JP3397837B2 - Suction nozzle pressure supply device - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mounting machine having a head unit provided with a nozzle member for sucking chip components.
In particular, the present invention relates to a suction nozzle pressure supply device that supplies a negative pressure or a positive pressure to a nozzle member when a chip component is sucked and mounted. 2. Description of the Related Art Conventionally, a small chip-shaped chip component such as an electronic component such as an IC is sucked from a component supply side by a head unit provided with a nozzle member for chip component suction so as to be able to move up and down. 2. Description of the Related Art There is generally known a mounter configured to be transferred onto a positioned printed board and mounted on a predetermined position of the printed board. A pressure supply device for a nozzle member of a mounting machine as described above, that is, a supply of a negative pressure and a positive pressure to a nozzle member is generally performed by a line (a negative pressure supply line) connected to a negative pressure source. A pipe (pipe) and a line (pipe) for supplying a positive pressure connected to a positive pressure source are connected to a nozzle member via a switching valve, and the nozzle is operated in accordance with the operation of the switching valve. The state can be switched between a state of supplying a negative pressure and a state of supplying a positive pressure to the member. In other words, a negative pressure is supplied to the nozzle member at the time of suction of the chip component, and a positive pressure is always supplied in other cases. [0004] This type of mounting machine includes:
In order to improve the work efficiency of suction and mounting of chip components, there is a mounting machine that equips a head unit with a large number of nozzle members and can suction a large number of chip components from the component supply side and mount them on a printed circuit board at once. . [0005] When a large number of nozzle members are provided in this manner, if a driving source for lifting and lowering is provided for each nozzle member, there is a disadvantage that the head unit itself is increased in size. The applicant has proposed and filed an application in which each of the nozzle members is moved up and down via a pressure-responsive clutch member (Japanese Patent Application No. Hei 5-133609).
issue). By the way, in such a mounting machine, when a chip component is sucked by a part of the nozzle members, the chip component arranged in the component supply unit shifts from a predetermined position.
Frequent situations such as being skipped have occurred. In other words, this is because the positive pressure supplied to the nozzle members other than the nozzle member that should pick up the chip components acts on the chip components on the component supply unit. However, such displacement of the chip components due to the action of the positive pressure causes deterioration of mounting accuracy of the chip components on the printed circuit board, which is extremely inconvenient. Therefore, it is desired to supply the positive pressure to the nozzle member temporarily after the supply of the negative pressure is cut off. It is necessary to separately provide a dedicated switching valve or the like. However, if the supply of the positive pressure is controlled by providing a separate switching valve in this way, it is necessary to provide a dedicated switching valve for each of a large number of nozzle members as described above, which results in an increase in the size of the head unit and cost. It is not preferable because it leads to an increase or complicates the control system. According to the present invention, when a plurality of nozzle members are driven up and down by using a pressure responsive member, such as by driving a number of nozzle members via a clutch member, when the nozzle members are raised and lowered, the clutch members can be properly moved. Focusing on the pressure supply / discharge switching, and using this as the positive supply pressure to the nozzle member at the time of mounting the chip component, it is possible to perform positive pressure supply to a suitable nozzle member with a simple configuration. It is an object of the present invention to provide a pressure supply device for a suction nozzle that can be used. According to the present invention, a plurality of nozzle members for picking up chip components are provided in a head unit movably mounted between a component supply side and a mounting side so as to be vertically movable. The suction and mounting of the chip component by each nozzle member is performed in accordance with the switching of the supply of the negative pressure to the nozzle member and the supply of the positive pressure.
In the mounting machine configured to switch the supply of the positive pressure by the pressure switching valve, each nozzle member is positioned below the nozzle member.
This pressure chamber has a pressure chamber for providing a lowering working pressure.
The nozzle member is lowered in response to the supply of positive pressure to
And <br/> pressure-responsive member to increase the nozzle member in accordance with the discharge of the positive pressure from the force chambers, against the above pressure chamber of the pressure-responsive member
And a pressure supply / discharge valve for switching between supply and discharge of the positive pressure, and a positive pressure introduction line for introducing a positive pressure to the pressure switching valve to lower the nozzle member. in order on the pressure-responsive member from the pressure supply and discharge valve
The pressure switching valve is connected to a positive pressure supply line for supplying a positive pressure to the pressure chamber , and the timing of discharging the positive pressure from the pressure chamber by the pressure supply / discharge valve after the nozzle member is lowered at the time of mounting the chip component is determined by the pressure switching valve. This is set so as to be delayed for a minute time from the switching timing from the negative pressure introduction state to the positive pressure introduction line conduction state. [0010] In the present invention, in together when adsorbing the chip component, when a positive pressure is supplied to the pressure chamber of the pressure-responsive member for the nozzle member elevating the pressure supply and discharge valve,
In synchronization with this, the pressure switching valve is switched and negative pressure is supplied to the nozzle member. That is, the negative pressure is supplied to the nozzle member in synchronization with the start of the lowering of the nozzle member. When the nozzle member reaches the lower end position of the vertically movable range, the chip component of the component supply unit is attracted to the nozzle member by the action of the negative pressure supplied to the nozzle member. Thereafter, the pressure supply / discharge valve is switched at a predetermined timing, so that a positive pressure is discharged from the pressure chamber of the pressure responsive member, whereby the nozzle member is lifted while adsorbing the chip component. On the other hand, when the chip component is mounted on the printed circuit board, the nozzle member is moved onto the printed circuit board by moving the head unit, and the pressure chamber of the pressure responsive member is switched by switching the pressure supply / discharge valve. Is supplied with a positive pressure, whereby the lowering of the nozzle member is started. Then, when the nozzle member reaches the descending end position in the same manner as during suction, the pressure switching valve is switched to shut off the supply of the negative pressure to the nozzle member. At this time, when the pressure switching valve is switched, the positive pressure from the pressure supply / discharge valve is supplied to the nozzle member via the positive pressure introduction line, and the positive pressure acts on the nozzle member. The mounted chip component is separated from the nozzle member and mounted on the printed circuit board. Then, after a short period of time from the operation of the pressure switching valve, the pressure supply / discharge valve is switched, so that positive pressure is discharged from the pressure chamber of the pressure responsive member and the nozzle member is raised. The positive pressure supply to the nozzle member is shut off by operating the pressure supply / discharge valve. That is, the positive pressure is supplied to the nozzle member only for the very short time from the interruption of the negative pressure supply by the operation of the pressure switching valve to the interruption of the positive pressure supply by the operation of the pressure supply / discharge valve. Then, until either the pressure switching valve or the pressure supply / discharge valve is switched, neither the negative pressure nor the positive pressure is supplied to the nozzle member. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described with reference to the drawings. 1 and 2 show the entire structure of a mounting machine to which a pressure supply device for a suction nozzle according to the present invention is applied. In these figures, a conveyor 2 constituting a transfer line is arranged on a base 1, and a printed board (not shown) is transferred on the conveyor 2 and stopped at a predetermined mounting work position. I have. At the side of the conveyor 2, a component supply unit 3
Is arranged. The component supply unit 3 can supply a large number of types of chip components. For example, a large number of supply tapes 3a wound around a reel are arranged, and each supply tape 3a has an IC and a transistor. And chip-like chip components such as capacitors are stored at predetermined intervals. Then, the supply tape 3a is intermittently fed out as chip components are supplied by a feeding mechanism (not shown). Above the base 1, a head unit 5 for mounting components is provided.
Can move in the X-axis direction (the direction of the conveyor 2) and the Y-axis direction (the direction orthogonal to the X-axis on a horizontal plane). That is, a pair of fixed rails 7 extending in the Y-axis direction and a ball screw shaft 8 driven to rotate by a Y-axis servomotor 9 are disposed on the base 1. A head unit support member 11 is disposed on the support member 11, and a nut portion 12 provided on the support member 11 is screwed to the ball screw shaft 8. A guide member 13 extending in the X-axis direction and a ball screw shaft 14 driven by an X-axis servomotor 15 are disposed on the support member 11 so that the head unit 5 can move on the guide member 13. A nut portion 15 held on the head unit 5 is screwed to the ball screw shaft 14. The ball screw shaft 8 is rotated by the operation of the Y-axis servo motor 9 to move the support member 11 in the Y-axis direction, and the ball screw shaft 14 is rotated by the operation of the X-axis servo motor 15, thereby causing the head unit to rotate. 5 is the support member 1
1 is moved in the X-axis direction. The head unit 5 includes a nozzle member 20.
Are arranged in parallel, and in the illustrated embodiment, eight nozzle members 20 are provided. Each of the nozzle members 20 is shown in FIG.
As shown in FIG. 5 to FIG. 5, a hollow nozzle shaft 21 has a structure in which a nozzle 22 formed integrally with the nozzle shaft 21 is opened at the tip thereof. Further, each nozzle member 20 is inserted into a cylindrical housing 23, and is connected to the housing 23 by a spline so as to be movable in the Z-axis direction (vertical direction) and to prevent relative rotation. I have. Further, each housing 23 is rotatably held by the main body of the head unit 5, so that each nozzle member 20 can rotate together with the housing 23 around the R axis (nozzle center axis) with respect to the main body of the head unit 5. Has become. The nozzle forming portion at the tip of each nozzle member 20 projects below the housing 23. The upper portion of each nozzle member 20 protrudes above the housing 23. In this portion, a rocker arm engaging portion 24 is provided on the outer periphery of the nozzle member 20, and a return spring 25 for urging the nozzle member 20 upward is provided. Equipped. A passage inside the nozzle member 20 is connected to a negative pressure supply source 51 and a positive pressure supply source 50 described later in detail.
3 are connected. Further, the head unit 5 is provided with each nozzle member 20 using one Z-axis servomotor 30 as a drive source.
And a mechanism for rotating each nozzle member 20 using one R-axis servomotor 40 as a drive source. The mechanism for raising and lowering each nozzle member 20 includes a camshaft 31, rocker arms 33, pivot members 34, and clutch cylinders 35 (pressure-responsive members) provided for each nozzle member 20. The camshaft 31 extends in the nozzle member arrangement direction, and is rotatably supported by the main body of the head unit 5.
6, 37 and the Z-axis servo motor 3 via the belt 38
Connected to 0. A cam 32 for raising and lowering the nozzle member is provided at a position corresponding to each nozzle member 20 of the camshaft 31. Each of the rocker arms 33 has a cam follower 33a at an intermediate portion thereof, which abuts on the cam 32 to form a power point portion, and has a rocker arm engaging portion of the nozzle member 20 at one end as an action point portion. Part 24
And a coupling portion 33c to the pivot member 34 as a fulcrum portion on the other end side. The pivot member 34 is composed of a shaft having an upper end connected to a connecting portion 33c of the rocker arm 33, and a lower end of which is integrally provided with a piston 34a located in a clutch cylinder 35. . The clutch cylinder 35 is located below the piston 34a and
Pressure chambers 35a and 35b are provided above the pressure chambers 35a and 35b.
a and 35b are connected to a positive pressure supply source 50 that generates air pressure via ports 48a and 48b and a clutch valve 52 (not shown) (not shown), and the air pressure, that is, the positive pressure is applied to the pressure chamber 35a. In the ON state where the positive pressure is discharged from the pressure chamber 35b while being supplied, the piston 34a is pushed up to hold the pivot member 34 at the raised position. Further, the positive pressure is supplied to the pressure chamber 35b while the positive pressure is supplied to the pressure chamber 35b.
When the positive pressure is discharged from the position a, the pivot member 34 is lowered to the lower end of the vertical movable range. The mechanism for rotating each of the nozzle members 20 includes a drive gear 41 attached to the shaft of the R-axis servomotor 40 and one nozzle member (for example, the rightmost nozzle member in FIGS. 3 and 4). A driven gear 42 that is engaged with the driving gear 41 and a belt transmission mechanism 43 between the nozzle member 20 and another nozzle member 20 are provided. The belt transmission mechanism 43 is provided in two upper and lower stages in order to ensure transmission operation.
45 is wound around a pulley 46 provided on each nozzle member 20. Thus, one nozzle member 20 is rotationally driven by the R-axis servo motor 40 via the gears 41 and 42, and its rotation is controlled by the other nozzle members 2
It is also transmitted to 0. Further, an encoder 47 for detecting the rotation angle is attached to the nozzle member 20 connected to the R-axis servo motor 40 via the gears 41 and 42. Here, the pressure supply system of the mounting machine will be described with reference to FIG. FIG. 6 shows a circuit for supplying a negative pressure and a positive pressure to each nozzle member 20 and supplying a positive pressure to the clutch cylinder 35. As shown in the figure, the positive pressure generated by the positive pressure supply source 50 is supplied to a clutch valve 52 ( pressure supply / discharge valve) provided for each nozzle member 20, and the positive pressure is supplied to each clutch member. The ON line 54a is switched by switching the valve.
