JP3474896B2 - Printed wiring board and manufacturing method thereof - Google Patents

Printed wiring board and manufacturing method thereof

Info

Publication number
JP3474896B2
JP3474896B2 JP22610693A JP22610693A JP3474896B2 JP 3474896 B2 JP3474896 B2 JP 3474896B2 JP 22610693 A JP22610693 A JP 22610693A JP 22610693 A JP22610693 A JP 22610693A JP 3474896 B2 JP3474896 B2 JP 3474896B2
Authority
JP
Japan
Prior art keywords
conductive metal
metal layer
synthetic resin
wiring board
printed wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP22610693A
Other languages
Japanese (ja)
Other versions
JPH0786749A (en
Inventor
勇一 山本
知久 本村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP22610693A priority Critical patent/JP3474896B2/en
Priority to EP94306405A priority patent/EP0647090B1/en
Priority to US08/297,954 priority patent/US5736681A/en
Priority to DE69419219T priority patent/DE69419219T2/en
Priority to KR1019940022332A priority patent/KR950010719A/en
Priority to TW083108450A priority patent/TW272350B/zh
Publication of JPH0786749A publication Critical patent/JPH0786749A/en
Priority to US08/902,100 priority patent/US5865934A/en
Application granted granted Critical
Publication of JP3474896B2 publication Critical patent/JP3474896B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は印刷配線板の製造方法に
係り、特に配線パターン層間を接続する導体配線部およ
び部品ピン挿入用などのスルホールを備え、かつ高密度
な配線および実装が可能な信頼性の高い印刷配線板を、
工数の低減を図りながら、歩留まり良好に製造し得る方
法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a printed wiring board, and more particularly, it has a conductor wiring portion for connecting wiring pattern layers and through holes for inserting component pins, and enables high-density wiring and mounting. Reliable printed wiring board
The present invention relates to a method capable of producing a good yield while reducing the number of steps.

【0002】[0002]

【従来の技術】配線回路の高機能化、もしくはコンパク
ト化などを目的として、配線パターンの多層化が図られ
ている。そして、この種の多層型印刷配線板において
は、内層配線パターン層間同士、内層配線パターン層と
表面配線パターン層との間の電気的な接続が必然的に要
求され、一般的に、次のようにして行っている。たとえ
ば、基板両面に張られた銅箔をそれぞれパターニングし
た後、要すれば IVHと呼称される両面間の電気的な接続
部を形成してから、前記パターニング面上に絶縁シート
(たとえばプリプレグ)を介して銅箔を積層・配置し、
加熱加圧により一体化する。なお、前記 IVHと呼称され
る両面間の電気的な接続は、基板の所定位置に穴明け加
工し、この穴内壁面にメッキ処理によって導電層を被着
形成することにより行っており、また前記加熱加圧によ
り一体化した後、前述の両面型のときと同様に、穴明け
加工およびメッキ処理によって、配線パターン層間の電
気的なスルホール接続、および部品ピン挿入用の半田付
け可能なスルホールを形設し、さらに表面銅箔について
パターニングすることにより、所要の配線パターン層間
接続部および部品ピン挿入用のスルホールを備えた多層
型印刷配線板を得ている。なお、より配線パターン層の
多い多層型印刷配線板の場合は、中間に介挿させる両面
型板の数を増やす方式で製造できる。
2. Description of the Related Art Multi-layered wiring patterns have been designed for the purpose of improving the functionality of wiring circuits or making them compact. In this type of multilayer printed wiring board, the electrical connection between the inner layer wiring pattern layers and between the inner layer wiring pattern layer and the surface wiring pattern layer is inevitably required. I am doing it. For example, after patterning the copper foil stretched on both sides of the board, if necessary, form an electrical connection between both sides called IVH, and then place an insulating sheet (eg prepreg) on the patterned surface. Laminate and place copper foil via
It is integrated by heating and pressing. The electrical connection between both surfaces, referred to as IVH, is performed by forming a hole in a predetermined position on the substrate and depositing a conductive layer on the inner wall surface of the hole by plating. After pressure integration, as in the case of the above-mentioned double-sided type, by forming holes and plating, electrical through hole connection between wiring pattern layers and solderable through holes for component pin insertion are formed. Then, by further patterning the surface copper foil, a multilayer printed wiring board having a required wiring pattern interlayer connecting portion and a through hole for inserting a component pin is obtained. In the case of a multilayer printed wiring board having more wiring pattern layers, it can be manufactured by a method of increasing the number of double-sided boards to be inserted in the middle.

【0003】前記印刷配線板の製造方法において、配線
パターン層間の電気的な接続をメッキ方法によらず行う
方法として、両面銅箔張り基板の所定位置に穴明けし、
この穴内に導電性ペーストを印刷法などにより流し込
み、穴内に流し込んだ導電性ペーストの樹脂分を硬化さ
せて、配線層間を電気的に接続する方法も行われてい
る。
In the method of manufacturing a printed wiring board, as a method of electrically connecting the wiring pattern layers without using a plating method, a double-sided copper foil-clad substrate is punched at a predetermined position,
There is also a method in which a conductive paste is poured into the hole by a printing method or the like, the resin component of the conductive paste poured into the hole is cured, and the wiring layers are electrically connected.

【0004】[0004]

【発明が解決しようとする課題】上記で説明したよう
に、配線パターン層間の電気的な接続にメッキ法を利用
する印刷配線板の製造方法においては、基板に配線パタ
ーン層間の電気的な接続用の穴明け(穿穴)加工、穿設
した穴内壁面を含めたメッキ処理工程などを要し、印刷
配線板の製造工程が冗長であるとともに、工程管理も繁
雑であるという欠点がある。一方、配線パターン層間の
電気的な接続用の穴に、導電性ペーストを印刷などによ
り埋め込む方法の場合も、前記メッキ法の場合と同様に
穴明け工程を必要とする。しかも、穿設した穴内に、均
一(一様)に導体性ペーストを流し込み埋め込むことが
難しく、電気的な接続の信頼性に問題があった。いずれ
にしても、高機能化などに伴い配線パターン層間の接続
部が多数化する傾向を考慮すると、前記穴明け工程(穴
明け箇所が増大する)などを要することは、印刷配線板
のコストや歩留まりなどに反映し、低コスト化などへの
要望に対応し得ないという欠点がある。
As described above, in a method of manufacturing a printed wiring board that utilizes a plating method for electrical connection between wiring pattern layers, a method for electrically connecting wiring pattern layers to a substrate is used. However, there are drawbacks in that the manufacturing process of the printed wiring board is redundant and the process control is complicated, since it requires a process of drilling (drilling) and a plating process including the inner wall surface of the hole. On the other hand, the method of embedding a conductive paste in the holes for electrical connection between the wiring pattern layers by printing or the like also requires a drilling step as in the case of the plating method. Moreover, it is difficult to evenly (uniformly) pour and embed the conductive paste into the bored holes, and there is a problem in reliability of electrical connection. In any case, considering the tendency that the number of connecting portions between wiring pattern layers increases with the increase in functionality and the like, the need for the perforating step (the number of perforating portions increases), etc. There is a drawback in that it is not possible to meet the demand for cost reduction, etc., by reflecting it in yield and the like.

【0005】また、前記配線パターン層間の電気的な接
続構成の場合は、印刷配線板の表裏面に、配線パターン
層間接続用の導電体穴が設置されているため、その導電
体穴の領域に配線を形成・配置し得ない。さらに、電子
部品を搭載することもできないので、配線密度の向上が
制約されるとともに、電子部品の実装密度向上も阻害さ
れるという問題がある。つまり、従来の製造方法によっ
て得られる印刷配線板は、高密度配線や高密度実装によ
る回路装置のコンパクト化、ひいては電子機器類の小形
化などの要望に、十分応え得るものといえず、前記コス
ト面を含め、実用的により有効な印刷配線板の製造方法
が望まれている。
Further, in the case of the electrical connection structure between the wiring pattern layers, since conductor holes for connecting the wiring pattern layers are installed on the front and back surfaces of the printed wiring board, the conductor hole is formed in the region of the conductor holes. Wiring cannot be formed or placed. Further, since it is not possible to mount electronic parts, there is a problem that the improvement of wiring density is restricted and the improvement of mounting density of electronic parts is also hindered. In other words, the printed wiring board obtained by the conventional manufacturing method cannot fully meet the demand for compact circuit devices by high-density wiring and high-density mounting, and further miniaturization of electronic devices. There is a demand for a practically more effective method for producing a printed wiring board, including the surface.

【0006】本発明は上記事情に対処してなされたもの
で、簡易なプロセスで、より高密度の配線および実装が
可能で、信頼性の高い印刷配線板を歩留まりよく製造し
得る方法の提供を目的とする。
The present invention has been made in view of the above circumstances, and provides a method capable of manufacturing a highly reliable printed wiring board with a high yield, which enables wiring and mounting at a higher density by a simple process. To aim.

