JPH0638113Y2 - 縦形炉におけるｏリングシール部の冷却構造 - Google Patents

縦形炉におけるｏリングシール部の冷却構造

Info

Publication number
JPH0638113Y2
JPH0638113Y2 JP1988016070U JP1607088U JPH0638113Y2 JP H0638113 Y2 JPH0638113 Y2 JP H0638113Y2 JP 1988016070 U JP1988016070 U JP 1988016070U JP 1607088 U JP1607088 U JP 1607088U JP H0638113 Y2 JPH0638113 Y2 JP H0638113Y2
Authority
JP
Japan
Prior art keywords
reaction tube
furnace
ring
flange
cooling jacket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988016070U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01122064U (US20020051482A1-20020502-M00012.png
Inventor
修司 米満
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP1988016070U priority Critical patent/JPH0638113Y2/ja
Publication of JPH01122064U publication Critical patent/JPH01122064U/ja
Application granted granted Critical
Publication of JPH0638113Y2 publication Critical patent/JPH0638113Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1988016070U 1988-02-08 1988-02-08 縦形炉におけるｏリングシール部の冷却構造 Expired - Lifetime JPH0638113Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988016070U JPH0638113Y2 (ja) 1988-02-08 1988-02-08 縦形炉におけるｏリングシール部の冷却構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988016070U JPH0638113Y2 (ja) 1988-02-08 1988-02-08 縦形炉におけるｏリングシール部の冷却構造

Publications (2)

Publication Number Publication Date
JPH01122064U JPH01122064U (US20020051482A1-20020502-M00012.png) 1989-08-18
JPH0638113Y2 true JPH0638113Y2 (ja) 1994-10-05

Family

ID=31228676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988016070U Expired - Lifetime JPH0638113Y2 (ja) 1988-02-08 1988-02-08 縦形炉におけるｏリングシール部の冷却構造

Country Status (1)

Country Link
JP (1) JPH0638113Y2 (US20020051482A1-20020502-M00012.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6317663B2 (ja) * 2014-11-06 2018-04-25 助川電気工業株式会社 鋳造用金型

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4539933A (en) * 1983-08-31 1985-09-10 Anicon, Inc. Chemical vapor deposition apparatus
JPH0217019Y2 (US20020051482A1-20020502-M00012.png) * 1985-02-26 1990-05-11
JPS6256232A (ja) * 1985-09-02 1987-03-11 Canon Inc 紙搬送装置

Also Published As

Publication number Publication date
JPH01122064U (US20020051482A1-20020502-M00012.png) 1989-08-18

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