DE69013825D1 - Verfahren zur kontinuierlichen Entfernung und Rückgewinnung von Ethylendiamintetra-Essigsäure (EDTA) aus dem Prozesswasser der stromlosen Kupferplattierung. - Google Patents
Verfahren zur kontinuierlichen Entfernung und Rückgewinnung von Ethylendiamintetra-Essigsäure (EDTA) aus dem Prozesswasser der stromlosen Kupferplattierung.Info
- Publication number
- DE69013825D1 DE69013825D1 DE69013825T DE69013825T DE69013825D1 DE 69013825 D1 DE69013825 D1 DE 69013825D1 DE 69013825 T DE69013825 T DE 69013825T DE 69013825 T DE69013825 T DE 69013825T DE 69013825 D1 DE69013825 D1 DE 69013825D1
- Authority
- DE
- Germany
- Prior art keywords
- edta
- recovery
- copper plating
- ethylenediaminetetraacetic acid
- electroless copper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1617—Purification and regeneration of coating baths
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
- C02F1/469—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S204/00—Chemistry: electrical and wave energy
- Y10S204/13—Purification and treatment of electroplating baths and plating wastes
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Water Treatment By Electricity Or Magnetism (AREA)
- Chemically Coating (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE69013825T DE69013825T2 (de) | 1989-09-01 | 1990-08-09 | Verfahren zur kontinuierlichen Entfernung und Rückgewinnung von Ethylendiamintetra-Essigsäure (EDTA) aus dem Prozesswasser der stromlosen Kupferplattierung. |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3929137A DE3929137C1 (de) | 1989-09-01 | 1989-09-01 | |
DE69013825T DE69013825T2 (de) | 1989-09-01 | 1990-08-09 | Verfahren zur kontinuierlichen Entfernung und Rückgewinnung von Ethylendiamintetra-Essigsäure (EDTA) aus dem Prozesswasser der stromlosen Kupferplattierung. |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69013825D1 true DE69013825D1 (de) | 1994-12-08 |
DE69013825T2 DE69013825T2 (de) | 1995-05-18 |
Family
ID=6388464
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3929137A Expired - Fee Related DE3929137C1 (de) | 1989-09-01 | 1989-09-01 | |
DE69013825T Expired - Fee Related DE69013825T2 (de) | 1989-09-01 | 1990-08-09 | Verfahren zur kontinuierlichen Entfernung und Rückgewinnung von Ethylendiamintetra-Essigsäure (EDTA) aus dem Prozesswasser der stromlosen Kupferplattierung. |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3929137A Expired - Fee Related DE3929137C1 (de) | 1989-09-01 | 1989-09-01 |
Country Status (4)
Country | Link |
---|---|
US (1) | US5091070A (de) |
EP (1) | EP0416312B1 (de) |
JP (1) | JPH0723538B2 (de) |
DE (2) | DE3929137C1 (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3929121C1 (de) * | 1989-09-01 | 1991-02-28 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De | |
US5160417A (en) * | 1991-09-11 | 1992-11-03 | Environmental Systems (International) Ltd. | Electrolytic process for treatment of photographic wastewater effluent |
US5472585A (en) * | 1994-11-30 | 1995-12-05 | At&T Corp. | Regeneration of spent electroless copper plating solution |
SE9500732L (sv) * | 1995-02-27 | 1996-08-28 | Eka Chemicals Ab | Förfarande för behandling av vätskor |
US5792315A (en) * | 1995-02-27 | 1998-08-11 | Eka Chemicals Ab | Purifying aqueous effluent from a pulp mill using electro chemical membrane device |
US6596148B1 (en) | 1999-08-04 | 2003-07-22 | Mykrolis Corporation | Regeneration of plating baths and system therefore |
US6391209B1 (en) | 1999-08-04 | 2002-05-21 | Mykrolis Corporation | Regeneration of plating baths |
US6942779B2 (en) * | 2000-05-25 | 2005-09-13 | Mykrolis Corporation | Method and system for regenerating of plating baths |
US6733679B2 (en) * | 2001-11-06 | 2004-05-11 | Intel Corporation | Method of treating an electroless plating waste |
US7211682B2 (en) | 2003-07-21 | 2007-05-01 | Akzo Nobel N.V. | Aqueous solution of a sodium salt of HEDTA |
KR20100053672A (ko) | 2007-08-27 | 2010-05-20 | 테크니온 리서치 엔드 디벨로프먼트 화운데이션 엘티디. | 전기 분해에 의해 제어되는 ph 구배 및 등전위 포커싱에서의 그 사용 |
JP5553492B2 (ja) * | 2008-07-31 | 2014-07-16 | キヤノン電子株式会社 | 無電解めっき液の再生方法および再生装置 |
WO2011021195A1 (en) | 2009-08-18 | 2011-02-24 | Technion Research & Development Foundation Ltd. | Methods and devices of separating molecular analytes |
AU2010286047B2 (en) * | 2009-08-18 | 2014-09-25 | Technion Research & Development Foundation Ltd. | Proton concentration topographies, methods and devices for producing the same |
DE102009037954A1 (de) * | 2009-08-18 | 2011-02-24 | Voith Patent Gmbh | Verfahren zur Rückgwinnung von Chemikalien aus bei der Erzeugung lignozellulosischer Faserstoffe anfallendem Abwasser |