【0007】[0007]

【課題を解決するための手段】本発明に係る第1の印刷
配線板の製造方法は、所定位置に導体バンプ群を形設し
た導電性金属層の主面に、合成樹脂系シート主面を対接
させて複数層を積層配置する工程と、前記積層体を加熱
して合成樹脂系シートの樹脂分がガラス転移点温度ない
し可塑状態温度で積層体を加圧し、前記合成樹脂系シー
トの厚さ方向に、前記バンプ群をそれぞれ貫挿させて合
成樹脂系シート面に対接・配置された内層配線パターン
に接続する導体配線部を備えた多層配線板を形成する工
程と、前記多層配線板の所定位置に両面間に貫通するス
ルホールを穿設する工程と、前記スルホール内壁面にメ
ッキ法によって金属層を被着形成する工程とを具備して
成ることを特徴とし、さらに本発明に係る第2の印刷配
線板の製造方法は、スルホール穿設予定領域に、穿設さ
れるスルホール内壁面の複数箇所に一部が露出可能な位
置を含む所定位置に導体バンプ群を形設した導電性金属
層の主面に、合成樹脂系シート主面を対接させて複数層
を積層配置する工程と、前記積層体を加熱して合成樹脂
系シートの樹脂分がガラス転移点温度ないし可塑状態温
度で積層体を加圧し、前記合成樹脂系シートの厚さ方向
に、前記バンプ群をそれぞれ貫挿させて合成樹脂系シー
ト面に対接・配置された内層配線パターンに接続する導
体配線部を備えた多層配線板を形成する工程と、前記多
層配線板の所定位置に、内壁面の複数箇所に導体バンプ
の一部を露出させて両面間に貫通するスルホールを穿設
する工程と、前記スルホール内壁面にメッキ法によって
金属層を被着形成する工程とを具備して成ることを特徴
とする。
According to a first method of manufacturing a printed wiring board of the present invention, a synthetic resin sheet main surface is formed on a main surface of a conductive metal layer having conductor bump groups formed at predetermined positions. A step of stacking and arranging a plurality of layers in contact with each other, and heating the laminate to press the laminate at a glass transition temperature or a plastic state temperature so that the resin content of the synthetic resin sheet increases the thickness of the synthetic resin sheet. Forming a multi-layer wiring board having conductor wiring portions that are inserted through the bump groups in the vertical direction to connect to inner layer wiring patterns that are contacted and arranged on the surface of the synthetic resin sheet, and the multi-layer wiring board. And a step of depositing a metal layer on the inner wall surface of the through hole by a plating method, the method according to the present invention. The manufacturing method of the printed wiring board of 2 is A synthetic resin sheet is formed on the main surface of the conductive metal layer in which conductor bump groups are formed at predetermined positions including positions where a part of the inner wall surface of the through hole can be partially exposed in the through hole drilling planned region. A step of stacking a plurality of layers with the main surfaces facing each other; and heating the laminate to press the laminate at a glass transition temperature or a plastic state temperature of the resin content of the synthetic resin sheet, A step of forming a multilayer wiring board having conductor wiring portions which are inserted through the bump groups in the thickness direction of the sheet and connected to inner layer wiring patterns which are contacted and arranged on a synthetic resin sheet surface; A step of exposing a part of the conductor bumps at a plurality of positions on the inner wall surface to form a through hole penetrating between both surfaces at a predetermined position of the multilayer wiring board, and depositing a metal layer on the inner wall surface of the through hole by a plating method. And the process of Characterized by comprising Te.

【0008】本発明において、導体バンプ群を形設する
導電性金属層としては、たとえば電解銅箔などの導電性
シート(箔)が挙げられ、この導電性金属層は1枚のシ
ートであってもよいし、パターン化されたものでもよ
く、その形状はとくに限定されないし、さらに導体バン
プ群は、一方の主面だけでなく、両主面にそれぞれ形設
した形のものを用いてもよい。
In the present invention, the conductive metal layer forming the conductor bump group may be, for example, a conductive sheet (foil) such as electrolytic copper foil, and the conductive metal layer is a single sheet. The conductor bump group may be patterned not only on one main surface but also on both main surfaces. .

【0009】ここで、導体バンプは、たとえば銀,金,
銅,半田粉などの導電性粉末、これらの合金粉末もしく
は複合(混合)金属粉末と、たとえばポリカーボネート
樹脂、ポリスルホン樹脂、ポリエステル樹脂、フェノキ
シ樹脂、フェノール樹脂,ポリイミド樹脂などのバイン
ダー成分とを混合して調製された導電性組成物、あるい
は導電性金属などで構成される。そして、前記バンプ群
の形設は、導電性組成物で形成する場合、たとえば比較
的厚いメタルマスクを用いた印刷法により、アスペクト
比の高いバンプを形成でき、そのバンプ群の高さは一般
的に、100〜400μm程度が望ましく、さらにバン
プ群の高さは一層の合成樹脂系シートを貫通し得る高さ
および複数層の合成樹脂系シートを貫通し得る高さとが
適宜混在していてもよい。なお、この導電性バンプの形
設において、スルーホール(貫通穴)の穿設予定位置
に、穿設するスルーホール内壁面の複数箇所に導電性バ
ンプの一部が露出するように設けておくと、メッキによ
る金属層の被着形成がより容易になる。一方、導電性金
属でバンプ群を形成する手段としては、(a)ある程度
形状もしくは寸法が一定な微小金属塊を、粘着剤層を予
め設けておいた導電性金属層面に散布し、選択的に固着
させるか(このときマスクを配置して行ってもよい)、
(b)電解銅箔面にメッキレジストを印刷・パターニン
グして,銅、錫、金、銀、半田などメッキして選択的に
微小な金属柱(バンプ)群の形成、(c)導電性金属層
面に半田レジストの塗布・パターニングして、半田浴に
浸漬して選択的に微小な金属柱(バンプ)群の形成など
が挙げられる。ここで、バンプに相当する微小金属塊な
いし微小な金属柱は、異種金属を組合わせて成る多層構
造、多層シェル構造でもよい。たとえば銅を芯にし表面
を金や銀の層で被覆して耐酸化性を付与したり、銅を芯
にし表面を半田層被覆して半田接合性をもたせたりして
もよい。なお、本発明において、バンプ群を導電性組成
物で形成する場合は、メッキ法などの手段で行う場合に
較べて、さらに工程など簡略化し得るので、低コスト化
の点で有効である。
Here, the conductor bumps are, for example, silver, gold,
A conductive powder such as copper or solder powder, an alloy powder or a composite (mixed) metal powder of these, and a binder component such as polycarbonate resin, polysulfone resin, polyester resin, phenoxy resin, phenol resin, or polyimide resin are mixed. It is composed of the prepared conductive composition or a conductive metal. When the bump group is formed of a conductive composition, a bump having a high aspect ratio can be formed by, for example, a printing method using a relatively thick metal mask. Further, the height of the bump group is preferably about 100 to 400 μm, and the height capable of penetrating one synthetic resin sheet and the height capable of penetrating a plurality of synthetic resin sheets may be appropriately mixed. . Incidentally, in the form set of the conductive bumps, the bored predetermined position of the through-hole (through-hole), when the part of the conductive bumps in a plurality of locations of Suruho Le inner wall of bored preferably provided so as to expose It becomes easier to form a metal layer by plating. On the other hand, as a means for forming a bump group with a conductive metal, (a) a fine metal block having a certain shape or size is sprayed on the surface of the conductive metal layer on which an adhesive layer is previously provided, and selectively. You can either fix it (you can place a mask at this time),
(B) A plating resist is printed / patterned on the surface of the electrolytic copper foil, and copper, tin, gold, silver, solder or the like is plated to selectively form a group of fine metal pillars (bumps), (c) a conductive metal For example, coating and patterning a solder resist on the layer surface and immersing in a solder bath to selectively form a group of fine metal pillars (bumps). Here, there is no small metal block corresponding to the bump.
The small metal pillar may have a multilayer structure or a multilayer shell structure formed by combining different metals. For example, copper may be used as a core and the surface may be coated with a gold or silver layer to impart oxidation resistance, or copper may be used as a core and the surface may be coated with a solder layer so as to have solder bondability. In addition, in the present invention, when the bump group is formed of a conductive composition, the process can be further simplified as compared with the case where it is performed by a method such as a plating method, which is effective in reducing the cost.

【0010】本発明において、前記導体バンプ群が貫挿
され、貫通型の導体配線部を形成する合成樹脂系シート
としては、たとえば熱可塑性樹脂フイルム(シート)が
挙げられ、またその厚さは50〜 800μm 程度が好まし
い。ここで、熱可塑性樹脂シートとしては、たとえばポ
リカーボネート樹脂,ポリスルホン樹脂,熱可塑性ポリ
イミド樹脂,4フッ化ポリエチレン樹脂,6フッ化ポリ
プロピレン樹脂,ポリエーテルエーテルケトン樹脂など
のシート類が挙げられる。また、硬化前状態に保持され
る熱硬化性樹脂シートとしては、エポキシ樹脂,ビスマ
レイミドトリアジン樹脂,ポリイミド樹脂,フェノール
樹脂,ポリエステル樹脂,メラミン樹脂,あるいはブタ
ジェンゴム,ブチルゴム,天然ゴム,ネオプレンゴム,
シリコーンゴムなどの生ゴムのシート類が挙げられる。
これら合成樹脂は、単独でもよいが絶縁性無機物や有機
物系の充填物を含有してもよく、さらにガラスクロスや
マット、有機合成繊維布やマット、あるいは紙などの補
強材と組み合わせて成るシートであってもよい。
In the present invention, examples of the synthetic resin sheet having the conductor bump group inserted therethrough to form a through-hole type conductor wiring portion include a thermoplastic resin film (sheet) and has a thickness of 50. It is preferably about 800 μm. Here, examples of the thermoplastic resin sheet include sheets of polycarbonate resin, polysulfone resin, thermoplastic polyimide resin, tetrafluoropolyethylene resin, hexafluoropolypropylene resin, polyetheretherketone resin, and the like. Further, as the thermosetting resin sheet which is kept in the pre-curing state, epoxy resin, bismaleimide triazine resin, polyimide resin, phenol resin, polyester resin, melamine resin, butadiene rubber, butyl rubber, natural rubber, neoprene rubber,
Examples include raw rubber sheets such as silicone rubber.
These synthetic resins may be used alone or may contain an insulating inorganic or organic filler, and are a sheet formed by combining with a reinforcing material such as glass cloth or mat, organic synthetic fiber cloth or mat, or paper. It may be.

【0011】さらに、本発明において、バンプ群を形設
した導電性金属層の主面に、合成樹脂系シート主面を対
接させた構成の複数層を、積層配置して成る積層体を加
熱・加圧するとき、合成樹脂系シートを載置する基台
(当て板)としては、寸法や変形の少ない金属板もしく
は耐熱性樹脂板、たとえばステンレス板,真鍮板、ポリ
イミド樹脂板(シート),ポリテトラフロロエチレン樹
脂板(シート)などが使用される。
Further, according to the present invention, a laminated body formed by laminating a plurality of layers having a structure in which a synthetic resin sheet main surface is in contact with a main surface of a conductive metal layer having a bump group formed thereon is heated.・ When applying pressure, the base (patch plate) on which the synthetic resin sheet is placed is a metal plate or heat-resistant resin plate with little size or deformation, such as stainless steel plate, brass plate, polyimide resin plate (sheet), poly A tetrafluoroethylene resin plate (sheet) or the like is used.

【0012】なお、スルホール穿設は、たとえばドリル
など印刷配線板の製造で、常套的である手段でよく、ま
た穿設したスルホール内壁面へのメッキ処理も化学メッ
キ(無電解メッキ)、もしくは化学メッキと電気メッキ
の併用で成し得る。そして、この穴明け工程やメッキ工
程は、いわゆる従来技術におけるスルホール接続など、
配線パターン層間の電気的な接続部数に比べて大幅に少
ないので、工程的な煩雑性もほとんど問題にならない。
The formation of the through hole may be a conventional means in the production of a printed wiring board such as a drill, and the inner wall surface of the formed through hole may be plated by chemical plating (electroless plating) or chemical plating. It can be made by a combination of plating and electroplating. And, this drilling process and plating process, such as through hole connection in the so-called conventional technology,
Since the number of electrical connection portions between the wiring pattern layers is significantly smaller than that of the wiring pattern layers, process complexity is hardly a problem.

【0013】[0013]

【作用】本発明に係る印刷配線板の製造方法によれば、
配線パターン層間を電気的に接続する層間の導体配線部
は、いわゆる積層一体化する工程での加熱・加圧によ
り、層間絶縁層を成す合成樹脂系シートの可塑状態化な
いしこれに類似した状態と、導電性金属層面の導体バン
プ群の圧入とによって、確実に信頼性の高い配線パター
ン層間の電気的な接続が達成される。つまり、プロセス
の簡易化を図りながら、微細な配線パターン層間を任意
な位置(箇所)で、高精度にかつ信頼性の高い電気的な
接続を形成し得る。つまり、配線密度の高い印刷配線板
を低コストで製造することが可能となり、また前記配線
パターン層間の電気的な接続に当たり、接続穴の形設も
不要となるので、その分高密度配線および高密度実装の
可能で、かつピン挿入形部品の確実な信頼性の高い実装
を成し得る印刷配線板が得られることになる。
According to the method of manufacturing a printed wiring board according to the present invention,
The conductor wiring portions between the wiring patterns that electrically connect the layers are formed into a plastic state or a state similar to that of the synthetic resin sheet forming the interlayer insulating layer by heating and pressing in the so-called laminated integration process. By press-fitting the conductor bump group on the surface of the conductive metal layer, reliable and reliable electrical connection between the wiring pattern layers is achieved. That is, while simplifying the process, it is possible to form highly accurate and highly reliable electrical connections between fine wiring pattern layers at arbitrary positions (locations). That is, it is possible to manufacture a printed wiring board having a high wiring density at low cost, and it is not necessary to form a connection hole for electrical connection between the wiring pattern layers. It is possible to obtain a printed wiring board which can be densely mounted and can surely and reliably mount the pin insertion type parts.

【0014】[0014]

【実施例】以下図1 (a)〜 (c)、図2 (a), (b)、図3
(a), (b),図4 (a)〜 (d)および図5 (a)〜 (c)をそ
れぞれ参照して本発明の実施例を説明する。
Embodiments Hereinafter, FIGS. 1 (a) to (c), FIGS. 2 (a), (b), and FIG.
Embodiments of the present invention will be described with reference to (a), (b), FIGS. 4 (a)-(d) and FIGS. 5 (a)-(c), respectively.

【0015】実施例1 図1 (a)〜 (c)、図2 (a), (b)および図3 (a), (b)
は本実施例の実施態様を模式的に示したものである。先
ず、厚さ35μm の電解銅箔を導電性金属層1として、ポ
リマータイプの銀系の導電性ペースト(商品名,熱硬化
性導電性ペーストMS-7,東芝ケミカルKK)として、ま
た板厚の 300μm のステンレス板の所定箇所に0.35mm径
の穴を明けたメタルマスクを用意した。そして、前記電
解銅箔1面に、前記メタルマスクを位置決め配置して導
電性ペーストを印刷し、この印刷された導電性ペースト
が乾燥後、同一マスクを用い同一位置に再度印刷する方
法で3回印刷を繰り返し、高さ 200〜 300μm の山形の
導電性バンプ2を形成(形設)した。
Example 1 FIGS. 1 (a) to 1 (c), 2 (a) and 2 (b) and 3 (a) and 3 (b)
Shows schematically the embodiment of this example. First, a 35 μm thick electrolytic copper foil is used as the conductive metal layer 1, as a polymer type silver-based conductive paste (trade name, thermosetting conductive paste MS-7, Toshiba Chemical KK) A metal mask with a hole of 0.35 mm diameter was prepared at a predetermined location on a 300 μm stainless steel plate. Then, the metal mask is positioned and arranged on the surface of the electrolytic copper foil, a conductive paste is printed, and after the printed conductive paste is dried, the conductive mask is printed again at the same position using the same mask three times. The printing was repeated to form (form) a mountain-shaped conductive bump 2 having a height of 200 to 300 μm.

【0016】一方、厚さ160μmのガラスエポキシ系
プリプレグ(合成樹脂系シート)3および厚さ35μm
電解銅箔1′を用意し、図1(a)に断面的に示すごと
く、前記合成樹脂系シート3面上に、前記形設した導電
性のバンプ2を対向させて、また合成樹脂系シート3面
の裏面側に電解銅箔1′をそれぞれ位置決め配置して積
層体化した。その後、100℃に保持した熱プレスの熱
板の間に配置し(図示せず)、合成樹脂系シート3が熱
可塑化した状態のとき、樹脂圧として1MPaで加圧し
そのまま冷却後取りだし、図1(b)に断面的に示すよ
うに、前記導電性バンプ2が導電接続部2aを成して両
電解銅箔1,1′を電気的に接続した両面銅張り積層板
を得た。この積層板は、前記図1(b)に示すごとく、
前記導電性のバンプ2がそのままの形で、合成樹脂系シ
ート3中に圧入し、電解銅箔1′面に対接して先端が潰
された形になった形態を採っている。
On the other hand, a glass epoxy prepreg (synthetic resin sheet) 3 having a thickness of 160 μm and a thickness of 35 μm
An electrolytic copper foil 1 ′ is prepared, and the shaped conductive bumps 2 are opposed to each other on the surface of the synthetic resin sheet 3 as shown in a sectional view of FIG. Electrolytic copper foils 1 ′ were positioned and arranged on the back surfaces of the three surfaces to form a laminate. After that, it is placed between hot plates of a hot press maintained at 100 ° C. (not shown), and when the synthetic resin sheet 3 is in a thermoplasticized state, it is pressurized at 1 MPa as a resin pressure, cooled, and taken out as shown in FIG. As shown in cross section in b), a double-sided copper-clad laminate was obtained in which the conductive bumps 2 formed the conductive connection portions 2a and the electrolytic copper foils 1 and 1'were electrically connected. This laminated plate, as shown in FIG.
The conductive bumps 2 as they are are pressed into the synthetic resin sheet 3 and are in contact with the surface of the electrolytic copper foil 1 ′ so that the tips are crushed.

【0017】なお、前記図1(b)に図示した構成の積
層板は、次のようにしても製造し得る。すなわち、導電
性のバンプ2を形設した前記電解銅箔1の導電性バンプ
2形設面側に、合成樹脂系シート3、アルミ箔およびゴ
ムシートを積層・配置し、熱プレス処理して、前記導電
性バンプ2の先端が合成樹脂系シート3を貫挿したもの
を作成し、冷却後取り出してアルミ箔およびゴムシート
を剥がし、導電性バンプ2の先端が貫挿した合成樹脂系
シート3面に、電解銅箔1′を積層・配置してから、た
とえば170℃に保持した熱プレスの熱板の間に配置
し、合成樹脂系シート3が熱可塑化した状態のとき、樹
脂圧として1MPaで1時間程加圧することによって
製造し得る。
The laminated plate having the structure shown in FIG. 1 (b) can be manufactured as follows. That is, the synthetic resin sheet 3, the aluminum foil and the rubber sheet are laminated and arranged on the conductive bump 2 forming surface side of the electro-deposited copper foil 1 on which the conductive bumps 2 are formed, and hot press treatment is performed. A synthetic resin sheet 3 having the tip of the conductive bump 2 inserted through the synthetic resin sheet 3 is taken out after cooling, the aluminum foil and the rubber sheet are removed, and the tip of the conductive bump 2 is inserted through the synthetic resin sheet 3. , The electrolytic copper foil 1'is laminated and arranged, and then arranged between hot plates of a hot press maintained at 170 ° C., for example, when the synthetic resin sheet 3 is in a thermoplasticized state, the resin pressure is 1 MPa at 1 MPa. Therefore also it is prepared to be pressurized enough time.

【0018】前記面銅張積層板両面の電解銅箔1,1′
に、通常のエッチングレジストインク(商品名,PSR-40
00 H,太陽インキKK)をスクリーン印刷し、導体パタ
ーン部をマスクしてから、塩化第2銅をエッチング液と
してエッチング処理後、レジストマスク剥離して、図1
(c)に断面的に示す両面型印刷配線素板4を得た。
Electrolytic copper foils 1, 1'on both sides of the above-mentioned copper clad laminate
In addition, ordinary etching resist ink (trade name, PSR-40
00 H, TAIYO INK KK) is screen-printed to mask the conductor pattern portion, and then the resist mask is peeled off after the etching process using cupric chloride as an etching solution.
A double-sided printed wiring board 4 shown in cross section in (c) was obtained.

【0019】次に、前記両面型印刷配線素板の両面側
に、片面側を配線パターニングした銅張積層素板(2
枚)5およびガラスエポキシ系プリプレグ(合成樹脂系
シート)3を用意し、図2 (a)に断面的に示すごとく、
それぞれ位置決め配置して積層体化した。その後、 170
℃に保持した熱プレスの熱板の間に配置し、合成樹脂系
シート3が熱可塑化した状態のとき、樹脂圧として 1 M
Paで加圧しそのまま冷却後取りだし、多層型積層板を得
た。この多層型積層板の所定位置に、ドリル加工によっ
てスルホール6を穿設し、このスルホール6内壁面に約
3時間化学銅メッキを選択的に施して、スルホール6内
壁面に厚さ約 7μm の銅層7を被着形成した。その後、
前記多層型積層板両面の電解銅箔1′に、通常のエッチ
ングレジストインク(商品名,PSR-4000 H,太陽インキ
KK)をスクリーン印刷し、導体パターン部をマスクし
てから、塩化第2銅をエッチング液としてエッチング処
理後、レジストマスク剥離して、多層型印刷配線板8を
得た。
Next, a copper-clad laminated base plate (2) having wiring patterning on one side is formed on both sides of the double-sided printed wiring base plate.
2) and a glass epoxy prepreg (synthetic resin sheet) 3 are prepared, and as shown in a sectional view in FIG.
Each was positioned and arranged into a laminate. Then 170
It is placed between the hot plates of a hot press kept at ℃, and when the synthetic resin sheet 3 is thermoplasticized, the resin pressure is 1 M
It was pressurized with Pa, cooled as it was, and then taken out to obtain a multilayer laminate. A through hole 6 is drilled at a predetermined position of this multi-layer laminated plate, and the inner wall surface of the through hole 6 is approximately
Chemical copper plating was selectively applied for 3 hours to deposit a copper layer 7 having a thickness of about 7 μm on the inner wall surface of the through hole 6. afterwards,
A normal etching resist ink (trade name, PSR-4000 H, Taiyo Ink KK) is screen-printed on the electrolytic copper foil 1'on both sides of the multilayer type laminated plate, the conductor pattern is masked, and then cupric chloride is used. After the etching treatment with the above as an etching solution, the resist mask was peeled off to obtain a multilayer printed wiring board 8.

【0020】前記製造した多層型印刷配線板8につい
て、通常実施されている電気チェックを行ったところ、
全ての接続に不良ないし信頼性などの問題が認められな
かった。また、配線パターン間の接続の信頼性を評価す
るため、ホットオイルテストで( 260℃のオイル中に10
秒浸漬,20℃のオイル中に20秒浸漬のサイクルを 1サイ
クルとして)、 500回行っても不良発生は認められず、
従来の銅メッキ法による場合に比較しても、導電(配
線)パターン層間の接続信頼性に問題はなかった。 実施例2 本実施例は、上記実施例1の場合において、両面側(外
側)の各2層の配線パターン層に、前記導電性バンプ2
が導電接続部2aを成して両電解銅箔1および配線パター
ンを接続した構成の両面型配線素板5を用い、また内層
にはスルホール接続のない両面型配線素板4′を用い
て、図3 (a)に断面的に示すように、積層・配置し、 1
70℃に保持した熱プレスの熱板の間に配置し、合成樹脂
系シート3が熱可塑化した状態のとき、樹脂圧として 1
MPaで加圧しそのまま冷却後取りだし、多層型積層板を
得た。この多層型積層板の所定位置に、ドリル加工によ
ってスルホール6を穿設し、このスルホール6内壁面に
約 3時間化学銅メッキを選択的に施して、スルホール6
内壁面に厚さ約 7μm の銅層7を被着形成した。その
後、前記多層型積層板両面の電解銅箔1′に、通常のエ
ッチングレジストインク(商品名,PSR-4000 H,太陽イ
ンキKK)をスクリーン印刷し、導体パターン部をマス
クしてから、塩化第2銅をエッチング液としてエッチン
グ処理後、レジストマスク剥離して、多層型印刷配線素
板8を得た。
When the produced multilayer printed wiring board 8 was subjected to an electrical check which is usually carried out,
No problems were found in all connections, such as defects or reliability. In addition, in order to evaluate the reliability of the connection between the wiring patterns, a hot oil test (10
The cycle of immersion for 20 seconds and immersion in oil at 20 ° C for 20 seconds is defined as 1 cycle), and no defect was observed even after 500 times.
There was no problem in connection reliability between the conductive (wiring) pattern layers even when compared with the conventional copper plating method. Example 2 In the present example, in the case of Example 1 described above, the conductive bumps 2 are formed on two wiring pattern layers on both sides (outside).
Uses a double-sided wiring base plate 5 having a structure in which both electrolytic copper foils 1 and a wiring pattern are connected to form a conductive connection portion 2a, and a double-sided wiring base plate 4'having no through-hole connection is used as an inner layer, As shown in cross section in Figure 3 (a), stack and arrange
It is placed between the hot plates of a hot press maintained at 70 ° C, and when the synthetic resin sheet 3 is in a thermoplasticized state, the resin pressure is 1
It was pressurized with MPa, cooled as it was, and taken out to obtain a multilayer laminate. A through hole 6 is drilled at a predetermined position of this multilayer laminated plate, and the inner wall surface of the through hole 6 is selectively subjected to chemical copper plating for about 3 hours to form the through hole 6.
A copper layer 7 having a thickness of about 7 μm was deposited on the inner wall surface. After that, an ordinary etching resist ink (trade name, PSR-4000 H, Taiyo Ink KK) is screen-printed on the electrolytic copper foils 1'on both sides of the multilayer type laminated plate to mask the conductor pattern portion, and then a chloride chloride 2 After etching with copper as an etching solution, the resist mask was peeled off to obtain a multilayer printed wiring board 8.

【0021】前記製造した多層型印刷配線板8につい
て、通常実施されている電気チェックを行ったところ、
全ての接続に不良ないし信頼性などの問題が認められな
かった。また、配線パターン間の接続の信頼性を評価す
るため、ホットオイルテストで(260℃のオイル中に
10秒浸漬20℃のオイル中に20秒浸漬のサイクルを
1サイクルとして)、500回行っても不良発生は認め
られず、従来の銅メッキ法による場合に比較しても、導
電(配線)パターン層間の接続信頼性に問題はなかっ
た。 実施例3 前記実施例1の場合と同様に、通常、印刷配線板の製造
に使用されている厚さ35μmの電解銅箔を導電性金属
層として、ポリマータイプの銀系の導電性ペースト(商
品名,熱硬化性導電性ペーストMS−7、東芝ケミカル
KK)を導電性ペーストとして、また、300μm厚み
のステンレス板の所定位置に0.35mm径の穴を明け
たメタルマスクをそれぞれ用意した。そして、前記電解
銅箔に前記メタルマスクを位置決め配置して導電性ペー
ストを印刷し、この印刷された導電性ペーストが乾燥
後、同一マスクを用い同一位置に再度印刷する方法を2
回印刷をくりかえし、高さ200〜300μmの山形
導電性バンプを形成(形設)した。
When the manufactured multilayer printed wiring board 8 was subjected to an electrical check which is usually carried out,
No problems were found in all connections, such as defects or reliability. In addition, in order to evaluate the reliability of the connection between the wiring patterns, a hot oil test was performed (a cycle of dipping in oil at 260 ° C for 10 seconds and dipping in oil at 20 ° C for 20 seconds as one cycle) 500 times. No defect was observed, and there was no problem in connection reliability between the conductive (wiring) pattern layers even when compared with the conventional copper plating method. Example 3 As in the case of Example 1, a polymer-type silver-based conductive paste (commercial product) was used, in which a 35 μm-thick electrolytic copper foil normally used in the production of printed wiring boards was used as a conductive metal layer. A thermosetting conductive paste MS-7, Toshiba Chemical KK) was used as a conductive paste, and a metal mask having a hole of 0.35 mm diameter was prepared at a predetermined position of a 300 μm thick stainless steel plate. Then, the metal mask is positioned and arranged on the electrolytic copper foil to print a conductive paste, and after the printed conductive paste is dried, the same mask is used to print again at the same position.
Repeated printing was repeated to form (form) chevron- shaped conductive bumps having a height of 200 to 300 μm.

【0022】次に、図4(a)に断面的に示すように、
前記所定位置に導電性バンプ群2を印刷形成した電解銅
箔1上に厚さ約160μmの合成樹脂系シート3、アル
ミ箔、ゴムシートを積層配置し(図示せず)、100℃
に保持した熱プレスの熱板の間に位置決め・配置し、ガ
ラス点移転以上の温度、好ましくは合成樹脂系シート3
の樹脂分が可塑状態になった温度で加圧し、冷却後、ア
ルミ箔、ゴムシートを剥がしたところ、導電性バンプ2
の先端が対接する合成樹脂系シート3を突き抜け、貫挿
・露出した。次に、電解銅箔1と合成樹脂系シート3の
積層体の導電性バンプ2の先端が貫挿・露出した側に電
解銅箔1′を積層配置し、170℃で1時間、1MPa
で加圧したところ、導電性バンプ2の先端が電解銅箔
1′と接合し、合成樹脂系シート3が硬化して両面電解
銅箔1,1′間が貫通型に接続された導体配線部2aを
有する両面銅張板を得た(図4(b))。
Next, as shown in a sectional view in FIG.
A synthetic resin sheet 3, aluminum foil, and rubber sheet having a thickness of about 160 μm, an aluminum foil, and a rubber sheet are laminated and arranged on the electrolytic copper foil 1 on which the conductive bump group 2 is formed by printing at the predetermined position (not shown), and 100 °
It is positioned and arranged between the hot plates of the hot press held at the temperature of above the glass point transfer, preferably the synthetic resin sheet 3
When the aluminum foil and the rubber sheet were peeled off after pressurizing at a temperature at which the resin content of the resin became a plastic state, the conductive bump 2
The synthetic resin sheet 3 with which the tip of the sheet abuts was pierced through and exposed. Next, the electrolytic copper foil 1'is laminated and arranged on the side of the laminated body of the electrolytic copper foil 1 and the synthetic resin sheet 3 where the tips of the conductive bumps 2 are penetrated / exposed, and at 170 ° C. for 1 hour at 1 MPa.
When pressed with, the tip of the conductive bump 2 is joined to the electrolytic copper foil 1 ', the synthetic resin sheet 3 is cured, and the conductor wiring part in which the double-sided electrolytic copper foils 1 and 1'are connected in a penetrating manner A double-sided copper clad plate having 2a was obtained (FIG. 4 (b)).

【0023】この両面銅張板の両面に、通常のエッチン
グレジストをラミネ−タ−で張り付け、ネガ用フィルム
を位置合わせし、露光・現像した後に銅箔1,1′をエ
ッチングし、最後にエッチングレジストをアルカリ水溶
液で剥離し導体パタ−ンを形成し、両面型配線素板4を
作成した(図4(c) 参照)。前記両面型配線素板4につ
いて、テスタ−で各導体配線部2aを表裏から導通テスト
したところ、全数が 2mΩ以下の抵抗値であった。
A normal etching resist is attached to both sides of the double-sided copper clad plate with a laminator, the negative film is aligned, exposed and developed, and then the copper foils 1 and 1'are etched and finally etched. The resist was peeled off with an alkaline aqueous solution to form a conductor pattern, and a double-sided wiring base plate 4 was prepared (see FIG. 4 (c)). When the conductor wiring parts 2a of the double-sided wiring base plate 4 were subjected to a continuity test from the front and back with a tester, the total number was 2 mΩ or less.

【0024】前記に準じて形成した所定位置に、導電性
バンプ2群が印刷されたの電解銅箔1、厚さ約 160μm
の合成樹脂系シ−ト3、アルミ箔およびゴムシ−トを積
層配置(図示せず)し、 100℃で 7分間保持後、 1 MPa
で 3分間加圧してから、前記アルミ箔およびゴムシ−ト
を剥がして、導電性バンプ2の先端が対接する合成樹脂
系シ−ト3を貫挿して成る部材を得た。この部材および
両面型配線素板4を、図4 (c)に断面的に示すごとく、
位置決め・積層・配置し、 170℃に30分、1MPaで加圧保
持し、導電性バンプ2の先端が対接する両面型配線素板
4の配線パターン面に接合して、図4 (d)に断面的に示
すような、両面銅張板を作成した。
Electrolytic copper foil 1 on which conductive bumps 2 are printed at predetermined positions formed according to the above, thickness about 160 μm
Laminated synthetic resin sheet 3, aluminum foil and rubber sheet (not shown), hold at 100 ° C for 7 minutes, and
After pressing for 3 minutes, the aluminum foil and the rubber sheet were peeled off to obtain a member formed by inserting a synthetic resin sheet 3 with which the tips of the conductive bumps 2 contact each other. This member and the double-sided wiring base plate 4 are shown in cross section in FIG.
After positioning, stacking and arranging, pressurizing and holding at 170 ° C for 30 minutes at 1MPa, and joining to the wiring pattern surface of the double-sided wiring base plate 4 where the tips of the conductive bumps 2 are in contact, A double-sided copper clad plate was prepared as shown in cross section.

【0025】なお、この両面銅張板の構成においては、
たとえばディスクリ−ト部品ピンの挿入・実装予定位置
の周りに、ピン挿入用スルホール6を穿設したとき、そ
のスルホール6内壁面に導電性バンプ2の一部が露出す
るように4個の貫通型導体配線部2bが形成されている。
つまり、部品ピンの挿入用スルホール6を穿設する領域
には、図5 (b)に平面的に示すごとく、4個の貫通型導
体配線部2b(図4 (d)参照)を特に形設してある。
In the structure of this double-sided copper clad board,
For example, when a through hole 6 for pin insertion is formed around a position where a discrete component pin is to be inserted and mounted, four through holes are formed so that a part of the conductive bump 2 is exposed on the inner wall surface of the through hole 6. The mold conductor wiring portion 2b is formed.
That is, in the area where the through hole 6 for inserting the component pin is formed, four through-type conductor wiring portions 2b (see FIG. 4 (d)) are particularly formed as shown in plan view in FIG. 5 (b). I am doing it.

【0026】次に、前記両面銅張板の貫通型導体配線部
2bのほぼ中心に、穴明け加工によりディスクリ−ト部品
ピン挿入用のスルホール6を穿設した後、前記スルホー
ル6内壁面に化学銅メッキ処理を 3時間施し、厚さ約 7
μm の銅層7を析出させた。次いで、前記両面銅張板の
両面銅箔1,1面に、通常のエッチングレジストをラミ
ネ−タ−で張り付け、ネガ用フィルムを位置合わせし、
前記の場合と同様に、エッチング処理を行って、図5
(c)に断面的に、また図5 (d)に平面的にそれぞれ示す
ように、貫通型導体配線部2bに接続した良質な銅層7か
ら成る部品実装用スルホール6およびパッドを備えた厚
さ約 550μm の4層薄型多層配線板8を作成した。
Next, the through-type conductor wiring portion of the double-sided copper clad plate
After forming a through hole 6 for inserting a discrete component pin by drilling at approximately the center of 2b, the inner wall surface of the through hole 6 is subjected to chemical copper plating for 3 hours to have a thickness of about 7
A copper layer 7 of μm was deposited. Then, a normal etching resist is attached to the double-sided copper foils 1 and 1 of the double-sided copper-clad plate with a laminator, and the negative film is aligned,
As in the case described above, the etching process is performed, and then, as shown in FIG.
As shown in a sectional view in (c) and in a plan view in FIG. 5 (d), a thickness including component mounting through holes 6 and pads made of a good quality copper layer 7 connected to the through conductor wiring portion 2b. A four-layer thin multilayer wiring board 8 having a thickness of about 550 μm was prepared.

【0027】前記4層薄型多層配線板8のスルホール6
に、ディスクリ−ト部品のピンを挿入し、半田付けを行
い実装回路装置を構成したところ、信頼性の高いディス
クリ−ト部品の接続実装が達成された。
Through hole 6 of the four-layer thin multilayer wiring board 8
Then, the pins of the discrete component were inserted and soldered to form a mounting circuit device. As a result, highly reliable connection mounting of the discrete component was achieved.

【0028】実施例4 前記実施例3において、導電性バンプ2を銀ペ−ストで
形成する代りに、銅ペ−ストを用いた他は同様の条件で
4層薄型多層配線板8を作成した。この実施例の場合
は、4個の貫通型導体配線部2b中心に、ディスクリ−ト
部品ピン用のスルホール6を穿設したとき、スルホール
内壁面に銅を含む導電体が露出するため、半田食われの
心配もなくなり、そのままディスクリ−ト部品ピンを挿
入し、半田付けを行うことができた。
Example 4 A four-layer thin multilayer wiring board 8 was prepared under the same conditions as in Example 3 except that the conductive bumps 2 were formed of silver paste instead of copper paste. . In the case of this embodiment, when a through hole 6 for a discrete component pin is bored at the center of the four through-type conductor wiring portions 2b, a conductor containing copper is exposed on the inner wall surface of the through hole. There was no fear of being eaten, and the discrete component pins could be inserted and soldered as they were.

【0029】なお、多層型配線板においては、ディスク
リ−ト部品を実装する場合、貫通孔(スルホール)内壁
面への化学銅メッキは必要不可欠であるが、前記実施例
4の構成を採った場合は、半田付けのための化学銅メッ
キなど必要なく、また複数個の貫通型導体配線部2bによ
り表面配線パターン層と内層配線パターンとの電気的接
続の信頼性も確保されるので、オ−ルドライ工程による
多層配線板の製造方法を確立できる。
In the case of mounting a discrete component in a multilayer wiring board, chemical copper plating on the inner wall surface of the through hole (thru hole) is indispensable, but the structure of the fourth embodiment is adopted. In this case, it is not necessary to use chemical copper plating for soldering, and the reliability of the electrical connection between the surface wiring pattern layer and the inner layer wiring pattern is ensured by the plurality of through conductor wiring portions 2b. A method of manufacturing a multilayer wiring board by a dry process can be established.

【0030】[0030]

【発明の効果】本発明によれば、パターン層間を接続す
る導電性のバンプを形設する工程、合成樹脂系シートを
積層的に配置して熱プレスする工程、外層パターニング
する工程というプロセスの簡略化、換言すると製造工程
数を従来の製造方法に比べ格段に少ない工程に低減しな
がら、両面型印刷配線板ないし多層型印刷配線板を容易
に製造することが可能となる。特に工程の繰り返しが多
い多層型印刷配線板の製造においては、大幅な工程数の
低減となり、生産性ないし量産性の向上に効果がある。
そして、従来の多層型印刷配線板などの製造工程で、必
要不可欠であった穴明け工程、メッキ工程が不要になる
ことに伴い、製造工程で発生する不良が大幅に抑えら
れ、歩留まりが向上するばかりでなく、信頼性の高い印
刷配線板が得られることになる。また、製造される印刷
配線板は、層間接続用の穴が表面に存在しないので、配
線密度の格段な向上を図り得るし、電子部品の実装用エ
リアも、穴の位置に関係なく設定し得ることになり、実
装密度も格段に向上し、ひいては実装電子部品間の距離
を短縮できるので、回路の性能向上をも図り得る。つま
り、本発明は、印刷配線板の低コス化に寄与するだけで
なく、実装回路装置のコンパクト化や、高性能化などに
も大きく寄与するものといえる。
According to the present invention, the steps of forming conductive bumps for connecting pattern layers, arranging synthetic resin sheets in a laminated manner and hot pressing, and patterning outer layers are simplified. In other words, it is possible to easily manufacture a double-sided printed wiring board or a multilayer printed wiring board while reducing the number of manufacturing steps to a significantly smaller number of steps as compared with the conventional manufacturing method. Particularly in the production of a multilayer printed wiring board in which many steps are repeated, the number of steps is significantly reduced, which is effective in improving productivity or mass productivity.
Further, in the manufacturing process of the conventional multilayer printed wiring board and the like, since the drilling process and the plating process, which are indispensable, are no longer necessary, the defects occurring in the manufacturing process are significantly suppressed, and the yield is improved. Not only that, a highly reliable printed wiring board can be obtained. Further, since the printed wiring board manufactured does not have holes for interlayer connection on the surface, the wiring density can be significantly improved, and the mounting area for electronic components can be set regardless of the positions of the holes. As a result, the packaging density can be remarkably improved, and the distance between the mounted electronic components can be shortened, so that the circuit performance can be improved. That is, it can be said that the present invention not only contributes to the reduction of the cost of the printed wiring board, but also contributes to the downsizing of the mounted circuit device and the high performance thereof.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施態様例の基本を模式的に示
すもので、 (a)は導電性バンプを形設具備した導電性金
属層,合成樹脂系シート,導電性金属層を位置決め・積
層した状態の断面図、 (b)は積層体を熱プレスで加圧一
体化した状態の断面図、(c)は両導電性金属層をパター
ニングして得た両面型配線素板の断面図。
FIG. 1 schematically shows the basics of a first embodiment of the present invention, in which (a) shows a conductive metal layer having conductive bumps formed thereon, a synthetic resin sheet, and a conductive metal layer. A cross-sectional view of a state where the layers are positioned and stacked, a cross-sectional view of a state where the stacked body is pressed and integrated by a hot press, and (c) is a double-sided wiring base plate obtained by patterning both conductive metal layers. Sectional view.

【図2】本発明の第1の実施態様例を模式的に示すもの
で、 (a)は両面型配線素板の両側に合成樹脂系シート,
片面パターニングした銅張り積層素板の積層・配置状態
の断面図、 (b)は最終的に形成した多層型配線板の構造
状態を示す断面図。
FIG. 2 schematically shows a first embodiment of the present invention, in which (a) is a synthetic resin sheet on both sides of a double-sided wiring board,
A cross-sectional view of a laminated and arranged state of a copper-clad laminated base plate that is patterned on one side, and (b) is a cross-sectional view showing a structural state of a finally formed multilayer wiring board.

【図3】本発明の第2の実施態様例を模式的に示すもの
で、 (a)は貫通導電接続部を持たない両面型配線素板の
両側に合成樹脂系シート,片面パターニングした貫通導
電接続部付き板銅張り積層素板の積層・配置状態の断面
図、 (b)は最終的に形成した多層型配線板の構造状態を
示す断面図。
FIG. 3 schematically shows a second embodiment of the present invention, in which (a) is a double-sided wiring base plate having no through conductive connection part, and a synthetic resin sheet on both sides, and one side patterned through conductive Sectional view of a laminated / arranged state of a copper clad laminated base plate with a connecting portion, (b) is a sectional view showing a structural state of a finally formed multilayer wiring board.

【図4】本発明の第2の実施態様例を模式的に示すもの
で、 (a)は導電性バンプを形設具備した導電性金属層,
合成樹脂系シート,導電性金属層を位置決め・積層した
状態の断面図、 (b)は積層体を熱プレスで加圧一体化し
た後、両導電性金属層をパターニングして得た両面型配
線素板の断面図、 (c)は両面型配線素板,導電性金属層
に形設した導電性バンプが合成樹脂系シートを貫挿させ
たものを位置決め・積層した状態の断面図、 (d)は積層
体を熱プレスで加圧一体化した両面銅張り積層板の断面
図。
FIG. 4 schematically shows a second embodiment of the present invention, in which (a) is a conductive metal layer having conductive bumps formed therein,
Cross-sectional view of the synthetic resin sheet and the conductive metal layers positioned and laminated, (b) is a double-sided wiring obtained by patterning both conductive metal layers after pressing and integrating the laminate with a hot press. A cross-sectional view of the base plate, (c) is a cross-sectional view of a double-sided wiring base plate, in which conductive bumps formed on a conductive metal layer are inserted through a synthetic resin sheet and positioned and laminated, (d) ) Is a cross-sectional view of a double-sided copper-clad laminate in which the laminate is pressed and integrated by hot pressing.

【図5】本発明の第2の実施態様例をさらに模式的に示
すもので、 (a)は両面銅張り積層板(図4(d) の両面を
パターニングした状態の断面図、 (b)は前記両面をパタ
ーニングした状態の平面図、 (c)は部品ピン挿入用穴を
穿設し、その内壁面に銅メッキ層を形成した状態の断面
図、 (d)は前記内壁面に銅メッキ層を形成した状態の平
面図。
FIG. 5 is a schematic view showing a second embodiment of the present invention, in which (a) is a cross-sectional view of a double-sided copper-clad laminate (FIG. 4 (d) with both surfaces patterned, (b)). Is a plan view of the state where both sides are patterned, (c) is a cross-sectional view of a state in which a hole for inserting a component pin is formed and a copper plating layer is formed on the inner wall surface, (d) is copper plating on the inner wall surface The top view of the state which formed the layer.

【符号の説明】[Explanation of symbols]

1,1′…導電性金属層 2…導体バンプ 2a…導
体接続部 2b…貫通型導体接続部 3…合成樹脂系
シート 4…両面型配線素板 4′…導体接続部な
しの両面型配線素板 5…片面パターニングした銅張
り積層素板 6…スルホール 7…銅メッキ層 8…多層型印刷
配線板 9…パッド
1, 1 '... Conductive metal layer 2 ... Conductor bump 2a ... Conductor connecting portion 2b ... Through conductor connecting portion 3 ... Synthetic resin sheet 4 ... Double-sided wiring base plate 4' ... Double-sided wiring element without conductor connecting portion Plate 5 ... Copper-clad laminated base plate patterned on one side 6 ... Through hole 7 ... Copper plating layer 8 ... Multilayer type printed wiring board 9 ... Pad

フロントページの続き (56)参考文献 特開 昭52−19263(JP,A) 特開 昭59−175191(JP,A) 特開 平4−250694(JP,A) 特開 平3−60096(JP,A) 特開 昭52−101474(JP,A) 特開 平1−186698(JP,A) 特開 昭62−42598(JP,A) 実開 平3−122572(JP,U) 米国特許3835531(US,A) 米国特許4991285(US,A) (58)調査した分野(Int.Cl.7,DB名) H05K 1/11 H05K 3/40 H05K 3/46 Continuation of the front page (56) Reference JP-A-52-19263 (JP, A) JP-A-59-175191 (JP, A) JP-A-4-250694 (JP, A) JP-A-3-60096 (JP , A) Japanese Unexamined Patent Publication No. 52-101474 (JP, A) Japanese Unexamined Patent Publication No. 1-186698 (JP, A) Japanese Unexamined Patent Publication No. 62-42598 (JP, A) Ukai 3-122572 (JP, U) U.S. Pat. (US, A) US Patent 4991285 (US, A) (58) Fields investigated (Int.Cl. 7 , DB name) H05K 1/11 H05K 3/40 H05K 3/46

