JPH0772171A - Electric inspection jig for wiring board - Google Patents

Electric inspection jig for wiring board

Info

Publication number
JPH0772171A
JPH0772171A JP21975093A JP21975093A JPH0772171A JP H0772171 A JPH0772171 A JP H0772171A JP 21975093 A JP21975093 A JP 21975093A JP 21975093 A JP21975093 A JP 21975093A JP H0772171 A JPH0772171 A JP H0772171A
Authority
JP
Japan
Prior art keywords
conductive
wiring board
inspection jig
metal layer
conductive bump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21975093A
Other languages
Japanese (ja)
Inventor
Eiji Imamura
英治 今村
Tomohisa Motomura
知久 本村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP21975093A priority Critical patent/JPH0772171A/en
Publication of JPH0772171A publication Critical patent/JPH0772171A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide an electric inspection jig for a wiring board which can be constituted without a need for an NC boring operation, the insertion operation of a voltage detection pin and the like and in which the electric inspection of narrow-pitch and small-diameter pads on a printed-wiring board can be performed with high accuracy. CONSTITUTION:The inspection jig is formed so as to be provided with a conductive metal layer 1, with a group of conductive bumps 2 whose ends on one side are connected to, and arranged at prescribed positions on the main face of the conductive metal layer 1 and whose height is nearly uniform and with an insulator layer 3 which exposes and buries the individual conductive bumps 2 in the group of the conductive bumps 2 exposing the tip parts and which separates, isolates and insulates the individual conductive bumps 2 from each other. The conductive metal layer 2 adopts a shape which is provided with lead wire parts 1a for electric inspection and with connector parts 1b, and its constitution can be made compact or simple. In addition, when it is formed as a multilayer interconnection structure, its multifunction can be achieved.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、印刷配線板の電気的な
導通試験に用いる電気検査治具に係り、特に高密度配線
板なども信頼性の高い電気検査が可能な配線板用電気検
査治具に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electric inspection jig used for an electric continuity test of a printed wiring board, and particularly for a high density wiring board and the like, which enables highly reliable electric inspection. Regarding jigs.

【0002】[0002]

【従来の技術】周知のように印刷配線板は、各種の電子
機器類に広く使用されており、それら電子機器類の小型
化ないし回路部分のコンパクト化などに大きく寄与して
いる。ところで、印刷配線板においては、その印刷配線
板に形成されている回路パタ―ンが、所要の機能を有し
ているか否かは重要な問題である。すなわち、印刷配線
板は煩雑な工程ないし多段的な工程を経て製造されるた
め、回路パタ―ンの破断や回路パタ―ン間の接続不良な
どを起こす場合がある。こうした回路パタ―ンの破断や
接続不良があると、印刷配線板は設計通りの機能に欠け
ることになるため、電子機器類の構成に用いた場合、そ
の電子機器類が所要の機能を発揮し得なくなる。したが
って、上記印刷配線板についても最終的な検査として、
オン.オフグリッド電気検査といわれる電気検査を行っ
ている。つまり、端子ピン挿入孔を所定のピッチで、た
とえばNC穴明け加工で設けたテ―ブルを備えた導通検査
機を用意する一方、検査すべき印刷配線板のスルホ―ル
に対応したリ―ドピン(検電ピン)を備えた電気検査治
具を用意する。そして、この電気検査治具を介して印刷
配線板を前記導通検査機に位置合わせ・装着して所要の
電気検査を行っている。
2. Description of the Related Art As is well known, printed wiring boards are widely used in various electronic devices and greatly contribute to downsizing of these electronic devices and downsizing of circuit parts. By the way, in a printed wiring board, whether or not the circuit pattern formed on the printed wiring board has a required function is an important issue. That is, since the printed wiring board is manufactured through complicated steps or multi-step steps, the circuit pattern may be broken or the connection between the circuit patterns may be defective. If such a circuit pattern breaks or there is a connection failure, the printed wiring board will lack the functions as designed.When used in the construction of electronic devices, the electronic devices will perform the required functions. I won't get it. Therefore, as a final inspection for the printed wiring board,
on. An electrical inspection called off-grid electrical inspection is performed. In other words, while preparing a continuity tester equipped with a table with terminal pin insertion holes at a predetermined pitch, for example, NC drilling, a lead pin corresponding to the printed wiring board to be inspected. An electric inspection jig equipped with (electrical detection pin) is prepared. Then, the printed wiring board is aligned and mounted on the continuity inspection machine through the electric inspection jig to perform a required electric inspection.

【0003】[0003]

【発明が解決しようとする課題】上記の如く、従来の印
刷配線板の電気検査治具の場合は、導通検査機が具備す
るテ―ブルの所定位置へのNC穴明け加工、検電ピン挿入
などの製造工程が煩雑で、しかも多くが手作業的である
ため、構成に比較的多くの時間を要するばかりでなく、
電気検査治具としての精度・信頼性にも問題がある。特
に、狭ピッチパッド部を備えた印刷配線板の電気検査に
当たっては、小径の検電ピンを使用することになるた
め、前記NC穴明けの小径化および狭ピッチ化が必然とな
って、これらの加工工程が煩雑・長時間化する一方、小
径化かつ狭ピッチ化した穴に対する検電ピンの挿入作業
の困難さも増長され、精度などの点でさらに問題が提起
される。
As described above, in the case of the conventional electric inspection jig for a printed wiring board, NC drilling is performed at a predetermined position of the table provided in the continuity inspection machine, and a detection pin is inserted. Since the manufacturing process is complicated and many are manual, not only does it take a relatively long time to configure,
There are also problems with accuracy and reliability as an electrical inspection jig. In particular, in the electrical inspection of a printed wiring board having a narrow pitch pad portion, since a small-diameter detection pin will be used, it is inevitable that the NC hole is made smaller in diameter and pitched. While the machining process becomes complicated and takes a long time, the difficulty of inserting the detection pin into a hole having a small diameter and a narrow pitch is also increased, which poses a further problem in terms of accuracy.

【0004】こうした問題に対して、前記検電ピンをス
プリング方式化することも試みられている。すなわち、
テ―ブルの端子ピン挿入孔に、スプリングを装着した検
電ピンを予め配置し、そのスプリングによって検電ピン
の上昇が可能な状態に設定しておき、被検査体としての
印刷配線板の所定箇所に対接させる手段も知られてい
る。しかし、このスプリング方式の場合は、被検査パッ
ド部が 0.5mm以下のピッチてになると、検査治具自体の
構成が困難で実用し得ない。さらに、ブローブ針方式と
いわれる方式も知られているが、ブローブ針の面配置が
困難で実用的といえない。
[0004] In response to these problems, it has been attempted to use a spring system for the detection pin. That is,
A voltage-sensing pin equipped with a spring is placed in advance in the terminal pin insertion hole of the table, and the spring is set so that the voltage-sensing pin can be raised. Means for contacting the place are also known. However, in the case of this spring method, if the pad portion to be inspected has a pitch of 0.5 mm or less, the construction of the inspection jig itself is difficult and it cannot be used practically. Further, a method called a probe needle method is also known, but it is not practical because the surface arrangement of the probe needle is difficult.

【0005】本発明は上記事情に対処してなされたもの
で、NC穴明け加工や検電ピンの挿入作業など要せずに構
成でき、また狭ピッチ・小径パッドを対象とした印刷配
線板の電気検査を精度よく行い得る配線板用電気検査治
具の提供を目的とする。
The present invention has been made in consideration of the above circumstances, and can be constructed without the need for NC drilling or the insertion of a detection pin, and it is also possible to provide a printed wiring board for narrow-pitch, small-diameter pads. An object of the present invention is to provide an electric inspection jig for a wiring board that can perform an electric inspection with high accuracy.

【0006】[0006]

【課題を解決するための手段】本発明に係る電気検査治
具は、導電性金属層と、前記導電性金属層主面の所定位
置に一端がそれぞれ接続して配置された高さがほぼ一様
な導電性バンプ群と、前記導電性バンプ群の各導電性バ
ンプ先端部を露出・埋設し、かつ各導電性バンプを互い
に離隔・絶縁する絶縁体層とを具備して成ることを特徴
とする。ここで、導電性金属層は、電気検査用リード線
部およびコネクター部を備えた形態を採って、構成のコ
ンパクト化ないし簡略化を図ることも可能であるし、さ
らに多層配線化構造とすることにより多機能化も図り得
る。
An electrical inspection jig according to the present invention has a conductive metal layer and a height at which one end is connected to a predetermined position on the main surface of the conductive metal layer so as to have a substantially uniform height. Such a conductive bump group, and an insulating layer that exposes / embeds each conductive bump tip of the conductive bump group and separates / insulates each conductive bump from each other. To do. Here, the conductive metal layer can be configured to have a lead wire portion for electrical inspection and a connector portion to make the configuration compact or simplified, and to provide a multilayer wiring structure. It is possible to achieve multi-functionality.

【0007】そして、この電気検査治具は、たとえば導
電性金属箔面の所定位置に、所要のピッチで、かつ所要
形状・高さの導電性バンプ群を選択的に配置・形成し、
前記導電性バンプ群形成面に、たとえばプリプレグ絶縁
シートを重ね合わせ、加圧・積層一体化することによ
り、導電性バンプ群がプリプレグ絶縁シートを貫通し
て、先端部を露出させた構成が容易に形成される。ここ
で、導電性バンプ群の支持体として機能した導電性金属
箔を、たとえばエッチング除去することにより、あるい
はフォトエッチング処理によりパターニングし、電気検
査用リード線やコネクター部を形成することによって、
上記構成の配線板用の電気検査治具が得られる。 な
お、前記構成において、絶縁体層面に露出した導電性バ
ンプ群の先端部を、たとえば金,銀,ロジウムなど接触
抵抗の小さい金属で、メッキ処理して補強しておくと、
磨耗などによる損傷が防止され長寿命化を図り得る。
In this electrical inspection jig, for example, conductive bump groups having a required pitch and a required shape and height are selectively arranged and formed at predetermined positions on the surface of a conductive metal foil,
For example, by stacking a prepreg insulating sheet on the surface on which the conductive bump group is formed and pressurizing / laminating them integrally, the structure in which the conductive bump group penetrates the prepreg insulating sheet and the tip portion is exposed becomes easy. It is formed. Here, the conductive metal foil functioning as a support for the conductive bump group is patterned, for example, by etching or by photoetching to form a lead wire for electrical inspection and a connector portion,
An electrical inspection jig for a wiring board having the above structure can be obtained. In the above structure, if the tip end portion of the conductive bump group exposed on the surface of the insulating layer is plated and reinforced with a metal having a small contact resistance, such as gold, silver, or rhodium,
Damage due to abrasion is prevented and the life can be extended.