DE102010015361A1 (de) * | 2010-04-16 | 2011-10-20 | Atotech Deutschland Gmbh | Membranelektrolysestapel, diesen enthaltende Elektrodialyseeinrichtung sowie Verfahren zum Regenerieren eines außenstromlos arbeitenden Bades zur Metallabscheidung |
WO2012059133A1 (de) * | 2010-11-05 | 2012-05-10 | Voith Patent Gmbh | Verfahren zur rückgewinnung von chemikalien aus bei der erzeugung lignozellulosischer faserstoffe anfallendem abwasser |
PL2717996T3 (pl) * | 2011-06-07 | 2022-06-06 | Imtex Membranes Corp. | Uzupełnianie ciekłego materiału w membranie |
SI23762A (sl) | 2011-06-17 | 2012-12-31 | Envit D.O.O. | Ponovna uporaba edta po pranju onesnaĺ˝enih tal |
JP6080070B2 (ja) * | 2012-11-12 | 2017-02-15 | 国立大学法人秋田大学 | レアメタルの回収方法及び回収装置 |
DE202015002289U1 (de) | 2015-03-25 | 2015-05-06 | Hartmut Trenkner | Zweikammer - Elektrodialysezelle mit Anionen- und Kationenaustauschermembran zur Verwendung als Anode in alkalischen Zink- und Zinklegierungselektrolyten zum Zweck der Metallabscheidung in galvanischen Anlagen |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3674669A (en) * | 1970-04-01 | 1972-07-04 | Rai Res Corp | Concentration of electrolyte from dilute washings by electrodialysis in a closed system |
DE3063023D1 (en) * | 1979-03-05 | 1983-06-16 | Electrochem Int Inc | Process for the regeneration of electroless plating baths |
US4289597A (en) * | 1979-03-05 | 1981-09-15 | Electrochem International, Inc. | Process for electrodialytically regenerating an electroless plating bath by removing at least a portion of the reacted products |
US4324629A (en) * | 1979-06-19 | 1982-04-13 | Hitachi, Ltd. | Process for regenerating chemical copper plating solution |
JPS5811775A (ja) * | 1981-07-13 | 1983-01-22 | Matsushita Electric Ind Co Ltd | 銅の化学メッキ廃液の再生方法 |
US4425205A (en) * | 1982-03-13 | 1984-01-10 | Kanto Kasei Co., Ltd. | Process for regenerating electroless plating bath and a regenerating apparatus of electroless plating bath |
US4552635A (en) * | 1983-05-02 | 1985-11-12 | Allied Corporation | Electrodialytic methods for removal of sulfur oxides from waste gases |
US4549946A (en) * | 1984-05-09 | 1985-10-29 | Electrochem International, Inc. | Process and an electrodialytic cell for electrodialytically regenerating a spent electroless copper plating bath |
US4629545A (en) * | 1984-08-10 | 1986-12-16 | Allied Corporation | Electrodialytic water splitter and process for removal of SO2 from gases containing same and for recovery of SO2 and NaOH |
US4600493A (en) * | 1985-01-14 | 1986-07-15 | Morton Thiokol, Inc. | Electrodialysis apparatus for the chemical maintenance of electroless copper plating baths |
DE3508206A1 (de) * | 1985-03-08 | 1986-09-11 | Basf Ag, 6700 Ludwigshafen | Verfahren zur herstellung bipolarer membranen |
US4680098A (en) * | 1985-03-18 | 1987-07-14 | Amoco Corporation | Aqueous recovery of cobalt or cobalt and manganese from solution also containing oxygenated aromatic compounds |
US4615780A (en) * | 1985-11-05 | 1986-10-07 | The United States Of America As Represented By The United States Department Of Energy | Method of removing oxides of sulfur and oxides of nitrogen from exhaust gases |
DE3603986A1 (de) * | 1986-02-08 | 1987-08-13 | Degussa | Verfahren zur aufarbeitung der nach abtrennung des enzysm verbleibenden loesung aus der enzymatischen racematspaltung einer n-acetyl-dl-aminocarbonsaeure in gegenwart einer l-aminosaeureacylase |
JPH0830048B2 (ja) * | 1987-10-14 | 1996-03-27 | クロリンエンジニアズ株式会社 | アミノ酸の製造方法 |
US4839056A (en) * | 1988-06-02 | 1989-06-13 | Cahn Robert P | Recovery and concentration of aqueous acids and bases |
US5006211A (en) * | 1989-04-19 | 1991-04-09 | Pulp And Paper Research Institute Of Canada | Electrodialylic water splitting process for the treatment of aqueous electrolytes |
DE3929121C1 (de) * | 1989-09-01 | 1991-02-28 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De |
-
1989
- 1989-09-01 DE DE3929137A patent/DE3929137C1/de not_active Expired - Fee Related
-
1990
- 1990-07-31 JP JP2201590A patent/JPH0723538B2/ja not_active Expired - Lifetime
- 1990-08-09 DE DE69013825T patent/DE69013825T2/de not_active Expired - Fee Related
- 1990-08-09 EP EP90115300A patent/EP0416312B1/de not_active Expired - Lifetime
- 1990-08-30 US US07/575,264 patent/US5091070A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69013825T2 (de) | 1995-05-18 |
JPH0723538B2 (ja) | 1995-03-15 |
EP0416312B1 (de) | 1994-11-02 |
DE3929137C1 (de) | 1991-02-28 |
EP0416312A2 (de) | 1991-03-13 |
JPH0397874A (ja) | 1991-04-23 |
US5091070A (en) | 1992-02-25 |
EP0416312A3 (en) | 1991-08-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |