JPH069492Y2 - ウエハ洗浄乾燥装置 - Google Patents

ウエハ洗浄乾燥装置

Info

Publication number
JPH069492Y2
JPH069492Y2 JP1987047291U JP4729187U JPH069492Y2 JP H069492 Y2 JPH069492 Y2 JP H069492Y2 JP 1987047291 U JP1987047291 U JP 1987047291U JP 4729187 U JP4729187 U JP 4729187U JP H069492 Y2 JPH069492 Y2 JP H069492Y2
Authority
JP
Japan
Prior art keywords
wafer
cleaning
vacuum
drying
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987047291U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63153529U (enrdf_load_stackoverflow
Inventor
史麻呂 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1987047291U priority Critical patent/JPH069492Y2/ja
Publication of JPS63153529U publication Critical patent/JPS63153529U/ja
Application granted granted Critical
Publication of JPH069492Y2 publication Critical patent/JPH069492Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP1987047291U 1987-03-30 1987-03-30 ウエハ洗浄乾燥装置 Expired - Lifetime JPH069492Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987047291U JPH069492Y2 (ja) 1987-03-30 1987-03-30 ウエハ洗浄乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987047291U JPH069492Y2 (ja) 1987-03-30 1987-03-30 ウエハ洗浄乾燥装置

Publications (2)

Publication Number Publication Date
JPS63153529U JPS63153529U (enrdf_load_stackoverflow) 1988-10-07
JPH069492Y2 true JPH069492Y2 (ja) 1994-03-09

Family

ID=30867759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987047291U Expired - Lifetime JPH069492Y2 (ja) 1987-03-30 1987-03-30 ウエハ洗浄乾燥装置

Country Status (1)

Country Link
JP (1) JPH069492Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5727244B2 (ja) * 2011-01-28 2015-06-03 リンテック株式会社 支持装置及び支持方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5932056B2 (ja) * 1979-01-30 1984-08-06 松下電器産業株式会社 半導体装置の製造方法
JPS56118347A (en) * 1980-02-22 1981-09-17 Hitachi Ltd Drying device
JPS57188347U (enrdf_load_stackoverflow) * 1981-05-22 1982-11-30

Also Published As

Publication number Publication date
JPS63153529U (enrdf_load_stackoverflow) 1988-10-07

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