ES2054395T3 - Dispositivo para recubrimiento continuo de substratos en forma de bandas. - Google Patents

Dispositivo para recubrimiento continuo de substratos en forma de bandas.

Info

Publication number
ES2054395T3
ES2054395T3 ES91106764T ES91106764T ES2054395T3 ES 2054395 T3 ES2054395 T3 ES 2054395T3 ES 91106764 T ES91106764 T ES 91106764T ES 91106764 T ES91106764 T ES 91106764T ES 2054395 T3 ES2054395 T3 ES 2054395T3
Authority
ES
Spain
Prior art keywords
towards
evaporizing
evaporization
bank
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES91106764T
Other languages
English (en)
Spanish (es)
Inventor
Bjorn Elvers
Klemens Rubsam
Jochen Heinz
Georg Harwarth
Ulrich Reibold
Norbert Ross
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Application granted granted Critical
Publication of ES2054395T3 publication Critical patent/ES2054395T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
ES91106764T 1990-08-27 1991-04-26 Dispositivo para recubrimiento continuo de substratos en forma de bandas. Expired - Lifetime ES2054395T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4027034A DE4027034C1 (enExample) 1990-08-27 1990-08-27

Publications (1)

Publication Number Publication Date
ES2054395T3 true ES2054395T3 (es) 1994-08-01

Family

ID=6412994

Family Applications (1)

Application Number Title Priority Date Filing Date
ES91106764T Expired - Lifetime ES2054395T3 (es) 1990-08-27 1991-04-26 Dispositivo para recubrimiento continuo de substratos en forma de bandas.

Country Status (4)

Country Link
EP (1) EP0474964B1 (enExample)
JP (1) JPH0663089B2 (enExample)
DE (2) DE4027034C1 (enExample)
ES (1) ES2054395T3 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4120910A1 (de) * 1990-08-27 1993-01-07 Leybold Ag Vorrichtung zur laufenden beschichtung von bandfoermigen substraten
DE4404550C2 (de) * 1994-02-12 2003-10-30 Applied Films Gmbh & Co Kg Anordnung zur Regelung der Verdampferrate von Tiegeln
DE19607400C2 (de) 1996-02-28 1999-09-09 Leybold Ag Verdampferschiffchen für eine Vorrichtung zur Beschichtung von Substraten
US6202591B1 (en) * 1998-11-12 2001-03-20 Flex Products, Inc. Linear aperture deposition apparatus and coating process
DE102004047938B4 (de) * 2004-10-01 2008-10-23 Leybold Optics Gmbh Vorrichtung für die Verdampferbeschichtung eines bandförmigen Substrates
DE102006056984A1 (de) * 2006-11-30 2008-06-05 Leybold Optics Gmbh Laufende Beschichtung
DE102009009992B4 (de) 2009-02-23 2013-08-29 Leybold Optics Gmbh Verfahren zur Abscheidung von CIS-, CIGS- oder CIGSSe-Schichten und Verwendung eines Drahtes zur Herstellung dieser Schichten
CN102212784A (zh) * 2010-04-12 2011-10-12 无锡尚德太阳能电力有限公司 沉积蒸发源
CN107406969B (zh) * 2015-06-09 2020-06-19 株式会社爱发科 卷取式成膜装置、蒸发源单元和卷取式成膜方法
EP3124648B1 (de) 2015-07-31 2018-03-28 Hilberg & Partner GmbH Verdampfersystem sowie verdampfungsverfahren für die beschichtung eines bandförmigen substrats

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3563202A (en) * 1969-06-25 1971-02-16 Pennwalt Corp Mobile vbaporative firing source
DE3615487A1 (de) * 1986-05-07 1987-11-19 Helmuth Schmoock Vorrichtung zur gleichmaessigen metallisierung von folien

Also Published As

Publication number Publication date
JPH0663089B2 (ja) 1994-08-17
JPH04247872A (ja) 1992-09-03
EP0474964A3 (en) 1992-04-08
DE4027034C1 (enExample) 1991-09-12
DE59101843D1 (de) 1994-07-14
EP0474964A2 (de) 1992-03-18
EP0474964B1 (de) 1994-06-08

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