JPH07226584A - Manufacture of multilayer wiring board wherein copper foil with insulation bonding material is used - Google Patents

Manufacture of multilayer wiring board wherein copper foil with insulation bonding material is used

Info

Publication number
JPH07226584A
JPH07226584A JP1705094A JP1705094A JPH07226584A JP H07226584 A JPH07226584 A JP H07226584A JP 1705094 A JP1705094 A JP 1705094A JP 1705094 A JP1705094 A JP 1705094A JP H07226584 A JPH07226584 A JP H07226584A
Authority
JP
Japan
Prior art keywords
copper
copper foil
circuit
insulating adhesive
wiring board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1705094A
Other languages
Japanese (ja)
Inventor
Teiichi Inada
禎一 稲田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP1705094A priority Critical patent/JPH07226584A/en
Publication of JPH07226584A publication Critical patent/JPH07226584A/en
Pending legal-status Critical Current

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  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PURPOSE:To realize a thin type of a large number of laminations by forming a circuit pattern of metal whose etching conditions are different from those of copper in a copper foil surface of a copper clad lamination board, by etching and removing the copper foil thereafter, by boring a hole in a specified position of an insulation bonding sheet, by laminating the sheet for lamination integration and by forming a circuit including interlaminar connection. CONSTITUTION:Plating resist 3 is formed in a surface of a copper foil 2 on a base material 1 to expose the copper foil 2. After a circuit pattern is formed by electrolytic nickel plating whose etching conditions are different from those of copper, the copper foil 2 is etched and removed. A hole is bored in a fixed position of an insulating bonding sheet 4, the sheet 4 is laminated and they are made integral by lamination. Thereby, a thin type can be realized even in case of a large number of laminations.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、絶縁接着材料シートを
用いた多層配線板の製造法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a multilayer wiring board using an insulating adhesive material sheet.

【0002】[0002]

【従来の技術】近年、電子機器の小型化や薄型化に伴
い、多層配線板にも薄型化が要求されるようになってき
た。そこで、ガラス基材を使用しない多層配線板形成法
が検討されるようになり、ドリル穴明けによる、配線板
全体を貫通するスルーホールだけを使用するのではな
く、隣接する配線層のみ接続を行う、いわゆるインター
スティシャルバイアホールを形成する方法が開発されて
いる。このような例として、層間接続用の穴や半導体を
搭載するためのキャビティ用の穴をあらかじめ設けた絶
縁性接着シートや銅箔付き絶縁性接着シートを、回路基
板に積層し、めっきなどの方法によって回路形成を行う
方法がある。
2. Description of the Related Art In recent years, as electronic devices have become smaller and thinner, multilayer wiring boards have also been required to be thinner. Therefore, a method for forming a multilayer wiring board that does not use a glass base material has been studied. Instead of using only a through hole that penetrates the entire wiring board by drilling holes, only adjacent wiring layers are connected. A method of forming a so-called interstitial via hole has been developed. As such an example, an insulating adhesive sheet having a hole for interlayer connection or a hole for a cavity for mounting a semiconductor or an insulating adhesive sheet with a copper foil is laminated on a circuit board, and a method such as plating is used. There is a method of forming a circuit by.

【0003】[0003]

【発明が解決しようとする課題】絶縁性接着シートや銅
箔付き絶縁性接着シートを用いる方法は、従来のガラス
エポキシ片面板あるいは多層板、フレキシブル基板を接
着する方法と比べて、薄型化可能である点、あるいはそ
の材料を選択すれば、耐熱性が良好である点で優れてい
る。また、キャビティを形成し、回路基板が部分的に露
出した構造にすることは、露出部に端子の形成、チップ
の搭載などが可能になる点で好ましい。しかしながら、
絶縁性接着シートや銅箔付き絶縁性接着シートを用いる
方法では、穴やキャビティに銅箔が露出してしまい、外
層の銅箔をエッチングにより回路加工するためには、他
の材料で塞ぎ、回路加工後にその塞いだ材料を除去しな
ければならず、効率的でないという課題があった。
The method of using an insulating adhesive sheet or an insulating adhesive sheet with a copper foil can be made thinner than the conventional method of adhering a glass epoxy single-sided board, a multilayer board, or a flexible board. When a certain point or its material is selected, it is excellent in heat resistance. In addition, it is preferable to form a cavity so that the circuit board is partially exposed, because terminals can be formed on the exposed portion and chips can be mounted. However,
In the method of using an insulating adhesive sheet or an insulating adhesive sheet with copper foil, the copper foil is exposed in the holes and cavities. The clogged material must be removed after processing, which is not efficient.

