JPH069513Y2 - Semiconductor pellet bonding machine - Google Patents

Description

TECHNICAL FIELD The present invention relates to a semiconductor pellet bonding apparatus.

[Prior Art] Conventionally, for example, an element group such as a semiconductor is arranged on the surface,
The formed wafer is divided into semiconductor pellets (hereinafter simply referred to as pellets) as element pieces, and each divided pellet is extracted by a pellet extractor and mounted on a substrate. Has become.

FIG. 2 is a sectional view showing a conventional pellet bonding apparatus. The pellet bonding apparatus 10 includes a gantry 11, and the gantry 11 has an XY movable in XY directions on a plane.
A table 12 is supported. On the upper surface of the XY table 12, the support frame 14 of the cassette ring is attached to the bolt 1
5, the cassette ring 17 is detachably attached to the support frame 14 of the cassette ring. As shown in FIG. 3, an adhesive sheet 19 having a wafer 18 attached thereto is attached to the cassette ring 17 via a rubber band 20. The wafer 18 on the adhesive sheet 19 has a circular shape.
Are divided into each pellet 21 as an element piece.
That is, the pellets 21 are arranged on the adhesive sheet 19 in a plurality of rows and a plurality of columns along the XY direction of the XY table 12.

Above the XY table 12, divided pellets 21 are provided.
A collet 22 is provided for adsorbing and picking up. The collet 22 is movable up and down in the direction of arrow A with respect to the pellets 21 arranged on the adhesive sheet 19, and the vertical movement is performed by the vertical drive unit 23 of the collet. The extraction of the pellets 21 by the collet 22 is performed by sequentially moving the XY table 12 so that the adsorbed pellets 21 are located directly below the collet 22. When adsorbing the pellet 21 located right below, the collet 22 is operated by the vertical drive unit 23 of the collet 22.
The pellet 21 is sucked at the descending end of the collet 22.

On the other hand, on the back surface 24 side of the adhesive sheet 19, the XY table 1
A needle 25 is provided above the position 2. The needle 25 is located vertically corresponding to the collet 22, and is vertically movable in the arrow A direction with respect to the back surface 24 of the adhesive sheet 19. The vertical movement of the needle 25 is performed by the vertical drive unit 26 of the needle 25. The needle 25 is moved upward as the collet 22 is moved downward, and the back surface 24 of the adhesive sheet 19 is moved.
Therefore, the pellet 21 adsorbed by the collet 22 is pushed up. That is, when the pellet 21 is pushed up by the needle 25, the pellet 21 adhered to the adhesive sheet 19 is peeled from the sheet surface of the adhesive sheet 19, and the pellet 21 is moved downward by the collet 22 that moves downward.
This is done in order to adsorb. Therefore, the upward movement of the needle 25 for pushing up the pellets 21 and the downward movement of the collet 22 for adsorbing the pellets 21 need to be performed synchronously.
For this reason, a control circuit 27 is provided which can transmit a drive control signal to each of the collet up / down drive unit 23 and the needle up / down drive unit 26, and the control circuit 27 causes the collet 22 to descend and suction and the needle 25. The push-up operation is performed synchronously. The pellet 21 sucked by the collet 22 is moved to the next step by the rotation of the collet arm 28, and can be mounted on a substrate (not shown). In this way, the pellets 21 arranged on the adhesive sheet 19 are sequentially extracted by the collet 22 by the movement of the XY table 12, and can be sequentially mounted on the substrate.

However, in the above-mentioned conventional pellet extracting device 10, since the vertical drive unit 23 of the collet 22 and the vertical drive unit 26 of the needle are separately provided, the vertical drive units 23 and 26 lower and suck the collet 22. A complicated control circuit 27 is indispensable for synchronously performing each of the operation and the pushing-up operation of the needle 25. Further, since the collet arm 28 is designed to move the pellet 21 by the rotational movement of a constant stroke, it is not possible to cope with the multi-bond such as changing the mount position or mounting a plurality of pellets on the same substrate.

[Object of the Invention] An object of the present invention is to easily and surely synchronize the pellet picking operation by the collet and the pellet pushing operation by the needle without using a complicated control circuit.

Another object of the present invention is to provide a semiconductor pellet bonding apparatus that can easily handle multi-bonding.

[Construction of the Invention] The present invention relates to first and second moving tables, a seat supporting frame supported on the first moving table, a frame supported on the second moving table, and a frame. A single cam shaft rotatably supported and driven to rotate by an electric motor, a first cam for pushing up the needle and a second cam for pellet extraction fixed to the cam shaft, and a second moving table. A first lever that is swingably supported by a support member that is integrally moved with the first cam and that has one end that engages with the first cam; and one end that is swingably supported at a fixed position with respect to the push-up position and that has one end that is a vertical movement end of the needle. And a second lever provided on one of the other end of the second lever and the other end of the first lever, and abutted against the other end of the other lever at least in the moving range of the second moving table. State can be retained It is characterized by having a contact plate having a contact area and a transmission device interposed between the second cam and the collet for transmitting the driving action of the second cam to the collet.

