JPH0713221Y2 - 半導体ウェハー用キャリア - Google Patents

半導体ウェハー用キャリア

Info

Publication number
JPH0713221Y2
JPH0713221Y2 JP1989002504U JP250489U JPH0713221Y2 JP H0713221 Y2 JPH0713221 Y2 JP H0713221Y2 JP 1989002504 U JP1989002504 U JP 1989002504U JP 250489 U JP250489 U JP 250489U JP H0713221 Y2 JPH0713221 Y2 JP H0713221Y2
Authority
JP
Japan
Prior art keywords
carrier
carrier body
wafer
wafers
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989002504U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0292931U (enrdf_load_stackoverflow
Inventor
秀洋 益子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Valqua Industries Ltd
Original Assignee
Nippon Valqua Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Valqua Industries Ltd filed Critical Nippon Valqua Industries Ltd
Priority to JP1989002504U priority Critical patent/JPH0713221Y2/ja
Publication of JPH0292931U publication Critical patent/JPH0292931U/ja
Application granted granted Critical
Publication of JPH0713221Y2 publication Critical patent/JPH0713221Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP1989002504U 1989-01-12 1989-01-12 半導体ウェハー用キャリア Expired - Lifetime JPH0713221Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989002504U JPH0713221Y2 (ja) 1989-01-12 1989-01-12 半導体ウェハー用キャリア

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989002504U JPH0713221Y2 (ja) 1989-01-12 1989-01-12 半導体ウェハー用キャリア

Publications (2)

Publication Number Publication Date
JPH0292931U JPH0292931U (enrdf_load_stackoverflow) 1990-07-24
JPH0713221Y2 true JPH0713221Y2 (ja) 1995-03-29

Family

ID=31203323

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989002504U Expired - Lifetime JPH0713221Y2 (ja) 1989-01-12 1989-01-12 半導体ウェハー用キャリア

Country Status (1)

Country Link
JP (1) JPH0713221Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6384045A (ja) * 1986-09-26 1988-04-14 Nec Corp 半導体ウエハ−の収納容器

Also Published As

Publication number Publication date
JPH0292931U (enrdf_load_stackoverflow) 1990-07-24

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