【0004】本発明は、このような絶縁性接着シートを
用いて、効率に優れた配線板の製造法を提供することを
目的とする。
It is an object of the present invention to provide a highly efficient method for producing a wiring board using such an insulating adhesive sheet.

【0005】[0005]

【課題を解決するための手段】本発明の多層配線板の製
造法は、銅張り積層板の銅箔表面に、銅とはエッチング
条件の異なる金属によって、回路形状にパターンを形成
し、露出した銅箔をエッチング除去し、その回路上に、
絶縁性接着シートもしくは銅箔付き絶縁性接着シート
の、所定位置に穴明けを行ったものを、絶縁性接着シー
トが回路に接するように重ねて積層一体化し、層間接続
を含む回路を形成することを特徴とする。
According to the method for manufacturing a multilayer wiring board of the present invention, a circuit pattern is formed on a copper foil surface of a copper-clad laminate by a metal having an etching condition different from that of copper and exposed. The copper foil is removed by etching, and on the circuit,
Forming a circuit including interlayer connections by stacking insulating adhesive sheets or insulating adhesive sheets with copper foil that have been punched in place so that the insulating adhesive sheets contact the circuits. Is characterized by.

【0006】また、これらの一連の工程を任意の回数繰
り返し行うことによって、3層以上の多層配線を形成す
ることもできる。
Further, by repeating these series of steps any number of times, it is possible to form a multilayer wiring having three or more layers.

【0007】本発明において、銅張り積層板の銅箔表面
に、銅とはエッチング条件の異なる金属によって、回路
形状にパターンを形成する方法としては、回路とならな
い箇所にめっきレジストを形成しておき、銅とはエッチ
ング条件の異なる金属をめっきする方法、あるいは、銅
張り積層板の銅箔表面に、銅とはエッチング条件の異な
る金属を全面にめっきしておいて、回路形状にエッチン
グレジストを形成し、その金属のみをエッチング除去す
る方法を使用することができる。
In the present invention, as a method for forming a pattern in a circuit shape on a copper foil surface of a copper-clad laminate using a metal having an etching condition different from that of copper, a plating resist is formed on a portion which does not form a circuit. , A method of plating a metal having a different etching condition from copper, or a metal having a different etching condition from copper is plated on the entire surface of the copper foil of the copper-clad laminate, and an etching resist is formed on the circuit shape. However, a method of etching away only the metal can be used.

【0008】このときに、めっきは、無電解めっきでも
よいが、効率の上からは、電解めっきを行うことが好ま
しい。
At this time, the plating may be electroless plating, but electrolytic plating is preferable in terms of efficiency.

【0009】銅とはエッチング条件の異なる金属によっ
て、回路形状にパターンを形成する、金属レジストの種
類としては、ニッケル、金、はんだ、スズ、またはこれ
らの合金などがあり、これらを1種または2種以上組み
合わせて用いても良い。
There are nickel, gold, solder, tin, alloys thereof, etc. as a type of metal resist for forming a pattern in a circuit shape with a metal having an etching condition different from copper. One or two of these are used. You may use it in combination of 2 or more types.

【0010】予め層間接続用穴やキャビティ用の穴を加
工した絶縁性接着シートあるいは銅箔付き絶縁性接着シ
ートと、回路基板を加圧加熱一体化するには、プレス、
真空プレス、ホットロールラミネータ、真空ラミネータ
などを用いることができる。この場合、積層時のクッシ
ョン材、積層圧を適切に選定することにより、回路充填
性、表面平滑性、層間接続穴部からの絶縁接着材料の流
動量を最適化することができ、これらの条件は、装置の
種類、絶縁接着材料の流動性、積層する回路基板の種類
により、実験的に求めることが可能である。
In order to press-heat and integrate the insulating adhesive sheet or the insulating adhesive sheet with copper foil in which the holes for interlayer connection and the holes for cavities have been processed in advance, a press,
A vacuum press, a hot roll laminator, a vacuum laminator, etc. can be used. In this case, it is possible to optimize the circuit filling property, surface smoothness, and the flow rate of the insulating adhesive material from the interlayer connection hole by appropriately selecting the cushioning material and the lamination pressure during lamination. Can be experimentally determined depending on the type of device, the fluidity of the insulating adhesive material, and the type of circuit board to be laminated.

【0011】本発明に用いる、絶縁性接着シートもしく
は銅箔付き絶縁性接着シートの絶縁材料の組成は、エポ
キシ樹脂系、ポリイミド樹脂系、フェノール樹脂系、な
どを使用することができる。この絶縁材料には、可とう
性付与成分を加えることが好ましく、これには、電気絶
縁性の良い高分子物質、例えば、高分子量エポキシ樹
脂、超高分子量エポキシ樹脂、アクリルゴム、NBR、
エポキシ変性アクリルゴム、エポキシ化ポリブタジエ
ン、フェノキシ樹脂などを1種以上使用することかでき
る。また、銅箔と絶縁接着材料との接着性を向上させる
ため、シランカッブリング剤、市販品では、NUC−A
187、A189、A1160(日本ユニカー株式会社
製、商品名)などを組合せて使用することが好ましい。
The composition of the insulating material of the insulating adhesive sheet or the insulating adhesive sheet with copper foil used in the present invention may be an epoxy resin type, a polyimide resin type, a phenol resin type or the like. It is preferable to add a flexibility-imparting component to this insulating material, which includes a polymer substance having good electrical insulation properties, such as a high molecular weight epoxy resin, an ultra high molecular weight epoxy resin, an acrylic rubber, NBR,
One or more kinds of epoxy-modified acrylic rubber, epoxidized polybutadiene, phenoxy resin and the like can be used. Moreover, in order to improve the adhesiveness between the copper foil and the insulating adhesive material, a silane coupling agent, which is a commercially available product, is NUC-A.
It is preferable to use 187, A189, A1160 (manufactured by Nippon Unicar Co., Ltd., trade name) in combination.

【0012】エポキシ樹脂を用いるときには、その硬化
剤としては、ワニスライフの長い潜在性の高いものが望
ましく、例えば、3級アミン、酸無水物、イミダゾール
化合物、ポリフェノール樹脂、マスクイソシアネートな
どの1種以上を使用することができる。
When an epoxy resin is used, it is desirable that the curing agent has a long varnish life and a high potential. For example, one or more of a tertiary amine, an acid anhydride, an imidazole compound, a polyphenol resin, a masked isocyanate and the like can be used. Can be used.

【0013】また、この絶縁性接着シートは、2層以上
の層構成にすることにより、各層に機能を分担させるこ
とが可能である。例えば、最外層については、回路充填
性を向上させるために、低分子エポキシ樹脂を主成分に
することができ、最外層以外の層は、多層配線板の用途
により必要となる特性に応じて選定することができる。
その例として、耐熱性が要求される場合、第1層として
銅箔耐熱性の良好なポリイミド樹脂を用い、少なくとも
最外層には、回路充填性の良好なエポキシ樹脂系を用い
ることにより、耐熱性と回路充填性を両立できる。ま
た、第1層として、対トラッキング性良好なフェノール
系絶縁接着材料を用い、少なくとも最外層には回路充填
性良好なエポキシ樹脂系を用いることにより、対トラッ
キング性と回路充填性の向上を図ることができる。な
お、絶縁材料を銅箔や、支持フィルムに塗工する方法と
しては、バーコータ、リップコータ、ロールコータなど
があるがクレータ、ボイドなどの欠陥が少なく、塗膜厚
をほぼ均一にできる方法ならば、どのような方法でも良
い。
Further, this insulating adhesive sheet can be made to have a function shared by each layer by having a layer structure of two or more layers. For example, for the outermost layer, a low molecular weight epoxy resin can be used as a main component in order to improve the circuit filling property, and the layers other than the outermost layer are selected according to the characteristics required depending on the application of the multilayer wiring board. can do.
As an example, when heat resistance is required, a polyimide resin having good heat resistance of copper foil is used as the first layer, and an epoxy resin system having good circuit filling property is used as at least the outermost layer to improve heat resistance. And the circuit filling property can both be achieved. Further, by using a phenolic insulating adhesive material having good anti-tracking properties as the first layer and using an epoxy resin system having good circuit-filling properties as at least the outermost layer, it is possible to improve anti-tracking properties and circuit-filling properties. You can Incidentally, as a method of applying an insulating material to a copper foil or a supporting film, there are a bar coater, a lip coater, a roll coater and the like, but there are few defects such as craters and voids, and if the coating film thickness can be made substantially uniform, Any method will do.

【0014】層間接続には、導電ペースト、めっき、ワ
イヤボンディング、などによる方法を用いることができ
る。
For the interlayer connection, a method using conductive paste, plating, wire bonding, etc. can be used.