[Operation] According to the present invention, the needle pushing-up operation and the pellet extraction operation by the collet can be easily and reliably synchronized.

Also, it becomes possible to easily deal with multi-bond.

[Embodiment] An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view showing a pellet bonding apparatus according to an embodiment of the present invention.

The pellet bonding apparatus 40 includes a gantry 41, and the gantry 41 supports a first XY table 42 that is movable in the plane XY directions. A support frame 43 of a cassette ring is fixed to the upper surface of the first XY table 42 with bolts 44. The cassette ring 45 is detachably attached to the support frame 43 of the cassette ring. An adhesive sheet 47 to which a wafer 46 is attached is attached to the cassette ring 45 via a rubber band 48. The wafer 46 on the adhesive sheet 47 has a circular shape, and the wafer 46 is divided into pellets 49 as element pieces. That is, each pellet 49
Are arranged in a plurality of rows and a plurality of columns on the adhesive sheet 47 along the XY direction of the first XY table 42.

Above the first XY table 42, a collet 50 capable of extracting the divided pellets 49 is provided.
The collet 50 is tubular and is supported by a support portion 52 at the tip of a collet arm 51 so as to be vertically movable. A vacuum pipe 53 is connected to the upper end of the collet 50 to allow air to be sucked in the direction of arrow B. As a result, the pellet 49 can be adsorbed to the lower end of the collet 50 and the pellet 49 can be extracted.

The collet arm 51 is held by a frame 54, and the frame 54 is supported on the upper surface of a second XY table 56 that is movable in a plane XY direction with respect to a frame 55. An electric motor 57 is arranged on the frame 54.
On the cam shaft 58 connected to the output shaft of the electric motor 57,
Three cams, a first cam 59, a second cam 60, and a third cam 61, are axially supported, and each of the cams corresponds to the electric motor 5
It can be rotated in the arrow C direction by the drive of 7. The collet arm 51 includes a holding portion 62 on the upper portion of the frame 54.
Slidably held by the collet arm 51, thereby supporting the collet 50 supported by the tip of the collet arm 51.
It is possible to move in the direction of arrow D. That is, the collet 50 is moved and moved in the direction of the arrow D to be conveyed and positioned between the suction point E of the pellet 49 on the adhesive sheet 47 and the first XY table 42 and the second XY table 56. It is possible to move back and forth between and.

The reciprocating movement of the collet 50 is performed by the rotation of the first cam 59. That is, the first upper surface of the second XY table 56
One end member of the first rod 65 is pivotally supported by the rod support bracket 64, and the first rod 65 further includes
A cam follower 66 is provided, and the cam surface 6 of the first cam 59 is provided.
It is in contact with 7. A tension spring 69 is interposed between the first rod 65 and the spring support 68 on the upper surface of the second XY table 56, and the cam follower 66 is connected to the cam surface 6.
7 is always in contact with. This makes the first
Through the rotation of the cam 59, the tip end portion of the first rod 65 can be swung in the arrow F direction. First rod 65
An elongated hole 70 is formed at the tip of the
An engagement pin 71 formed so as to project from the collet arm 51 is engaged. As a result, the collet arm 51 can be slid in the arrow D direction with respect to the holding portion 62 through the swing of the first rod 65 in the arrow F direction.
Therefore, the collet 50 can be reciprocated between the pellet adhesion point E (pellet extraction position) on the adhesive sheet 47 and the pellet mounting position on the substrate 63.

The collet 50 that is reciprocally moved in the direction D is reciprocally movable in the vertical direction [H direction] at the pellet adsorption point E on the adhesive sheet 47 and the pellet mount position G on the substrate 63, and the reciprocation is performed. , The third cam 61 rotates. That is, the frame 54 is provided with a slide body 73 that is supported so as to be vertically movable with respect to the frame 54, and the slide body 73 is provided with a cam follower 74. The cam follower 74 is in contact with the cam surface 75 of the third cam 61. Slide body 73 and frame 54
A tension spring 77 is interposed between the spring support body 76 and the spring support body 76, and the cam follower 74 is always in contact with the cam surface 75. As a result, the third cam 61
It is possible to reciprocate the slide body 73 in the up-down direction [H direction] through the rotation. On the other hand, a second rod support bracket 78 is provided on the upper surface of the collet arm 51, and a second rod 79 is pivotally supported on the support bracket 78 in a state where both ends thereof can swing. An engaging portion 80 is formed at one end of the second rod 79, and the engaging portion 8
An engaging pin 81 formed to project from the collet 50 is engaged with 0. The roller 8 is attached to the other end of the second rod 79.
2 is provided, and the roller 82 is in contact with the lower surface 84 of the engaging body 83 provided on the upper portion of the slide body 73 that is moved up and down. A tension spring 85 is interposed between the one end of the second rod 79 and the collet arm 51 so that the roller 82 and the lower surface 84 of the engaging body 83 are always in contact with each other. As a result, the second rod 79 is indicated by the arrow J as the slide body 73 reciprocates in the vertical direction [H direction].
The collet 50 can be swung in the direction, and the collet 50 can be moved up and down at each of the pellet suction point E on the adhesive sheet 47 and the pellet mount position G on the substrate 63. That is, as shown by the solid line in FIG. 1, the collet 50 located at the adsorption point E is moved down to adsorb and extract the pellet 49, and again rises when the pellet 49 is adsorbed to the lower end of the collet 50. Be moved. The collet 50 that has been moved up is shown in FIG.
The pellet mounting position G of the substrate 63 as indicated by the dotted line
It moves horizontally upwards. Collet 50 moved horizontally
Is moved down with respect to the mounting position G of the substrate 63,
The extracted pellet 49 is adsorbed and released at this position. As a result, the pellets 49
It becomes possible to mount. The collet 50 that has adsorbed and released the pellet 49 is moved up again, and is moved to the original position, that is, above the pellet adsorption point E, by the horizontal movement of the collet arm 51. When the collet arm 51 is moved in the horizontal direction, the roller 82 slides on the lower surface 84 of the engagement body 83.

On the back surface 86 side of the adhesive sheet 47, above the first XY table 42, there is a pellet pushing device, that is, a needle 87.
Are attached to the needle support 88. The needle support 88 is supported so as to be vertically movable with respect to a tubular holding portion 90 that is supported by a fixed frame 89. Further, the fixed frame 89 is fixed to the frame 41.

The needle support 88 formed by attaching the needle 87 has a tubular holding portion 90 as the collet 50 moves downward.
The needles 87 are moved upward with respect to the back surface 86 of the adhesive sheet 47 and the pellets 49 adsorbed by the downwardly moved collet 50 are pushed up by the needle 87.

The needle support 88 is moved up and down by the rotation of the second cam 60. That is, the second XY table 56 is provided with a third rod support bracket 110, and an L-shaped third rod 111 (first lever) swings in the arrow K direction at both ends of the support bracket 110. It is pivotally supported so that it can move. A cam follower 112 is provided at one end of the third rod 111, and the cam follower 112 is in contact with the cam surface 113 of the second cam 60. A contact plate 114 is provided at the other end of the third rod 111. A tension spring 116 is interposed between one end of the third rod 111 and the spring support 115 on the upper surface of the second XY table 56, and the cam follower 112 and the cam surface 113 of the second cam 60 are always in contact with each other. On the other hand, the fixed frame 89 is provided with a fourth rod support bracket 117, and the support bracket 117 has a fourth rod support bracket 117.
The rod 118 (second lever) is pivotally supported in a state where both ends thereof can swing in the arrow L direction. Fourth rod 11
A roller 119 is provided at one end of the roller 8.
19 is in contact with the lower surface 120 of the contact plate 114 of the third rod 111. An engagement portion 121 is formed at the other end of the third rod 111, and an engagement pin 122 formed to project from the needle support 88 is engaged with the engagement portion 121. A tension spring 123 is provided between the other end of the fourth rod 118 and the fixed frame 89 so that the roller 119 is always in contact with the lower surface 120 of the contact plate 114 of the third rod 111. . Accordingly, the rotation of the second cam 60 causes the third rod 111 to rotate.
The fourth rod 118 is swung in the direction of arrow L in association with the swing in the direction of arrow K of FIG.
Direction]. As a result, the pellets 49 adsorbed by the needles 87 can be pushed up, and the pellets 49 adhered to the adhesive sheet 47 are peeled off.

Thus, the pellet 49 on the adhesive sheet 47 is rotated by the collet 50 by the rotation of the first cam 59, the second cam 60, and the third cam 61, which are pivotally supported by the cam shaft 58 of the electric motor 57, in the arrow C direction. It is possible to extract and transport the substrate 63 to a predetermined mounting position G on the substrate 63 for mounting. Further, by moving the first XY table 42 in the XY directions and sequentially arranging the adsorbed pellets 49 at the adsorption point E of the collet 50, these pellets 49 can be mounted on the substrate 63 that is sequentially conveyed.

