JPH0575595B2 - - Google Patents
Info
- Publication number
- JPH0575595B2 JPH0575595B2 JP58099577A JP9957783A JPH0575595B2 JP H0575595 B2 JPH0575595 B2 JP H0575595B2 JP 58099577 A JP58099577 A JP 58099577A JP 9957783 A JP9957783 A JP 9957783A JP H0575595 B2 JPH0575595 B2 JP H0575595B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- recording
- recording medium
- thickness
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 76
- 239000002131 composite material Substances 0.000 claims description 66
- 230000003287 optical effect Effects 0.000 claims description 52
- 239000000758 substrate Substances 0.000 claims description 45
- 229910052751 metal Inorganic materials 0.000 claims description 32
- 239000002184 metal Substances 0.000 claims description 32
- 229910044991 metal oxide Inorganic materials 0.000 claims description 14
- 150000004706 metal oxides Chemical class 0.000 claims description 14
- 239000010409 thin film Substances 0.000 claims description 12
- 229910052718 tin Inorganic materials 0.000 claims description 12
- 239000010419 fine particle Substances 0.000 claims description 10
- 229910052738 indium Inorganic materials 0.000 claims description 10
- 229910045601 alloy Inorganic materials 0.000 claims description 8
- 239000000956 alloy Substances 0.000 claims description 8
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- 150000002739 metals Chemical class 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 229910052725 zinc Inorganic materials 0.000 claims description 5
- 229910052732 germanium Inorganic materials 0.000 claims description 4
- 229910052787 antimony Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 229910052745 lead Inorganic materials 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 178
- 230000035945 sensitivity Effects 0.000 description 23
- 230000000052 comparative effect Effects 0.000 description 19
- 229910006404 SnO 2 Inorganic materials 0.000 description 17
- 230000007423 decrease Effects 0.000 description 10
- 239000002245 particle Substances 0.000 description 10
- 239000010408 film Substances 0.000 description 9
- 231100000053 low toxicity Toxicity 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 9
- 239000004926 polymethyl methacrylate Substances 0.000 description 9
- 230000010355 oscillation Effects 0.000 description 8
- 229920000642 polymer Polymers 0.000 description 8
- 239000000975 dye Substances 0.000 description 7
- 238000010521 absorption reaction Methods 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 229910052714 tellurium Inorganic materials 0.000 description 6
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- -1 polyethylene terephthalate Polymers 0.000 description 5
- 238000007738 vacuum evaporation Methods 0.000 description 5
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 4
- 229910010413 TiO 2 Inorganic materials 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- 229910000967 As alloy Inorganic materials 0.000 description 3
- 229910001215 Te alloy Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 238000005566 electron beam evaporation Methods 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000004793 Polystyrene Substances 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- SYFOAKAXGNMQAX-UHFFFAOYSA-N bis(prop-2-enyl) carbonate;2-(2-hydroxyethoxy)ethanol Chemical compound OCCOCCO.C=CCOC(=O)OCC=C SYFOAKAXGNMQAX-UHFFFAOYSA-N 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 239000004800 polyvinyl chloride Substances 0.000 description 2
- 229910052711 selenium Inorganic materials 0.000 description 2
- 239000011669 selenium Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 231100000419 toxicity Toxicity 0.000 description 2
- 230000001988 toxicity Effects 0.000 description 2
- 239000004641 Diallyl-phthalate Substances 0.000 description 1
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 229910005542 GaSb Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- 229920001410 Microfiber Polymers 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910018731 SnâAu Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- QUDWYFHPNIMBFC-UHFFFAOYSA-N bis(prop-2-enyl) benzene-1,2-dicarboxylate Chemical compound C=CCOC(=O)C1=CC=CC=C1C(=O)OCC=C QUDWYFHPNIMBFC-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000005243 fluidization Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 231100000086 high toxicity Toxicity 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000003658 microfiber Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920000205 poly(isobutyl methacrylate) Polymers 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920001707 polybutylene terephthalate Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- 229920006380 polyphenylene oxide Polymers 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/24304—Metals or metalloids group 2 or 12 elements (e.g. Be, Ca, Mg, Zn, Cd)
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/24308—Metals or metalloids transition metal elements of group 11 (Cu, Ag, Au)
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/2431—Metals or metalloids group 13 elements (B, Al, Ga, In)
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/24312—Metals or metalloids group 14 elements (e.g. Si, Ge, Sn)
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/24314—Metals or metalloids group 15 elements (e.g. Sb, Bi)
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24318—Non-metallic elements
- G11B2007/2432—Oxygen
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
Description
æ¬çºæã¯ãã¬ãŒã¶å
çã®ãšãã«ã®ãŒç·ãç
§å°ã
ãããšã«ãã€ãŠãèšé²å±€ã®ãšãã«ã®ãŒç·ç §å°éšã
溶èçã«ããå€åœ¢ãŸãã¯é€å»ãããããšã«ãã€ãŠ
çããåå°çãããã¯ééçã®å€åãå©çšããŠå
åŠçã«æ å ±ã®èšé²ãåçãè¡ãã®ã«é©ããèšé²åª
äœã«é¢ãããã®ã§ããã å ãã€ã¹ã¯çã®å èšé²åªäœã«èŠæ±ãããæ§è³ªãš
ããŠã¯ãèšé²å æºã«çšããã¬ãŒã¶ã®æ³¢é·é åã§ã®
èšé²æ床ãé«ãããšãåçä¿¡å·ã®SNæ¯ãé«ãã
ãšãèšé²å¯åºŠãé«ãããšãä¿åå®å®æ§ã«ããããŠ
ããããšãåã³æ¯æ§ãäœãããšãæããããã ã¬ãŒã¶å ç §å°éšã®æž©åºŠäžæã«ããèšé²å±€ã溶解
ãããããã圢æããããããããŒãã¢ãŒãåèš
é²åªäœã«æŒãŠãèšé²æ床ãé«ãããããã«ã¯ãèš
é²å±€ã®åå åžåçãé«ãããšãèç¹ãæ¯ç±ããã³
ç±äŒå°çãäœãããšãå¿ èŠã§ããŸãèšé²å±€ã®åã
ã¯èãããšãæãŸãããåçä¿¡å·ã®SNæ¯ãé«ã
ããããã«ã¯ããããã®åœ¢ç¶ã倧ãããæã€ãŠã
ãŠããããåšèŸºã«ä¹±ããç¡ãããšãåã³åçã«å
å°å ã䜿çšããå Žåã«ã¯ãèšé²éšãšæªèšé²éšãšã®
åå°çã®å·®ã倧ããããšããŸãèšé²å¯åºŠãé«ãã
ãããã«ã¯ãç±äŒå°çãäœãããšãèŠæ±ãããã
ãŸãä¿åå®å®æ§ã«ããããèšé²åªäœãåŸãããã«
ã¯ãèšé²å±€ã®é žåå®å®æ§åã³è湿æ§ãé«ãããšã
èŠæ±ãããã ã¬ãŒã¶çšèšé²åªäœãšããŠçŸåšæãããããŠãã
ãšãããŠããã®ã¯ãã¬ã©ã¹ãŸãã¯ãã©ã¹ããã¯åº
æ¿äžã«èšé²å±€ãšããŠãã«ã«ãŸãã¯ãã«ã«âç çŽ å
éçã®ãã«ã«åéèèã圢æãããã®ã§ãããã
ã«ã«åã³ãã«ã«åéèèã¯ãå¯èŠâè¿èµ€å€ã®æ³¢é·
é åã§å ã®åžåçãé«ããäœç±äŒå°çãäœèç¹ã§
ããããèšé²æ床ãé«ãããŸããããã®åœ¢ç¶ã倧
ãããæãæããäžã€å¯èŠâè¿èµ€å€ã®æ³¢é·é åã§
é©åœãªåå°çãæããŠãããããåå°å ã«ãã€ãŠ
SNæ¯ã®é«ãåçä¿¡å·ãåŸããããªã©ãããŒãã¢
ãŒãåã¬ãŒã¶èšé²åªäœã«æ¥µããŠé©ããæ§è³ªãæã€
ãŠãããããããã«ã«èèåã³ãã«ã«âç çŽ åé
èèã«ã¯ãé žåå®å®æ§ãäœãããšåã³æ¯æ§ãé«ã
çã®æ¬ ç¹ããããé žåå®å®æ§ã®æ¹è¯ã«ã¯ãã«ã«ãŸ
ãã¯ãã«ã«âç çŽ åéã«ã»ã¬ã³ãæ·»å ããããã
ã«ã«äœé žåç©ãçšããçã®æ¹æ³ãè©Šã¿ãããŠãã
ããçŸåšãŸã§å åãªãã®ã¯åŸãããŠãããããŸã
æ¯æ§ã«é¢ããŠã¯å¹æçãªå¯Ÿçã¯èŠåºãããŠããª
ãã æ¯æ§ã®ç¹ã§ã¯ããã«ã«ç³»èšé²åªäœã«æ¯èŒããŠæ
å©ãªãã®ã«ãã¬ã©ã¹ãŸãã¯ãã©ã¹ããã¯åºæ¿äžã
ãããã¯è©²åºæ¿äžã«èšããã¢ã«ãããŠã çã®åå°
å±€ã®äžã«è²çŽ ãŸãã¯è²çŽ ãããªããŒã«åæ£ããå±€
ã圢æããèšé²åªäœããããããããäžè¬ã«è²çŽ
ã®åžåæ³¢é·ã¯ãèµ€è²å ããçæ³¢é·åŽã«ãããä»åŸ
èšé²çšå æºã®äž»æµãšãªããšäºæ³ãããŠããåå°äœ
ã¬ãŒã¶ã®çºæ¯æ³¢é·åã§ãã750nmmã850nïœã®é
åã§å€§ããªåžåã瀺ãå®å®ãªè²çŽ ãåŸãããªãã
ããåå°äœã¬ãŒã¢ãèšé²çšå æºãšããè²çŽ ç³»èšé²
åªäœã§å®çšçãªãã®ã¯åŸãããŠããªãã æ¬çºæè çã¯ãæ¯æ§ãäœããé žåå®å®æ§åã³è
æ°Žæ§ã«ããããå èšé²åªäœã®å®æãç®çãšããŠé
æç 究ãé²ããçµæãé žåå®å®æ§åã³èæ°Žæ§ã«ã
ãããç¹å®ã®éå±ãããã¯åå°äœã®åŸ®ç²åããç§
åŠçå®å®æ§ã«ããããéå±é žåç©èèäžã«åæ£ã
ãè€åå±€ãšããã®è€åå±€ã®å°ãªããšãäžæ¹ã®è¡šé¢
ã«æ¥è§Šããç¹å®ã®åå°äœãããªãèšé²å±€ãçšãã
ããšã«ãã€ãŠé«æ床ã§åçä¿¡å·ã®SNæ¯ã極ããŠ
é«ããäžã€å®å®ã§ãããæ¯æ§ã®äœãå èšé²åªäœã
åŸãããããšãèŠåºããæ¬çºæã«å°éããã æ¬çºæã®èŠæšãšãããšããã¯ãåºæ¿äžã«ãéå±
é žåç©èèäžã«éå±ãããã¯åå°äœã®åŸ®ç²åãå
æ£ããè€åå±€ãšã該è€åå±€ã®å°ãªããšãäžæ¹ã®è¡š
é¢ã«æ¥è§Šããåã20â«ä»¥äžã100â«ä»¥äžã®Geå±€
ïŒä»¥äžãåå°äœå±€ãšåŒã¶ïŒãšãããªãèšé²å±€ã圢
æãããŠããããšãç¹åŸŽãšããå èšé²åªäœã®æ©æ§
ãšæ§æã«ããã 第ïŒå³ã«ãæ¬çºæã®å èšé²åªäœã®å±€æ§æã®äžäŸ
ã瀺ãã第ïŒå³ã«æŒãŠã¯ãåºæ¿äžã«ãéå±é žåç©
äžã«éå±ãããã¯åå°äœã®åŸ®ç²åãåæ£ããè€å
å±€ïŒä»¥äžè€åå±€ãšåŒã¶ïŒãèšããããŠããã該è€
åå±€ã®è¡šé¢ã«åå°äœå±€ã圢æãããŠããããã®å
èšé²åªäœã«æŒãŠã¯åºæ¿åŽãããã¯åºæ¿ãšå察åŽã
ãå ¥å°ãããšãã«ã®ãŒç·ã¯ãåå°äœå±€åã³è€åå±€
ã«åžåããçºçããç±ã«ããè€åå±€ãè解ããã
ã®è€åå±€ã®è解éšåãåå°äœå±€ã®ããã«æ¥ããéš
åã䜵ã€ãŠç§»åããããšã«ãã€ãŠåœ¢æããããã
ãã«ãã€ãŠçããåªäœã®ãšãã«ã®ãŒç·ãç §å°ãã
ãéšåã®å ã®åå°çãééççã®å åŠçæ§è³ªã®å€
åãå©çšããŠèšé²ãåçãè¡ãããã æ¬çºæã®å èšé²åªäœã«æŒããè€åå±€ã«çšããã
ãéå±ãããã¯åå°äœã®äŸãšããŠã¯ãSnãInã
PbãAlãZnãCuãAgãAuãSbãBiãSeãTeã
Geåã³ããããäž»æåãšããåéãæãããã
ããäœæ¯æ§ã®èŠ³ç¹ãã奜ãŸããéå±ãããã¯åå°
äœã®äŸãšããŠã¯ãSnãInãSbãPbãAlãZnã
CuãAgãAuãGeåã³ããããäž»æåãšããå
éãæãããããäžèšéå±ãããã¯åå°äœã®ç¹åŸŽ
ã¯åå°äœã¬ãŒã¶ã®çºæ¯æ³¢é·åã§ã®åå°çãé«ãã
èç¹ãäœããæ¯æ§ãäœããåã³ç©ºæ°äžã§ã®å®å®æ§
ãé«ãçã§ããã®ã§ããããã®éå±ãããã¯åå°
äœãäž»æåãšããåéãçšããå Žåã¯ãäžèšç¹åŸŽ
ã倱ãããªãããã«æ³šæããå¿ èŠãããã æ¬çºæã®å èšé²åªäœã«æŒããè€åå±€ã«çšããã
ãéå±é žåç©ã¯ãååŠçå®å®æ§ã«ããããç±äŒå°
çã®äœããã®ã§ããããšãå¿ èŠã§ã奜ãŸããäŸãš
ããŠã¯ãSnãInãAlãZråã³Znã®é žåç©ãæã
ãããããæã«SnãŸãã¯Inã®é žåç©ãçšãããšã
空æ°äžã§ã®å®å®æ§ãããããé«æ床äžã€åçä¿¡å·
ã®SNæ¯ãé«ãèšé²åªäœãåŸããããSnãŸãã¯In
é žåç©ã®äŸãšããŠã¯ååŠåŒã§SnO2ãIn2O3åã³
SnO2-xãIn2O3-xçã®äœé žåç©ããSn1-yMyO2ã
In2-zNzO3çã®SnO2ãIn2O3ã«ç°çš®éå±ãããŒã
ã³ã°ããããã®ãæãããããããã§ïœãïœã¯
0.5以äžãïœã¯0.25以äžã®æ£ã®æ°ãïŒã¯SbãInã
ã¯SnãGeãPbãZnçã®éå±ã瀺ãã äžèšè€åå±€ã«æŒããéå±ãããã¯åå°äœã®å å¡«
çã¯0.3以äžã0.95以äžã§ããããšãå¿ èŠã§ããã
å å¡«çã0.3以äžã§ãããšãè€åå±€ã®åžåä¿æ°ã
äœäžããäžã€è€åå±€ã溶èæµååãã枩床ãé«ã
ãªããåŸãããå èšé²åªäœã®èšé²æ床ãäœäžã
ããå å¡«çã0.95以äžãšãªããšãè€åå±€ã«åæ£ã
