei der Erzeugung lignozellulosischer Faserstoffe anfallendem Abwasser
WO2011021195A1 (en) 2009-08-18 2011-02-24 Technion Research & Development Foundation Ltd. Methods and devices of separating molecular analytes
DE102010015361A1 (de) 2010-04-16 2011-10-20 Atotech Deutschland Gmbh Membranelektrolysestapel, diesen enthaltende Elektrodialyseeinrichtung sowie Verfahren zum Regenerieren eines außenstromlos arbeitenden Bades zur Metallabscheidung
WO2012059133A1 (de) * 2010-11-05 2012-05-10 Voith Patent Gmbh Verfahren zur rückgewinnung von chemikalien aus bei der erzeugung lignozellulosischer faserstoffe anfallendem abwasser
ES2909508T3 (es) * 2011-06-07 2022-05-06 Imtex Membranes Corp Reposición de material líquido a la membrana
SI23762A (sl) 2011-06-17 2012-12-31 Envit D.O.O. Ponovna uporaba edta po pranju onesnaĺ˝enih tal
JP6080070B2 (ja) * 2012-11-12 2017-02-15 国立大学法人秋田大学 レアメタルの回収方法及び回収装置
DE202015002289U1 (de) * 2015-03-25 2015-05-06 Hartmut Trenkner Zweikammer - Elektrodialysezelle mit Anionen- und Kationenaustauschermembran zur Verwendung als Anode in alkalischen Zink- und Zinklegierungselektrolyten zum Zweck der Metallabscheidung in galvanischen Anlagen

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3674669A (en) * 1970-04-01 1972-07-04 Rai Res Corp Concentration of electrolyte from dilute washings by electrodialysis in a closed system
EP0015737B1 (en) * 1979-03-05 1983-05-11 Electrochem International, Inc. Process for the regeneration of electroless plating baths
US4289597A (en) * 1979-03-05 1981-09-15 Electrochem International, Inc. Process for electrodialytically regenerating an electroless plating bath by removing at least a portion of the reacted products
US4324629A (en) * 1979-06-19 1982-04-13 Hitachi, Ltd. Process for regenerating chemical copper plating solution
JPS5811775A (ja) * 1981-07-13 1983-01-22 Matsushita Electric Ind Co Ltd 銅の化学メッキ廃液の再生方法
US4425205A (en) * 1982-03-13 1984-01-10 Kanto Kasei Co., Ltd. Process for regenerating electroless plating bath and a regenerating apparatus of electroless plating bath
US4552635A (en) * 1983-05-02 1985-11-12 Allied Corporation Electrodialytic methods for removal of sulfur oxides from waste gases
US4549946A (en) * 1984-05-09 1985-10-29 Electrochem International, Inc. Process and an electrodialytic cell for electrodialytically regenerating a spent electroless copper plating bath
US4629545A (en) * 1984-08-10 1986-12-16 Allied Corporation Electrodialytic water splitter and process for removal of SO2 from gases containing same and for recovery of SO2 and NaOH
US4600493A (en) * 1985-01-14 1986-07-15 Morton Thiokol, Inc. Electrodialysis apparatus for the chemical maintenance of electroless copper plating baths
DE3508206A1 (de) * 1985-03-08 1986-09-11 Basf Ag, 6700 Ludwigshafen Verfahren zur herstellung bipolarer membranen
US4680098A (en) * 1985-03-18 1987-07-14 Amoco Corporation Aqueous recovery of cobalt or cobalt and manganese from solution also containing oxygenated aromatic compounds
US4615780A (en) * 1985-11-05 1986-10-07 The United States Of America As Represented By The United States Department Of Energy Method of removing oxides of sulfur and oxides of nitrogen from exhaust gases
DE3603986A1 (de) * 1986-02-08 1987-08-13 Degussa Verfahren zur aufarbeitung der nach abtrennung des enzysm verbleibenden loesung aus der enzymatischen racematspaltung einer n-acetyl-dl-aminocarbonsaeure in gegenwart einer l-aminosaeureacylase
US4839056A (en) * 1988-06-02 1989-06-13 Cahn Robert P Recovery and concentration of aqueous acids and bases
US5006211A (en) * 1989-04-19 1991-04-09 Pulp And Paper Research Institute Of Canada Electrodialylic water splitting process for the treatment of aqueous electrolytes
DE3929121C1 (enExample) * 1989-09-01 1991-02-28 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De

Also Published As

Publication number Publication date
US5091070A (en) 1992-02-25
EP0416312A3 (en) 1991-08-07
DE69013825D1 (de) 1994-12-08
DE3929137C1 (enExample) 1991-02-28
DE69013825T2 (de) 1995-05-18
EP0416312A2 (en) 1991-03-13
EP0416312B1 (en) 1994-11-02
JPH0397874A (ja) 1991-04-23

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