JPH0582850B2 - - Google Patents

Info

Publication number
JPH0582850B2
JPH0582850B2 JP61245229A JP24522986A JPH0582850B2 JP H0582850 B2 JPH0582850 B2 JP H0582850B2 JP 61245229 A JP61245229 A JP 61245229A JP 24522986 A JP24522986 A JP 24522986A JP H0582850 B2 JPH0582850 B2 JP H0582850B2
Authority
JP
Japan
Prior art keywords
sio
group
polymer
groups
alkali
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61245229A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63101427A (ja
Inventor
Hisashi Sugyama
Kazuo Nate
Takashi Inoe
Akiko Mizushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP24522986A priority Critical patent/JPS63101427A/ja
Publication of JPS63101427A publication Critical patent/JPS63101427A/ja
Publication of JPH0582850B2 publication Critical patent/JPH0582850B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Polymers (AREA)
JP24522986A 1986-10-17 1986-10-17 アルカリ可溶性ラダ−シリコ−ン Granted JPS63101427A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24522986A JPS63101427A (ja) 1986-10-17 1986-10-17 アルカリ可溶性ラダ−シリコ−ン

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24522986A JPS63101427A (ja) 1986-10-17 1986-10-17 アルカリ可溶性ラダ−シリコ−ン

Publications (2)

Publication Number Publication Date
JPS63101427A JPS63101427A (ja) 1988-05-06
JPH0582850B2 true JPH0582850B2 (enExample) 1993-11-22

Family

ID=17130573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24522986A Granted JPS63101427A (ja) 1986-10-17 1986-10-17 アルカリ可溶性ラダ−シリコ−ン

Country Status (1)

Country Link
JP (1) JPS63101427A (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63132942A (ja) * 1986-11-25 1988-06-04 Hitachi Ltd アルカリ可溶性ポリオルガノシルセスキオキサン重合体
JP2567984B2 (ja) * 1990-09-21 1996-12-25 東京応化工業株式会社 ポジ型レジスト組成物
JP4547911B2 (ja) 2002-02-01 2010-09-22 アリアド・ファーマシューティカルズ・インコーポレイテッド リン含有化合物およびその用途
WO2004051376A1 (ja) * 2002-12-02 2004-06-17 Tokyo Ohka Kogyo Co., Ltd. 反射防止膜形成用組成物
JP4361527B2 (ja) * 2002-12-02 2009-11-11 東京応化工業株式会社 化学増幅型シリコーン系ポジ型ホトレジスト組成物、それを用いた二層レジスト材料及びそれらに用いられるラダー型シリコーン共重合体
EP1643307A4 (en) * 2003-06-11 2009-12-23 Tokyo Ohka Kogyo Co Ltd POSITIVE RESIST COMPOSITION, RESIST LAMINATES, AND METHOD OF FORMING RESIST PATTERNS
AU2007319825B2 (en) 2006-11-14 2014-01-23 Ariad Pharmaceuticals, Inc. Oral formulations
JP5533232B2 (ja) * 2009-06-29 2014-06-25 Ｊｓｒ株式会社 ポジ型感放射線性組成物、硬化膜、層間絶縁膜、層間絶縁膜の形成方法、表示素子、及び層間絶縁膜形成用のシロキサンポリマー
WO2016111112A1 (ja) * 2015-01-05 2016-07-14 東レ・ファインケミカル株式会社 シリコーン共重合体およびその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6390534A (ja) * 1986-10-06 1988-04-21 Hitachi Ltd アルカリ可溶性ラダ−シリコ−ン重合体

Also Published As

Publication number Publication date
JPS63101427A (ja) 1988-05-06

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees