JPH0719828B2 - Pellet push-up method - Google Patents

Description

TECHNICAL FIELD The present invention relates to a pellet pushing method.

[Prior Art] Conventionally, for example, an element group such as a semiconductor is arranged on the surface,
The formed wafer is divided into each pellet as an element piece, and each divided pellet is extracted by a pellet extracting device described in, for example, JP-A-60-167337. Each of the pellets to be extracted is supplied to the pellet extracting device in a state of being attached to the upper surface of an adhesive sheet or the like. That is, each pellet is formed in a state in which the wafer attached to the adhesive sheet is broken into individual element pieces and divided. A gap is formed between each of the divided pellets by stretching the sheet, and the pellet extracting device sequentially extracts the divided pellets one by one.

Conventionally, when extracting a pellet attached to a sheet, it was necessary to surely peel the pellet from the sheet. For peeling the pellets, for example, a pellet pushing-up device described in JP-A-59-88844 or JP-A-60-102754 is used. This pellet pushing-up device pushes up a pellet stuck on the sheet from the back surface of the sheet by a needle that is moved forward and backward by a pushing-up drive unit, and peels the pellet from the sheet.
Here, the push-up drive unit is composed of a cam which is rotated by a motor or the like, and the cam allows the needle to move up and down up and down by the rotation operation thereof.

[Problems to be Solved by the Invention] By the way, recent pellets are provided with various sizes and shapes due to diversification of ICs and LSIs manufactured by the pellets. However, when peeling pellets of these various sizes and shapes from the pressure-sensitive adhesive sheet, if the needle push-up speed, push-up stroke, and push-up times are the same as in the case of conventional standard size and shape pellets, Is not peeled off well from the sheet, and when the pellets are peeled off from the sheet, the pellets are scattered. Especially recently, in the case of small pellets, by increasing the adhesive strength of the adhesive sheet, each pellet is prevented from scattering when stretched, so this type of pellets is difficult to peel from the sheet. It was supposed to be.

It is an object of the present invention to achieve a push-up operation under optimum conditions according to the size, shape, etc. of pellets attached to a sheet, and to reliably peel the pellets from the sheet.

[Means for Solving the Problems] The present invention provides a pellet pushing-up method for pushing up a pellet stuck on a sheet from the back surface of the sheet by a needle that is moved forward and backward by a cam that is rotationally driven by a motor, and peeling the pellet. Pushing stroke of the needle, pushing speed, while setting at least one operating condition of the number of times of pushing in the setting unit, when the pushing stroke of the needle is set in the setting unit,
When the amount of rotation of the cam by the motor is set according to the set thrust stroke, the set thrust stroke is executed, and when the needle push speed is set in the setting unit, The rotation speed of the cam by the motor is set according to the set push-up speed, the set push-up speed is executed, and when the number of push-ups of the needle is set in the setting unit, The number of times the cam reciprocates by the motor is set according to the set number of push-ups, and the set number of push-ups is executed.

[Operation] According to the present invention, if at least one operating condition of the needle thrust stroke, the thrust speed, and the thrust frequency is set in the setting unit, the cam rotation angle amount, the rotation speed, or the reciprocating frequency can be changed accordingly. Is adjusted and set to the operating conditions set in the setting section. Therefore, in the present invention, since it is possible to freely set and adjust at least one operating condition such as the needle push-up stroke, push-up speed, and push-up frequency, the optimum conditions depending on the size, shape, etc. of the pellets stuck to the sheet. The push-up operation can be achieved, and the pellets can be reliably peeled from the sheet.

[Embodiment] An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view of a pellet picking device including a pellet pushing device according to an embodiment of the present invention, and FIG. 2 is a sectional view of FIG.
FIG. 3 is a sectional view showing a state before the pellet is pushed up, and FIG. 4 is a sectional view showing a pellet pushed up state.

The pellet mounting device 10 includes a base 11, and the base 11 includes
An XY table 12 that can be driven in a plane XY direction is supported. A cassette ring support frame 13 is fixed to the upper surface of the XY table 12 by bolts 14. The cassette ring 15 is detachably attached to the support frame 13 of the cassette ring. An adhesive sheet 17 having a wafer 16 attached thereto is attached to the cassette ring 15 via a rubber band 18. The wafer 16 on the adhesive sheet 17 is formed into a circular shape, and the wafer 16 is divided into chip-like pellets 19 as element pieces, and the pellets 19 are spaced from each other in a stretched state of the sheet 17. Are formed. That is, each pellet 19 is placed on the XY table 12 on the adhesive sheet 17.
Are arranged in a plurality of rows and a plurality of columns along the XY direction, and a predetermined position on the adhesive sheet 17 is moved to the pellet extraction position 20.
I am trying.

