JPH0719149Y2 - 二重フオーク横型搬送装置 - Google Patents

二重フオーク横型搬送装置

Info

Publication number
JPH0719149Y2
JPH0719149Y2 JP4224789U JP4224789U JPH0719149Y2 JP H0719149 Y2 JPH0719149 Y2 JP H0719149Y2 JP 4224789 U JP4224789 U JP 4224789U JP 4224789 U JP4224789 U JP 4224789U JP H0719149 Y2 JPH0719149 Y2 JP H0719149Y2
Authority
JP
Japan
Prior art keywords
wafer
susceptor
pedestal
chamber
wafer mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4224789U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02132950U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
正敏 小野田
潤一 立道
清 久保田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP4224789U priority Critical patent/JPH0719149Y2/ja
Publication of JPH02132950U publication Critical patent/JPH02132950U/ja
Application granted granted Critical
Publication of JPH0719149Y2 publication Critical patent/JPH0719149Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Weting (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP4224789U 1989-04-10 1989-04-10 二重フオーク横型搬送装置 Expired - Lifetime JPH0719149Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4224789U JPH0719149Y2 (ja) 1989-04-10 1989-04-10 二重フオーク横型搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4224789U JPH0719149Y2 (ja) 1989-04-10 1989-04-10 二重フオーク横型搬送装置

Publications (2)

Publication Number Publication Date
JPH02132950U JPH02132950U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-11-05
JPH0719149Y2 true JPH0719149Y2 (ja) 1995-05-01

Family

ID=31553622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4224789U Expired - Lifetime JPH0719149Y2 (ja) 1989-04-10 1989-04-10 二重フオーク横型搬送装置

Country Status (1)

Country Link
JP (1) JPH0719149Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003087430A1 (fr) * 2002-04-16 2003-10-23 Tokyo Electron Limited Systeme de traitement, procede de traitement et element de montage
JP2011139079A (ja) * 2001-07-15 2011-07-14 Applied Materials Inc 処理システム

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100688548B1 (ko) * 2005-05-19 2007-03-02 삼성전자주식회사 웨이퍼 이송 장치
JP5563397B2 (ja) * 2010-07-21 2014-07-30 大塚電子株式会社 被搬送物回転装置
WO2014054501A1 (ja) * 2012-10-04 2014-04-10 大陽日酸株式会社 気相成長装置
JP6013122B2 (ja) * 2012-10-04 2016-10-25 大陽日酸株式会社 気相成長装置
JP6059940B2 (ja) * 2012-10-04 2017-01-11 大陽日酸株式会社 気相成長装置
JP6013121B2 (ja) * 2012-10-04 2016-10-25 大陽日酸株式会社 気相成長装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011139079A (ja) * 2001-07-15 2011-07-14 Applied Materials Inc 処理システム
WO2003087430A1 (fr) * 2002-04-16 2003-10-23 Tokyo Electron Limited Systeme de traitement, procede de traitement et element de montage

Also Published As

Publication number Publication date
JPH02132950U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-11-05

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term