JPH0514262B2 - - Google Patents

Info

Publication number

JPH0514262B2

JPH0514262B2 JP8913789A JP8913789A JPH0514262B2 JP H0514262 B2 JPH0514262 B2 JP H0514262B2 JP 8913789 A JP8913789 A JP 8913789A JP 8913789 A JP8913789 A JP 8913789A JP H0514262 B2 JPH0514262 B2 JP H0514262B2

Authority

JP

Japan

Prior art keywords

film

thin film

photomask

thickness

glass plate

Prior art date

1989-04-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

Links

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• 239000010409 thin film Substances 0.000 claims description 22
• 238000000034 method Methods 0.000 claims description 13
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
• 238000004519 manufacturing process Methods 0.000 claims description 7
• 239000000758 substrate Substances 0.000 claims description 5
• 239000010408 film Substances 0.000 description 21
• 239000011521 glass Substances 0.000 description 13
• 229920000742 Cotton Polymers 0.000 description 11
• 238000005266 casting Methods 0.000 description 8
• ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
• QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
• YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 6
• OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
• 229910052782 aluminium Inorganic materials 0.000 description 6
• 239000000428 dust Substances 0.000 description 5
• 239000002904 solvent Substances 0.000 description 5
• KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 4
• 229920002678 cellulose Polymers 0.000 description 4
• 239000000020 Nitrocellulose Substances 0.000 description 3
• YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
• FJWGYAHXMCUOOM-QHOUIDNNSA-N [(2s,3r,4s,5r,6r)-2-[(2r,3r,4s,5r,6s)-4,5-dinitrooxy-2-(nitrooxymethyl)-6-[(2r,3r,4s,5r,6s)-4,5,6-trinitrooxy-2-(nitrooxymethyl)oxan-3-yl]oxyoxan-3-yl]oxy-3,5-dinitrooxy-6-(nitrooxymethyl)oxan-4-yl] nitrate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](O[N+]([O-])=O)[C@H]1O[N+]([O-])=O)O[C@H]1[C@@H]([C@@H](O[N+]([O-])=O)[C@H](O[N+]([O-])=O)[C@@H](CO[N+]([O-])=O)O1)O[N+]([O-])=O)CO[N+](=O)[O-])[C@@H]1[C@@H](CO[N+]([O-])=O)O[C@@H](O[N+]([O-])=O)[C@H](O[N+]([O-])=O)[C@H]1O[N+]([O-])=O FJWGYAHXMCUOOM-QHOUIDNNSA-N 0.000 description 3
• 239000000463 material Substances 0.000 description 3
• 239000012528 membrane Substances 0.000 description 3
• 229920001220 nitrocellulos Polymers 0.000 description 3
• 230000003287 optical effect Effects 0.000 description 3
• 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 3
• 229920005989 resin Polymers 0.000 description 3
• 239000011347 resin Substances 0.000 description 3
• 239000000126 substance Substances 0.000 description 3
• BQCIDUSAKPWEOX-UHFFFAOYSA-N 1,1-Difluoroethene Chemical compound FC(F)=C BQCIDUSAKPWEOX-UHFFFAOYSA-N 0.000 description 2
• DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
• 239000000853 adhesive Substances 0.000 description 2
• 230000001070 adhesive effect Effects 0.000 description 2
• JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
• 238000001035 drying Methods 0.000 description 2
• 230000005484 gravity Effects 0.000 description 2
• FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 2
• 238000001459 lithography Methods 0.000 description 2
• 239000006082 mold release agent Substances 0.000 description 2
• -1 polyethylene terephthalate Polymers 0.000 description 2
• 239000007787 solid Substances 0.000 description 2
• 238000004528 spin coating Methods 0.000 description 2
• BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 2
• SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
• NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
• YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
• 229920002319 Poly(methyl acrylate) Polymers 0.000 description 1
• 239000004793 Polystyrene Substances 0.000 description 1
• 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
• 238000007605 air drying Methods 0.000 description 1
• 230000015572 biosynthetic process Effects 0.000 description 1
• 238000009835 boiling Methods 0.000 description 1
• 229920002301 cellulose acetate Polymers 0.000 description 1
• 238000009750 centrifugal casting Methods 0.000 description 1
• 238000007796 conventional method Methods 0.000 description 1
• 229920001577 copolymer Polymers 0.000 description 1
• 230000002950 deficient Effects 0.000 description 1
• 235000014113 dietary fatty acids Nutrition 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 239000000194 fatty acid Substances 0.000 description 1
• 229930195729 fatty acid Natural products 0.000 description 1
• 229910052731 fluorine Inorganic materials 0.000 description 1
• 239000011737 fluorine Substances 0.000 description 1
• HCDGVLDPFQMKDK-UHFFFAOYSA-N hexafluoropropylene Chemical group FC(F)=C(F)C(F)(F)F HCDGVLDPFQMKDK-UHFFFAOYSA-N 0.000 description 1
• GJRQTCIYDGXPES-UHFFFAOYSA-N iso-butyl acetate Natural products CC(C)COC(C)=O GJRQTCIYDGXPES-UHFFFAOYSA-N 0.000 description 1
• FGKJLKRYENPLQH-UHFFFAOYSA-M isocaproate Chemical compound CC(C)CCC([O-])=O FGKJLKRYENPLQH-UHFFFAOYSA-M 0.000 description 1
• OQAGVSWESNCJJT-UHFFFAOYSA-N isovaleric acid methyl ester Natural products COC(=O)CC(C)C OQAGVSWESNCJJT-UHFFFAOYSA-N 0.000 description 1
• 150000002576 ketones Chemical group 0.000 description 1
• 239000012046 mixed solvent Substances 0.000 description 1
• 238000000465 moulding Methods 0.000 description 1
• 229920002120 photoresistant polymer Polymers 0.000 description 1
• 239000004417 polycarbonate Substances 0.000 description 1
• 229920000515 polycarbonate Polymers 0.000 description 1
• 229920000139 polyethylene terephthalate Polymers 0.000 description 1
• 239000005020 polyethylene terephthalate Substances 0.000 description 1
• 229920002223 polystyrene Polymers 0.000 description 1
• 229920000915 polyvinyl chloride Polymers 0.000 description 1
• 239000004800 polyvinyl chloride Substances 0.000 description 1
• 239000005033 polyvinylidene chloride Substances 0.000 description 1
• 230000001681 protective effect Effects 0.000 description 1
• 230000001105 regulatory effect Effects 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1
• 125000006850 spacer group Chemical group 0.000 description 1
• 230000008961 swelling Effects 0.000 description 1
• 229920001897 terpolymer Polymers 0.000 description 1
• 235000012431 wafers Nutrition 0.000 description 1
• 238000005303 weighing Methods 0.000 description 1