Above the XY table 12, a collet 21 that reciprocates between a pellet extraction position 20 and a pellet transfer unit (not shown) is arranged. That is, the collet 21 is capable of reciprocating in the arrow X direction between the pellet extraction position 20 and the pellet transfer portion, and the collet 21 is supported by the moving arm 22 so as to be vertically movable. Collet 21 that can be moved up and down
Is at the lower end position when moved to the pellet extraction position 20.
Moved to 23. In this state, the collet 21 is suctioned, and the pellet 19 positioned at the pellet extraction position 20 can be extracted and held. The collet 21 holding the pellet 19 as described above is moved to the rising end position 24,
Further, the collet 21 is moved to the pellet transfer section by driving the moving arm 22. The collet 21 moved to the pellet transfer section is moved to the descending end position 23 in the transfer section, and then the suction operation is stopped. As a result, the pellets 19 held by the collet 21 are released to the pellet transfer unit,
The collet 21 that has released 19 is moved to the rising end position 24 again. As a result, the transfer of one pellet 19 is completed. Here, the collet 21 is moved up and down by an elevating means (not shown). The collet 21 that has completed the transfer of the pellets 19 is moved to the pellet extraction position 20 again, and holds the pellets 19 to be transferred next in the same operation order of the collet 21 as described above. At this time, at the pellet extraction position 20,
Pellets 19 to be extracted next by driving the XY table 12
Will be positioned. In this way, the pellets 19 aligned in the XY direction are driven by the XY table 12.
The pellets are sequentially positioned at the pellet extraction position 20, and the pellets are
The collet 21 is sequentially transferred to the pellet transfer section by the operation of the collet 21.

Below the support frame 13, a pellet pushing-up device 25 is provided while being supported by the base 11. The pellet pushing-up device 25 is positioned at the pellet extraction position 20 and is capable of peeling the pellet 19 adsorbed by the collet 21 from the adhesive sheet 17 in advance. Pellet thruster 25
Is provided with a fixed frame 26 arranged on the base 11, and a lifting shaft holding portion 27 is arranged on the fixed frame 26. An elevating shaft 29 is movably supported by the elevating shaft holding portion 27 with a bush 28 interposed therebetween. Lifting axis 29
The engaging pin 30 is formed to project, and the engaging recess 30 is engaged with the engaging pin 30. The engagement recess 31 is formed at one end of a swing rod 32 whose center is pivotally supported by the fixed frame 26. That is, both ends of the rocking rod 32 can rock in the direction of arrow A, and the rocking rod 32 can rock the lifting shaft 29 in the vertical direction [Z direction]. The swing of the swing rod 32 in the direction of arrow A is performed by the rotation of the cam 33. The cam 33 is supported by a driving shaft 35 of a stepping motor 34 as shown in FIG.
It can be rotated in any direction. A cam follower 37 is brought into contact with the cam surface 36 of the cam 33, and the cam follower 37 is supported by the other end of the swing rod 32. A tension spring 38 is interposed between the other end of the rocking rod 32 and the fixed frame 26, and the tension spring 38 allows the cam follower 37 to always contact the cam surface 36. As a result, by driving the motor 34 and rotating the cam 33, the lifting shaft 29 can be moved up and down in the arrow Z direction.

On the other hand, above the lifting shaft holding portion 27, a fixed frame is also provided.
The tubular body holding portion 39 is provided so as to be supported by the 26. The lower end of the tubular body 40 is supported by the tubular body holding portion 39 by tightening a fixing screw 41. The tubular body 40 supported by the holding portion 39 is extended below the cassette ring 15, and the needle support shaft 42 is inserted inside the extended tubular body 40. The needle support shaft 42 has a lower end connected to an upper part of the elevating shaft 29 by tightening a fixing screw 43.

