JP2000091404A - Pellet thrust-up device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To surely strip off pellets from a sheet, having different sizes and shapes. SOLUTION: A pellet thrust-up device is provided with an input section 52 which inputs the data on pellets 19 and a thrust-up control section 51 which can adjust at least the thrust-up stroke, thrust-up speed, or the number of thrust-up times of a needle 49 by controlling the drive state of a stepping motor 34, based on the data on the pellets 19 inputted by means of the input section 52.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a pellet push-up device.

[0002]

2. Description of the Related Art Conventionally, for example, a wafer formed by arranging an element group such as a semiconductor on the surface thereof is divided into individual pellets as element pieces. It is extracted by a pellet extracting device described in JP-A-60-167337. Each of the pellets to be extracted is supplied to a pellet extracting apparatus in a state of being attached to an upper surface of, for example, an adhesive sheet. That is, each pellet is formed in a state in which the wafer attached to the adhesive sheet is broken into individual element pieces and divided. Further, a gap is formed between each of the divided pellets by stretching the sheet, and the pellet extracting device sequentially extracts each of the divided pellets one by one.

[0003] Conventionally, when a pellet adhered to a sheet is extracted, it has been necessary to reliably remove the pellet from the sheet. For exfoliation of pellets, see, for example,
Pellet push-up devices described in JP-A-88844 and JP-A-60-102754 are used. This pellet push-up device pushes up a pellet to be stuck on a sheet from the back surface of the sheet by a needle moved forward and backward by a push-up drive section, and peels off the pellet from the sheet. Here, the push-up drive section is constituted by a cam rotated by a motor or the like, and the cam allows the needle to move up and down by the rotation operation.

[0004]

By the way, recent pellets are provided in various sizes and shapes due to diversification of ICs and LSIs manufactured by the pellets. However, when peeling the pellets of these various dimensions and shapes from the pressure-sensitive adhesive sheet, the push-up speed of the needle, the push-up stroke, the number of push-ups are set to the conventional standard dimensions,
If it is carried out in the same state as in the case of shaped pellets, there is a problem that the pellets do not peel off well from the sheet, and when the pellets peel off from the sheet, the pellets scatter. Especially recently, in the case of small pellets, by increasing the adhesive strength of the adhesive sheet so that each pellet does not scatter when stretching the sheet, this kind of pellet is difficult to peel from the sheet It was supposed to be.

An object of the present invention is to reliably remove pellets having different sizes and shapes from a sheet.

[0006]

According to a first aspect of the present invention, there is provided a pellet push-up device for pushing up a pellet to be stuck on a sheet from a back surface of the sheet by a needle which is moved forward and backward by a push-up driving section, and peeling the pellet. An input unit for inputting data relating to the pellets, and a driving state of the push-up driving unit is controlled based on the data relating to the pellets input by the input unit, and the thrust stroke of the needle, the thrust speed, and the number of thrusts are controlled. And a push-up control unit capable of adjusting at least one operation condition.

[0007]

When the data relating to the pellet is input to the input section, the push-up control section controls the drive state of the push-up drive section, and adjusts at least one of the push-up stroke, the push-up speed, and the number of push-ups of the needle. Performs a lifting stroke, a lifting speed and / or the number of times of lifting according to the size and shape of the pellet,
Peel the pellet securely.

[0008]

FIG. 1 is a cross-sectional view of a pellet extracting device provided with a pellet push-up device according to an embodiment of the present invention, FIG. 2 is a view taken along the line II-II of FIG. 1, and FIG. FIG. 4 is a sectional view showing a state before pushing up, and FIG.