ãŠããéå±ãããã¯åå°äœç²åéã®æ¥è§Šãå§ãŸ
ããéå±ãããã¯åå°äœç²åã®ç²ååŸã倧ãããª
ãããã®ããèšé²ãããã®å€§ããã圢ç¶ãäžæã
ã«ãªããåçä¿¡å·ã®SNæ¯ãäœäžãããŸãè€åå±€
ã®ç±äŒå°çã倧ãããªãããèšé²æ床ãäœäžã
ãã æ¬çºæã®å èšé²åªäœã«æŒããè€åå±€ã®äžå±€ã®å
ãã¯10â«ä»¥äžã500â«ä»¥äžãæãŸãããè€åå±€ã®
äžå±€ã®åãã10â«ä»¥äžã§ãããšãè€åå±€ã®ãšãã«
ã®ãŒç·ç §å°éšã®æº¶èæµååã«ããåå°äœå±€ã®ãã
ã圢æãé²è¡ãé£ããªããèšé²åªäœã®èšé²æ床ã
äœäžããããŸãè€åå±€ã®äžå±€ã®åãã500â«ä»¥äž
ã§ãããšãè€åå±€ãšãã«ã®ãŒç·ç §å°éšã®æº¶èæµå
åã«å¿ èŠãªãšãã«ã®ãŒã倧ãããªãããèšé²åªäœ
ã®èšé²æ床ãäœäžãããç¹ã«è€åå±€ã®äžå±€ã®åã
ã30â«ä»¥äžã300â«ä»¥äžã®å Žåãé«æ床ã§åçä¿¡
å·ã®SNæ¯ã®é«ãèšé²åªäœãåŸãããã æ¬çºæã®å èšé²åªäœã«çšããããåå°äœå±€ã®äŸ
ãšããŠã¯ãGeãSiãSeçã®å çŽ åå°äœåã³ã
AlSBãGaAsãGaSbãInPãInAsãInSbçã®å
åç©åå°äœãæãããããç¹ã«åå°äœã«Geãçš
ããå Žåã¯ãå質äžã€750nïœã850nïœã®æ³¢é·å
ã§å ã®åžåä¿æ°ã®å€§ããå±€ãåŸããããããé«æ
床äžã€åçä¿¡å·ã®SNæ¯ãé«ãèšé²åªäœãåŸãã
ãããŸãGeå±€ã¯èèã®å Žåã§ãé žåå®å®æ§åã³
è湿æ§ãããããŠãããæ¯æ§ãäœãç¹ã§æ¬çºæã®
å èšé²åªäœã«çšããããåå°äœå±€ãšããŠå¥œé©ã§ã
ããæŽã«æ¬çºæã®å èšé²åªäœã«ã¯ãGeã«GaãIn
ãŸãã¯SbçãããŒãã³ã°ããèèãããªãåå°
äœå±€ãçšããããšãã§ããã æ¬çºæã®å èšé²åªäœã«æŒããåå°äœå±€ã®äžå±€ã®
åãã¯20â«ä»¥äžã100â«ä»¥äžãæãŸãããåå°äœ
å±€ã®äžå±€ã®åãã10â«ä»¥äžã§ãããšãåŸãããèš
é²åªäœã®750nïœã850nïœã®æ³¢é·åã§ã®å ã®åå°
çãåžåçãäœããªããèšé²éšãšæªèšé²éšãšã®ã³
ã³ãã©ã¹ãã倧ããã§ãããåçä¿¡å·ã®SNæ¯ã
äœããªããåå°äœå±€ã®äžå±€ã®åãã200â«ä»¥äžã§
ãããšãè€åå±€ã®ãšãã«ã®ãŒç·ç §å°éšã溶èæµå
åããŠããåå°äœå±€ã®ããã圢æãé²è¡ãé£ããª
ããããèšé²åªäœã®èšé²æ床ãäœäžãããç¹ã«å
å°äœå±€ã®äžå±€ã®åãã20â«ä»¥äžã100â«ä»¥äžã®å Ž
åSNæ¯ã®é«ãèšé²åªäœãåŸãããã æ¬çºæã®å èšé²åªäœã®äžã€ã®å®æœæ æ§ã¯ãåºæ¿
äžã«è€åå±€ã圢æãããæŽã«ãã®è€åå±€ã®è¡šé¢ã«
åå°äœå±€ã圢æããããã®ã§ãããåºæ¿ãšããŠ
ã¯ãã¢ã«ãããŠã çã®éå±æ¿ãã¬ã©ã¹æ¿ãããã
ã¯ããªã¡ã¿ã¯ãªã«é žã¡ãã«ãããªã¹ãã¬ã³ãããª
å¡©åããã«ãããªã«ãŒãããŒããããªãšãã¬ã³ã
ã¬ãã¿ã¬ãŒããããªããã¬ã³ãã¬ãã¿ã¬ãŒããã
ãªã¢ããåã³ãšããã·æš¹èããžã¢ãªã«ãã¿ã¬ãŒã
éåäœããžãšãã¬ã³ã°ãªã³ãŒã«ãã¹ã¢ã«ãªã«ãŒã
ããŒãéåäœãããªããšãã¬ã³ãµã«ãã¢ã€ããã
ãªããšãã¬ã³ãªããµã€ããããªã€ããçã®ç±å¯å¡
æ§ãåã¯ç±ç¡¬åæ§æš¹èã®ã·ãŒãåã¯ãã€ã«ã ãçš
ãããããç¹ã«æ¬çºæã®å èšé²åªäœãèšé²å ãå
çå ãåºæ¿ãéããŠç §å°ãã圢åŒã®å ãã€ã¹ã¯ãš
ããŠäœ¿çšããå Žåã«æŒãŠã¯ãåºæ¿ã«ã¯ã¡ãã«ã¡ã¿
ã¯ãªã¬ãŒãç³»éåäœãã¹ãã¬ã³ç³»éåäœãããªå¡©
åããã«ãããªã«ãŒãããŒãããžãšãã¬ã³ã°ãªã³
ãŒã«ãã¹ã¢ãªã«ã«ãŒãããŒãéåäœããšããã·æš¹
èçã®éæãã©ã¹ããã¯ã®ã·ãŒããçšããå¿ èŠã
ããããŸããåºæ¿ã«ã¬ã©ã¹æ¿ãåã¯ã¢ã«ãããŠã
çã®éå±æ¿ã䜿çšããå Žåã¯ããããåºæ¿äžã«ã
ãªããŒå±€ãèšããåŸã«è€åå±€åã³åå°äœå±€ãããª
ãèšé²å±€ã圢æããããšé«æ床ã®å èšé²åªäœãåŸ
ããããäžèšããªããŒã®äŸãšããŠã¯ãããªã¹ãã¬
ã³ãããªã¡ãã«ã¡ã¿ã¯ãªã¬ãŒããããªã€ãœããã«
ã¡ã¿ã¯ãªã¬ãŒãçãæããããã æ¬çºæã®å èšé²åªäœã®å±€æ§æã®äŸã第ïŒå³ã第
ïŒå³ã«ç€ºãã以äžæ¬çºæã®èšé²åªäœã®è£œé æ¹æ³ã
å±€æ§æã®äŸå³ãçšããŠèª¬æããã 第ïŒå³ã«ç€ºãæ§æã®èšé²åªäœã¯ãåºæ¿ïŒã®äžã«
åå°äœå±€ïŒã圢æãããåŸã«ããã®åå°äœå±€ïŒã®
äžã«è€åå±€ïŒã圢æããã次ãã§ãã®æäœããã
è¿ããåŸæå€å±€ã«åå°äœå±€ã圢æããããšã«ã
ããåå°äœå±€ãïœå±€ãè€åå±€ãïœâïŒå±€ç©å±€ãã
ãããšã«ãã€ãŠåŸãããïŒããã§ïœã¯æ§ã®æŽæ°ã
瀺ããïŒãåå°äœå±€åã³è€åå±€ã圢æãããããã«
ã¯ãç空èžçæ³ãã€ãªã³åèžçæ³ãã€ãªã³ãã¬ãŒ
ãã€ã³ã°æ³ãã¹ããã¿æ³ãã¯ã©ã¹ã¿ãŒã€ãªã³ããŒ
ã æ³çãå©çšãããè€åå±€ã圢æãããå Žåã¯ã
éå±ãããã¯åå°äœéå±é žåç©ãšãå¥ã ã®ã«ãã
ã«å ¥ããïŒÃ10-3mmHg以äžã®ç空床ã«æŒãŠåæ
ã«èžçºããèžçãè¡ãããŸãäžèšç空èžçå·¥çšã§
èžçºç²åãã€ãªã³åããåå°äœå±€è¡šé¢ã«è¡çªãã
ãã€ãªã³åèžçæ³ããŸãã¯ã€ãªã³åãšåæã«åºæ¿
åŽã«çŽæµé»å§ãå°å ããŠã€ãªã³åç²åãå éãã
ãã€ãªã³ãã¬ãŒãã€ã³ã°æ³ãçšããããšãã§ã
ãããŸãéå±ãããã¯åå°äœã®ã¿ãŒã²ãããšéå±
é žåç©ã®ã¿ãŒã²ãããçšããŠåæã¹ããã¿ãè¡ã
