JPH058062Y2 - - Google Patents

Info

Publication number
JPH058062Y2
JPH058062Y2 JP1987078290U JP7829087U JPH058062Y2 JP H058062 Y2 JPH058062 Y2 JP H058062Y2 JP 1987078290 U JP1987078290 U JP 1987078290U JP 7829087 U JP7829087 U JP 7829087U JP H058062 Y2 JPH058062 Y2 JP H058062Y2
Authority
JP
Japan
Prior art keywords
box
moving body
ball screw
movable body
shaped support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987078290U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63119521U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987078290U priority Critical patent/JPH058062Y2/ja
Publication of JPS63119521U publication Critical patent/JPS63119521U/ja
Application granted granted Critical
Publication of JPH058062Y2 publication Critical patent/JPH058062Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1987078290U 1987-05-25 1987-05-25 Expired - Lifetime JPH058062Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987078290U JPH058062Y2 (enEXAMPLES) 1987-05-25 1987-05-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987078290U JPH058062Y2 (enEXAMPLES) 1987-05-25 1987-05-25

Publications (2)

Publication Number Publication Date
JPS63119521U JPS63119521U (enEXAMPLES) 1988-08-02
JPH058062Y2 true JPH058062Y2 (enEXAMPLES) 1993-03-01

Family

ID=30927091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987078290U Expired - Lifetime JPH058062Y2 (enEXAMPLES) 1987-05-25 1987-05-25

Country Status (1)

Country Link
JP (1) JPH058062Y2 (enEXAMPLES)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61117094A (ja) * 1984-11-08 1986-06-04 松下電器産業株式会社 工業用ロボツト
JPH0615157B2 (ja) * 1985-03-20 1994-03-02 ダイキン工業株式会社 無塵室用作業ロボツト

Also Published As

Publication number Publication date
JPS63119521U (enEXAMPLES) 1988-08-02

Similar Documents

Publication Publication Date Title
US7562595B2 (en) Dust proof sliding device
JPH0253580A (ja) 産業用ロボットの直動軸構造
WO2022171205A3 (zh) 一种防尘效果好的工业机箱
JPH058062Y2 (enEXAMPLES)
JP2002206530A (ja) スライド装置のシール構造
US7066649B2 (en) Actuator
US5380246A (en) Dust suction apparatus
JPH062075Y2 (ja) 送り装置
JPH1193553A (ja) 案内支持装置
JPH02253039A (ja) ボールねじ移動機構のクリーン化機構
JP2003222223A (ja) 一軸アクチュエータ
JPH0437742Y2 (enEXAMPLES)
JPS62287995A (ja) 産業用ロボツト
JPS61192490A (ja) クリ−ンル−ム用ロボツトのア−ム構造
JP2583597Y2 (ja) ローダーアームの直線運動用ころがり軸受の防塵装置
JP2000220884A (ja) 給気ダンパ
JPH0752445Y2 (ja) ベルト伝達機ハウジング
JPS61192492A (ja) クリ−ンル−ム用ロボツト
JPH10217165A (ja) 直線移動型ロボット
JPH11347862A (ja) 直動ユニット
JPS62124896A (ja) 産業用ロボツト
JPH0592580U (ja) 真空容器のゲートバルブ
JPH0448481U (enEXAMPLES)
JPH0525141Y2 (enEXAMPLES)
JPH0526944Y2 (enEXAMPLES)