JPH064306Y2 - 物理量変換装置 - Google Patents

物理量変換装置

Info

Publication number
JPH064306Y2
JPH064306Y2 JP1986149688U JP14968886U JPH064306Y2 JP H064306 Y2 JPH064306 Y2 JP H064306Y2 JP 1986149688 U JP1986149688 U JP 1986149688U JP 14968886 U JP14968886 U JP 14968886U JP H064306 Y2 JPH064306 Y2 JP H064306Y2
Authority
JP
Japan
Prior art keywords
temperature
sensor
signal
meter body
differential pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986149688U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6355137U (enrdf_load_stackoverflow
Inventor
敏夫 関口
輝孝 平田
惇 木村
信行 山下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP1986149688U priority Critical patent/JPH064306Y2/ja
Publication of JPS6355137U publication Critical patent/JPS6355137U/ja
Application granted granted Critical
Publication of JPH064306Y2 publication Critical patent/JPH064306Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
JP1986149688U 1986-09-30 1986-09-30 物理量変換装置 Expired - Lifetime JPH064306Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986149688U JPH064306Y2 (ja) 1986-09-30 1986-09-30 物理量変換装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986149688U JPH064306Y2 (ja) 1986-09-30 1986-09-30 物理量変換装置

Publications (2)

Publication Number Publication Date
JPS6355137U JPS6355137U (enrdf_load_stackoverflow) 1988-04-13
JPH064306Y2 true JPH064306Y2 (ja) 1994-02-02

Family

ID=31065134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986149688U Expired - Lifetime JPH064306Y2 (ja) 1986-09-30 1986-09-30 物理量変換装置

Country Status (1)

Country Link
JP (1) JPH064306Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016166824A1 (ja) * 2015-04-15 2016-10-20 理化工業株式会社 センサ信号変換器及びセンサ信号変換方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2786668B2 (ja) * 1989-04-21 1998-08-13 株式会社日立製作所 自動車のエンジン制御用センサ
JP2523912B2 (ja) * 1989-12-22 1996-08-14 松下電器産業株式会社 車載用角速度検出装置
JP5445020B2 (ja) * 2009-10-20 2014-03-19 横河電機株式会社 電子式差圧・圧力伝送器
JP5548531B2 (ja) * 2010-06-17 2014-07-16 アズビル株式会社 デュアル物理量センサ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57115873A (en) * 1981-01-09 1982-07-19 Hitachi Ltd Semiconductor diaphragm type pressure sensor
JPS6046419A (ja) * 1983-08-25 1985-03-13 Tokyo Tatsuno Co Ltd 流量測定装置
JPS6076637A (ja) * 1983-10-03 1985-05-01 Hitachi Ltd 半導体圧力計
US4592002A (en) * 1983-12-13 1986-05-27 Honeywell Inc. Method of digital temperature compensation and a digital data handling system utilizing the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016166824A1 (ja) * 2015-04-15 2016-10-20 理化工業株式会社 センサ信号変換器及びセンサ信号変換方法
JPWO2016166824A1 (ja) * 2015-04-15 2017-11-24 理化工業株式会社 センサ信号変換器及びセンサ信号変換方法

Also Published As

Publication number Publication date
JPS6355137U (enrdf_load_stackoverflow) 1988-04-13

Similar Documents

Publication Publication Date Title
US7430918B2 (en) Amplified flow through pressure sensor
US6516672B2 (en) Sigma-delta analog to digital converter for capacitive pressure sensor and process transmitter
JPS5821688B2 (ja) アツリヨクゲ−ジ
KR20010032103A (ko) 마이크로-기계적 차압 감응 장치
KR970007320A (ko) 반도체 차압(差壓) 측정장치
JP2719448B2 (ja) 半導体圧力検出装置
JPH064306Y2 (ja) 物理量変換装置
ATE64994T1 (de) Membran fuer kraftmesseinrichtungen.
US5034848A (en) Low pressure sensor
JP2800083B2 (ja) 圧力トランスデューサ組立体およびその製造方法
JPS6061637A (ja) 複合機能形差圧センサ
US6370960B1 (en) Capacitive sensor
JP3409980B2 (ja) 半導体圧力センサ
US4682502A (en) Pressure sensor
JPH0933371A (ja) 半導体圧力計
CN100416250C (zh) 小型化智能差压/压力变送器
JP3329480B2 (ja) 差圧測定装置
JP3607420B2 (ja) ドライタイプ圧力検出装置
JP2005010021A (ja) 差圧伝送器
JP3067001B2 (ja) 圧力センサ
RU2010200C1 (ru) Емкостный датчик давления и устройство формирования его выходного сигнала
CN219064622U (zh) 一种液体位置压力传感器
JP3370810B2 (ja) 静電容量型圧力センサ
JPS6239307Y2 (enrdf_load_stackoverflow)
JPH0438273Y2 (enrdf_load_stackoverflow)