JPH0580827B2 - - Google Patents

Info

Publication number
JPH0580827B2
JPH0580827B2 JP59180509A JP18050984A JPH0580827B2 JP H0580827 B2 JPH0580827 B2 JP H0580827B2 JP 59180509 A JP59180509 A JP 59180509A JP 18050984 A JP18050984 A JP 18050984A JP H0580827 B2 JPH0580827 B2 JP H0580827B2
Authority
JP
Japan
Prior art keywords
wafer
chamber
clip
loading
electromagnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59180509A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6159850A (ja
Inventor
Yutaka Kakehi
Akira Ichihashi
Sosuke Kawashima
Toshiaki Makino
Hideki Izumi
Ryokichi Kaji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59180509A priority Critical patent/JPS6159850A/ja
Priority to US06/768,332 priority patent/US4718681A/en
Priority to KR1019850006217A priority patent/KR900005351B1/ko
Publication of JPS6159850A publication Critical patent/JPS6159850A/ja
Publication of JPH0580827B2 publication Critical patent/JPH0580827B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Gripping On Spindles (AREA)
JP59180509A 1984-08-31 1984-08-31 半導体製造装置 Granted JPS6159850A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP59180509A JPS6159850A (ja) 1984-08-31 1984-08-31 半導体製造装置
US06/768,332 US4718681A (en) 1984-08-31 1985-08-22 Sample chucking apparatus
KR1019850006217A KR900005351B1 (ko) 1984-08-31 1985-08-28 시료 척킹(Chucking) 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59180509A JPS6159850A (ja) 1984-08-31 1984-08-31 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS6159850A JPS6159850A (ja) 1986-03-27
JPH0580827B2 true JPH0580827B2 (enExample) 1993-11-10

Family

ID=16084487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59180509A Granted JPS6159850A (ja) 1984-08-31 1984-08-31 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS6159850A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110665894B (zh) * 2019-11-11 2020-09-01 南京溧水高新创业投资管理有限公司 一种半导体生产清洗装置
CN115816118B (zh) * 2022-10-25 2025-08-26 杭州大和热磁电子有限公司 一种轴类零件辅助加工装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5349762A (en) * 1976-10-19 1978-05-06 Yoshimitsu Ogura Automatic centripetal holding apparatus for industrial robot
JPS5875844A (ja) * 1981-10-30 1983-05-07 Hitachi Ltd ウエハ・ハンドリング装置

Also Published As

Publication number Publication date
JPS6159850A (ja) 1986-03-27

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