JPH0575006B2 - - Google Patents

Info

Publication number
JPH0575006B2
JPH0575006B2 JP61278596A JP27859686A JPH0575006B2 JP H0575006 B2 JPH0575006 B2 JP H0575006B2 JP 61278596 A JP61278596 A JP 61278596A JP 27859686 A JP27859686 A JP 27859686A JP H0575006 B2 JPH0575006 B2 JP H0575006B2
Authority
JP
Japan
Prior art keywords
polymer
resist
mol
poly
oxygen plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61278596A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63132942A (ja
Inventor
Hisashi Sugyama
Kazuo Nate
Takashi Inoe
Akiko Mizushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP61278596A priority Critical patent/JPS63132942A/ja
Publication of JPS63132942A publication Critical patent/JPS63132942A/ja
Publication of JPH0575006B2 publication Critical patent/JPH0575006B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Polymers (AREA)
JP61278596A 1986-11-25 1986-11-25 アルカリ可溶性ポリオルガノシルセスキオキサン重合体 Granted JPS63132942A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61278596A JPS63132942A (ja) 1986-11-25 1986-11-25 アルカリ可溶性ポリオルガノシルセスキオキサン重合体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61278596A JPS63132942A (ja) 1986-11-25 1986-11-25 アルカリ可溶性ポリオルガノシルセスキオキサン重合体

Publications (2)

Publication Number Publication Date
JPS63132942A JPS63132942A (ja) 1988-06-04
JPH0575006B2 true JPH0575006B2 (enExample) 1993-10-19

Family

ID=17599469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61278596A Granted JPS63132942A (ja) 1986-11-25 1986-11-25 アルカリ可溶性ポリオルガノシルセスキオキサン重合体

Country Status (1)

Country Link
JP (1) JPS63132942A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016111112A1 (ja) * 2015-01-05 2016-07-14 東レ・ファインケミカル株式会社 シリコーン共重合体およびその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6390534A (ja) * 1986-10-06 1988-04-21 Hitachi Ltd アルカリ可溶性ラダ−シリコ−ン重合体
JPS63101427A (ja) * 1986-10-17 1988-05-06 Hitachi Ltd アルカリ可溶性ラダ−シリコ−ン

Also Published As

Publication number Publication date
JPS63132942A (ja) 1988-06-04

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees