JPH0587782B2 - - Google Patents

Info

Publication number
JPH0587782B2
JPH0587782B2 JP62003657A JP365787A JPH0587782B2 JP H0587782 B2 JPH0587782 B2 JP H0587782B2 JP 62003657 A JP62003657 A JP 62003657A JP 365787 A JP365787 A JP 365787A JP H0587782 B2 JPH0587782 B2 JP H0587782B2
Authority
JP
Japan
Prior art keywords
signal
dark
circuit
level
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62003657A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63171345A (ja
Inventor
Masato Sakakibara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP365787A priority Critical patent/JPS63171345A/ja
Publication of JPS63171345A publication Critical patent/JPS63171345A/ja
Publication of JPH0587782B2 publication Critical patent/JPH0587782B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP365787A 1987-01-09 1987-01-09 表面欠陥検査装置 Granted JPS63171345A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP365787A JPS63171345A (ja) 1987-01-09 1987-01-09 表面欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP365787A JPS63171345A (ja) 1987-01-09 1987-01-09 表面欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS63171345A JPS63171345A (ja) 1988-07-15
JPH0587782B2 true JPH0587782B2 (enrdf_load_html_response) 1993-12-17

Family

ID=11563537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP365787A Granted JPS63171345A (ja) 1987-01-09 1987-01-09 表面欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS63171345A (enrdf_load_html_response)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4491922B2 (ja) * 2000-06-21 2010-06-30 トヨタ自動車株式会社 表面欠陥検査方法
JP4495327B2 (ja) * 2000-10-05 2010-07-07 株式会社メック 欠陥検出装置及び方法
JP4633245B2 (ja) * 2000-11-06 2011-02-16 住友化学株式会社 表面検査装置及び表面検査方法
JP2011033392A (ja) * 2009-07-30 2011-02-17 Kobe Steel Ltd 凹凸形状を抽出するための画像処理方法及び画像処理装置
JP6167608B2 (ja) * 2013-03-28 2017-07-26 大日本印刷株式会社 パターン検査システム、パターン検査方法
KR20150022359A (ko) * 2013-08-23 2015-03-04 와이즈플래닛(주) 표면 굴곡을 가진 디펙을 검사하는 장치

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61114113A (ja) * 1984-11-09 1986-05-31 Ishida Scales Mfg Co Ltd 重量判定方法

Also Published As

Publication number Publication date
JPS63171345A (ja) 1988-07-15

Similar Documents

Publication Publication Date Title
JPH08145906A (ja) 被検査面の欠陥検査方法およびその装置
JP3412366B2 (ja) 塗膜平滑性検査装置
JPH0587782B2 (enrdf_load_html_response)
JPH04240557A (ja) 欠陥検出方法
JP2638121B2 (ja) 表面欠陥検査装置
JP2019120644A (ja) 表面検査装置、及び表面検査方法
JPH08145907A (ja) 欠陥検査装置
JPH07318516A (ja) 円形容器の内面検査装置
JPS6330749A (ja) 表面欠陥検査装置
JP4097834B2 (ja) リブ付カラーフィルター基板のリブ欠落の検査方法
JPH08145904A (ja) 明欠陥／暗欠陥検査装置
JPH0645845Y2 (ja) 表面平滑度自動検査装置
JPH0682390A (ja) 表面欠陥検査方法及び装置
JPS6338146A (ja) 表面欠陥検査装置
JPS63108249A (ja) 表面欠陥検査装置
JPS63111448A (ja) 表面欠陥検査装置
JP2508122B2 (ja) 表面欠陥検査装置
JPS63111449A (ja) 表面欠陥検査装置
JPH06148094A (ja) シート状製品の異物混入検査方法
JPS6338147A (ja) 表面欠陥検査装置
JPH05340746A (ja) 表面凹凸検査方法及びその方法に用いる装置
JPH01102347A (ja) 表面欠陥検査装置
JPS5857705B2 (ja) ケイコウジフンタンシヨウホウ オヨビ ソノソウチ
JPS63185182A (ja) 濃淡画像処理方式
JPS6338144A (ja) 表面欠陥検査装置

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees