JPH081925B2 - Pellet pushing device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pellet pushing device.

[0002]

2. Description of the Related Art Conventionally, for example, a wafer formed by arranging and forming an element group such as a semiconductor on the surface thereof is divided into pellets as element pieces, and each divided pellet is disclosed in It is extracted by the pellet extracting device described in JP-A-60-167337. Each of the pellets to be extracted is supplied to the pellet extracting device in a state of being attached to the upper surface of an adhesive sheet or the like. That is, each pellet is formed in a state in which the wafer attached to the adhesive sheet is broken into individual element pieces and divided. A gap is formed between each of the divided pellets by stretching the sheet, and the pellet extracting device sequentially extracts each of the divided pellets one by one.

Conventionally, when extracting a pellet attached to a sheet, it was necessary to surely remove the pellet from the sheet. For exfoliating pellets, for example, Japanese Patent Laid-Open No.
The pellet pushing device described in JP-A-9-88844 and JP-A-60-102754 is used. This pellet pushing-up device pushes up a pellet stuck on the sheet from the back surface of the sheet by a needle that is moved forward and backward by a pushing-up drive unit, and peels the pellet from the sheet. Here, the push-up drive unit is composed of a cam which is rotated by a motor or the like, and the cam allows the needle to move up and down up and down by the rotation operation thereof.

[0004]

By the way, recent pellets are provided with various sizes and shapes due to diversification of ICs and LSIs manufactured by the pellets. However, when peeling pellets of these various sizes and shapes from the pressure-sensitive adhesive sheet, if the needle push-up speed, push-up stroke, and push-up times are the same as in the case of conventional standard size and shape pellets, Is not peeled off well from the sheet, and when the pellets are peeled off from the sheet, the pellets are scattered. Especially in the case of small pellets, recently, by increasing the adhesive strength of the adhesive sheet, each pellet is prevented from scattering when it is stretched, so this type of pellet is difficult to peel from the sheet. It was supposed to be.

The present invention relates to a pellet attached to a sheet.
Push-up operation under optimum conditions according to the size and shape of the
To ensure the peeling of pellets from the sheet
It is intended to provide a pellet pushing device .

[0006]

DISCLOSURE OF THE INVENTION The present invention relates to a pellet pushing-up apparatus that pushes up a pellet stuck on a sheet from the back surface of the sheet by a needle that is moved back and forth by a pushing-up drive unit and peels the pellet. A setting unit having an input unit for arbitrarily setting at least one operating condition of the needle pushing stroke, the pushing speed, and the number of pushing times, and the operation set in the setting unit
And a push-up control unit that drives and controls the push-up drive unit based on conditions .

[0007]

According to the present invention, the needle push-up straw is
At least one of the following:
If you set the operating conditions in the input section of the setting section,
The push-up control unit drives and controls the push-up drive unit, and the setting unit
The operating condition set to is realized. Therefore, in the present invention
In addition, the needle push-up stroke and push-up speed
At least one operating condition such as
Since the settings can be adjusted, the pellets attached to the sheet
Depending on the size and shape of the
Achievable and ensures peeling of pellets from the sheet
It becomes possible.

[0008]

FIG. 1 is a sectional view of a pellet picking device including a pellet pushing device according to an embodiment of the present invention, FIG. 2 is a view taken along the line II--II of FIG. 1, and FIG. 4 is a cross-sectional view showing the state of FIG. 4, and FIG. 4 is a cross-sectional view showing the state of the pellet being pushed up.

The pellet mounting apparatus 10 is provided with a base 11, on which an XY table 12 that can be driven in the plane XY direction is supported. On the upper surface of the XY table 12, the support frame 13 of the cassette ring is attached to the bolt 1
It is fixed by 4. A cassette ring 15 is detachably attached to the support frame 13 of the cassette ring. An adhesive sheet 17 having a wafer 16 attached thereto is attached to the cassette ring 15 via a rubber band 18. The wafer 16 on the adhesive sheet 17 has a circular shape, and the wafer 16 is divided into chip-like pellets 19 as element pieces, and the pellets 19 are spaced from each other in a state where the sheet 17 is stretched. Has been formed.
That is, the pellets 19 are arranged on the adhesive sheet 17 in a plurality of rows and a plurality of columns along the XY direction of the XY table 12, and a predetermined position on the adhesive sheet 17 is a pellet extraction position 20.

A collet 21 is disposed above the XY table 12 to reciprocate between a pellet extracting position 20 and a pellet transfer unit (not shown). That is, the collet 21 is capable of reciprocating in the arrow X direction between the pellet extraction position 20 and the pellet transfer portion, and the collet 21 is supported by the moving arm 22 so as to be vertically movable. The collet 21, which is vertically movable, is moved to the descending end position 23 while being moved to the pellet extracting position 20. In this state, the collet 21 is suctioned, and the pellet extracting position 2
The pellet 19 positioned at 0 can be extracted and held. As described above, the collet 21 holding the pellets 19 is moved to the rising end position 24, and the collet 21 is moved to the pellet transfer section by driving the moving arm 22. Collet 21 moved to pellet transfer unit
Is moved to the lower end position 23 by the transfer section, and then the suction operation is stopped. As a result, the pellet 19 held by the collet 21 is released to the pellet transfer section, and the pellet 1
The collet 21 having released 9 is moved to the rising end position 24 again. As a result, the transfer of one pellet 19 is completed. Here, the collet 21 is moved up and down by an elevating means (not shown). The collet 21 having completed the transfer of the pellets 19 is moved to the pellet extracting position 20 again, and holds the pellets 19 to be transferred next in the same operation order of the collet 21 as described above. At this time, the pellet 19 to be extracted next is positioned at the pellet extraction position 20 by driving the XY table 12. In this way, the pellets 19 aligned in the XY directions are sequentially positioned at the pellet extraction position 20 by driving the XY table 12, and the pellets 19 are sequentially transferred to the pellet transfer section by the operation of the collet 21. .

Below the support frame 13, a pellet pushing-up device 25 is provided while being supported by the base 11. The pellet push-up device 25 has a pellet extraction position 2
The pellet 19 positioned at 0 and adsorbed by the collet 21 can be peeled from the adhesive sheet 17 in advance. The pellet pushing-up device 25 includes a fixed frame 26 arranged on the base 11, and a lifting shaft holding portion 27 is arranged on the fixed frame 26. The lifting shaft holding portion 27 is mounted on the lifting shaft 2 with a bush 28 interposed therebetween.
9 is supported so as to be vertically movable. An engaging pin 30 is formed so as to project from the elevating shaft 29, and an engaging recess 31 is engaged with the engaging pin 30. The engagement recess 31 is formed at one end of a swing rod 32 whose center is pivotally supported by the fixed frame 26. That is, the swing rod 32 has both ends indicated by the arrow A.
The vertical axis [Z direction] can be moved up and down by swinging the swing rod 32. The swing of the swing rod 32 in the direction of arrow A is
This is performed by rotating the cam 33. The cam 33 is supported by a driving shaft 35 of a stepping motor 34 as shown in FIG. 2 and is rotatable in the direction of arrow B. This cam 3
A cam follower 37 is brought into contact with the cam surface 36 of No. 3, and the cam follower 37 is supported by the other end of the swing rod 32. A tension spring 38 is interposed between the other end of the rocking rod 32 and the fixed frame 26, and the tension spring 38 allows the cam follower 37 to always contact the cam surface 36. As a result, by driving the motor 34 and rotating the cam 33, the lifting shaft 29 can be moved up and down in the arrow Z direction.

On the other hand, above the lifting shaft holding portion 27, the cylindrical body holding portion 3 is also supported by the fixed frame 26.
9 are provided. The lower end of the tubular body 40 is supported by the tubular body holding portion 39 by tightening a fixing screw 41.
The tubular body 40 supported by the holding portion 39 is extended below the cassette ring 15, and the needle support shaft 42 is inserted inside the extended tubular body 40. The needle support shaft 42 has a lower end connected to an upper portion of the elevating shaft 29 by tightening a fixing screw 43.

The lower portion of the needle support shaft 42 inside the tubular body 40 is supported by the inner wall of the tubular body 40 with a bush 44 also serving as a seal member interposed therebetween. Further, the upper portion of the needle support shaft 42 is supported by the inner wall of the tubular body 40 with a bush 45 interposed therebetween. The inside of the tubular body 40 into which the needle support shaft 42 is inserted has a space 4 between the inner wall of the tubular body 40 and the outer periphery of the needle support shaft 42.
6 is provided. The void 46 extends from the upper end surface of the bush 44, which also serves as a seal member, to the upper end position of the tubular body 40 via a communication portion (not shown) penetrating in the axial direction of the bush 45. Sheet suction nozzle 4 above
7 is attached. A vacuum pipe 48 is connected to the tubular body 40, and the vacuum pipe 48 can suck air from a void 46 inside the tubular body 40. When the air in the space 46 is sucked, the inside of the space 46 becomes a negative pressure, whereby the back surface of the adhesive sheet 17 facing the sheet suction nozzle 47 is sucked and held by the nozzle 47.

A needle 49 is attached above the needle support shaft 42. The needle 49 has a sharp tip, and the needle 49 can be moved back and forth with respect to the back surface of the seat 17. The needle 49 is moved back and forth by moving the needle support shaft 42 up and down.
The vertical movement of is performed by moving the lifting shaft 29 up and down. That is, when the lifting shaft 29 is moved up and down by the rotation of the cam 33, the tip of the needle 49 is moved up and down relative to the back surface of the seat 17 in conjunction with this. As shown in FIGS. 3 and 4, the sheet suction nozzle 47 is provided with a needle insertion hole 50. Also, the needle 49 is
It is positioned so as to correspond to the pellet extraction position 20 in the vertical direction. The tip portion of the needle 49 is projected from the insertion hole 50 in the advanced state of the needle 49, whereby the pellet 19 positioned at the pellet extraction position 20 can be pushed up from the back surface of the sheet 17. At this time, the sheet 17 is
The sheet suction nozzle 47 sucks and holds the sheet. As a result, the pellets 19 can be peeled from the surface of the adhesive sheet 17 (see FIG. 4). On the other hand, the tip of the needle 49 can be retracted into the insertion hole 50 when the needle 49 is retracted (see FIG. 3).

The push-up speed, the push-up stroke, and the number of push-ups of the needle 49 can be adjusted by changing the driving speed, the driving amount, etc. of the stepping motor 34. The change in the driving state of the stepping motor 34 is performed based on a command from the push-up control unit 51. Here, operating conditions such as the push-up stroke, push-up speed, and push-up frequency of the needle 49 are set by the size / shape input unit 52 (setting unit). That is, the push-up control unit 51, the push-up stroke, the push-up speed of the needle 49, which is set according to the data such as the size and the shape of the pellet 19 attached to the adhesive sheet 17 input to the size / shape input unit 52, The driving state of the motor 34 can be variably adjusted based on operating conditions such as the number of times of pushing up.

The push-up control unit 51 is, for example, the needle 4
When the pellet 19 pushed up by 9 is made small, the pushing speed is set high so that the pellet 19 is reliably separated from the sheet 17, and the pushing stroke L shown in FIG. 4 is adjusted to a small value. I am trying.

The push-up speed can be adjusted by setting the rotation speed of the stepping motor 34 to be high.

On the other hand, the thrust stroke L can be adjusted by adjusting the rotation angle amount of the cam 33. The rotation angle of the cam 33 is input to the cam rotation angle detection unit 54 from a rotation angle detection sensor 53 arranged at a position facing the cam 33. That is, the cam rotation angle detection unit 54
The detected rotation angle is fed back to the push-up control unit 51, and the push-up control unit 51 enables the rotation range of the cam 33 to be within a predetermined angle range based on the feedback rotation angle. As a result, the thrust stroke L of the needle 49 can be adjusted to a predetermined value.

On the other hand, when the pellet 19 pushed up by the needle 49 is large, the pushing speed is set slow and the pushing stroke L is set large so that the pellet 19 is reliably separated from the sheet 17. Need to be adjusted. In this case, the push-up control unit 51 sets the rotation speed of the motor 34 to be slow and adjusts the rotation angle region of the cam 33 to a large value.

Furthermore, depending on the large size of the pellet 19, it is necessary to push the needle 49 twice or three times. In this case, the push-up control unit 51 can drive and control the motor 34 so that the cam 33 is reciprocated in a predetermined angle region two or three times.

In this embodiment, the push-up control section 51
Controls the thrusting speed of the needle 49, the thrusting stroke L, and the number of times of thrusting, but the pellet 19 can be surely peeled off by adjusting one of all these factors. .

Next, the operation of the pellet mounting device 10 will be described. When the pellet 19 to be extracted is positioned at the pellet extraction position 20 by the movement of the XY table 12, the collet 21 moves from the state shown in FIG.
And the suction operation of the collet 21 is started in this state. At the same time, the suction operation of the vacuum pipe 48 is started, and the back surface of the adhesive sheet 17 is sucked by the sheet suction nozzle 47 (see FIG. 4). As a result, the sheet 17 is held by the nozzle 47 in a fixed state.

The back surface of the sheet 17 is the sheet suction nozzle 47.
Next, the needle 49 is driven to push up from the retracted state shown in FIG. 3 to the advanced state shown in FIG. As a result, the pellets 19 are separated from the surface of the sheet 17, and then the needles 49 push up the pellets 19 in the state shown in FIG. At this time, the collet 21 is moved up as the needle 49 is pushed up. In this state, the pellets 19 separated from the surface of the sheet 17 are extracted and held by the collet 21. Next, the collet 21 holding the pellet 19 is
The pellets 19 are lifted to the lift end position 24, and then the pellets 19 are transferred to the pellet transfer unit. At the same time, the needle 49 that has been pushed up is driven backward again, and the suction operation of the vacuum pipe 48 is stopped. As a result, the suction state of the sheet 17 by the sheet suction nozzle 47 is released. When the suction state of the sheet 17 is released, the XY table 12 is moved to move the pellet 19 to the pellet extraction position 20.
Will be positioned. In this way, the pellets 19 aligned in the XY directions are sequentially peeled from the adhesive sheet 17 by the push-up operation of the needle 49, and the pellets 19 are sequentially extracted by the collet 21 and transferred.

Next, the operation of the above embodiment will be described. the above
According to the pellet pushing-up device 25 according to the embodiment, the knee
Thrust stroke of dollar 49, thrust speed, thrust up
At least one operating condition of the number of strokes
(Setting section) If set to 52, push up accordingly
The control unit 51 is a push-up drive unit (cam 33, motor 34)
Drive control and operation set in the dimension / shape input unit 52
The condition is realized. Therefore, in the above embodiment,
Thrust stroke, speed, and thrust
Freely set and adjust at least one operating condition of the number of times
The pellets 19 attached to the sheet 17 are possible.
Depending on the size and shape of the
Achievable and ensure peeling of pellets 19 from sheet 17
It becomes possible to do it.

[0025]

As described above, according to the present invention ,
Optimal according to the size and shape of the attached pellets
Achieves push-up operation under conditions and pellets from sheets
Can be reliably peeled off .

[Brief description of drawings]

FIG. 1 is a cross-sectional view of a pellet extracting device equipped with a pellet pushing-up device according to an embodiment of the present invention.

FIG. 2 is a view taken along the line II-II in FIG.

FIG. 3 is a cross-sectional view showing a state before the pellet is pushed up.

FIG. 4 is a cross-sectional view showing a state where a pellet is pushed up.

[Explanation of symbols]

 17 Adhesive Sheet 19 Pellets 25 Pellet Pushing Up Device 33 Cam (Pushing Up Drive Unit) 34 Stepping Motor (Pushing Up Drive Unit) 49 Needle 51 Push Up Control Unit 52 Dimension / Shape Input Unit (Setting Unit)

Claims (1)

[Claims] 1. A pellet pushing-up device that pushes up pellets adhered on a sheet from the back surface of the sheet by a needle that is moved back and forth by a pushing-up drive unit and peels the pellets, and a pushing-up stroke and a pushing-up speed of the needle according to the pellets. A setting unit having an input unit for arbitrarily setting at least one operating condition of the number of push-ups,
And a push-up control unit that drives and controls the push-up drive unit based on the operating condition set in the setting unit.