JPH057817B2 - - Google Patents

Info

Publication number
JPH057817B2
JPH057817B2 JP58129041A JP12904183A JPH057817B2 JP H057817 B2 JPH057817 B2 JP H057817B2 JP 58129041 A JP58129041 A JP 58129041A JP 12904183 A JP12904183 A JP 12904183A JP H057817 B2 JPH057817 B2 JP H057817B2
Authority
JP
Japan
Prior art keywords
rotation
sample
signal
electron beam
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58129041A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6020439A (ja
Inventor
Kenji Obara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP58129041A priority Critical patent/JPS6020439A/ja
Publication of JPS6020439A publication Critical patent/JPS6020439A/ja
Publication of JPH057817B2 publication Critical patent/JPH057817B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP58129041A 1983-07-15 1983-07-15 荷電粒子線装置における試料回転装置 Granted JPS6020439A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58129041A JPS6020439A (ja) 1983-07-15 1983-07-15 荷電粒子線装置における試料回転装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58129041A JPS6020439A (ja) 1983-07-15 1983-07-15 荷電粒子線装置における試料回転装置

Publications (2)

Publication Number Publication Date
JPS6020439A JPS6020439A (ja) 1985-02-01
JPH057817B2 true JPH057817B2 (en:Method) 1993-01-29

Family

ID=14999632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58129041A Granted JPS6020439A (ja) 1983-07-15 1983-07-15 荷電粒子線装置における試料回転装置

Country Status (1)

Country Link
JP (1) JPS6020439A (en:Method)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03174239A (ja) * 1989-03-22 1991-07-29 Nippon Zeon Co Ltd 分散剤およびその使用方法
JP2007192741A (ja) * 2006-01-20 2007-08-02 Sharp Corp 元素分析方法及び元素分析装置
JP5182864B2 (ja) * 2007-05-11 2013-04-17 国立大学法人浜松医科大学 電子顕微鏡用試料ホルダ及び電子顕微鏡
US10431418B1 (en) 2018-04-05 2019-10-01 B Dot Medical Inc. Focusing magnet and charged particle irradiation apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5766854U (en:Method) * 1980-10-08 1982-04-21

Also Published As

Publication number Publication date
JPS6020439A (ja) 1985-02-01

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