Claims (9)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 合成樹脂系シートの第1の主面に、所定
位置に導体バンプ群を形設した第1の導電性金属層を対
接させ、前記合成樹脂系シートの第2の主面に第2の導
電性金属層を対接させて積層配置して積層体を形成する
工程と、 前記積層体を加熱、加圧し、前記第1の導体金属層のバ
ンプ群を、前記合成樹脂系シートの厚さ方向に貫挿させ
て前記第2の導電性金属層に当接、塑性変形させて第1
および第2の導電性金属層が前記バンプ群によって電気
的に接続された両面型積層板を形成する工程と、 前記第1および第2の導電性金属層の少なくとも一方を
パターン化して第1の両面型印刷配線板を形成する工程
と、 前記第1の両面型印刷配線板のパターン化された導電性
金属層と、少なくとも一方の表面の導電性金属層がパタ
ーン化された第2の印刷配線板とを、前記パターン化さ
れた導電性金属層側を対向させ合成樹脂系シートを介し
て積層し、加熱加圧により一体化して多層型積層板を形
成する工程と、 前記多層型積層板の所定位置にスルーホールを穿設して
前記第1の両面型印刷配線板の少なくとも一方の前記
電性金属層と前記第2の印刷配線板の少なくとも一方の
前記導電性金属層とを接続する工程とを具備して成るこ
とを特徴とする印刷配線板の製造方法。
1. A second major surface of the synthetic resin sheet, wherein a first conductive metal layer having conductor bump groups formed at predetermined positions is brought into contact with the first major surface of the synthetic resin sheet. A step of forming a laminated body by stacking the second conductive metal layers in contact with each other to form a laminated body; and heating and pressurizing the laminated body to form the bump group of the first conductor metal layer into the synthetic resin system. The sheet is inserted in the thickness direction of the sheet, abutted on the second conductive metal layer, and plastically deformed to make the first
And a step of forming a double-sided laminated plate in which the second conductive metal layer is electrically connected by the bump group, and patterning at least one of the first and second conductive metal layers. To form a first double-sided printed wiring board, a patterned conductive metal layer of the first double-sided printed wiring board, and a conductive metal layer on at least one surface of which is patterned. A printed wiring board of No. 2 with the patterned conductive metal layers facing each other, laminated via a synthetic resin sheet, and integrated by heating and pressing to form a multilayer laminate; A through hole is formed at a predetermined position of the die laminate to form at least one of the conductive metal layer of at least one of the first double-sided printed wiring board and the second printed wiring board .
Method of manufacturing a printed wiring board, characterized by comprising comprises the step of connecting the conductive metal layer.
【請求項2】 合成樹脂系シートの第1の主面に、所定
位置に導体バンプ群を形設した第1の導電性金属層を対
接させ、前記合成樹脂系シートの第2の主面に第2の導
電性金属層を対接させて積層配置して積層体を形成する
工程と、 前記積層体を加熱、加圧し、前記第1の導体金属層のバ
ンプ群を、前記合成樹脂系シートの厚さ方向に貫挿させ
て前記第2の導電性金属層に当接、塑性変形させて第1
および第2の導電性金属層が前記バンプ群によって電気
的に接続された両面型積層板を形成する工程と、前記 両面型積層板の前記第1および第2の導電性金属層
をパターン化して第1の両面型印刷配線板とする工程
と、 前記第1の両面型印刷配線板の両面に、少なくとも一方
の表面の導電性金属層がパターン化された第2の印刷配
板を、前記パターン化された導電性金属層側を第1の
両面型印刷配線板と対向させ、それぞれ合成樹脂系シー
トを介して積層し、加熱加圧により一体化して多層型積
層板とする工程と、 前記多層型積層板の所定位置にスルーホールを穿設して
前記第1の両面型印刷配線板の導電性金属層と前記第2
印刷配線板の導電性金属層とを接続する工程とを具備
して成ることを特徴とする印刷配線板の製造方法。
2. A second major surface of the synthetic resin sheet, wherein a first conductive metal layer having conductor bump groups formed at predetermined positions is brought into contact with the first major surface of the synthetic resin sheet. A step of forming a laminated body by stacking the second conductive metal layers in contact with each other to form a laminated body; and heating and pressurizing the laminated body to form the bump group of the first conductor metal layer into the synthetic resin system. The sheet is inserted in the thickness direction of the sheet, abutted on the second conductive metal layer, and plastically deformed to make the first
A and step in which the second conductive metal layer to form a double-sided laminate electrically connected by the bumps group, and patterning the first and second conductive metal layer of the double-sided laminate a step of the first double-sided printed circuit board, on both surfaces of the first double-sided printed wiring board, a second printed distribution of the conductive metal layer of at least one surface is patterned
A line plate is made to face the patterned conductive metal layer side to the first double-sided printed wiring board, laminated with synthetic resin sheets respectively, and integrated by heating and pressing to form a multilayer laminate. And a conductive metal layer of the first double-sided printed wiring board and a second through-hole formed in a predetermined position of the multilayer laminated board.
Method of manufacturing a printed wiring board to the conductive metal layer of the printed wiring board of the step of connecting characterized by comprising comprises a.
【請求項3】 合成樹脂系シートの第1の主面に、所定
位置に導体バンプ群を形設した第1の導電性金属層を対
接させ、前記合成樹脂系シートの第2の主面に第2の導
電性金属層を対接させて積層配置して積層体を形成する
工程と、 前記積層体を加熱、加圧し、前記第1の導体金属層のバ
ンプ群を、前記合成樹脂系シートの厚さ方向に貫挿させ
て前記第2の導電性金属層に当接、塑性変形させて第1
および第2の導電性金属層が前記バンプ群によって電気
的に接続された両面型積層板を形成する工程と、 前記第1および第2の導電性金属層が前記バンプ群によ
って電気的に接続された両面型積層板の少なくとも一方
の導電性金属層をパターン化して第1の両面型印刷配線
板を形成する工程と、 電性金属層をパターン化した第2の印刷配線板を内層
板とし、それぞれ合成樹脂系シートを介して、前記第1
の両面型印刷配線板の複数枚をパターン化された導電性
金属層側を対向させて積層し、加熱、加圧により一体化
して多層型積層板を形成する工程と、 前記多層型積層板の所定位置にスルーホールを穿設して
前記第1の両面型印刷配線板の導電性金属層と前記第2
印刷配線板の導電性金属層とを接続する工程とを具備
して成ることを特徴とする印刷配線板の製造方法。
3. A second main surface of the synthetic resin sheet, the first main surface of the synthetic resin sheet being brought into contact with a first conductive metal layer having conductor bump groups formed at predetermined positions. A step of forming a laminated body by stacking the second conductive metal layers in contact with each other to form a laminated body; and heating and pressurizing the laminated body to form the bump group of the first conductor metal layer into the synthetic resin system. The sheet is inserted in the thickness direction of the sheet, abutted on the second conductive metal layer, and plastically deformed to make the first
And a step of forming a double-sided laminated plate in which the second conductive metal layer is electrically connected by the bump group, and the first and second conductive metal layers are electrically connected by the bump group. forming a first double-sided printed wiring board was patterned at least one of the conductive metal layer of the double-sided laminate, the second printed wiring board obtained by patterning the conductive metal layer and an inner layer plate was , Through the synthetic resin sheet, respectively, the first
A step of laminating a plurality of double-sided printed wiring boards with the patterned conductive metal layers facing each other, and integrally forming by heating and pressing to form a multilayer laminated board; A through hole is formed at a predetermined position to form a conductive metal layer of the first double-sided printed wiring board and the second
Method of manufacturing a printed wiring board to the conductive metal layer of the printed wiring board of the step of connecting characterized by comprising comprises a.
【請求項4】 第1の合成樹脂系シートの第1の主面
に、所定位置に導体バンプ群を形設した導電性金属層を
対接させて積層体を形成する工程と、 前記積層体を加熱、加圧し、前記導体金属層の導体バン
プ群を、第1の合成樹脂系シートの厚さ方向に貫通させ
て導体バンプ群が第1の合成樹脂系シートの第2の主面
から突出した結合体を形成する工程と、 前記結合体の導体バンプ突出面に、少なくとも一方の
面の導電性金属層がパターン化された印刷配線板を、前
記パターン化された導電性金属層側を前記導体バンプ群
と対向させて第2の合成樹脂系シートを介して積層し、
加熱加圧により一体化するとともに、前記結合体のバン
プ群を、第2の合成樹脂系シートの厚さ方向に貫挿させ
て前記印刷配線板のパターン化された導電性金属層に当
接、塑性変形させて前記結合体の導電性金属層と前記
刷配線板のパターン化された導電性金属層とを接続して
多層型積層板を形成する工程と、 前記多層型積層板の所定位置にスルーホールを穿設し
て、前記結合体の導電性金属層と前記多層型積層板の外
側の導電性金属層とを接続する工程とを具備して成るこ
とを特徴とする印刷配線板の製造方法。
4. A first major surface of the first synthetic resin sheet, a step of forming a laminate by Taise' conductive metal layer Katachi設the conductor bumps group in position, the laminate Is heated and pressed to penetrate the conductor bump group of the conductor metal layer in the thickness direction of the first synthetic resin sheet so that the conductor bump group projects from the second main surface of the first synthetic resin sheet. forming a binding member, the conductor bump protruding surface of said coupling body, at least one of the table
The printed wiring board conductive metal layer of the surface is patterned, and laminating the patterned conductive metal layer side through the second synthetic resin sheet by facing the conductor bumps group,
While being integrated by heating and pressurizing, the bump group of the combined body is inserted in the thickness direction of the second synthetic resin sheet to abut the patterned conductive metal layer of the printed wiring board, The conductive metal layer of the bonded body and the stamp are plastically deformed.
Forming a multi-layer laminate by connecting the patterned conductive metal layer of the printed wiring board, and forming a through hole at a predetermined position of the multi-layer laminate to improve the conductivity of the combined body. A method of manufacturing a printed wiring board, comprising the step of connecting a metal layer and a conductive metal layer on the outer side of the multilayer laminate.
【請求項5】 第1の合成樹脂系シートの第1の主面
に、所定位置に導体バンプ群を形設した導電性金属層を
対接させて積層体を形成する工程と、 前記積層体を加熱、加圧し、前記導体金属層の導体バン
プ群を、第1の合成樹脂系シートの厚さ方向に貫通させ
て導体バンプ群が第1の合成樹脂系シートの第2の主面
から突出した結合体を形成する工程と、 電性金属層をパターン化した印刷配線板を内層板と
し、それぞれ第2の合成樹脂系シートを介して、前記結
体を導体バンプ群の突出した側を対向させて積層し、
加熱、加圧により一体化するとともに、前記結合体のバ
ンプ群を、前記各第2の合成樹脂系シートの厚さ方向に
貫挿させて前記印刷配線板のパターン化された導電性金
属層に当接、塑性変形させて前記結合体の導電性金属層
と前記印刷配線板のパターン化された導電性金属層とを
接続して多層型積層板を形成する工程と、 前記多層型積層板の所定位置にスルーホールを穿設して
記印刷配線板の導電性金属層と前記結合体の導電性金
属層とを接続する工程とを具備して成ることを特徴とす
る印刷配線板の製造方法。
5. A first main surface of the first synthetic resin sheet, a step of forming a laminate by Taise' conductive metal layer Katachi設the conductor bumps group in position, the laminate Is heated and pressed to penetrate the conductor bump group of the conductor metal layer in the thickness direction of the first synthetic resin sheet so that the conductor bump group projects from the second main surface of the first synthetic resin sheet. forming a binding material, a conductive metal layer was patterned printed circuit board and an inner layer plate, respectively through the second synthetic resin sheet, protruding side of the guide body bumps group the conjugate And stack them facing each other,
While being integrated by heating and pressing, the bump group of the combined body is inserted in the thickness direction of each of the second synthetic resin sheets to form a patterned conductive metal layer of the printed wiring board. A step of contacting and plastically deforming to connect the conductive metal layer of the combined body and the patterned conductive metal layer of the printed wiring board to form a multilayer laminated board; and printing characterized by comprising comprises the step of connecting the by bored through-holes at predetermined positions <br/> the previous SL printed wiring board conductive metal layer of the conjugate of the conductive metal layer Wiring board manufacturing method.
【請求項6】 前記合成樹脂系シートは繊維強化熱硬化
性樹脂であることを特徴とする請求項1乃至5のいずれ
か1項記載の印刷配線板の製造方法。
6. The method of manufacturing a printed wiring board according to claim 1, wherein the synthetic resin sheet is a fiber-reinforced thermosetting resin.
【請求項7】 合成樹脂系シートを介して配設された内
層の配線パターンと外層の配線パターンが前記合成樹脂
系シートを貫通する層間接続部により接続された多層の
基板からなり、前記多層の基板内の所定位置に設けら
れ、前記内層の配線パターン間、または前記内層の配線
パターンと前記外層の配線パターンとを接続するスルー
ホールの形成された印刷配線板において、 前記層間接続部は、合成樹脂系シートを介して対向する
一方の配線パターンに他方の配線パターンと対応させて
形設された導電体からなり、前記導電体の先端は、穴明
けされていない前記合成樹脂系シート中に圧入され前記
他方の配線パターンへの押圧により形成された塑性変形
部で前記他方の配線パターンに接続されていることを特
徴とする印刷配線板。
7. A multi-layer substrate in which an inner layer wiring pattern and an outer layer wiring pattern arranged via a synthetic resin sheet are connected by an interlayer connecting portion penetrating the synthetic resin sheet, In a printed wiring board provided at a predetermined position in a substrate and having through holes formed between the wiring patterns of the inner layer or connecting the wiring pattern of the inner layer and the wiring pattern of the outer layer, the interlayer connection portion is a composite. It is composed of an electric conductor formed so as to correspond to one wiring pattern facing the other wiring pattern via a resin sheet, and the tip of the electric conductor has a hole.
A printed wiring board, wherein the printed wiring board is connected to the other wiring pattern by a plastically deformed portion formed by being pressed into the undeformed synthetic resin sheet and formed by pressing the other wiring pattern.
【請求項8】 合成樹脂系シートの両面に内層配線パタ
ーンの形成された内層板と合成樹脂系シートの片面に外
層配線パターンの形成された外層板と前記外層配線パタ
ーンと前記各外層配線と対応する内層配線パターンとを
接続する層間接続部とを有する多層の印刷配線板におい
て、 前記層間接続部は、前記各外層板の外層配線パターンに
前記内層配線パターンと対応させて形設された導電体か
らなり、前記導電体の先端は、穴明けされていない前記
合成樹脂系シート中に圧入され対向する前記内層配線パ
ターンへの押圧により形成された塑性変形部で前記内層
配線パターンに接続されていることを特徴とする印刷配
線板。
8. An inner layer board having inner layer wiring patterns formed on both sides of a synthetic resin sheet, an outer layer board having an outer layer wiring pattern formed on one surface of the synthetic resin sheet, the outer layer wiring pattern, and each outer layer wiring. In a multilayer printed wiring board having an interlayer connecting portion for connecting with an inner layer wiring pattern, the interlayer connecting portion is a conductor formed on the outer layer wiring pattern of each outer layer board in correspondence with the inner layer wiring pattern. And the tip of the conductor is not perforated.
Printed circuit board, characterized in that it is connected to the inner wiring pattern by the plastic deformation portion formed by pressing to the inner wiring patterns against direction is pressed into the synthetic resin in the sheet.
【請求項9】 導電体が錐形の導電体である請求項7又
8のいずれか1項記載の印刷配線板。
9. The conductor according to claim 7 , wherein the conductor is a cone-shaped conductor.
Is a printed wiring board according to any one of 8.
JP22610693A 1993-09-03 1993-09-10 Printed wiring board and manufacturing method thereof Expired - Lifetime JP3474896B2 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP22610693A JP3474896B2 (en) 1993-09-10 1993-09-10 Printed wiring board and manufacturing method thereof
US08/297,954 US5736681A (en) 1993-09-03 1994-08-31 Printed wiring board having an interconnection penetrating an insulating layer
DE69419219T DE69419219T2 (en) 1993-09-03 1994-08-31 Printed circuit board and method for producing such printed circuit boards
EP94306405A EP0647090B1 (en) 1993-09-03 1994-08-31 Printed wiring board and a method of manufacturing such printed wiring boards
KR1019940022332A KR950010719A (en) 1993-09-03 1994-09-03 Manufacturing method of printed circuit board and printed circuit board
TW083108450A TW272350B (en) 1993-09-03 1994-09-13
US08/902,100 US5865934A (en) 1993-09-03 1997-07-29 Method of manufacturing printed wiring boards

