JPH0558447B2 - - Google Patents

Info

Publication number
JPH0558447B2
JPH0558447B2 JP18295085A JP18295085A JPH0558447B2 JP H0558447 B2 JPH0558447 B2 JP H0558447B2 JP 18295085 A JP18295085 A JP 18295085A JP 18295085 A JP18295085 A JP 18295085A JP H0558447 B2 JPH0558447 B2 JP H0558447B2
Authority
JP
Japan
Prior art keywords
polymer
groups
soluble
general formula
alkali
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP18295085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6243426A (ja
Inventor
Hisashi Sugyama
Kazuo Nate
Takashi Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP18295085A priority Critical patent/JPS6243426A/ja
Priority to US06/859,370 priority patent/US4745169A/en
Priority to EP86106238A priority patent/EP0204963B1/en
Priority to DE8686106238T priority patent/DE3687479T2/de
Publication of JPS6243426A publication Critical patent/JPS6243426A/ja
Priority to US07/893,946 priority patent/US5264319A/en
Publication of JPH0558447B2 publication Critical patent/JPH0558447B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Silicon Polymers (AREA)
JP18295085A 1985-05-10 1985-08-22 アルカリ可溶性シルメチレン重合体 Granted JPS6243426A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP18295085A JPS6243426A (ja) 1985-08-22 1985-08-22 アルカリ可溶性シルメチレン重合体
US06/859,370 US4745169A (en) 1985-05-10 1986-05-05 Alkali-soluble siloxane polymer, silmethylene polymer, and polyorganosilsesquioxane polymer
EP86106238A EP0204963B1 (en) 1985-05-10 1986-05-07 Use of Alkali-Soluble Polyorganosilsesquioxane Polymers in a resist for preparing electronics parts.
DE8686106238T DE3687479T2 (de) 1985-05-10 1986-05-07 Verwendung von in alkalische milieu loeslichen silsesquioxanpolymeren in einem resist zur herstellung von electronischen teilen.
US07/893,946 US5264319A (en) 1985-05-10 1992-06-04 Photosensitive resin composition having high resistance to oxygen plasma, containing alkali-soluble organosilicon polymer and photosensitive dissolution inhibitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18295085A JPS6243426A (ja) 1985-08-22 1985-08-22 アルカリ可溶性シルメチレン重合体

Publications (2)

Publication Number Publication Date
JPS6243426A JPS6243426A (ja) 1987-02-25
JPH0558447B2 true JPH0558447B2 (enExample) 1993-08-26

Family

ID=16127185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18295085A Granted JPS6243426A (ja) 1985-05-10 1985-08-22 アルカリ可溶性シルメチレン重合体

Country Status (1)

Country Link
JP (1) JPS6243426A (enExample)

Also Published As

Publication number Publication date
JPS6243426A (ja) 1987-02-25

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