【0008】本発明に係る配線板用電気検査治具の製造
において、導体バンプ群を形設具備する導電性金属層
(導電性シートもしくは箔)は、1枚のシートであって
もよいし、予めパターン化されたものでもよく、その形
状はとくに限定されない。また、貫挿した導電性のバン
プ2(導体配線部)の支持基体を成す導電性金属層は、
共通的な導電層として利用してもよいし、前記例示のよ
うにパターニングして電気検査リード部やコネクター部
として利用してもよい。
In the manufacture of the electrical inspection jig for a wiring board according to the present invention, the conductive metal layer (conductive sheet or foil) having the conductor bump group formed therein may be a single sheet, It may be patterned in advance, and its shape is not particularly limited. In addition, the conductive metal layer forming the supporting base of the conductive bumps 2 (conductive wiring portion) inserted is
It may be used as a common conductive layer, or may be patterned as described above and used as an electrical inspection lead portion or a connector portion.

【0009】本発明において、導体バンプ(導体バンプ
群)は、たとえば銀,金,銅,半田粉などの導電性粉
末、これらの合金粉末もしくは複合(混合)金属粉末
と、たとえばポリカーボネート樹脂,ポリスルホン樹
脂,ポリエステル樹脂,フェノキシ樹脂,フェノール樹
脂,ポリイミド樹脂などのバインダー成分とを混合して
調製された導電性組成物、あるいは導電性金属などで構
成される。そして、前記バンプ群の形設は、導電性組成
物で形成する場合、たとえば比較的厚いメタルマスクを
用いた印刷法により、アスペクト比の高い導電性バンプ
を形成でき、その導電性バンプ群の高さは一般的に、 1
00〜 400μm 程度が望ましい。
In the present invention, the conductor bump (group of conductor bumps) is made of, for example, conductive powder such as silver, gold, copper, solder powder, etc., an alloy powder or a composite (mixed) metal powder thereof, and a polycarbonate resin, a polysulfone resin, for example. , A conductive composition prepared by mixing with a binder component such as polyester resin, phenoxy resin, phenol resin, polyimide resin, or a conductive metal. When the bump group is formed of a conductive composition, a conductive bump having a high aspect ratio can be formed by, for example, a printing method using a relatively thick metal mask. Is generally 1
00 to 400 μm is desirable.

【0010】一方、導電性金属でバンプ群を形成する手
段としては、 (a)ある程度形状もしくは寸法が一定な微
小金属魂を、粘着剤層を予め設けておいた導電性金属層
面に散布し、選択的に固着させるか(このときマスクを
配置して行ってもよい)、 (b)銅箔を導電性金属層とし
た場合は、メッキレジストを印刷・パターニングして、
銅,錫,金,銀,半田などメッキして選択的に微小な金
属柱(バンプ)群の形成、 (c)導電性金属層面に半田レ
ジストの塗布・パターニングして、半田浴に浸漬して選
択的に微小な金属柱(バンプ)群の形成などが挙げられ
る。ここで、バンプに相当する微小金属魂ない微小な金
属柱は、異種金属を組合わせて成る多層構造、多層シェ
ル構造でもよい。なお、本発明において、バンプ群を導
電性組成物で形成する場合は、メッキ法などの手段で行
う場合に較べて、さらに工程など簡略化し得るので、低
コスト化の点で有効である。
On the other hand, as means for forming a bump group with a conductive metal, (a) fine metal particles having a certain shape or size are dispersed on the surface of the conductive metal layer on which an adhesive layer is previously provided, Selectively fixed (may be arranged with a mask at this time), or (b) if the copper foil is used as a conductive metal layer, print / pattern a plating resist,
Copper, tin, gold, silver, solder, etc. are plated to selectively form minute metal pillars (bumps), (c) Applying and patterning a solder resist on the conductive metal layer surface and immersing in a solder bath For example, the formation of a group of minute metal columns (bumps) can be mentioned. Here, the minute metal pillar having no minute metal soul corresponding to the bump may have a multilayer structure or a multilayer shell structure formed by combining different metals. In addition, in the present invention, when the bump group is formed of a conductive composition, the process can be further simplified as compared with the case where it is performed by a method such as a plating method, which is effective in reducing the cost.

