JPH0627349Y2 - ロボツトハンド - Google Patents

ロボツトハンド

Info

Publication number
JPH0627349Y2
JPH0627349Y2 JP1987076516U JP7651687U JPH0627349Y2 JP H0627349 Y2 JPH0627349 Y2 JP H0627349Y2 JP 1987076516 U JP1987076516 U JP 1987076516U JP 7651687 U JP7651687 U JP 7651687U JP H0627349 Y2 JPH0627349 Y2 JP H0627349Y2
Authority
JP
Japan
Prior art keywords
robot hand
air chamber
air
clean
gripping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987076516U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63186589U (enExample
Inventor
隆輝 三田村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1987076516U priority Critical patent/JPH0627349Y2/ja
Publication of JPS63186589U publication Critical patent/JPS63186589U/ja
Application granted granted Critical
Publication of JPH0627349Y2 publication Critical patent/JPH0627349Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987076516U 1987-05-21 1987-05-21 ロボツトハンド Expired - Lifetime JPH0627349Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987076516U JPH0627349Y2 (ja) 1987-05-21 1987-05-21 ロボツトハンド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987076516U JPH0627349Y2 (ja) 1987-05-21 1987-05-21 ロボツトハンド

Publications (2)

Publication Number Publication Date
JPS63186589U JPS63186589U (enExample) 1988-11-30
JPH0627349Y2 true JPH0627349Y2 (ja) 1994-07-27

Family

ID=30923670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987076516U Expired - Lifetime JPH0627349Y2 (ja) 1987-05-21 1987-05-21 ロボツトハンド

Country Status (1)

Country Link
JP (1) JPH0627349Y2 (enExample)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60180789A (ja) * 1984-02-25 1985-09-14 ソニー株式会社 クリ−ンル−ム内作業ロボツト装置
JPS6129633A (ja) * 1984-07-20 1986-02-10 Hitachi Ltd 移送装置
JPH0682741B2 (ja) * 1985-09-04 1994-10-19 株式会社椿本チエイン ウエハ搬送装置
JPS6294291A (ja) * 1985-10-21 1987-04-30 フアナツク株式会社 産業用ロボツトの防塵構造

Also Published As

Publication number Publication date
JPS63186589U (enExample) 1988-11-30

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