JPH0617281Y2 - 半導体物品の縦型熱処理装置におけるボ−ト支持装置 - Google Patents
半導体物品の縦型熱処理装置におけるボ−ト支持装置Info
- Publication number
- JPH0617281Y2 JPH0617281Y2 JP19104084U JP19104084U JPH0617281Y2 JP H0617281 Y2 JPH0617281 Y2 JP H0617281Y2 JP 19104084 U JP19104084 U JP 19104084U JP 19104084 U JP19104084 U JP 19104084U JP H0617281 Y2 JPH0617281 Y2 JP H0617281Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer boat
- shaft
- boat
- connecting shaft
- processing tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims description 13
- 238000010438 heat treatment Methods 0.000 title claims description 11
- 235000012431 wafers Nutrition 0.000 description 51
- 238000009792 diffusion process Methods 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 230000008878 coupling Effects 0.000 description 10
- 238000010168 coupling process Methods 0.000 description 10
- 238000005859 coupling reaction Methods 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 239000010453 quartz Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 208000037998 chronic venous disease Diseases 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19104084U JPH0617281Y2 (ja) | 1984-12-17 | 1984-12-17 | 半導体物品の縦型熱処理装置におけるボ−ト支持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19104084U JPH0617281Y2 (ja) | 1984-12-17 | 1984-12-17 | 半導体物品の縦型熱処理装置におけるボ−ト支持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61106025U JPS61106025U (enrdf_load_stackoverflow) | 1986-07-05 |
| JPH0617281Y2 true JPH0617281Y2 (ja) | 1994-05-02 |
Family
ID=30748481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19104084U Expired - Lifetime JPH0617281Y2 (ja) | 1984-12-17 | 1984-12-17 | 半導体物品の縦型熱処理装置におけるボ−ト支持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0617281Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5162899B2 (ja) * | 2006-12-28 | 2013-03-13 | 村田機械株式会社 | 被搬送物の保管装置 |
-
1984
- 1984-12-17 JP JP19104084U patent/JPH0617281Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61106025U (enrdf_load_stackoverflow) | 1986-07-05 |
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