ããšã«ãã€ãŠè€åå±€ã圢æãããããšãã§ããã
ãããã®å Žåãè€åå±€ã®åœ¢ææã«ã¯ãåèžçºæºã
ã¿ãŒã²ããã®æ¯èŒçè¿åã«æ°Žæ¶èåã»ã³ãµçã®ã»
ã³ãµããããèšçœ®ããéå±ãããã¯åå°äœåã³é
å±é žåç©ã®èžçé床ãã¹ããã¿ãªã³ã°é床ãå¥ã
ã«æ€ç¥ãå¶åŸ¡ããããšã«ãããæå®ã®éå±ããã
ã¯åå°äœã®å å¡«çåã³åãã®è€åå±€ãåŸãããã 第ïŒå³ã«ç€ºãæ§æã®èšé²åªäœã¯ãåºæ¿ïŒã®äžã«
è€åå±€ïŒã圢æãããåŸããã®è€åå±€ïŒã®äžã«å
å°äœå±€ïŒã圢æããã次ãã§ãã®æäœãããè¿ã
ããšã«ããè€åå±€ãïœå±€ãåå°äœå±€ãïœå±€ç©å±€ã
ããããšã«ãã€ãŠåŸãããã第ïŒå³ã«ç€ºãæ§æã®
èšé²åªäœã¯ã第ïŒå³ã«ç€ºãæ§æã®èšé²åªäœã補é
ããå Žåãšåæ§ã®æäœãè¡ããåºæ¿ïŒã®äžã«åå°
äœå±€ïŒãïœå±€ãè€åå±€ïŒãïœå±€ç©å±€ãããããšã«
ãã€ãŠåŸãããã第ïŒå³ã«ç€ºãæ§æã®èšé²åªäœ
ã¯ã第ïŒå³ã«ç€ºãæ§æã®èšé²åªäœã補é ããå Žå
ãšåæ§ã®æäœãè¡ããåºæ¿ïŒã®äžã«è€åå±€ïŒãïœ
å±€ãåå°äœå±€ïŒãïœâïŒå±€ç©å±€ãããããšã«ãã€
ãŠåŸãããã 第ïŒå³ã第ïŒå³ã«ç€ºãæ§æã®æ¬çºæã®å èšé²åª
äœã«æŒãŠã¯ãèšé²å±€ã®åãïŒè€åå±€åã³åå°äœå±€
ãç©å±€ããå šäœã®åãïŒã50â«ä»¥äžã2000â«ä»¥äž
ã§ããããšãæãŸãããèšé²å±€ã®åãã2000â«ä»¥
äžã«ãªããšãèšé²å±€ã®ãšãã«ã®ãŒç·ç §å°éšã®äœç©
ã倧ãããªãããããšãã«ã®ãŒç·ãç §å°ããå Žå
ã«åžåããããšãã«ã®ãŒã®å¯åºŠãäœäžããããã
èšé²åªäœã®èšé²æ床ãäœäžããããã«åœ¢æããã
ãããåšèŸºã®åœ¢ç¶ãä¹±ãæããªããåçä¿¡å·ã®
SNæ¯ã«æªåœ±é¿ãäžãããèšé²å±€ã®åãã50â«ä»¥
äžã§ãããšãèšé²åªäœã®èšé²éšãšæªèšé²éšã®åå°
çåã³ééçã®å·®ãå°ãããªããã³ã³ãã©ã¹ãã
äœããªããããåçä¿¡å·ã®SNæ¯ãé«ãããããš
ãã§ããªããæ¬çºæã®å èšé²åªäœãåå°åå ãã€
ã¹ã¯ã«äœ¿çšããå Žåãèšé²å±€ã®ãã奜ãŸããåã
ã®ç¯å²ã¯70â«ä»¥äžã500â«ä»¥äžã§ããã 第ïŒå³ã第ïŒå³ã«ç€ºãæ§æã®æ¬çºæã®å èšé²åª
äœã«æŒãŠã¯ãè€åå±€ã®äžå±€ã®åãã10â«ã500â«ã
åå°äœå±€ã®åãã10â«ã200â«ãè€åå±€ãšåå°äœ
å±€ãç©å±€ãããèšé²å±€ã®åãã50â«ã2000â«ã®ç¯
å²å ã§ããã°ãïœã®å€ã¯ïŒä»¥äžã®ä»»æã®æŽæ°ã§è¯
ããç¹ã«åå°äœå±€ã«Geã䜿çšãã第ïŒå³ã«ç€ºã
æ§æã§ïœãïŒä»¥äžã®å Žåã空æ°äžã§ã®å®å®æ§åã³
è湿æ§ã®ç¹ã«ããããå èšé²åªäœãåŸãããã æ¬çºæã®å èšé²åªäœã«æŒããèšé²å±€ã¯ãéåžžã®
ç°å¢äžã§ã¯æ¥µããŠå®å®ã§ãããç¹ã«ä¿è·å±€ãèšã
ãå¿ èŠã¯ç¡ãããæ©æ¢°çè¡æçã«å¯Ÿããä¿è·ãã
塵åçã®ä»çã«ãããèšé²ãåçã«æ¯éãçãã
ã®ãé²ãããšãç®çãšããŠãä¿è·å±€ãèšé²å±€ã®äž
ã«èšããããšãå¯èœã§ãããä¿è·å±€ãšããŠã¯ã
SiO2ãAl2O3ãTiO2çã®ç¡æ©ææåã³ææ©é«å
åææãçšããããã 第ïŒå³ã第ïŒå³ã«ç€ºãæ¬çºæã®å èšé²åªäœã«æŒ
ãŠã¯ãåºæ¿ïŒãéæãªãã®ãšããå Žåã¯ãèšé²å
åã³åçå ãå³ã®äžæ¹ããå ¥å°ãããŠããäžæ¹ã
ãå ¥å°ãããŠãè¯ãã æ¬çºæã®å èšé²åªäœã¯ãäœæ¯æ§ã§é«æ床ã§ã
ãã空æ°äžã§ã®å®å®æ§åã³è湿æ§ãããããŠãã
ãšåæã«åçä¿¡å·ã®SNæ¯ã極ããŠé«ãç¹ã«ç¹åŸŽ
ããããæ¬çºæã®å èšé²åªäœãäžèšã®åŠãããã
ãç¹åŸŽã瀺ãçç±ã¯çŸæç¹ã§ã¯å¿ ãããæ確ã§ç¡
ããã以äžã®æ§ã«æšå®ããããšãã§ãããæ¬çºæ
ã®å èšé²åªäœã®èšé²å±€ã¯ãããããå åŠå®æ°ã®ç°
ãªãè€åå±€ãšåå°äœå±€ãšã®ç©å±€èããæãç«ã€ãŠ
ãããããèšé²å±€ãããããè€åãããã¯åå°äœ
å±€åç¬ã§æãç«ã€ãŠããå Žåã«æ¯èŒããŠãèšé²å±€
ã®åãã極ããŠå°ããå Žåã§ããšãã«ã®ãŒç·ã®åž
åçåã³åå°çãé«ããªãããã®ããèšé²å±€ã®ãš
ãã«ã®ãŒç·ãç §å°ãããéšåã«æŒãããšãã«ã®ãŒ
å¯åºŠã倧ãããªããèšé²æ床ãé«ããªããšåæ
ã«ãèšé²éšãšæªèšé²éšãšã®ã³ã³ãã©ã¹ãã倧ãã
ãªããåçæã®SNæ¯ãé«ããªããããã«èšé²å±€
ãæ§æããŠããè€åå±€ã¯éå±é žåç©ãšãã®é žåç©
ã«åæ£ããç²åŸãå ã®æ³¢é·ä»¥äžã®æ¥µããŠåŸ®çŽ°ãªé
å±ãããã¯åå°äœã®ç²åããæãç«ã€ãŠããã
ãããã«ã¯ã®éå±ãããã¯åå°äœã«æ¯èŒããŠäœã
枩床ã§é£æ¥ããåå°äœå±€ã䌎ã€ãŠå®¹æã«æµååã
ãããã®èšé²å±€ã®æµååããéšåã¯ãéå±ããã
ã¯åå°äœåç¬ã®æº¶èäœã«æ¯èŒããŠå€§ããªè¡šé¢ãšã
ã«ã®ãŒãæããŠãããæµååããèšé²å±€ãšããã«
æ¥è§Šããåºæ¿ãšã®è¡šé¢ãšã®è¡šé¢ãšãã«ã®ãŒã®å·®ã
倧ãããªããæµååããèšé²å±€ã®ç§»åãã¹ã ãŒãº
ã«èµ·ãããã圢æã容æã«ãªãããã®æµååãã
èšé²å±€ã®ç§»åã¯ãæµååããéšåãšãã®åšå²ã®åº
çžãšã®è¡šé¢ãšãã«ã®ãŒã®å·®ã«ãã€ãŠèµ·ããšèãã
ããŠãããïŒç¹éæ55â132536å·åç §ïŒãæ¬çºæ
ã®å èšé²åªäœã«æŒãŠã¯ãåå°äœå±€ã®ç¡å®åœ¢ããã
ã¯åŸ®çµæ¶æ§é ããšãæããè€åå±€ã§ã¯ãéå±ãã
ãã¯åå°äœã®ç²åã極ããŠå°ããããããããã®
倧ãã圢ç¶ã«å€§ããªåœ±é¿ãäžãããšèããããã
ããäžè¬ã®éå±èèã§å€ãèŠããã倧ããªçµæ¶ã«
ããçµæ¶ç²çã®åœ±é¿ãç¡ããªãããã®çµæãäœã
ç §å°ãšãã«ã®ãŒã§åœ¢ç¶ã倧ããã®æã€ãåšèŸºéšã®
ä¹±ãã®å°ãããããã圢æããããã®ãšèããã
ãã ããã«æ¬çºæã®å èšé²åªäœã«ãããèšé²å±€ãæ§
æããåå°äœå±€ã¯ç±äŒå°çãäœããè€åå±€äžã§
ã¯ãéå±ãããã¯åå°äœã®åŸ®ç²åã¯ãé žåç©äžã«
äºãã«å€ç«ããŠååšããŠãããããè€åå±€ã®ç±äŒ
å°çãäœããªããèšé²åªäœã®æ床ã¯é«ããªãããŸ
ãè€åå±€äžã®éå±ã®å å¡«çãåå°äœå±€ãè€åå±€ã®
åããé©åã«éžæããããšã«ãããæé©ãªåå åž
åçãåå åå°çã®èšé²åªäœãåŸãããã æ¬çºæã®å èšé²åªäœã®èšé²å±€ã«äœ¿çšããéå±ã
ããã¯åå°äœåã³éå±é žåç©çã¯ããããã空æ°
äžåã³æ°Žäžã§æ¥µããŠå®å®ã§ãäžã€æ¯æ§ãäœãã
ããæ¬çºæã®å èšé²åªäœã¯äœæ¯æ§ã§ä¿åå®å®æ§ã
ããããŠããã æ¬çºæã®å èšé²åªäœã¯ãèšé²åççšå ãã€ã¹ã¯
ãšããŠç»åãã¢ã€ã«ãææžãã¢ã€ã«ãããŒã¿ãã¢
ã€ã«åã³ã³ã³ããŠãŒã¿ã®å€éšã¡ã¢ãªãšããŠçšãã
ããã°ããã§ãªããã¬ãŒã¶å ã§çŽæ¥æžã蟌ã¿ãèª
ã¿åããå¯èœãªããŒããã«ãŒãããã€ã¯ããã€ã
ã·ãŠçãšããŠçšããããšãã§ããã 以äžãæ¬çºæã®è©³çŽ°ãå®æœäŸã«ãã€ãŠç€ºããã
æ¬çºæã¯ããçã®äŸã«éå®ããããã®ã§ã¯ãªãã å°ã以äžã®å®æœäŸã§ç€ºãå å¡«çãšã¯ãè€åå±€äž
ã§éå±ãããã¯åå°äœåŸ®ç²åã®å ããäœç©ã®å²å
ã§ããã å®æœäŸ ïŒ åã1.2mmãå€åŸ300mmãå åŸ35mmã®ããªã¡ã¿ã¯
ãªã«é žã¡ãã«ãããªããã€ã¹ã¯ç¶åºæ¿ãç空èžç
è£ çœ®ã®ãã€ã³ããŒã«åãä»ããäžã€ã®ã«ããã«ã
ããããGeïŒãã«ãŠãååŠè£œã30ÏÃ10mmïœãçŽ
床99.999ïŒ ïŒãSnïŒãã«ãŠãååŠè£œã30ÏÃ10mm
ïœãçŽåºŠ99.99ïŒ ïŒãSnO2ïŒãã«ãŠãååŠè£œã18Ï
ÃïŒmmïœãçŽåºŠ99.99ïŒ ïŒãå ¥ãããã®åºæ¿ã
20rpmã®é床ã§å転ãããªãããç空床ïŒÃ10-6
mmHgã®æ¡ä»¶ã«æŒãŠãé»åããŒã èžçæ³ãçšãã
ãŸã¥Geã30â«ã®åãã«èžçãã次ãã§Snåã³
SnO2ã«ããããå¥ã®é»åéããé»åç·ãç §å°ãã
Snåã³SnO2ã®èžçºé床ã調ç¯ããªããèžçãè¡
ããSnã®å å¡«ç0.8ã§èå60â«ã®Snåã³SnO2ã®è€
åå±€ãGeå±€ã®äžã«åœ¢æããç¶ããŠåæ§ã®æäœã
è¡ãããšã«ããããã®SnãšSnO2ã®è€åå±€äžã«å
ã20â«ã®Geå±€ãåã60â«ã®SnãšSnO2ã®è€åå±€å
ã³åã30â«ã®Geå±€ãé 次ç©å±€ãã第ïŒå³ã«æŒãŠ
ïœïŒïŒã«çžåœããæ§æã§åã200â«ã®èšé²å±€ãæ
ãããã€ã¹ã¯ç¶å èšé²åªäœã補äœããã åŸããããã€ã¹ã¯ç¶å èšé²åªäœãæ¯å1800å転
ã®å転é床ã§å転ãããªããããããããåšæ³¢æ°
5MHzã§100nsecã®ãã«ã¹å·Ÿã«å€èª¿ããåå°äœã¬ãŒ
ã¶ïŒæ¥ç«è£œäœæ補HLPâ1600ãçºæ¯æ³¢é·830nïœïŒ
ã®çºæ¯å ãã³ãªã¡ãŒã¿ãŒã¬ã³ãºãéå ã¬ã³ãºåã³
åºæ¿ãéããŠèšé²å±€ã«ããŒã åŸ1ÎŒïœãŸã§éå ã
ãŠç §å°ããããšã«ããèšé²ãè¡ã€ããšãããçåŸ
ãã»ãŒ1ÎŒïœã®ãããã圢æãããã®ã«å¿ èŠãªã
ã€ã¹ã¯ã®èšé²é¢äžã«æŒããã¬ãŒã¶å 匷床ã¯ïŒïœïŒ·
ã§ãã€ãããŸãèšé²ä¿¡å·ãïŒïœïŒ·ã®ã¬ãŒã¶å ã§å
çãè¡ããåºæºä¿¡å·5MHzããã³ãå·Ÿ100KHzã®æ¡
件ã§ã¹ãã¯ãã©ã ã¢ãã©ã€ã¶ã§æž¬å®ããCNæ¯ã¯
56dBã§ãã€ãã äžèšã®åŠãããŠèšé²ãè¡ã€ãèšé²æžã®ãã€ã¹ã¯
ç¶èšé²åªäœã60âã95ïŒ RHã®ææž©æ質局å ã«å ¥
ãã120æ¥éã®è湿ç±æ§è©Šéšãè¡ã€ããšããã
CNæ¯ã«å€åã¯èªããããªãã€ãã æ¯èŒäŸ ïŒ å®æœäŸïŒã«çšããã®ãšåæ§ã®ããªã¡ã¿ã¯ãªã«é ž
ã¡ãã«ã®ãã€ã¹ã¯ç¶åºæ¿ãïŒæçšæããå®æœäŸïŒ
ãšåæ§ã«åºæ¿å転é床20rpmãç空床ïŒÃ10-6mm
Hgã«æŒãŠãé»åããŒã èžçæ³ãçšãããããåº
æ¿äžã«Snåã³SnO2ãåã ãèžçºé床ã調ç¯ããª
ããå ±èžçããSnã®å å¡«çã0.8ã§ãåã èåã
100â«ã180â«åã³300â«ã®SnO2äžã«Sn埮ç²åãå
æ£ããè€åå±€ã®ã¿ãæããïŒçš®é¡ã®è©ŠæãåŸãã åŸãããïŒçš®é¡ã®è©Šæã«ã€ããŠå®æœäŸïŒãšåæ§
ã®æ¹æ³ã§èšé²åçãè¡ã€ãçµæã第ïŒè¡šã«ç€ºãã
ãããšã«ãã€ãŠãèšé²å±€ã®ãšãã«ã®ãŒç·ç §å°éšã
溶èçã«ããå€åœ¢ãŸãã¯é€å»ãããããšã«ãã€ãŠ
çããåå°çãããã¯ééçã®å€åãå©çšããŠå
åŠçã«æ å ±ã®èšé²ãåçãè¡ãã®ã«é©ããèšé²åª
äœã«é¢ãããã®ã§ããã å ãã€ã¹ã¯çã®å èšé²åªäœã«èŠæ±ãããæ§è³ªãš
ããŠã¯ãèšé²å æºã«çšããã¬ãŒã¶ã®æ³¢é·é åã§ã®
èšé²æ床ãé«ãããšãåçä¿¡å·ã®SNæ¯ãé«ãã
ãšãèšé²å¯åºŠãé«ãããšãä¿åå®å®æ§ã«ããããŠ
ããããšãåã³æ¯æ§ãäœãããšãæããããã ã¬ãŒã¶å ç §å°éšã®æž©åºŠäžæã«ããèšé²å±€ã溶解
ãããããã圢æããããããããŒãã¢ãŒãåèš
é²åªäœã«æŒãŠãèšé²æ床ãé«ãããããã«ã¯ãèš
é²å±€ã®åå åžåçãé«ãããšãèç¹ãæ¯ç±ããã³
ç±äŒå°çãäœãããšãå¿ èŠã§ããŸãèšé²å±€ã®åã
ã¯èãããšãæãŸãããåçä¿¡å·ã®SNæ¯ãé«ã
ããããã«ã¯ããããã®åœ¢ç¶ã倧ãããæã€ãŠã
ãŠããããåšèŸºã«ä¹±ããç¡ãããšãåã³åçã«å
å°å ã䜿çšããå Žåã«ã¯ãèšé²éšãšæªèšé²éšãšã®
åå°çã®å·®ã倧ããããšããŸãèšé²å¯åºŠãé«ãã
ãããã«ã¯ãç±äŒå°çãäœãããšãèŠæ±ãããã
ãŸãä¿åå®å®æ§ã«ããããèšé²åªäœãåŸãããã«
ã¯ãèšé²å±€ã®é žåå®å®æ§åã³è湿æ§ãé«ãããšã
èŠæ±ãããã ã¬ãŒã¶çšèšé²åªäœãšããŠçŸåšæãããããŠãã
ãšãããŠããã®ã¯ãã¬ã©ã¹ãŸãã¯ãã©ã¹ããã¯åº
æ¿äžã«èšé²å±€ãšããŠãã«ã«ãŸãã¯ãã«ã«âç çŽ å
éçã®ãã«ã«åéèèã圢æãããã®ã§ãããã
ã«ã«åã³ãã«ã«åéèèã¯ãå¯èŠâè¿èµ€å€ã®æ³¢é·
é åã§å ã®åžåçãé«ããäœç±äŒå°çãäœèç¹ã§
ããããèšé²æ床ãé«ãããŸããããã®åœ¢ç¶ã倧
ãããæãæããäžã€å¯èŠâè¿èµ€å€ã®æ³¢é·é åã§
é©åœãªåå°çãæããŠãããããåå°å ã«ãã€ãŠ
SNæ¯ã®é«ãåçä¿¡å·ãåŸããããªã©ãããŒãã¢
ãŒãåã¬ãŒã¶èšé²åªäœã«æ¥µããŠé©ããæ§è³ªãæã€
ãŠãããããããã«ã«èèåã³ãã«ã«âç çŽ åé
èèã«ã¯ãé žåå®å®æ§ãäœãããšåã³æ¯æ§ãé«ã
çã®æ¬ ç¹ããããé žåå®å®æ§ã®æ¹è¯ã«ã¯ãã«ã«ãŸ
ãã¯ãã«ã«âç çŽ åéã«ã»ã¬ã³ãæ·»å ããããã
ã«ã«äœé žåç©ãçšããçã®æ¹æ³ãè©Šã¿ãããŠãã
ããçŸåšãŸã§å åãªãã®ã¯åŸãããŠãããããŸã
æ¯æ§ã«é¢ããŠã¯å¹æçãªå¯Ÿçã¯èŠåºãããŠããª
ãã æ¯æ§ã®ç¹ã§ã¯ããã«ã«ç³»èšé²åªäœã«æ¯èŒããŠæ
å©ãªãã®ã«ãã¬ã©ã¹ãŸãã¯ãã©ã¹ããã¯åºæ¿äžã
ãããã¯è©²åºæ¿äžã«èšããã¢ã«ãããŠã çã®åå°
å±€ã®äžã«è²çŽ ãŸãã¯è²çŽ ãããªããŒã«åæ£ããå±€
ã圢æããèšé²åªäœããããããããäžè¬ã«è²çŽ
ã®åžåæ³¢é·ã¯ãèµ€è²å ããçæ³¢é·åŽã«ãããä»åŸ
èšé²çšå æºã®äž»æµãšãªããšäºæ³ãããŠããåå°äœ
ã¬ãŒã¶ã®çºæ¯æ³¢é·åã§ãã750nmmã850nïœã®é
åã§å€§ããªåžåã瀺ãå®å®ãªè²çŽ ãåŸãããªãã
ããåå°äœã¬ãŒã¢ãèšé²çšå æºãšããè²çŽ ç³»èšé²
åªäœã§å®çšçãªãã®ã¯åŸãããŠããªãã æ¬çºæè çã¯ãæ¯æ§ãäœããé žåå®å®æ§åã³è
æ°Žæ§ã«ããããå èšé²åªäœã®å®æãç®çãšããŠé
æç 究ãé²ããçµæãé žåå®å®æ§åã³èæ°Žæ§ã«ã
ãããç¹å®ã®éå±ãããã¯åå°äœã®åŸ®ç²åããç§
åŠçå®å®æ§ã«ããããéå±é žåç©èèäžã«åæ£ã
ãè€åå±€ãšããã®è€åå±€ã®å°ãªããšãäžæ¹ã®è¡šé¢
ã«æ¥è§Šããç¹å®ã®åå°äœãããªãèšé²å±€ãçšãã
ããšã«ãã€ãŠé«æ床ã§åçä¿¡å·ã®SNæ¯ã極ããŠ
é«ããäžã€å®å®ã§ãããæ¯æ§ã®äœãå èšé²åªäœã
åŸãããããšãèŠåºããæ¬çºæã«å°éããã æ¬çºæã®èŠæšãšãããšããã¯ãåºæ¿äžã«ãéå±
é žåç©èèäžã«éå±ãããã¯åå°äœã®åŸ®ç²åãå
æ£ããè€åå±€ãšã該è€åå±€ã®å°ãªããšãäžæ¹ã®è¡š
é¢ã«æ¥è§Šããåã20â«ä»¥äžã100â«ä»¥äžã®Geå±€
ïŒä»¥äžãåå°äœå±€ãšåŒã¶ïŒãšãããªãèšé²å±€ã圢
æãããŠããããšãç¹åŸŽãšããå èšé²åªäœã®æ©æ§
ãšæ§æã«ããã 第ïŒå³ã«ãæ¬çºæã®å èšé²åªäœã®å±€æ§æã®äžäŸ
ã瀺ãã第ïŒå³ã«æŒãŠã¯ãåºæ¿äžã«ãéå±é žåç©
äžã«éå±ãããã¯åå°äœã®åŸ®ç²åãåæ£ããè€å
å±€ïŒä»¥äžè€åå±€ãšåŒã¶ïŒãèšããããŠããã該è€
åå±€ã®è¡šé¢ã«åå°äœå±€ã圢æãããŠããããã®å
èšé²åªäœã«æŒãŠã¯åºæ¿åŽãããã¯åºæ¿ãšå察åŽã
ãå ¥å°ãããšãã«ã®ãŒç·ã¯ãåå°äœå±€åã³è€åå±€
ã«åžåããçºçããç±ã«ããè€åå±€ãè解ããã
ã®è€åå±€ã®è解éšåãåå°äœå±€ã®ããã«æ¥ããéš
åã䜵ã€ãŠç§»åããããšã«ãã€ãŠåœ¢æããããã
ãã«ãã€ãŠçããåªäœã®ãšãã«ã®ãŒç·ãç §å°ãã
ãéšåã®å ã®åå°çãééççã®å åŠçæ§è³ªã®å€
åãå©çšããŠèšé²ãåçãè¡ãããã æ¬çºæã®å èšé²åªäœã«æŒããè€åå±€ã«çšããã
ãéå±ãããã¯åå°äœã®äŸãšããŠã¯ãSnãInã
PbãAlãZnãCuãAgãAuãSbãBiãSeãTeã
Geåã³ããããäž»æåãšããåéãæãããã
ããäœæ¯æ§ã®èŠ³ç¹ãã奜ãŸããéå±ãããã¯åå°
äœã®äŸãšããŠã¯ãSnãInãSbãPbãAlãZnã
CuãAgãAuãGeåã³ããããäž»æåãšããå
éãæãããããäžèšéå±ãããã¯åå°äœã®ç¹åŸŽ
ã¯åå°äœã¬ãŒã¶ã®çºæ¯æ³¢é·åã§ã®åå°çãé«ãã
èç¹ãäœããæ¯æ§ãäœããåã³ç©ºæ°äžã§ã®å®å®æ§
ãé«ãçã§ããã®ã§ããããã®éå±ãããã¯åå°
äœãäž»æåãšããåéãçšããå Žåã¯ãäžèšç¹åŸŽ
ã倱ãããªãããã«æ³šæããå¿ èŠãããã æ¬çºæã®å èšé²åªäœã«æŒããè€åå±€ã«çšããã
ãéå±é žåç©ã¯ãååŠçå®å®æ§ã«ããããç±äŒå°
çã®äœããã®ã§ããããšãå¿ èŠã§ã奜ãŸããäŸãš
ããŠã¯ãSnãInãAlãZråã³Znã®é žåç©ãæã
ãããããæã«SnãŸãã¯Inã®é žåç©ãçšãããšã
空æ°äžã§ã®å®å®æ§ãããããé«æ床äžã€åçä¿¡å·
ã®SNæ¯ãé«ãèšé²åªäœãåŸããããSnãŸãã¯In
é žåç©ã®äŸãšããŠã¯ååŠåŒã§SnO2ãIn2O3åã³
SnO2-xãIn2O3-xçã®äœé žåç©ããSn1-yMyO2ã
In2-zNzO3çã®SnO2ãIn2O3ã«ç°çš®éå±ãããŒã
