JPS63186589U - - Google Patents
Info
- Publication number
- JPS63186589U JPS63186589U JP7651687U JP7651687U JPS63186589U JP S63186589 U JPS63186589 U JP S63186589U JP 7651687 U JP7651687 U JP 7651687U JP 7651687 U JP7651687 U JP 7651687U JP S63186589 U JPS63186589 U JP S63186589U
- Authority
- JP
- Japan
- Prior art keywords
- robot hand
- air chamber
- utility
- model registration
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987076516U JPH0627349Y2 (ja) | 1987-05-21 | 1987-05-21 | ロボツトハンド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987076516U JPH0627349Y2 (ja) | 1987-05-21 | 1987-05-21 | ロボツトハンド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63186589U true JPS63186589U (enExample) | 1988-11-30 |
| JPH0627349Y2 JPH0627349Y2 (ja) | 1994-07-27 |
Family
ID=30923670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987076516U Expired - Lifetime JPH0627349Y2 (ja) | 1987-05-21 | 1987-05-21 | ロボツトハンド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0627349Y2 (enExample) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60180789A (ja) * | 1984-02-25 | 1985-09-14 | ソニー株式会社 | クリ−ンル−ム内作業ロボツト装置 |
| JPS6129633A (ja) * | 1984-07-20 | 1986-02-10 | Hitachi Ltd | 移送装置 |
| JPS6257882A (ja) * | 1985-09-04 | 1987-03-13 | 株式会社椿本チエイン | ウエハ搬送装置 |
| JPS6294291A (ja) * | 1985-10-21 | 1987-04-30 | フアナツク株式会社 | 産業用ロボツトの防塵構造 |
-
1987
- 1987-05-21 JP JP1987076516U patent/JPH0627349Y2/ja not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60180789A (ja) * | 1984-02-25 | 1985-09-14 | ソニー株式会社 | クリ−ンル−ム内作業ロボツト装置 |
| JPS6129633A (ja) * | 1984-07-20 | 1986-02-10 | Hitachi Ltd | 移送装置 |
| JPS6257882A (ja) * | 1985-09-04 | 1987-03-13 | 株式会社椿本チエイン | ウエハ搬送装置 |
| JPS6294291A (ja) * | 1985-10-21 | 1987-04-30 | フアナツク株式会社 | 産業用ロボツトの防塵構造 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0627349Y2 (ja) | 1994-07-27 |