The pellet mounting apparatus 10 includes a base 11, and the base 11 supports an XY table 12 that can be driven in the plane XY directions. On the upper surface of the XY table 12, the support frame 13 of the cassette ring
4 fixed. The cassette ring 15 is detachable from the support frame 13 of the cassette ring. An adhesive sheet 17 on which a wafer 16 is attached is attached to the cassette ring 15 via a rubber band 18. The wafer 16 on the adhesive sheet 17 is formed in a circular shape. Further, the wafer 16 is divided into chip-shaped pellets 19 as element pieces, and an interval is provided between the pellets 19 while the sheet 17 is stretched. Is formed.
That is, the pellets 19 are arranged in a plurality of rows and a plurality of columns along the XY direction of the XY table 12 on the adhesive sheet 17, and a predetermined position on the adhesive sheet 17 is a pellet extracting position 20.

A collet 21 is provided above the XY table 12 so as to reciprocate between a pellet extracting position 20 and a pellet transfer section (not shown). That is, the collet 21 can reciprocate between the pellet extracting position 20 and the pellet transfer section in the arrow X direction, and the collet 21 is supported by the moving arm 22 so as to be vertically movable. The vertically movable collet 21 is moved to the lower end position 23 while being moved to the pellet extracting position 20. In this state, the collet 21 is operated by suction, and the pellet extracting position 2
The pellet 19 positioned at 0 is extracted and can be held. The collet 21 holding the pellet 19 is moved to the rising end position 24 as described above, and the collet 21 is further moved to the pellet transfer section by driving the moving arm 22. Collet 21 moved to pellet transfer section
Is moved to the lower end position 23 in the transfer section, and then the suction operation is stopped. As a result, the pellet 19 held by the collet 21 is released to the pellet transfer section, and the pellet 1
The collet 21 having released 9 is moved to the rising end position 24 again. Thereby, the transfer of one pellet 19 is completed. Here, the up-and-down movement of the collet 21 is performed by lifting means (not shown). After the transfer of the pellets 19 is completed, the collet 21 is moved to the pellet extracting position 20 again, and holds the pellets 19 to be transferred next in the same operation order of the collet 21 as described above. At this time, the pellet 19 to be extracted next is positioned at the pellet extraction position 20 by driving the XY table 12. In this way, the pellets 19 aligned in the XY directions are sequentially positioned at the pellet extracting position 20 by driving the XY table 12, and the pellets 19 are sequentially transferred to the pellet transfer unit by the operation of the collet 21. .

A pellet push-up device 25 is provided below the support frame 13 while being supported by the base 11. The pellet push-up device 25 is provided at the pellet extracting position 2
The pellets 19 positioned at 0 and adsorbed by the collet 21 can be peeled off from the adhesive sheet 17 in advance. The pellet push-up device 25 includes a fixed frame 26 disposed on the base 11, and the fixed frame 26 is provided with an elevating shaft holding unit 27. The lifting shaft 2 is mounted on the lifting shaft holding portion 27 with a bush 28 interposed therebetween.
9 is movably supported. An engagement pin 30 protrudes from the elevating shaft 29, and an engagement recess 31 is engaged with the engagement pin 30. The engagement recess 31 is formed at one end of a swing rod 32 whose center is pivotally supported by the fixed frame 26. That is, the swinging rod 32 is indicated by arrows A at both ends.
In this manner, the swinging rod 32 can swing up and down, so that the elevating shaft 29 can be moved up and down in the vertical direction [Z direction]. The swing of the swing rod 32 in the direction of arrow A is
The rotation of the cam 33 is performed. The cam 33 is supported by a driving shaft 35 of a stepping motor 34 as shown in FIG. 2, and is rotatable in the direction of arrow B. This cam 3
A cam follower 37 is in contact with the third cam surface 36, and the cam follower 37 is supported by the other end of the swing rod 32. A tension spring 38 is interposed between the other end of the swing rod 32 and the fixed frame 26, and the tension spring 38 allows the cam follower 37 to always contact the cam surface 36. As a result, by driving the motor 34 and rotating the cam 33, the elevating shaft 29 can be moved up and down in the arrow Z direction.

On the other hand, above the elevating shaft holding portion 27, the cylindrical body holding portion 3 is also supported by the fixed frame 26.
9 are provided. The lower end of the cylindrical body 40 is supported by the cylindrical body holding portion 39 by tightening a fixing screw 41.
The tubular body 40 supported by the holding portion 39 extends below the cassette ring 15, and a needle support shaft 42 is inserted into the extended tubular body 40. The lower end of the needle support shaft 42 is connected to the upper portion of the elevating shaft 29 by tightening a fixing screw 43.

Below the needle support shaft 42 inside the cylindrical body 40, a bush 44 also serving as a sealing member is interposed and supported on the inner wall of the cylindrical body 40. Further, the upper part of the needle support shaft 42 is supported on the inner wall of the cylindrical body 40 with a bush 45 interposed therebetween. The inside of the cylindrical body 40 into which the needle support shaft 42 is inserted has a gap 4 between the inner wall of the cylindrical body 40 and the outer periphery of the needle support shaft 42.
6 is provided. The air gap 46 extends from the upper end surface of the bush 44 also serving as a seal member to the upper end position of the cylindrical body 40 through a communicating portion (not shown) penetrating in the axial direction of the bush 45. Above the sheet suction nozzle 4
7 is attached. A vacuum pipe 48 is connected to the cylindrical body 40, and the vacuum pipe 48 can suction air from a gap 46 inside the cylindrical body 40. When the air in the gap 46 is sucked, the inside of the gap 46 becomes negative pressure, so that the back surface of the adhesive sheet 17 facing the sheet suction nozzle 47 is sucked and held by the nozzle 47.

A needle 49 is mounted above the needle support shaft 42. The tip of the needle 49 is sharp, and the needle 49 can move forward and backward with respect to the back surface of the seat 17. The advance and retreat of the needle 49 is performed by moving the needle support shaft 42 up and down.
Is performed by moving the elevating shaft 29 up and down. That is, when the elevating shaft 29 is moved up and down by the rotation of the cam 33, the tip end of the needle 49 is moved up and down with respect to the back surface of the seat 17 in conjunction with this. As shown in FIGS. 3 and 4, the sheet suction nozzle 47 is provided with a needle insertion hole 50. In addition, the needle 49
It is positioned corresponding to the pellet extracting position 20 in the vertical direction. The distal end of the needle 49 is projected from the insertion hole 50 with the needle 49 advanced, whereby the pellet 19 positioned at the pellet extracting position 20 can be pushed up from the back surface of the sheet 17. At this time, the sheet 17
The sheet is suction-held by the sheet suction nozzle 47. Thereby, the pellet 19 can be peeled off from the surface of the adhesive sheet 17 (see FIG. 4). On the other hand, the distal end of the needle 49 can be retracted into the insertion hole 50 with the needle 49 retracted (see FIG. 3).

The pushing speed, the pushing stroke and the number of pushing of the needle 49 can be adjusted by changing the driving speed and the driving amount of the stepping motor 34. These changes in the driving state of the stepping motor 34 are performed based on a command from the push-up control unit 51. That is, the push-up control unit 51 can variably adjust the driving state of the motor 34 based on data relating to the pellets 19 adhered to the adhesive sheet 17 input to the size / shape input unit 52 of the pellets 19.

The push-up controller 51 includes, for example, the needle 4
When the pellets 19 pushed up by 9 are small, the pushing up speed is set to be high so that the pellets 19 are surely separated from the sheet 17, and the pushing up stroke L shown in FIG. 4 is set and adjusted to a small value. Like that.

The adjustment of the push-up speed is made possible by setting the rotation speed of the stepping motor 34 to be high.

On the other hand, the adjustment of the push-up stroke L is made possible by adjusting the rotation angle of the cam 33. The rotation angle of the cam 33 is input to a cam rotation angle detection unit 54 from a rotation angle detection sensor 53 provided at a position facing the cam 33. That is, the cam rotation angle detection unit 54
The detected rotation angle is fed back to the push-up control unit 51, and the push-up control unit 51 enables the rotation range of the cam 33 to be within a predetermined angle range based on the fed-back rotation angle. As a result, it is possible to adjust the thrust stroke L of the needle 49 to a predetermined value.

On the other hand, when the pellet 19 pushed up by the needle 49 is made large, the pushing speed is set low and the pushing stroke L is set large so that the pellet 19 is surely separated from the sheet 17. Need to adjust. In this case, the push-up controller 51 sets the rotation speed of the motor 34 to a low value and adjusts the rotation angle region of the cam 33 to a large value.

Further, depending on the size of the large-sized pellets 19, it is necessary to increase the number of times the needle 49 is pushed up to two or three times. In this case, the push-up controller 51 can control the drive of the motor 34 so that the cam 33 is reciprocated two or three times in the predetermined angle region.

In this embodiment, the push-up control unit 5
1 controls the push-up speed, push-up stroke L, and push-up frequency of the needle 49 all,
By adjusting one of all these elements, the pellet 19 can be reliably peeled off.

Next, the operation of the pellet mounting device 10 will be described. When the pellet 19 to be extracted is positioned at the pellet extracting position 20 by moving the XY table 12, the collet 21 is moved from the state shown in FIG.
The suction operation of the collet 21 is started in this state. At the same time, the suction operation of the vacuum pipe 48 is started, and the back surface of the adhesive sheet 17 is sucked by the sheet suction nozzle 47 (see FIG. 4). Thus, the sheet 17 is held by the nozzle 47 in a fixed state.

The back side of the sheet 17 is a sheet suction nozzle 47
Then, the needle 49 is driven up from the retracted state shown in FIG. 3 to the forward state shown in FIG. As a result, the pellet 19 is peeled off from the surface of the sheet 17, and then the pellet 19 is pushed up by the needle 49 in a state shown in FIG. At this time, the collet 21 is moved up together with the pushing up of the needle 49. In this state, the pellet 19 peeled off from the surface of the sheet 17 is extracted and held by the collet 21. Next, the collet 21 holding the pellet 19 is
The pellets 19 are raised to the rising end position 24, and are then transferred to the pellet transfer section. At the same time, the needle 49 in the pushed-up state is driven backward again, and the suction operation of the vacuum pipe 48 is stopped. As a result, the suction state of the sheet 17 by the sheet suction nozzle 47 is released. When the suction state of the sheet 17 is released, the pellet 19 to be next extracted is moved to the pellet extracting position 20 via the movement of the XY table 12.
Will be positioned. In this way, the pellets 19 aligned in the X and Y directions are sequentially peeled from the adhesive sheet 17 by the push-up operation of the needle 49, and the pellets 19 are sequentially extracted and transferred by the collet 21.

Therefore, according to the present embodiment, the following operations are provided. When data relating to the pellet 19 is input to the input unit 52, the push-up control unit 51
The driving state of the needle 4 is controlled, and at least one of the pushing stroke, the pushing speed, and the number of pushing of the needle 49 is adjusted. As a result, the pushing stroke, the pushing speed, and / or the pushing stroke according to the size and the shape of the pellet 19 are adjusted. The number of times of pushing is performed to surely remove the pellet 19.

[0025]

As described above, according to the present invention, pellets having different dimensions and shapes can be reliably separated from a sheet.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a pellet extracting device including a pellet push-up device according to an embodiment of the present invention.

FIG. 2 is an arrow view along the line II-II in FIG.

FIG. 3 is a cross-sectional view showing a state before pushing up a pellet.

FIG. 4 is a cross-sectional view showing a state in which a pellet is pushed up.

[Explanation of symbols]

 17 adhesive sheet 19 pellet 25 pellet push-up device 33 cam 34 stepping motor (thrust drive) 49 needle 51 push-up control unit 52 input unit

Claims (1)

[Claims] 1. A pellet push-up device that pushes up and separates a pellet stuck on a sheet from a back surface of a sheet by a needle that is moved forward and backward by a push-up driving unit, and an input unit that inputs data relating to the pellet. Control the drive state of the push-up drive unit based on the data regarding the pellets input by the input unit,
A pellet push-up device, comprising: a push-up control unit capable of adjusting at least one operation condition of the needle push-up stroke, the push-up speed, and the number of push-ups.