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22610693A JP3474896B2 (en) 1993-09-10 1993-09-10 Printed wiring board and manufacturing method thereof

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2002191249A Division JP3628313B2 (en) 2002-05-27 2002-05-27 Printed wiring board and manufacturing method thereof

Publications (2)

Publication Number Publication Date
JPH0786749A JPH0786749A (en) 1995-03-31
JP3474896B2 true JP3474896B2 (en) 2003-12-08

Family

ID=16839927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22610693A Expired - Lifetime JP3474896B2 (en) 1993-09-03 1993-09-10 Printed wiring board and manufacturing method thereof

Country Status (1)

Country Link
JP (1) JP3474896B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08321684A (en) * 1995-05-24 1996-12-03 Sony Corp Wiring board and manufacture thereof
WO1997019579A1 (en) * 1995-11-17 1997-05-29 Kabushiki Kaisha Toshiba Multilayered wiring board, prefabricated material for multilayered wiring board, process of manufacturing multilayered wiring board, electronic parts package, and method for forming conductive pillar
JP3183653B2 (en) 1999-08-26 2001-07-09 ソニーケミカル株式会社 Flexible board
KR101046077B1 (en) 2002-10-08 2011-07-01 다이니폰 인사츠 가부시키가이샤 Manufacturing method of parts-embedded wiring board, manufacturing method of parts-embedded wiring board
JP4574288B2 (en) 2004-04-09 2010-11-04 大日本印刷株式会社 Manufacturing method of rigid-flexible substrate

Also Published As

Publication number Publication date
JPH0786749A (en) 1995-03-31

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