(Positive pressure supply line) through the clutch cylinder 35
And the OFF line 54
This is switched between the case where the power is supplied to the port 48b of the clutch cylinder 35 through the port b. The ON line 54a has a positive pressure introducing line.
Inn 55 are connected, this positive pressure introduction line 55
There is connected to the pressure switching valve 53 provided for each nozzle member 20. That is, the clutch valve 52
When the positive pressure is supplied to the ON line 54a by the switching, the positive pressure is supplied to each clutch cylinder 35 and each pressure switching valve 53, respectively.
Further, the negative pressure generated by the negative pressure generating source 51 is supplied to each pressure switching valve 53, and the switching operation of the pressure switching valve 53 causes each nozzle member 20 to receive the negative pressure.
The switching between the case of supplying the positive pressure from the positive pressure introduction line 55 and the case of supplying the negative pressure is performed. The operation of picking up and mounting components by the mounting machine as described above will be described with reference to FIGS. FIG. 7 is an operation explanatory view of a mechanism for elevating and lowering each nozzle member.
FIG. 4 is a time chart showing a pressure supply state to each nozzle member, a state of a clutch cylinder, and an operation state of a cam when each nozzle member is sequentially raised and lowered. 8 and 9, the clutch cylinder is indicated by CL. The component supply unit 3 is controlled by the head unit 5.
When a chip component is to be sucked, the head unit 5 is positioned above the component supply unit 3 and the nozzle member 20 that is to suck the chip component is operated. That is, the clutch valve 5 corresponding to the nozzle member 20
6 and the pressure switching valve 53 are simultaneously switched from the state shown in FIG.
, The clutch cylinder 35 is turned ON (positive pressure is supplied to the pressure chamber 35a and positive pressure is discharged from the pressure chamber 35b), and negative pressure is supplied to the nozzle member 20 ( For example, t1 in FIG.
Time). Further, the Z-axis servomotor 30 is operated at the same time as the switching of the valves 52 and 53, whereby the rotation of the camshaft 31 is performed in a state where the pivot member 34 is in the raised position as shown by the solid line in FIG. Accordingly, the rocker arm 33 swings around the connecting portion 33c with the pivot member 34 as a fulcrum, and accordingly, the nozzle member 20 descends to a predetermined height close to the chip component, and sucks the chip component (at time t2 in FIG. 8). ). Subsequently, after a short period of time when the nozzle member 20 sucks the chip component, that is, at a timing when the nozzle member 20 reaches a position slightly raised from the lower end of the vertical movable range with the rotation of the camshaft 31, the clutch is moved. The use valve 52 is switched to the state shown in FIG. 6 (at time t3 in FIG. 8). As a result, the positive pressure is supplied to the clutch cylinder 35 via the OFF line 54b, and the clutch cylinder 35 is turned off (supplying the positive pressure to the pressure chamber 35b and discharging the positive pressure from the pressure chamber 35a). As a result, the pivot member 34 is displaced to a lowered position as indicated by a two-dot chain line in FIG. 7, and the nozzle member 20 is lifted by the urging force of the return spring 25 in a state in which the chip component is suctioned. For example, when the suction of chip components by each nozzle member 20 is performed sequentially, as shown in FIG. 8, while the Z-axis servomotor 30 is continuously operated, The operation of the valves 52 and 53 is sequentially performed on each nozzle member 20. When the pick-up of the component by the nozzle member 20 is completed, the mounting position and the correction amount of the rotation angle are determined by the component recognition or the like by a component recognizing means (not shown). The head unit 5 moves onto a certain printed board, and mounting of chip components is performed. In this case, when the clutch valve 52 corresponding to the nozzle member 20 to be mounted is switched again from the state shown in FIG. 6, positive pressure is supplied to the clutch cylinder 35 via the ON line 54a, thereby 35 is ON (positive pressure supply to pressure chamber 35a, pressure chamber 35
b), the Z-axis servo motor 30 is operated, and the nozzle member 20 of the chip component is lowered in the same manner as when the component is sucked (time t4 in FIG. 9). When the nozzle member 20 reaches a predetermined height close to the printed circuit board, that is, the lower end position of the vertical movable range of the nozzle member 20, the pressure switching valve 53 corresponding to the nozzle member 20 is shown in FIG. The state is switched to the above state, whereby the supply of the negative pressure to the nozzle member 20 is interrupted (time t5 in FIG. 9). However, when the negative pressure supply is interrupted, the positive pressure supply from the clutch valve 52 corresponding to the nozzle member 20 to the ON line 54a is continued, and the pressure switching valve 53 is provided to the nozzle member 20. , The supply of the positive pressure via the positive pressure introduction line 55 is started. That is, the interruption of the negative pressure by the switching of the pressure switching valve 53 and the continuous supply of the positive pressure allow the chip components adsorbed on the nozzle member 20 to be removed from the nozzle member 20. It will be mounted on the printed circuit board at a distance. After a short period of time when the pressure switching valve 53 is switched, that is, when the nozzle member 20 reaches a position slightly raised from the lower end of the vertical movable range with the rotation of the camshaft 31, the clutch valve 52 is turned on. Is switched to the state shown in FIG. 6, whereby the clutch cylinder 35 is turned off (positive pressure is supplied to the pressure chamber 35b,
5a), and the nozzle member 20 is held at the raised position, as in the case of the suction. At this time, the supply of the positive pressure to the positive pressure introduction line 55 is shut off by switching the clutch valve 52 as described above,
As a result, the supply of the positive pressure to the nozzle member 20 is interrupted (time t6 in FIG. 9). For example, when the mounting of the chip components by each nozzle member 20 is performed sequentially, as shown in FIG. 9, the Z-axis servomotor 30 is continuously operated while The operation of the valves 52 and 53 is sequentially performed on each nozzle member 20. On the other hand, when the nozzle member 20 to be used for suctioning chip components is being moved up and down as described above, the installed nozzle member 20 is connected to the corresponding clutch valve 52 by the clutch cylinder. 35 for OF
F (positive pressure supply to the pressure chamber 35b and positive pressure discharge from the pressure chamber 35a), that is, the state shown in FIG. 6, and the pressure switching valve 53 shuts off the negative pressure supply. . That is, in response to the clutch cylinder 35 being turned off, the pivot member 34 is displaced to a lowered position as shown by a two-dot chain line in FIG.
0 is held at the ascending position by the return spring 25, and further, in the state of the clutch valve 52 as described above, the positive pressure is not supplied to the ON line 54a . Neither of the positive pressure is supplied, and its operation is substantially stopped. As described above, in the mounting machine of the above embodiment, the positive pressure introducing line 55 for supplying the positive pressure to the pressure switching valve 53 is replaced with the clutch valve for lowering the nozzle member 20. as well as connect to oN line 54 a for supplying a positive pressure to the clutch cylinder 35 from 52, the chip component positive pressure supply cutoff timing nozzle member 2 to oN line 54 a due to switching of the clutch valve 52 after mounting
The negative pressure supply to the nozzle member 20 is delayed by a minute time from the negative pressure supply cut-off timing to zero.
Since the switching operation is started by the switching operation of No. 2 and is interrupted by the switching operation of the clutch valve 52 after the mounting of the chip component, a very short time after the mounting of the chip component (at time t5 in FIG. 9) without providing a new valve member. It is possible to temporarily supply the positive pressure to the nozzle member 20. Neither the negative pressure nor the positive pressure is supplied to the nozzle member 20 that is not substantially operated. Therefore, as in the conventional apparatus, the component is operated by the positive pressure of the nozzle member 20 that is not operated. It does not cause a situation in which the chip components on the supply unit 3 are shifted. As described above, the clutch cylinder 3
Since the positive pressure for turning ON / OFF 5 is commonly used as the positive pressure to be supplied to the nozzle member, there is an advantage that the structure of the mounting machine can be simplified. In the above embodiment, the mounting machine in which the head unit 5 is equipped with eight nozzle members 20 has been described. However, the number of nozzle members 20 is not limited to the embodiment, but is less than eight. Or eight or more. In the above-described embodiment, the present invention provides the pivot member 34 by supplying positive pressure to the clutch cylinder 35.
The rocker arm 33 connected to this is raised and lowered.
Although the example applied to the mounting machine having a mechanism in which the nozzle member 20 is moved up and down in response to the swing of the nozzle has been described, for example,
A mounting machine configured to directly raise and lower each nozzle member 20 by an air cylinder may be used. That is, the nozzle member 20
Is applicable as long as it starts and ends based on the supply and discharge of positive pressure such as air pressure or fluid pressure. As described above, according to the present invention, a positive pressure introducing line for introducing a positive pressure to a pressure switching valve is provided by a pressure supply / discharge valve and a pressure responsive member for lowering a nozzle member. To the positive pressure supply line that supplies positive pressure to the nozzle, and adjusts the positive pressure discharge timing of the pressure supply / discharge valve after the nozzle member descends when the chip component is mounted. Since it is set to be delayed for a very short time from the switching timing to the line conduction state, it is possible to temporarily supply positive pressure to the nozzle member for a very short time after chip component mounting without newly installing a valve member. is there. In addition, since neither negative pressure nor positive pressure is supplied to the nozzle member that is not substantially operated,
The displacement of the chip component on the component supply unit due to the action of the positive pressure of the inactive nozzle member does not occur. Therefore, it is possible to supply positive pressure to a suitable nozzle member with a simple configuration.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic plan view showing an example of a mounting machine to which a suction nozzle pressure supply device of the present invention is applied. FIG. 2 is a schematic front view of the mounting machine. FIG. 3 is a longitudinal sectional front view showing a main part of a head unit. FIG. 4 is a plan view showing a main part of the head unit. FIG. 5 is a vertical sectional side view showing a main part of the head unit. FIG. 6: supply of negative pressure and positive pressure to each nozzle member,
FIG. 3 is a circuit diagram for supplying a positive pressure to a clutch cylinder. FIG. 7 is an operation explanatory view of a mechanism for elevating and lowering each nozzle member. FIG. 8 is a time chart showing a pressure supply state to each nozzle member, a state of a clutch cylinder, and an operation state of a cam when each of the nozzle members is sequentially moved up and down to suck and mount a chip component. FIG. 9 is a time chart showing a state of pressure supply to each nozzle member, a state of a clutch cylinder, and an operation state of a cam when each of the nozzle members is sequentially moved up and down to suck and mount a chip component. [Description of Signs] 20 Nozzle member 30 Z-axis servo motor 35 Clutch cylinder 50 Positive pressure supply source 51 Negative pressure supply source 52 Clutch valve 53 Pressure switching valve 54a ON line 54b OFF line 55 Pressure supply line

────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-4-30984 (JP, A) JP-A-1-122198 (JP, A) JP-A-2-292152 (JP, A) JP-A-3-292 166087 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) B25J 15/06 H05K 13/00

Claims (1)

(57) [Claim 1] A plurality of nozzle members for picking up chip components are respectively provided in a head unit movably mounted between a component supply side and a mounting side so as to be movable up and down, The suction and mounting of the chip component by each nozzle member is performed in accordance with the switching of the supply of the negative pressure and the positive pressure to the nozzle member, and the switching of the supply of the negative pressure and the positive pressure to the nozzle member is performed by a pressure switching valve. In order to apply a nozzle member lowering operating pressure to each nozzle member in a mounting machine configured to perform
Has a pressure chamber, according to the supply of positive pressure to this pressure chamber
Lower the nozzle member to discharge positive pressure from this pressure chamber.
A pressure responsive member that raises the nozzle member in response thereto, and a supply and discharge of positive pressure to and from the pressure chamber of the pressure responsive member.
And a pressure supply / discharge valve for performing pressure change, and a positive pressure introduction line for introducing a positive pressure to the pressure switching valve, and a pressure response member from the pressure supply / discharge valve to lower the nozzle member . connected to the positive pressure supply line for supplying a positive pressure to the pressure chamber, the pressure by the pressure supply and discharge valve after the nozzle member downward when the chip component mounting
The suction nozzle is characterized in that the timing of discharging the positive pressure from the power chamber is set to be delayed for a minute time from the timing of switching the pressure switching valve from the negative pressure introducing state to the positive pressure introducing line conducting state. Pressure supply device.