【0015】[0015]

【実施例】【Example】

実施例1 (1)35μmの銅箔に、第1層として乾燥後の膜厚が
35μmになるようにワニスA(表1に組成を示す。)
を塗工後、150℃にて10分乾燥し、この上に第2層
として、乾燥後の膜厚が第1層、第2層合わせて70μ
mになるようにワニスAを塗工後、110℃にて10分
乾燥して銅箔付き絶縁接着材料シートを作製した。 (2)上記の銅箔付き絶縁性接着シートの、層間接続を
行う部所及びキャビティを形成する部分にパンチで穴明
けを行った。 (3)銅張り積層板の回路となる形状に、銅箔を露出す
るようにめっきレジストを形成し、電解ニッケルめっき
を行って、めっきレジストを剥離した後、ニッケルめっ
きをエッチングレジストとして用いて、不要な銅箔をア
ルカリエッチャントによりエッチング除去して作成し
た、ガラス−エポキシ回路基板と、工程(2)で作成し
た銅箔付き絶縁性接着シートを、加熱加圧下で積層一体
化する。 (4)銅箔の不要な箇所を、エッチング除去し、回路を
形成する。 (5)銀ペーストにより層間接続を図る。 上記の方法により、インタースティシャルバイアホール
及びキャビティを有する多層板を製造することができ
た。
Example 1 (1) Varnish A (composition is shown in Table 1) on a copper foil having a thickness of 35 μm so that the thickness of the dried first layer would be 35 μm.
After coating, it is dried at 150 ° C. for 10 minutes, and a second layer having a thickness of 70 μm is formed on the first layer and the second layer after drying.
The varnish A was applied so that the thickness became m, and then dried at 110 ° C. for 10 minutes to produce an insulating adhesive material sheet with a copper foil. (2) The insulating adhesive sheet with a copper foil was punched at a portion for interlayer connection and a portion for forming a cavity. (3) A plating resist is formed on the shape of the circuit of the copper-clad laminate so as to expose the copper foil, electrolytic nickel plating is performed, the plating resist is peeled off, and then nickel plating is used as an etching resist. The glass-epoxy circuit board created by etching away unnecessary copper foil with an alkaline etchant and the copper foil-attached insulating adhesive sheet created in step (2) are laminated and integrated under heat and pressure. (4) An unnecessary portion of the copper foil is removed by etching to form a circuit. (5) A silver paste is used for interlayer connection. A multilayer board having interstitial via holes and cavities could be manufactured by the above method.

【0016】[0016]

【発明の効果】本発明により、インタースティシャルバ
イアホール及びキャビティの形成を、効率よく製造する
ことができた。また、絶縁性接着シートまたは銅箔付き
絶縁性接着シートを用いるので、積層する層数が多い場
合でも薄型化を図ることができる。さらに、パンチ、ド
リルなどにより、絶縁性接着シートまたは銅箔付き絶縁
性接着シートに予め穴明けを行うことができるので、低
コストで層間接続部の信頼性が高い多層配線板を得るこ
とができる。
According to the present invention, the formation of interstitial via holes and cavities can be efficiently manufactured. Moreover, since an insulating adhesive sheet or an insulating adhesive sheet with a copper foil is used, it is possible to reduce the thickness even when the number of layers to be laminated is large. Furthermore, since punching can be performed in advance on the insulating adhesive sheet or the insulating adhesive sheet with copper foil by a punch, a drill, etc., it is possible to obtain a multilayer wiring board with low cost and high reliability of the interlayer connection portion. .

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示す断面図である。FIG. 1 is a sectional view showing an embodiment of the present invention.

