JPH0292931U - - Google Patents

Info

Publication number
JPH0292931U
JPH0292931U JP250489U JP250489U JPH0292931U JP H0292931 U JPH0292931 U JP H0292931U JP 250489 U JP250489 U JP 250489U JP 250489 U JP250489 U JP 250489U JP H0292931 U JPH0292931 U JP H0292931U
Authority
JP
Japan
Prior art keywords
carrier body
carrier
wafers
erected
grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP250489U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0713221Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989002504U priority Critical patent/JPH0713221Y2/ja
Publication of JPH0292931U publication Critical patent/JPH0292931U/ja
Application granted granted Critical
Publication of JPH0713221Y2 publication Critical patent/JPH0713221Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Packaging Frangible Articles (AREA)
JP1989002504U 1989-01-12 1989-01-12 半導体ウェハー用キャリア Expired - Lifetime JPH0713221Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989002504U JPH0713221Y2 (ja) 1989-01-12 1989-01-12 半導体ウェハー用キャリア

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989002504U JPH0713221Y2 (ja) 1989-01-12 1989-01-12 半導体ウェハー用キャリア

Publications (2)

Publication Number Publication Date
JPH0292931U true JPH0292931U (enrdf_load_stackoverflow) 1990-07-24
JPH0713221Y2 JPH0713221Y2 (ja) 1995-03-29

Family

ID=31203323

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989002504U Expired - Lifetime JPH0713221Y2 (ja) 1989-01-12 1989-01-12 半導体ウェハー用キャリア

Country Status (1)

Country Link
JP (1) JPH0713221Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6384045A (ja) * 1986-09-26 1988-04-14 Nec Corp 半導体ウエハ−の収納容器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6384045A (ja) * 1986-09-26 1988-04-14 Nec Corp 半導体ウエハ−の収納容器

Also Published As

Publication number Publication date
JPH0713221Y2 (ja) 1995-03-29

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