JPH0578027B2 - - Google Patents
Info
- Publication number
- JPH0578027B2 JPH0578027B2 JP1089135A JP8913589A JPH0578027B2 JP H0578027 B2 JPH0578027 B2 JP H0578027B2 JP 1089135 A JP1089135 A JP 1089135A JP 8913589 A JP8913589 A JP 8913589A JP H0578027 B2 JPH0578027 B2 JP H0578027B2
- Authority
- JP
- Japan
- Prior art keywords
- support frame
- thin film
- film
- photomask
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1089135A JPH0262A (ja) | 1989-04-07 | 1989-04-07 | フォトマスクカバー |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1089135A JPH0262A (ja) | 1989-04-07 | 1989-04-07 | フォトマスクカバー |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57103488A Division JPS58219023A (ja) | 1982-06-15 | 1982-06-15 | 樹脂薄膜の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0262A JPH0262A (ja) | 1990-01-05 |
JPH0578027B2 true JPH0578027B2 (enrdf_load_stackoverflow) | 1993-10-27 |
Family
ID=13962437
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1089135A Granted JPH0262A (ja) | 1989-04-07 | 1989-04-07 | フォトマスクカバー |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0262A (enrdf_load_stackoverflow) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100910657B1 (ko) * | 2007-02-23 | 2009-08-05 | 박현진 | 신규한 락토바실러스 브츠네리 및 이의 용도 |
KR100919852B1 (ko) * | 2007-11-15 | 2009-09-30 | 한국 한의학 연구원 | 해방풍 추출물을 유효성분으로 함유하는 부종 또는 피부염예방 및 치료용 조성물 |
LT5905B (lt) | 2011-05-13 | 2013-02-25 | Ernest Vardanian | Pagalbinė plaukimo priemonė |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6131331Y2 (enrdf_load_stackoverflow) * | 1979-10-09 | 1986-09-11 | ||
US4255216A (en) * | 1980-01-14 | 1981-03-10 | International Business Machines Corporation | Pellicle ring removal method and tool |
-
1989
- 1989-04-07 JP JP1089135A patent/JPH0262A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0262A (ja) | 1990-01-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6325932B2 (enrdf_load_stackoverflow) | ||
US4861402A (en) | Method of making a cellulose acetate butyrate pellicle | |
US7488560B2 (en) | Large pellicle | |
US5691088A (en) | Pellicle for protection of photolithographic mask | |
US5008156A (en) | Photochemically stable mid and deep ultraviolet pellicles | |
JPH0578027B2 (enrdf_load_stackoverflow) | ||
JPH0544017B2 (enrdf_load_stackoverflow) | ||
JPH0514262B2 (enrdf_load_stackoverflow) | ||
JP2790946B2 (ja) | ペリクル膜の製造方法 | |
JPS6038130A (ja) | 枠に接着固定されたポリマ−薄膜の製造方法 | |
US4796973A (en) | Pellicle structure for transmission of mid ultraviolet light | |
JPH0465764B2 (enrdf_load_stackoverflow) | ||
JP3429897B2 (ja) | ペリクルの製造方法 | |
KR910009610B1 (ko) | 방진막 | |
JPH01166045A (ja) | ペリクルの剥離法 | |
JPH06222551A (ja) | 離型性成膜用基板およびペリクル膜の製造方法 | |
GB2165545A (en) | Pellicle structure for transmission of mid ultraviolet light | |
JPH0768576A (ja) | フッ素樹脂薄膜の製造方法 | |
JPH0619125A (ja) | ペリクルの製造法 | |
JPH0477739A (ja) | ペリクルの製造方法 | |
JP2006163215A (ja) | ペリクル膜の製造方法 | |
JPH02145292A (ja) | プラスチック薄膜の切断方法 | |
KR20100116107A (ko) | 펠리클 막의 제조방법 | |
JPH06100826B2 (ja) | リソグラフイー用ペリクル | |
JPH08179495A (ja) | ペリクル及びその製造方法 |