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】銅張り積層板の銅箔表面に、銅とはエッチ
ング条件の異なる金属によって、回路形状にパターンを
形成し、露出した銅箔をエッチング除去し、その回路上
に、絶縁性接着シートもしくは銅箔付き絶縁性接着シー
トの、所定位置に穴明けを行ったものを、絶縁性接着シ
ートが回路に接するように重ねて積層一体化し、層間接
続を含む回路を形成することを特徴とする多層配線板の
製造法。
1. A pattern of a circuit shape is formed on a copper foil surface of a copper-clad laminate with a metal having an etching condition different from that of copper, the exposed copper foil is removed by etching, and an insulating adhesive is applied on the circuit. A sheet or an insulating adhesive sheet with a copper foil, which has been punched at a predetermined position, is laminated and integrated so that the insulating adhesive sheet contacts the circuit to form a circuit including interlayer connection. Method for manufacturing multilayer wiring board.
【請求項2】銅張り積層板の銅箔表面に、銅とはエッチ
ング条件の異なる金属によって、回路形状にパターンを
形成し、露出した銅箔をエッチング除去し、その回路上
に、絶縁性接着シートもしくは銅箔付き絶縁性接着シー
トの、所定位置に穴明けを行ったものを、絶縁性接着シ
ートが回路に接するように重ねて積層一体化し、層間接
続を含む回路を形成する、一連の工程を任意の回数繰り
返し行うことを特徴とする多層配線板の製造法。
2. A circuit pattern is formed on a copper foil surface of a copper-clad laminate with a metal having an etching condition different from that of copper, the exposed copper foil is removed by etching, and an insulating adhesive is applied onto the circuit. A series of steps in which a sheet or an insulating adhesive sheet with copper foil, which has been punched at a predetermined position, is laminated and integrated so that the insulating adhesive sheet contacts the circuit to form a circuit including interlayer connection. A method for manufacturing a multilayer wiring board, characterized in that the above steps are repeated an arbitrary number of times.
【請求項3】銅張り積層板の銅箔表面に、銅とはエッチ
ング条件の異なる金属によって、回路形状にパターンを
形成する方法として、回路とならない箇所にめっきレジ
ストを形成しておき、銅とはエッチング条件の異なる金
属をめっきすることを特徴とする請求項1または2に記
載の多層配線板の製造法。
3. As a method of forming a pattern in a circuit shape on a copper foil surface of a copper-clad laminate by using a metal having an etching condition different from that of copper, a plating resist is formed at a portion which does not become a circuit, and copper is formed. 3. The method for manufacturing a multilayer wiring board according to claim 1, wherein the metal is plated with different etching conditions.
【請求項4】銅張り積層板の銅箔表面に、銅とはエッチ
ング条件の異なる金属によって、回路形状にパターンを
形成する方法として、銅張り積層板の銅箔表面に、銅と
はエッチング条件の異なる金属を全面にめっきしておい
て、回路形状にエッチングレジストを形成し、その金属
のみをエッチング除去することを特徴とする請求項1ま
たは2に記載の多層配線板の製造法。
4. A method for forming a pattern in a circuit shape on a surface of a copper foil of a copper-clad laminate by using a metal having an etching condition different from that of copper. The method for producing a multilayer wiring board according to claim 1 or 2, wherein different metals are plated on the entire surface, an etching resist is formed in a circuit shape, and only the metal is removed by etching.
【請求項5】めっきが、電解めっきであることを特徴と
する請求項3または4に記載の多層配線板の製造法。
5. The method for manufacturing a multilayer wiring board according to claim 3, wherein the plating is electrolytic plating.
【請求項6】銅とはエッチング条件の異なる金属によっ
て、回路形状にパターンを形成する、金属レジストの種
類として、ニッケル、金、はんだ、スズ、またはこれら
の合金からなる群から1種以上を用いることを特徴とす
る請求項1〜5のうちいずれかに記載の多層配線板の製
造法。
6. A metal resist for forming a pattern in a circuit shape with a metal having a different etching condition from copper is used, and at least one member selected from the group consisting of nickel, gold, solder, tin and alloys thereof is used. The method for manufacturing a multilayer wiring board according to any one of claims 1 to 5, wherein:
JP1705094A 1994-02-14 1994-02-14 Manufacture of multilayer wiring board wherein copper foil with insulation bonding material is used Pending JPH07226584A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1705094A JPH07226584A (en) 1994-02-14 1994-02-14 Manufacture of multilayer wiring board wherein copper foil with insulation bonding material is used

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1705094A JPH07226584A (en) 1994-02-14 1994-02-14 Manufacture of multilayer wiring board wherein copper foil with insulation bonding material is used

Publications (1)

Publication Number Publication Date
JPH07226584A true JPH07226584A (en) 1995-08-22

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP1705094A Pending JPH07226584A (en) 1994-02-14 1994-02-14 Manufacture of multilayer wiring board wherein copper foil with insulation bonding material is used

Country Status (1)

Country Link
JP (1) JPH07226584A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003060341A (en) * 2001-08-08 2003-02-28 Mitsubishi Gas Chem Co Inc Method of manufacturing printed wiring board having minute pattern
JP2003069218A (en) * 2001-08-23 2003-03-07 Mitsubishi Gas Chem Co Inc Method for manufacturing printed wiring board having extra-fine pattern

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003060341A (en) * 2001-08-08 2003-02-28 Mitsubishi Gas Chem Co Inc Method of manufacturing printed wiring board having minute pattern
JP2003069218A (en) * 2001-08-23 2003-03-07 Mitsubishi Gas Chem Co Inc Method for manufacturing printed wiring board having extra-fine pattern

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