The lower portion of the needle support shaft 42 inside the tubular body 40 is supported by the inner wall of the tubular body 40 with a bush 44 also serving as a seal member interposed therebetween. Further needle support shaft 42
The upper part of the cylindrical body 40 with the bush 45 interposed
It is supported on the inner wall of the. The inside of the tubular body 40 into which the needle support shaft 42 is inserted is the inner wall of the tubular body 40 and the needle support shaft.
A gap 46 is provided between the outer circumferences of 42. The void 46 extends from the upper end surface of the bush 44 that also serves as a seal member to the upper end position of the tubular body 40 via a communication portion (not shown) that penetrates the bush 45 in the axial direction, and the tubular body 40 A seal suction nozzle 47 is attached above the. A vacuum pipe 48 is connected to the tubular body 40, and the vacuum pipe 48 can suck air from a void 46 inside the tubular body 40. When the air in the void 46 is sucked,
A negative pressure is applied to the inside of the void 46, whereby the back surface of the adhesive sheet 17 facing the seal suction nozzle 47 is exposed to the nozzle 47.
Will be held by adsorption.

A needle 49 is attached above the needle support shaft 42. The needle 49 has a sharp tip, and the needle 49
Can be moved back and forth with respect to the back surface of the seat 17. The needle 49 is moved back and forth by moving the needle support shaft 42 up and down, and the support shaft 42 is moved up and down by moving the elevating shaft 29 up and down. That is, when the lifting shaft 29 is moved up and down by the rotation of the cam 33, the needle 49 is interlocked with this.
The leading end of the sheet is moved up and down with respect to the back surface of the sheet 17. As shown in FIGS. 3 and 4, the sheet suction nozzle 47 is provided with a needle insertion hole 50. Further, the needle 49 is positioned corresponding to the pellet extraction position 20 in the vertical direction. The tip end portion of the needle 49 is projected from the insertion hole 50 in the advanced state of the needle 49, whereby the pellet 19 positioned at the pellet extraction position 20 can be pushed up from the back surface of the sheet 17. At this time, the sheet 17 is suction-held by the sheet suction nozzle 47. As a result, the pellets 19 can be separated from the surface of the adhesive sheet 17 [see FIG. 4]. On the other hand, the tip of the needle 49
It is possible to immerse into the insertion hole 50 in the retracted state of 49. [Third
See figure].

The push-up speed of the needle 49, the push-up stroke, the number of push-ups, and the like can be adjusted by changing the drive speed and drive amount of the stepping motor 34. The change in the driving state of these stepping motors 34 is
This is performed based on a command from the thrust control unit 51. here,
Push-up stroke of the needle 49, push-up speed,
Operating conditions such as the number of push-ups are set by the size / shape input unit 52 (setting unit). That is, the push-up control unit 51, the push-up stroke of the needle 49, the push-up speed, which is set according to the data such as the size and the shape of the pellet 19 attached to the adhesive sheet 17 input to the size / shape input unit 52, The driving state of the motor 34 can be variably adjusted according to operating conditions such as the number of times of pushing up.

When the pellet 19 pushed up by the needle 49 is small, for example, the push-up control unit 51 sets the push-up speed to a high value so that the pellet 19 is reliably separated from the sheet 17, and the push-up control shown in FIG. The stroke L is set and adjusted to a small value.

The push-up speed can be adjusted by setting the rotation speed of the stepping motor 34 to be high.

On the other hand, the thrust stroke L can be adjusted by adjusting the rotation angle amount of the cam 33. The rotation angle of the cam 33 is input to the cam rotation angle detection unit 54 from a rotation angle detection sensor 53 arranged at a position facing the cam 33. That is, the cam rotation angle detection unit 54 feeds back the detected rotation angle to the push-up control unit 51, and the push-up control unit 51.
Makes it possible to perform the rotation region of the cam 33 within a predetermined angle region based on the fed back rotation angle. As a result, the thrust stroke L of the needle 49 can be adjusted to a predetermined value.

On the other hand, pellets that are pushed up by the needle 49
If the 19 are large, the pellets 19
It is necessary to set the push-up speed to be slow and to set the push-up stroke L to a large value so that the peeling can be reliably peeled off. In this case, the push-up control unit 51 sets the rotation speed of the motor 34 to be slow and adjusts the rotation angle region of the cam 33 to a large value.

Furthermore, depending on the large-sized pellet 19, it is necessary to push the needle 49 up two or three times. In this case, the push-up control unit 51 can drive and control the motor 34 so that the cam 33 is reciprocally moved in a predetermined angle region two or three times.

In the present embodiment, the push-up control unit 51 is a needle
Although the push-up speed, push-up stroke L, and push-up frequency of 49 are all controlled, the pellet 19 can be reliably peeled off by adjusting one of all these elements.

Next, the operation of the pellet mounting device 10 will be described.

When the pellet 19 to be extracted is positioned at the pellet extraction position 20 by the movement of the XY table 12, the collet 21 is lowered from the state shown in FIG. 3 to the descending end position 23, and the suction operation of the collet 21 is started in this state. To be done. Along with this, the suction operation of the vacuum pipe 48 is started, and the sheet suction nozzle 47
The back surface of the pressure-sensitive adhesive sheet 17 is adsorbed on the sheet [see FIG. 4]. As a result, the sheet 17 is held by the nozzle 47 in a fixed state.

When the back surface of the sheet 17 is held by the sheet suction nozzle 47,
Next, the needle 49 is pushed up from the retracted state shown in FIG. 3 to the forward movement state shown in FIG. As a result, the pellet 19 is peeled from the surface of the sheet 17, and then the needle 49
As a result, the pellet 19 is pushed up in the state shown in FIG. At this time, the collet 21 is moved up as the needle 49 is pushed up. Seat 17 in this state
The pellets 19 peeled from the surface of the are picked up and held by the collet 21. Then, the collet 21 holding the pellet 19 is raised to the rising end position 24,
19 will then be transferred to the pellet transfer station. At the same time, the needle 49 that has been pushed up is driven backward again, and the suction operation of the vacuum pipe 48 is stopped. As a result, the suction state of the sheet 17 by the sheet suction nozzle 47 is released. When the suction state of the sheet 17 is released, the pellet 19 to be next extracted is positioned at the pellet extraction position 20 through the movement of the XY table 12. In this way, the pellets 19 aligned in the XY directions are sequentially peeled off from the adhesive sheet 17 by the push-up operation of the needle 49, and the pellets 19 are sequentially extracted by the collet 21 and transferred.

Next, the operation of the above embodiment will be described.

According to the pellet pushing-up device 25 according to the above-described embodiment, if at least one operating condition of the pushing-up stroke of the needle 49, the pushing-up speed, and the number of times of pushing is set in the setting unit (dimension / shape input unit 52), according to it, The rotation angle amount, rotation speed, or the number of reciprocations of the cam 33 is set and adjusted, and the operating conditions set in the setting unit are set. Therefore, in this embodiment, the push-up operation under the optimum conditions can be achieved according to the size, shape, etc. of the pellets 19 attached to the sheet 17, and the pellets 19 can be reliably peeled from the sheet 17. Is possible.

[Effect of the Invention] As described above, according to the present invention, the push-up operation is achieved under optimum conditions according to the size, shape, etc. of the pellets attached to the sheet, and the pellets are reliably peeled from the sheet. Can be done

[Brief description of drawings]

FIG. 1 is a sectional view of a pellet picking device including a pellet pushing device according to an embodiment of the present invention, and FIG. 2 is a sectional view of FIG.
FIG. 3 is a sectional view showing a state before the pellet is pushed up, and FIG. 4 is a sectional view showing a pellet pushed up state. 17 …… Adhesive sheet, 19 …… Pellet, 25 …… Pellet pushing up device, 33 …… Cam [pushing drive unit], 34 …… Stepping motor, 49 …… Needle, 51 …… Pushing control unit, 52 …… Dimensions -Shape input section (setting section).

Claims (1)

[Claims] 1. A pellet pushing-up method in which a pellet stuck on a sheet is pushed up from the back surface of the sheet and separated by a needle that is moved forward and backward by a cam that is rotationally driven by a motor. , Setting at least one operating condition of the number of push-ups in the setting unit, and when the push-up stroke of the needle is set in the setting unit, rotation of the cam by the motor according to the set push-up stroke. When the push-up stroke is set by setting the angle amount and the push-up speed of the needle is set in the setting unit, rotation of the cam by the motor is performed according to the set push-up speed. Set the speed and execute the set push-up speed. When the number of push-ups of the needle is set in the setting unit, the number of reciprocating movements of the cam by the motor is set according to the set number of push-ups, and the set number of push-ups is executed. A method for pushing up a pellet.