JPH0715138Y2 - 縦型収納治具 - Google Patents

縦型収納治具

Info

Publication number
JPH0715138Y2
JPH0715138Y2 JP1986015694U JP1569486U JPH0715138Y2 JP H0715138 Y2 JPH0715138 Y2 JP H0715138Y2 JP 1986015694 U JP1986015694 U JP 1986015694U JP 1569486 U JP1569486 U JP 1569486U JP H0715138 Y2 JPH0715138 Y2 JP H0715138Y2
Authority
JP
Japan
Prior art keywords
wafer
arc
shaped
storage jig
holding portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986015694U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62128633U (enExample
Inventor
一雄 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Quartz Products Co Ltd
Original Assignee
Shin Etsu Quartz Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Quartz Products Co Ltd filed Critical Shin Etsu Quartz Products Co Ltd
Priority to JP1986015694U priority Critical patent/JPH0715138Y2/ja
Publication of JPS62128633U publication Critical patent/JPS62128633U/ja
Application granted granted Critical
Publication of JPH0715138Y2 publication Critical patent/JPH0715138Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986015694U 1986-02-07 1986-02-07 縦型収納治具 Expired - Lifetime JPH0715138Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986015694U JPH0715138Y2 (ja) 1986-02-07 1986-02-07 縦型収納治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986015694U JPH0715138Y2 (ja) 1986-02-07 1986-02-07 縦型収納治具

Publications (2)

Publication Number Publication Date
JPS62128633U JPS62128633U (enExample) 1987-08-14
JPH0715138Y2 true JPH0715138Y2 (ja) 1995-04-10

Family

ID=30806862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986015694U Expired - Lifetime JPH0715138Y2 (ja) 1986-02-07 1986-02-07 縦型収納治具

Country Status (1)

Country Link
JP (1) JPH0715138Y2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2961167B2 (ja) * 1988-03-18 1999-10-12 東京エレクトロン株式会社 ボート並びにそれを用いた熱処理装置及び方法
JPH0648859Y2 (ja) * 1989-03-03 1994-12-12 ラムコ株式会社 ウエハー支持具
JP2537563Y2 (ja) * 1989-03-20 1997-06-04 東横化学 株式会社 縦型減圧気相成長装置
US5492229A (en) * 1992-11-27 1996-02-20 Toshiba Ceramics Co., Ltd. Vertical boat and a method for making the same
JP3280438B2 (ja) * 1992-11-30 2002-05-13 東芝セラミックス株式会社 縦型ボート
JP3250628B2 (ja) * 1992-12-17 2002-01-28 東芝セラミックス株式会社 縦型半導体熱処理用治具

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS523731Y2 (enExample) * 1971-06-21 1977-01-26
JPS51879A (en) * 1974-06-21 1976-01-07 Hitachi Ltd Cvd sochi
JPS60124031U (ja) * 1984-01-27 1985-08-21 富士通株式会社 縦型炉

Also Published As

Publication number Publication date
JPS62128633U (enExample) 1987-08-14

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