Further, if the second XY table 56 is moved in the XY directions with respect to the pedestal 55 and the plurality of mount positions G and the suction release points of the pellets 49 by the collet 50 are sequentially positioned in the vertical direction, a plurality of mount positions on the substrate 63 will be obtained. It becomes possible to mount the pellet 49 on each G.

At this time, the third rod 111 moves the second XY table 5
Although it moves with the movement of 6, the third rod 11
The first contact plate 114 is provided with a contact area capable of maintaining the contact state of the fourth rod 118 with the roller 119 at all times, which allows the third rod to be maintained even when the second XY table 56 is moved. The connection state between 111 and the fourth rod 118 will not be disconnected.

Next, the operation of the above embodiment will be described.

According to the pellet bonding apparatus 40, the operation of extracting each pellet 49 attached to the adhesive sheet 47, that is,
The collet 5 is lowered and sucked with respect to the adsorbed pellet 49, and the needle 87 is pushed up by the needle 87, that is, the adsorbed pellet 49 is pushed up from the back surface 86 of the adhesive sheet 47 and lowered.
The operation for adsorbing the pellets 49 to 0 is performed by rotating the second cam 60 for pushing up the needle and the third cam 61 for extracting the collet. Each of the second cam 60 and the third cam 61 is axially supported by the cam shaft 58 of the electric motor 57, and the extraction operation of the pellet 49 and the push-up operation of the pellet 49 are performed by the same drive source. As a result, unlike the conventional pellet extraction device 10, the operation of extracting the pellet 49 with the collet 50 and the pellet 49 with the needle 87 can be easily performed without using a control circuit for synchronizing each operation.
It is possible to synchronize the push-up operations of the. Further, this allows good separation of pellets from the pressure-sensitive adhesive sheet, and can also prevent pellet chipping and the like.

In addition, the opening point of the pellet 49 by the collet 50 is set to the substrate 6
3 to the plurality of pellet mounting positions on the substrate 63, and to the plurality of pellet mounting positions on the substrate 63.
Even when the second XY table 56 is moved to mount the second XY table 56, the contact state of the third plate 111 and the fourth rod 118 is not removed due to the existence of the contact plate 114, and the vertical operation position of the needle 87 is changed to the fourth rod. It is possible to always stably limit by 118.

[Advantage of Invention] As described above, according to the present invention, it is possible to easily and surely synchronize the pellet picking operation by the collet and the pellet pushing operation by the needle without using a complicated control circuit. Pellets can be separated well, chipping of pellets can be prevented, and multi-bonding can be easily dealt with.

[Brief description of drawings]

FIG. 1 is a sectional view showing a pellet bonding apparatus according to an embodiment of the present invention, FIG. 2 is a sectional view showing a conventional pellet bonding apparatus, and FIG. 3 is a state in which an adhesive sheet is attached to a cassette ring. It is a perspective view. 10, 40 ... Pellet extractor, 19, 47 ... Adhesive sheet, 21, 49 ... Pellet, 22, 50 ... Collet, 24, 86 ... Back surface, 25, 87 ... Needle,
57 ... electric motor, 58 ... cam shaft, 59 ... first cam,
60 ... Second cam, 61 ... Third cam, 54 ... Frame, 56 ... Second XY table (moving table), 11
0 ... Support bracket (support member), 111 ... Third rod (first lever), 114 ... Contact plate, 118
...... 4th rod (second lever), 120 ...... bottom surface (contact area), 121 ...... engagement part (vertical movement end).

Claims (1)

[Scope of utility model registration request] 1. A needle, which is disposed at a needle push-up position and pushes up a semiconductor pellet on a sheet supported by a sheet support frame from its back surface, and a collet which is vertically movable to extract the semiconductor pellet pushed up by this needle. A semiconductor pellet bonding apparatus comprising: a first moving table, a second moving table, the sheet supporting frame supported on the first moving table, and a frame supported on the second moving table. A single cam shaft supported by the frame and driven to rotate by an electric motor; a first cam for pushing up the needle and a second cam for picking up the pellet, which are fixed to the cam shaft; and the second cam. A first lever that is swingably supported by a support member that moves integrally with the moving table and has one end that engages with the first cam. A second lever that is swingably supported at a fixed position with respect to the push-up position and has one end serving as a vertically moving end of the needle; the other end of the second lever and the other end of the first lever. A contact plate provided on one side of the second movable table, the contact plate having a contact area capable of maintaining a contact state with the other end of the other lever in at least the moving range of the second moving table; and the second cam. And a transmission device that is interposed between the collet and transmits the driving action of the second cam to the collet.