【0011】本発明において、前記導体バンプ群が貫挿
され、貫通型の導体配線部を形成する合成樹脂系シート
としては、たとえば熱可塑性樹脂フイルム(シート)が
挙げられ、またその厚さは導体バンプの高さにより決ま
る。つまり、互いに対向配置される導体バンプの先端部
が塑性変形して十分な電気的な接続を構成する必要があ
るので、前記対を成す導体バンプの高さの和より薄く選
択・設定され、一般的に50〜 800μm 程度が好ましい。
ここで、熱可塑性樹脂シートとしては、たとえばポリカ
ーボネート樹脂,ポリスルホン樹脂,熱可塑性ポリイミ
ド樹脂,4フッ化ポリエチレン樹脂,6フッ化ポリプロ
ピレン樹脂,ポリエーテルエーテルケトン樹脂などのシ
ート類が挙げられる。また、硬化前状態に保持される熱
硬化性樹脂シートとしては、エポキシ樹脂,ビスマレイ
ミドトリアジン樹脂,ポリイミド樹脂,フェノール樹
脂,ポリエステル樹脂,メラミン樹脂,あるいはブタジ
ェンゴム,ブチルゴム,天然ゴム,ネオプレンゴム,シ
リコーンゴムなどの生ゴムのシート類が挙げられる。こ
れら合成樹脂は、単独でもよいが絶縁性無機物や有機物
系の充填物を含有してもよく、さらにガラスクロスやマ
ット、有機合成繊維布やマット、あるいは紙などの補強
材と組み合わせて成るシートであってもよい。
In the present invention, examples of the synthetic resin sheet having the conductor bump group inserted therethrough to form a through-type conductor wiring portion include a thermoplastic resin film (sheet), and the thickness thereof is a conductor. Determined by bump height. In other words, since the tips of the conductor bumps arranged to face each other need to be plastically deformed to form a sufficient electrical connection, they are selected and set thinner than the sum of the heights of the conductor bumps forming the pair. It is preferably about 50 to 800 μm.
Here, examples of the thermoplastic resin sheet include sheets of polycarbonate resin, polysulfone resin, thermoplastic polyimide resin, tetrafluoropolyethylene resin, hexafluoropolypropylene resin, polyetheretherketone resin, and the like. Further, as the thermosetting resin sheet to be kept in the pre-curing state, epoxy resin, bismaleimide triazine resin, polyimide resin, phenol resin, polyester resin, melamine resin, or butadiene rubber, butyl rubber, natural rubber, neoprene rubber, silicone rubber Sheets of raw rubber such as. These synthetic resins may be used alone or may contain an insulating inorganic or organic filler, and are a sheet formed by combining with a reinforcing material such as glass cloth or mat, organic synthetic fiber cloth or mat, or paper. It may be.

【0012】[0012]

【作用】上記構成によれば、いわゆる検電ピンは、高さ
がほぼ一定な導電性バンプ群で形成されており、かつこ
の導電性バンプ群は互いに絶縁・離隔し、先端部を露出
した形で絶縁体層に埋め込れている。そして、前記導電
性バンプ群は、位置・形状ともに精度よく形成し得ると
ともに、加圧成型の際も、形崩れや位置ずれなど起こさ
ずに、容易に絶縁シート層を貫通(貫挿)して、先端部
を絶縁シート層面に露出した構成を採る。つまり、狭ピ
ッチ・小径の検電ピンを高精度に、かつ確実に備えてい
るため、狭ピッチ・小径パッドを対象とした印刷配線板
でも、高精度に所要の電気検査を行い得ることが可能と
なる。
According to the above-mentioned structure, the so-called detection pin is formed by the conductive bump group having a substantially constant height, and the conductive bump group is insulated / separated from each other and the tip portion is exposed. Embedded in the insulator layer. The conductive bump group can be accurately formed in both position and shape, and can be easily penetrated (inserted) through the insulating sheet layer without causing deformation or displacement during pressure molding. , The tip portion is exposed on the surface of the insulating sheet layer. In other words, because it has a narrow-pitch, small-diameter detection pin with high accuracy and certainty, it is possible to perform the required electrical inspection with high accuracy even on a printed wiring board that targets narrow-pitch, small-diameter pads. Becomes

【0013】[0013]

【実施例】以下図1〜図5を参照して本発明の実施例を
説明する。
Embodiments of the present invention will be described below with reference to FIGS.

【0014】実施例1 図1 (a), (b)は、本発明に係る配線板用電気検査治具
の要部構成例を示したもので、 (a)は断面図、また (b)
は平面図である。図1 (a), (b)において、1は導電性
金属層、2は前記導電性金属層1主面の所定位置にそれ
ぞれ一端が接続して配置された高さがほぼ一様な導電性
バンプである。ここで、導電性バンプ2は、検電ピンと
しての機能を成すものであり、その先端部は予め金メッ
キ処理されている。また、3は前記各導電性バンプ2先
端部を露出・埋設し、かつ各導電性バンプ2を互いに離
隔・絶縁する絶縁体層である。そして、この構成例にお
いては、前記導電性金属層1をいわゆるパターニング処
理して、電気検査リード部1a化、およびコネクタ部1b化
してある。
Embodiment 1 FIGS. 1 (a) and 1 (b) show an example of the essential structure of an electrical inspection jig for a wiring board according to the present invention, where (a) is a sectional view and (b) is
Is a plan view. In FIGS. 1 (a) and 1 (b), 1 is a conductive metal layer, and 2 is a conductive metal having a substantially uniform height, one end of which is arranged at a predetermined position on the main surface of the conductive metal layer 1. It is a bump. Here, the conductive bump 2 has a function as a detection pin, and the tip portion thereof is previously plated with gold. Reference numeral 3 is an insulator layer that exposes and buries the tip of each conductive bump 2 and separates and insulates each conductive bump 2 from each other. Then, in this configuration example, the conductive metal layer 1 is subjected to so-called patterning treatment to form an electrical inspection lead portion 1a and a connector portion 1b.

【0015】図2は、上記構成の配線板用電気検査治具
の使用態様を模式的に示したもので、導通検査機の載置
台4面に、たとえばゴムシート5を介して、前記配線板
用電気検査治具6を配置し、この配線板用電気検査治具
6のコネクター部1bを導通検査機の載置台4のコネクタ
ーに接続する一方、検電ピンとしての機能する導電性バ
ンプ2先端部を、被検査体としての印刷配線板の被検査
部、たとえば小径パッド部に、位置合わせ・対接させ
て、所要の電気検査を行い得るように構成されている。
FIG. 2 schematically shows a mode of use of the electric inspection jig for a wiring board having the above-mentioned structure. The wiring board is placed on the surface of the mounting table 4 of the continuity inspection machine via, for example, a rubber sheet 5. The electrical inspection jig 6 for wiring is arranged, and the connector portion 1b of the electrical inspection jig 6 for wiring board is connected to the connector of the mounting table 4 of the continuity inspection machine, while the tip of the conductive bump 2 that functions as a detection pin. The part is aligned with and brought into contact with a part to be inspected of a printed wiring board as a part to be inspected, for example, a small-diameter pad part, and a required electrical inspection can be performed.

【0016】次に、上記構成の配線板用電気検査治具の
製造例を説明する。
Next, a manufacturing example of the electrical inspection jig for a wiring board having the above structure will be described.

【0017】図3 (a), (b), (c)は製造工程の態様を
模式的に示したもので、先ず、厚さ35μm の電解銅箔を
導電性金属層、ポリマータイプの銀系の導電性ペースト
(商品名,熱硬化性導電性ペーストMS-7,東芝ケミカル
KK)、および板厚 300μmのアルミ板の所定箇所に 0.
3mm径の穴を明けたメタルマスクをそれぞれ用意した。
そして、前記電解銅箔1面に、前記メタルマスクを位置
決め配置して、導電性ペーストを印刷し、この印刷され
た導電性ペーストが乾燥後、同一マスクを用い同一位置
に再度印刷する方法で3回印刷を繰り返し、高さ 200〜
300μm の山形の導電性パンブ2を形成(形設)した。
FIGS. 3 (a), 3 (b) and 3 (c) schematically show an embodiment of the manufacturing process. First, an electrolytic copper foil having a thickness of 35 μm is provided with a conductive metal layer and a polymer type silver-based copper foil. Conductive paste (trade name, thermosetting conductive paste MS-7, Toshiba Chemical KK) of 1.
We prepared metal masks with 3mm holes.
Then, the metal mask is positioned and arranged on one surface of the electrolytic copper foil, a conductive paste is printed, and after the printed conductive paste is dried, it is printed again at the same position using the same mask. Repeated printing times, height 200 ~
A 300 μm chevron-shaped conductive bump 2 was formed (formed).

【0018】一方、厚さ 160μm の合成樹脂系シート
3、たとえばポリエーテルイミド樹脂フィルム(商品
名,スミライト FS-1400,住友ベークライトKK)を用
意し、図3 (a)に断面的に示すごとく、前記導電性パン
ブ2群を形成(形設)した電解銅箔1に対して、合成樹
脂系シート3を、前記導電性のバンプ2対向させて位置
決め配置し、積層体化した。その後、前記積層体化した
合成樹脂系シート3面に、アルミ箔やゴムシートなどを
当て板として積層・配置し(図示せず)、 170℃に保持
した熱プレスの熱板の間に配置し(図示せず)、合成樹
脂系シート3のガラス点移転以上の温度、好ましくは熱
可塑化した状態のとき、樹脂圧として 1 MPaで約30分
間,加圧保持し、導電性パンブ2および合成樹脂系シー
ト3の樹脂分を硬化させ、冷却後取りだし、アルミ箔や
ゴムシートなどをを剥離したところ、図3 (b)に断面的
に示すごとく、前記各導電性のバンプ2先端が、合成樹
脂系シート3中に圧入し、さらに合成樹脂系シート3の
裏面側に先端部が貫通して、互いに絶縁離隔する導体配
線部を備えた積層体を形成した。
On the other hand, a synthetic resin sheet 3 having a thickness of 160 μm, for example, a polyetherimide resin film (trade name, Sumilite FS-1400, Sumitomo Bakelite KK) is prepared, and as shown in a sectional view in FIG. The synthetic resin sheet 3 was positioned and arranged so as to face the conductive bumps 2 with respect to the electrolytic copper foil 1 on which the group of conductive bumps 2 was formed (formed), and a laminated body was formed. After that, aluminum foil or a rubber sheet is laminated and arranged as a backing plate (not shown) on the surface of the laminated synthetic resin sheet 3 (not shown), and is arranged between the hot plates of the hot press kept at 170 ° C (see Fig. (Not shown), when the temperature is not lower than the glass point transfer of the synthetic resin sheet 3, preferably in a thermoplasticized state, the resin pressure is maintained at 1 MPa for about 30 minutes, and the conductive pump 2 and the synthetic resin sheet are kept under pressure. When the resin component of the sheet 3 was cured, taken out after cooling, and the aluminum foil or rubber sheet was peeled off, as shown in the sectional view in FIG. 3 (b), the tips of the conductive bumps 2 were made of synthetic resin. A laminate having a conductor wiring portion press-fitted into the sheet 3 and further having a tip portion penetrating the back surface side of the synthetic resin sheet 3 and insulated and separated from each other was formed.

【0019】次いで、前記導体配線部を備えた積層体
の、合成樹脂系シート3面に貫通・露出した導電性のバ
ンプ2先端部に、前記電解銅箔1を電極として、金メッ
キ処理を施して、図3 (c)に断面的に示すごとく、導電
性のバンプ2先端部を金で被覆2aした。その後、前記電
解銅箔1の露出面にエッチングレジストを印刷し、銅箔
1を選択的にエッチング除去してから、エッチングレジ
ストをアルカリ水溶液で剥離することにより、前記図1
(a), (b)に示すような、各導電性バンプ2に電気的に
接続する電気検査リード部1aおよびコネクター部1bを一
体的に備えた配線板用電気検査治具を得た。
Then, the electroplated copper foil 1 is used as an electrode on the tip of the conductive bump 2 penetrating and exposed on the surface of the synthetic resin sheet 3 of the laminate having the conductor wiring portion, and gold plating is applied to the tip. As shown in a sectional view in FIG. 3 (c), the tips of the conductive bumps 2 were covered with gold 2a. After that, an etching resist is printed on the exposed surface of the electrolytic copper foil 1, the copper foil 1 is selectively removed by etching, and then the etching resist is peeled off with an alkaline aqueous solution.
As shown in (a) and (b), an electric inspection jig for a wiring board integrally provided with an electric inspection lead portion 1a and a connector portion 1b electrically connected to each conductive bump 2 was obtained.

【0020】実施例2 図4は、電気検査リード部を高密度化して、高機能化な
どを図った配線板用電気検査治具の要部構成例を示す断
面図であり、前記実施例1の構成において、検電ピンを
成す先端部に金メッキ層2aが被覆された導電性のバンプ
2群を絶縁埋設する絶縁体層3と、電気検査リード部1a
およびコネクター部1bを形成した電解銅箔1との間に、
所要の層間接続がなされて電気検査リード部1aを形成す
る配線層を多層的に配置した構成を成している。
Example 2 FIG. 4 is a cross-sectional view showing an example of the essential structure of an electrical inspection jig for a wiring board in which the electrical inspection lead portion is densified so as to have higher functionality. In the above configuration, an insulator layer 3 for electrically insulating and embedding a group of conductive bumps 2 having a gold plating layer 2a coated on the tip end portion of the detection pin, and an electrical inspection lead portion 1a.
And between the electrolytic copper foil 1 on which the connector portion 1b is formed,
The wiring layers that form the electrical inspection lead portion 1a are formed in a multi-layered manner by making the required interlayer connection.

【0021】そして、このよう配線層を多層的に備えた
配線板用電気検査治具配置は、前記実施例1の場合に準
じた手段で製造し得る。すなわち、先ず、複数枚の厚さ
35μm の電解銅箔を導電性金属層、ポリマータイプの銀
系の導電性ペースト(商品名,熱硬化性導電性ペースト
MS-7,東芝ケミカルKK)、および板厚 300μm のアル
ミ板の所定箇所に 0.3mm径の穴を明けた所要のメタルマ
スク(複数種の)をそれぞれ用意した。そして、前記各
電解銅箔1面に、前記所要のメタルマスクを位置決め配
置して、導電性ペーストを印刷し、この印刷された導電
性ペーストが乾燥後、同一マスクを用い同一位置に再度
印刷する方法で3回印刷を繰り返し、高さ 200〜 300μ
m の山形の導電性パンブ2を形成(形設)した。
The wiring board electrical inspection jig arrangement including a plurality of wiring layers can be manufactured by a method similar to that of the first embodiment. That is, first, the thickness of a plurality of sheets
35μm electrolytic copper foil with conductive metal layer, polymer type silver-based conductive paste (trade name, thermosetting conductive paste
MS-7, TOSHIBA CHEMICAL KK), and required metal masks (plural types) in which holes of 0.3 mm diameter were drilled at predetermined locations on an aluminum plate with a plate thickness of 300 μm were prepared. Then, the required metal mask is positioned and arranged on the surface of each of the electrolytic copper foils, and a conductive paste is printed. After the printed conductive paste is dried, the same mask is used to print again at the same position. Printing is repeated 3 times, and the height is 200-300μ.
An m-shaped chevron-shaped conductive bump 2 was formed (shaped).

【0022】一方、厚さ 160μm の合成樹脂系シート
3、たとえばポリエーテルイミド樹脂フィルム(商品
名,スミライト FS-1400,住友ベークライトKK)を用
意し、前記導電性パンブ2群を形成(形設)した第1の
電解銅箔1に対して、合成樹脂系シート3を、前記導電
性のバンプ2対向させて位置決め配置し、積層体化し
た。その後、前記積層体面に、アルミ箔やゴムシートな
どを当て板として積層・配置し、 120℃に保持した熱プ
レスの熱板の間に配置し、合成樹脂系シート3のガラス
点移転以上の温度、好ましくは熱可塑化した状態のと
き、樹脂圧として 1 MPaで加圧保持し、各導電性のバン
プ2先端が、合成樹脂系シート3中に圧入し、さらに合
成樹脂系シート3の裏面側に先端部が貫通して、互いに
絶縁離隔する導体配線部を備えた積層体を形成した。
On the other hand, a synthetic resin sheet 3 having a thickness of 160 μm, for example, a polyether imide resin film (trade name, Sumilite FS-1400, Sumitomo Bakelite KK) is prepared to form (form) the second group of conductive bumps. The synthetic resin sheet 3 was positioned and arranged so as to face the conductive bumps 2 with respect to the first electro-deposited copper foil 1, and a laminated body was formed. Then, an aluminum foil or a rubber sheet is laminated and arranged on the surface of the laminated body as a backing plate, and is placed between the hot plates of a hot press kept at 120 ° C., and the temperature is equal to or higher than the glass point transfer of the synthetic resin sheet 3, preferably. Is held at 1 MPa as the resin pressure in the thermoplasticized state, the tips of the conductive bumps 2 are press-fitted into the synthetic resin sheet 3, and the tips are placed on the back surface side of the synthetic resin sheet 3. A laminated body having conductor wiring portions that penetrate each other and are insulated and separated from each other is formed.

