JPH0624838Y2 - ペリクル収納容器 - Google Patents

Info

Publication number

JPH0624838Y2

JPH0624838Y2 JP1988070543U JP7054388U JPH0624838Y2 JP H0624838 Y2 JPH0624838 Y2 JP H0624838Y2 JP 1988070543 U JP1988070543 U JP 1988070543U JP 7054388 U JP7054388 U JP 7054388U JP H0624838 Y2 JPH0624838 Y2 JP H0624838Y2

Authority

JP

Japan

Prior art keywords

pellicle

case

support frame

cover

storage container

Prior art date

1988-05-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

Links

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• 238000003860 storage Methods 0.000 title claims description 45
• 239000000853 adhesive Substances 0.000 claims description 18
• 230000001070 adhesive effect Effects 0.000 claims description 17
• 239000000463 material Substances 0.000 description 6
• 239000004820 Pressure-sensitive adhesive Substances 0.000 description 5
• 230000000712 assembly Effects 0.000 description 4
• 238000000429 assembly Methods 0.000 description 4
• 239000000428 dust Substances 0.000 description 4
• 238000004806 packaging method and process Methods 0.000 description 3
• 239000004033 plastic Substances 0.000 description 3
• 229920003023 plastic Polymers 0.000 description 3
• -1 polypropylene, ethylene-vinyl acetate Polymers 0.000 description 3
• 239000000758 substrate Substances 0.000 description 3
• 239000011248 coating agent Substances 0.000 description 2
• 238000000576 coating method Methods 0.000 description 2
• 238000001459 lithography Methods 0.000 description 2
• 238000000034 method Methods 0.000 description 2
• 239000005022 packaging material Substances 0.000 description 2
• 239000004065 semiconductor Substances 0.000 description 2
• 239000010409 thin film Substances 0.000 description 2
• NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
• 239000004698 Polyethylene Substances 0.000 description 1
• 239000004793 Polystyrene Substances 0.000 description 1
• PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Natural products C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 1
• NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
• 229920002301 cellulose acetate Polymers 0.000 description 1
• 238000004140 cleaning Methods 0.000 description 1
• 230000003749 cleanliness Effects 0.000 description 1
• 229920001577 copolymer Polymers 0.000 description 1
• 238000001035 drying Methods 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 239000005038 ethylene vinyl acetate Substances 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 238000000465 moulding Methods 0.000 description 1
• 230000002093 peripheral effect Effects 0.000 description 1
• 239000002985 plastic film Substances 0.000 description 1
• 229920006255 plastic film Polymers 0.000 description 1
• 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
• 239000004417 polycarbonate Substances 0.000 description 1
• 229920000515 polycarbonate Polymers 0.000 description 1
• 229920000728 polyester Polymers 0.000 description 1
• 229920000573 polyethylene Polymers 0.000 description 1
• 229920000139 polyethylene terephthalate Polymers 0.000 description 1
• 239000005020 polyethylene terephthalate Substances 0.000 description 1
• 229920000642 polymer Polymers 0.000 description 1
• 239000004926 polymethyl methacrylate Substances 0.000 description 1
• 229920002223 polystyrene Polymers 0.000 description 1
• 239000004800 polyvinyl chloride Substances 0.000 description 1
• 229920000915 polyvinyl chloride Polymers 0.000 description 1
• 238000003825 pressing Methods 0.000 description 1
• 238000007789 sealing Methods 0.000 description 1
• 230000035939 shock Effects 0.000 description 1