JPH0648849Y2 - 基板処理装置 - Google Patents

基板処理装置

Info

Publication number
JPH0648849Y2
JPH0648849Y2 JP1989099460U JP9946089U JPH0648849Y2 JP H0648849 Y2 JPH0648849 Y2 JP H0648849Y2 JP 1989099460 U JP1989099460 U JP 1989099460U JP 9946089 U JP9946089 U JP 9946089U JP H0648849 Y2 JPH0648849 Y2 JP H0648849Y2
Authority
JP
Japan
Prior art keywords
substrate
transfer means
unit
substrate transfer
self
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989099460U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0338636U (en, 2012
Inventor
信敏 大神
憲司 杉本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP1989099460U priority Critical patent/JPH0648849Y2/ja
Publication of JPH0338636U publication Critical patent/JPH0338636U/ja
Application granted granted Critical
Publication of JPH0648849Y2 publication Critical patent/JPH0648849Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Multi-Process Working Machines And Systems (AREA)
  • General Factory Administration (AREA)
JP1989099460U 1989-08-25 1989-08-25 基板処理装置 Expired - Lifetime JPH0648849Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989099460U JPH0648849Y2 (ja) 1989-08-25 1989-08-25 基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989099460U JPH0648849Y2 (ja) 1989-08-25 1989-08-25 基板処理装置

Publications (2)

Publication Number Publication Date
JPH0338636U JPH0338636U (en, 2012) 1991-04-15
JPH0648849Y2 true JPH0648849Y2 (ja) 1994-12-12

Family

ID=31648512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989099460U Expired - Lifetime JPH0648849Y2 (ja) 1989-08-25 1989-08-25 基板処理装置

Country Status (1)

Country Link
JP (1) JPH0648849Y2 (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4389424B2 (ja) * 2001-12-25 2009-12-24 東京エレクトロン株式会社 被処理体の搬送機構及び処理システム
JP4580780B2 (ja) * 2005-02-18 2010-11-17 秀光 翁長 生ごみ処理装置及び処理方法
CN104443951B (zh) * 2014-11-26 2016-05-25 芜湖懒人智能科技有限公司 一种旋叶式智能垃圾桶及其控制电路

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63215048A (ja) * 1987-03-04 1988-09-07 Toshiba Corp 半導体組立部品の群管理方法
JP2660285B2 (ja) * 1988-02-17 1997-10-08 東京エレクトロン株式会社 基板処理装置及び基板処理方法

Also Published As

Publication number Publication date
JPH0338636U (en, 2012) 1991-04-15

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term