【0023】次いで、前記導体配線部を備えた積層体
の、合成樹脂系シート3面に貫通・露出した導電性のバ
ンプ2先端部に、前記電解銅箔1を電極として、金メッ
キ処理を施して、図3 (c)に断面的に示すごとく、導電
性のバンプ2先端部を金で被覆2aした。その後、前記電
解銅箔1の露出面にエッチングレジストを印刷し、銅箔
1を選択的にエッチング除去してから、エッチングレジ
ストをアルカリ水溶液で剥離することにより、前記各導
電性バンプ2に電気的に接続する電気検査リード部1aを
備えた素板を得る。
Next, the electroplated copper foil 1 is used as an electrode and gold-plated at the tip of the conductive bump 2 penetrating and exposed on the surface of the synthetic resin sheet 3 of the laminate having the conductor wiring portion. As shown in a sectional view in FIG. 3 (c), the tips of the conductive bumps 2 were covered with gold 2a. Then, an etching resist is printed on the exposed surface of the electrolytic copper foil 1, the copper foil 1 is selectively removed by etching, and then the etching resist is peeled off with an alkaline aqueous solution to electrically connect the conductive bumps 2 to each other. A blank plate having an electrical inspection lead portion 1a connected to is obtained.

【0024】前記手法に準じて、各導電性バンプ2′
(層間接続用の導体配線部を成す)を備えた積層体を製
造し、前記電解銅箔1をパターニングして所要の電気検
査リード部1aのみ、もしくは所要の電気検査リード部1a
およびコネクタヘ部1bを備えた素板をそれぞれ得る。そ
の後、これらの各素板を図5に断面的に示すように、積
層・配置し、この積層体面にアルミ箔やゴムシートなど
を当て板として積層・配置して、 170℃に保持した熱プ
レスの熱板の間に配置し、樹脂圧として 1 MPaで加圧保
持し、絶縁体層3および導電性のバンプ2,2′樹脂分
を硬化させてから、冷却後取りだしてからアルミ箔やゴ
ムシートなどをを剥離したところ、図4に断面的に示す
ごとく、前記層間の接続に寄与する導電性バンプ2′
が、塑性変形し対向する被接続面に電気的に良好な状態
で接続した構成の、多層配線型の配線板用電気検査治具
が得られた。
In accordance with the above method, each conductive bump 2 '
A laminated body having (a conductor wiring portion for interlayer connection) is manufactured, and the electrolytic copper foil 1 is patterned to obtain only the required electrical inspection lead portion 1a or the required electrical inspection lead portion 1a.
And a blank plate provided with the connector portion 1b is obtained. After that, each of these blanks is laminated and arranged as shown in cross section in Fig. 5, and aluminum foil, rubber sheet, etc. are laminated and arranged as a backing plate on the surface of this laminated body, and hot pressed at 170 ° C. It is placed between the hot plates of 1 MPa, and is held under pressure of 1 MPa as the resin pressure to cure the insulating layer 3 and the conductive bumps 2 and 2'resin, and after cooling, it is taken out and then aluminum foil, rubber sheet, etc. Of the conductive bumps 2'which contribute to the connection between the layers as shown in a sectional view in FIG.
However, an electrical inspection jig for a wiring board of a multi-layer wiring type having a configuration in which it is plastically deformed and electrically connected to the opposing connection surface in an electrically favorable state was obtained.

【0025】[0025]

【発明の効果】上記の如く、本発明に係る配線板用検査
治具によれば、いわゆる検電ピンは検査治具の一体化成
型工程における加圧で、互いに絶縁離隔した形で絶縁体
層を貫通(貫挿)しており、高精度かつ確実に配置され
た構成を容易に採り得る。つまり、印刷法やメッキ法な
どにより微小径の検電ピンを、また狭ピッチに形設配置
も可能なため、高密度配線ないし微細な接続パッドを備
えた配線板などについて、信頼性の高い電気検査を行い
得る。しかも、従来の配線板用検査治具の場合と異な
り、穴明け工程および検電ピンの挿入操作なども不要と
なること、さらに検査の信頼性の向上も図り得ること、
加えて設計変更など繰り返えされ配線板の電気検査にも
対応し得ることから、実用上多くの利点をもたらすもの
といえる。
As described above, according to the wiring board inspection jig of the present invention, the so-called detection pins are insulated from each other by the pressure applied in the integrated molding process of the inspection jig. It is possible to easily adopt a configuration in which it is arranged with high accuracy and certainty. In other words, because it is possible to form and arrange minute-diameter detection pins with a narrow pitch by printing or plating, it is possible to use highly reliable electrical wiring for high-density wiring or wiring boards with fine connection pads. An inspection can be done. Moreover, unlike the case of the conventional wiring board inspection jig, the drilling process and the operation of inserting the detection pin are not necessary, and the reliability of the inspection can be improved.
In addition, it can be said to bring many practical advantages because it can be repeatedly subjected to electrical inspection of wiring boards by repeated design changes.

【0026】き、前記電気検査の能率向上(工数削減)
に大きく寄与する。
(1) Improving the efficiency of the electrical inspection (reducing man-hours)
Greatly contribute to.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る配線板用電気検査治具の要部構成
例を示すもので、 (a)は断面図、 (b)は平面図。
FIG. 1 is a sectional view showing a configuration example of a main part of an electric inspection jig for a wiring board according to the present invention, and FIG.

