JPH0635465Y2 - 気相成長用基板固定治具 - Google Patents
気相成長用基板固定治具Info
- Publication number
- JPH0635465Y2 JPH0635465Y2 JP1986180724U JP18072486U JPH0635465Y2 JP H0635465 Y2 JPH0635465 Y2 JP H0635465Y2 JP 1986180724 U JP1986180724 U JP 1986180724U JP 18072486 U JP18072486 U JP 18072486U JP H0635465 Y2 JPH0635465 Y2 JP H0635465Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- recess
- semiconductor substrate
- quartz
- quartz plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims description 72
- 238000001947 vapour-phase growth Methods 0.000 title claims description 5
- 239000010453 quartz Substances 0.000 claims description 35
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 35
- 239000004065 semiconductor Substances 0.000 claims description 33
- 210000000078 claw Anatomy 0.000 claims description 6
- 238000005452 bending Methods 0.000 claims description 2
- 239000013078 crystal Substances 0.000 description 10
- 150000001875 compounds Chemical class 0.000 description 6
- 229910000846 In alloy Inorganic materials 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000005275 alloying Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986180724U JPH0635465Y2 (ja) | 1986-11-25 | 1986-11-25 | 気相成長用基板固定治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986180724U JPH0635465Y2 (ja) | 1986-11-25 | 1986-11-25 | 気相成長用基板固定治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6384932U JPS6384932U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-06-03 |
| JPH0635465Y2 true JPH0635465Y2 (ja) | 1994-09-14 |
Family
ID=31124940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986180724U Expired - Lifetime JPH0635465Y2 (ja) | 1986-11-25 | 1986-11-25 | 気相成長用基板固定治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0635465Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60234314A (ja) * | 1984-05-07 | 1985-11-21 | Agency Of Ind Science & Technol | ウエハ保持構造 |
-
1986
- 1986-11-25 JP JP1986180724U patent/JPH0635465Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6384932U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-06-03 |
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