JPH0663089B2 - 帯状のサブストレートを連続的にコーティングする装置 - Google Patents

帯状のサブストレートを連続的にコーティングする装置

Info

Publication number
JPH0663089B2
JPH0663089B2 JP3211809A JP21180991A JPH0663089B2 JP H0663089 B2 JPH0663089 B2 JP H0663089B2 JP 3211809 A JP3211809 A JP 3211809A JP 21180991 A JP21180991 A JP 21180991A JP H0663089 B2 JPH0663089 B2 JP H0663089B2
Authority
JP
Japan
Prior art keywords
evaporator
vessels
strip
coating
vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3211809A
Other languages
English (en)
Japanese (ja)
Other versions
JPH04247872A (ja
Inventor
エルフェルス ブイェールン
リュプザム クレメンス
ハインツ ヨッヘン
ハルヴァルト ゲオルク
ライボルト ウルリッヒ
ロス ノルベルト
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Deutschland Holding GmbH
Original Assignee
Unaxis Deutschland Holding GmbH
Oerlikon Deutschland Holding GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unaxis Deutschland Holding GmbH, Oerlikon Deutschland Holding GmbH filed Critical Unaxis Deutschland Holding GmbH
Publication of JPH04247872A publication Critical patent/JPH04247872A/ja
Publication of JPH0663089B2 publication Critical patent/JPH0663089B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP3211809A 1990-08-27 1991-08-23 帯状のサブストレートを連続的にコーティングする装置 Expired - Lifetime JPH0663089B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4027034.3 1990-08-27
DE4027034A DE4027034C1 (enExample) 1990-08-27 1990-08-27

Publications (2)

Publication Number Publication Date
JPH04247872A JPH04247872A (ja) 1992-09-03
JPH0663089B2 true JPH0663089B2 (ja) 1994-08-17

Family

ID=6412994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3211809A Expired - Lifetime JPH0663089B2 (ja) 1990-08-27 1991-08-23 帯状のサブストレートを連続的にコーティングする装置

Country Status (4)

Country Link
EP (1) EP0474964B1 (enExample)
JP (1) JPH0663089B2 (enExample)
DE (2) DE4027034C1 (enExample)
ES (1) ES2054395T3 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4120910A1 (de) * 1990-08-27 1993-01-07 Leybold Ag Vorrichtung zur laufenden beschichtung von bandfoermigen substraten
DE4404550C2 (de) * 1994-02-12 2003-10-30 Applied Films Gmbh & Co Kg Anordnung zur Regelung der Verdampferrate von Tiegeln
DE19607400C2 (de) 1996-02-28 1999-09-09 Leybold Ag Verdampferschiffchen für eine Vorrichtung zur Beschichtung von Substraten
US6202591B1 (en) * 1998-11-12 2001-03-20 Flex Products, Inc. Linear aperture deposition apparatus and coating process
DE102004047938B4 (de) * 2004-10-01 2008-10-23 Leybold Optics Gmbh Vorrichtung für die Verdampferbeschichtung eines bandförmigen Substrates
DE102006056984A1 (de) * 2006-11-30 2008-06-05 Leybold Optics Gmbh Laufende Beschichtung
DE102009009992B4 (de) 2009-02-23 2013-08-29 Leybold Optics Gmbh Verfahren zur Abscheidung von CIS-, CIGS- oder CIGSSe-Schichten und Verwendung eines Drahtes zur Herstellung dieser Schichten
CN102212784A (zh) * 2010-04-12 2011-10-12 无锡尚德太阳能电力有限公司 沉积蒸发源
CN107406969B (zh) * 2015-06-09 2020-06-19 株式会社爱发科 卷取式成膜装置、蒸发源单元和卷取式成膜方法
EP3124648B1 (de) 2015-07-31 2018-03-28 Hilberg & Partner GmbH Verdampfersystem sowie verdampfungsverfahren für die beschichtung eines bandförmigen substrats

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3563202A (en) * 1969-06-25 1971-02-16 Pennwalt Corp Mobile vbaporative firing source
DE3615487A1 (de) * 1986-05-07 1987-11-19 Helmuth Schmoock Vorrichtung zur gleichmaessigen metallisierung von folien

Also Published As

Publication number Publication date
ES2054395T3 (es) 1994-08-01
JPH04247872A (ja) 1992-09-03
EP0474964A3 (en) 1992-04-08
DE4027034C1 (enExample) 1991-09-12
DE59101843D1 (de) 1994-07-14
EP0474964A2 (de) 1992-03-18
EP0474964B1 (de) 1994-06-08

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