【図2】本発明に係る配線板用電気検査治具を通電検査
機に装着した状態例を示す断面図。
FIG. 2 is a cross-sectional view showing an example of a state in which the electrical inspection jig for a wiring board according to the present invention is mounted on a current inspection machine.

【図3】本発明に係る配線板用電気検査治具の製造工程
例を模式的に示すもので、 (a)は導電性バンプ群を設け
た導電性金属層を絶縁体層に位置合わせ・積層する状態
の断面図、 (b)は加圧一体化により導電性バンプ群を絶
縁体層に貫挿させた状態の断面図、 (c)は絶縁体層を貫
挿した導電性バンプ先端部にメッキ層を被覆した状態の
断面図。
FIG. 3 schematically shows an example of a manufacturing process of an electric inspection jig for a wiring board according to the present invention, in which (a) aligns a conductive metal layer provided with a conductive bump group with an insulator layer. Cross-sectional view of stacked state, (b) cross-sectional view of a state where the conductive bump group is inserted into the insulator layer by pressure integration, (c) is a conductive bump tip part that penetrates the insulator layer FIG. 3 is a cross-sectional view of a state in which a plating layer is covered on the.

【図4】本発明に係る配線板用電気検査治具の他の要部
構成例を示す断面図。
FIG. 4 is a cross-sectional view showing another example of the essential structure of a wiring board electrical inspection jig according to the present invention.

【図5】本発明に係る配線板用電気検査治具の他の製造
工程例を模式的に示すもので、各構成素板の位置合わせ
・積層状態の断面図。 1…導電性金属層 1a…電気検査リード部 1b…コ
ネクター部 2…導電性バンプ(電検ピンを成す)
2′…導電性バンプ(層間接続導体を成す) 2a…メッキ被覆層 3…絶縁体層(絶縁樹脂系シー
ト) 4…通電検査機の載置台 5…ゴムシート
6…配線板用電気検査治具
FIG. 5 schematically shows another example of the manufacturing process of the electrical inspection jig for a wiring board according to the present invention, and is a cross-sectional view showing the alignment / stacking state of each constituent plate. 1 ... Conductive metal layer 1a ... Electrical inspection lead part 1b ... Connector part 2 ... Conductive bump (forms an electric test pin)
2 '... Conductive bump (forms an interlayer connection conductor) 2a ... Plating coating layer 3 ... Insulator layer (insulating resin-based sheet) 4 ... Mounting table for current inspection machine 5 ... Rubber sheet
6 ... Electrical inspection jig for wiring boards

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 導電性金属層と、前記導電性金属層主面
の所定位置に一端が接続して配置された高さがほぼ一様
な導電性バンプ群と、前記導電性バンプ群の各導電性バ
ンプ先端部を露出・埋設し、かつ各導電性バンプを互い
に離隔・絶縁する絶縁体層とを具備して成ることを特徴
とする配線板用電気検査治具。
1. A conductive metal layer, a conductive bump group having one end connected to a predetermined position on the main surface of the conductive metal layer and having a substantially uniform height, and each of the conductive bump groups. An electrical inspection jig for a wiring board, comprising: an insulating layer that exposes and buries conductive bump tips and separates and insulates each conductive bump from each other.
【請求項2】 電気検査用リード線部およびコネクター
部を備えた導電性金属層と、前記導電性金属層主面の所
定位置に一端が接続して配置された高さがほぼ一様な導
電性バンプ群と、前記導電性バンプ群の各導電性バンプ
先端部を露出・埋設し、かつ各導電性バンプを互いに離
隔・絶縁する絶縁体層とを具備して成ることを特徴とす
る配線板用電気検査治具。
2. A conductive metal layer having an electrical inspection lead wire portion and a connector portion, and a conductive material having one end connected to a predetermined position on the main surface of the conductive metal layer and having a substantially uniform height. Wiring board, comprising: a conductive bump group; and an insulating layer that exposes / embeds each conductive bump tip of the conductive bump group and separates / insulates each conductive bump from each other. Electrical inspection jig.
JP21975093A 1993-09-03 1993-09-03 Electric inspection jig for wiring board Pending JPH0772171A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21975093A JPH0772171A (en) 1993-09-03 1993-09-03 Electric inspection jig for wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21975093A JPH0772171A (en) 1993-09-03 1993-09-03 Electric inspection jig for wiring board

Publications (1)

Publication Number Publication Date
JPH0772171A true JPH0772171A (en) 1995-03-17

Family

ID=16740414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21975093A Pending JPH0772171A (en) 1993-09-03 1993-09-03 Electric inspection jig for wiring board

Country Status (1)

Country Link
JP (1) JPH0772171A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6028083A (en) * 1997-07-25 2000-02-22 Hoechst Marion Roussel, Inc. Esters of (+)-α-(2,3-dimethoxyphenyl)-1-[2-(4-fluorophenyl) ethyl]-4-piperidinemethanol
JP2005322677A (en) * 2004-05-06 2005-11-17 Dt Circuit Technology Co Ltd Wiring board with built-in capacitor and its manufacturing method
JP2006196770A (en) * 2005-01-14 2006-07-27 Dainippon Printing Co Ltd Printed-wiring board having built-in resistor and manufacturing method thereof
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