JPH066248Y2 - ２段式アクチュエータ - Google Patents

２段式アクチュエータ

Info

Publication number
JPH066248Y2
JPH066248Y2 JP2411388U JP2411388U JPH066248Y2 JP H066248 Y2 JPH066248 Y2 JP H066248Y2 JP 2411388 U JP2411388 U JP 2411388U JP 2411388 U JP2411388 U JP 2411388U JP H066248 Y2 JPH066248 Y2 JP H066248Y2
Authority
JP
Japan
Prior art keywords
diaphragm
stage
negative pressure
cup
joint
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2411388U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01128003U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
毅 柳父
Original Assignee
エヌオーケー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エヌオーケー株式会社 filed Critical エヌオーケー株式会社
Priority to JP2411388U priority Critical patent/JPH066248Y2/ja
Publication of JPH01128003U publication Critical patent/JPH01128003U/ja
Application granted granted Critical
Publication of JPH066248Y2 publication Critical patent/JPH066248Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Actuator (AREA)
JP2411388U 1988-02-25 1988-02-25 ２段式アクチュエータ Expired - Lifetime JPH066248Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2411388U JPH066248Y2 (ja) 1988-02-25 1988-02-25 ２段式アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2411388U JPH066248Y2 (ja) 1988-02-25 1988-02-25 ２段式アクチュエータ

Publications (2)

Publication Number Publication Date
JPH01128003U JPH01128003U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-08-31
JPH066248Y2 true JPH066248Y2 (ja) 1994-02-16

Family

ID=31243680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2411388U Expired - Lifetime JPH066248Y2 (ja) 1988-02-25 1988-02-25 ２段式アクチュエータ

Country Status (1)

Country Link
JP (1) JPH066248Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH01128003U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-08-31

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