ã³ã°ããããã®ãæãããããããã§ïœãïœã¯
0.5以äžãïœã¯0.25以äžã®æ£ã®æ°ãïŒã¯SbãInã
ã¯SnãGeãPbãZnçã®éå±ã瀺ãã äžèšè€åå±€ã«æŒããéå±ãããã¯åå°äœã®å å¡«
çã¯0.3以äžã0.95以äžã§ããããšãå¿ èŠã§ããã
å å¡«çã0.3以äžã§ãããšãè€åå±€ã®åžåä¿æ°ã
äœäžããäžã€è€åå±€ã溶èæµååãã枩床ãé«ã
ãªããåŸãããå èšé²åªäœã®èšé²æ床ãäœäžã
ããå å¡«çã0.95以äžãšãªããšãè€åå±€ã«åæ£ã
ãŠããéå±ãããã¯åå°äœç²åéã®æ¥è§Šãå§ãŸ
ããéå±ãããã¯åå°äœç²åã®ç²ååŸã倧ãããª
ãããã®ããèšé²ãããã®å€§ããã圢ç¶ãäžæã
ã«ãªããåçä¿¡å·ã®SNæ¯ãäœäžãããŸãè€åå±€
ã®ç±äŒå°çã倧ãããªãããèšé²æ床ãäœäžã
ãã æ¬çºæã®å èšé²åªäœã«æŒããè€åå±€ã®äžå±€ã®å
ãã¯10â«ä»¥äžã500â«ä»¥äžãæãŸãããè€åå±€ã®
äžå±€ã®åãã10â«ä»¥äžã§ãããšãè€åå±€ã®ãšãã«
ã®ãŒç·ç §å°éšã®æº¶èæµååã«ããåå°äœå±€ã®ãã
ã圢æãé²è¡ãé£ããªããèšé²åªäœã®èšé²æ床ã
äœäžããããŸãè€åå±€ã®äžå±€ã®åãã500â«ä»¥äž
ã§ãããšãè€åå±€ãšãã«ã®ãŒç·ç §å°éšã®æº¶èæµå
åã«å¿ èŠãªãšãã«ã®ãŒã倧ãããªãããèšé²åªäœ
ã®èšé²æ床ãäœäžãããç¹ã«è€åå±€ã®äžå±€ã®åã
ã30â«ä»¥äžã300â«ä»¥äžã®å Žåãé«æ床ã§åçä¿¡
å·ã®SNæ¯ã®é«ãèšé²åªäœãåŸãããã æ¬çºæã®å èšé²åªäœã«çšããããåå°äœå±€ã®äŸ
ãšããŠã¯ãGeãSiãSeçã®å çŽ åå°äœåã³ã
AlSBãGaAsãGaSbãInPãInAsãInSbçã®å
åç©åå°äœãæãããããç¹ã«åå°äœã«Geãçš
ããå Žåã¯ãå質äžã€750nïœã850nïœã®æ³¢é·å
ã§å ã®åžåä¿æ°ã®å€§ããå±€ãåŸããããããé«æ
床äžã€åçä¿¡å·ã®SNæ¯ãé«ãèšé²åªäœãåŸãã
ãããŸãGeå±€ã¯èèã®å Žåã§ãé žåå®å®æ§åã³
è湿æ§ãããããŠãããæ¯æ§ãäœãç¹ã§æ¬çºæã®
å èšé²åªäœã«çšããããåå°äœå±€ãšããŠå¥œé©ã§ã
ããæŽã«æ¬çºæã®å èšé²åªäœã«ã¯ãGeã«GaãIn
ãŸãã¯SbçãããŒãã³ã°ããèèãããªãåå°
äœå±€ãçšããããšãã§ããã æ¬çºæã®å èšé²åªäœã«æŒããåå°äœå±€ã®äžå±€ã®
åãã¯20â«ä»¥äžã100â«ä»¥äžãæãŸãããåå°äœ
å±€ã®äžå±€ã®åãã10â«ä»¥äžã§ãããšãåŸãããèš
é²åªäœã®750nïœã850nïœã®æ³¢é·åã§ã®å ã®åå°
çãåžåçãäœããªããèšé²éšãšæªèšé²éšãšã®ã³
ã³ãã©ã¹ãã倧ããã§ãããåçä¿¡å·ã®SNæ¯ã
äœããªããåå°äœå±€ã®äžå±€ã®åãã200â«ä»¥äžã§
ãããšãè€åå±€ã®ãšãã«ã®ãŒç·ç §å°éšã溶èæµå
åããŠããåå°äœå±€ã®ããã圢æãé²è¡ãé£ããª
ããããèšé²åªäœã®èšé²æ床ãäœäžãããç¹ã«å
å°äœå±€ã®äžå±€ã®åãã20â«ä»¥äžã100â«ä»¥äžã®å Ž
åSNæ¯ã®é«ãèšé²åªäœãåŸãããã æ¬çºæã®å èšé²åªäœã®äžã€ã®å®æœæ æ§ã¯ãåºæ¿
äžã«è€åå±€ã圢æãããæŽã«ãã®è€åå±€ã®è¡šé¢ã«
åå°äœå±€ã圢æããããã®ã§ãããåºæ¿ãšããŠ
ã¯ãã¢ã«ãããŠã çã®éå±æ¿ãã¬ã©ã¹æ¿ãããã
ã¯ããªã¡ã¿ã¯ãªã«é žã¡ãã«ãããªã¹ãã¬ã³ãããª
å¡©åããã«ãããªã«ãŒãããŒããããªãšãã¬ã³ã
ã¬ãã¿ã¬ãŒããããªããã¬ã³ãã¬ãã¿ã¬ãŒããã
ãªã¢ããåã³ãšããã·æš¹èããžã¢ãªã«ãã¿ã¬ãŒã
éåäœããžãšãã¬ã³ã°ãªã³ãŒã«ãã¹ã¢ã«ãªã«ãŒã
ããŒãéåäœãããªããšãã¬ã³ãµã«ãã¢ã€ããã
ãªããšãã¬ã³ãªããµã€ããããªã€ããçã®ç±å¯å¡
æ§ãåã¯ç±ç¡¬åæ§æš¹èã®ã·ãŒãåã¯ãã€ã«ã ãçš
ãããããç¹ã«æ¬çºæã®å èšé²åªäœãèšé²å ãå
çå ãåºæ¿ãéããŠç §å°ãã圢åŒã®å ãã€ã¹ã¯ãš
ããŠäœ¿çšããå Žåã«æŒãŠã¯ãåºæ¿ã«ã¯ã¡ãã«ã¡ã¿
ã¯ãªã¬ãŒãç³»éåäœãã¹ãã¬ã³ç³»éåäœãããªå¡©
åããã«ãããªã«ãŒãããŒãããžãšãã¬ã³ã°ãªã³
ãŒã«ãã¹ã¢ãªã«ã«ãŒãããŒãéåäœããšããã·æš¹
èçã®éæãã©ã¹ããã¯ã®ã·ãŒããçšããå¿ èŠã
ããããŸããåºæ¿ã«ã¬ã©ã¹æ¿ãåã¯ã¢ã«ãããŠã
çã®éå±æ¿ã䜿çšããå Žåã¯ããããåºæ¿äžã«ã
ãªããŒå±€ãèšããåŸã«è€åå±€åã³åå°äœå±€ãããª
ãèšé²å±€ã圢æããããšé«æ床ã®å èšé²åªäœãåŸ
ããããäžèšããªããŒã®äŸãšããŠã¯ãããªã¹ãã¬
ã³ãããªã¡ãã«ã¡ã¿ã¯ãªã¬ãŒããããªã€ãœããã«
ã¡ã¿ã¯ãªã¬ãŒãçãæããããã æ¬çºæã®å èšé²åªäœã®å±€æ§æã®äŸã第ïŒå³ã第
ïŒå³ã«ç€ºãã以äžæ¬çºæã®èšé²åªäœã®è£œé æ¹æ³ã
å±€æ§æã®äŸå³ãçšããŠèª¬æããã 第ïŒå³ã«ç€ºãæ§æã®èšé²åªäœã¯ãåºæ¿ïŒã®äžã«
åå°äœå±€ïŒã圢æãããåŸã«ããã®åå°äœå±€ïŒã®
äžã«è€åå±€ïŒã圢æããã次ãã§ãã®æäœããã
è¿ããåŸæå€å±€ã«åå°äœå±€ã圢æããããšã«ã
ããåå°äœå±€ãïœå±€ãè€åå±€ãïœâïŒå±€ç©å±€ãã
ãããšã«ãã€ãŠåŸãããïŒããã§ïœã¯æ§ã®æŽæ°ã
瀺ããïŒãåå°äœå±€åã³è€åå±€ã圢æãããããã«
ã¯ãç空èžçæ³ãã€ãªã³åèžçæ³ãã€ãªã³ãã¬ãŒ
ãã€ã³ã°æ³ãã¹ããã¿æ³ãã¯ã©ã¹ã¿ãŒã€ãªã³ããŒ
ã æ³çãå©çšãããè€åå±€ã圢æãããå Žåã¯ã
éå±ãããã¯åå°äœéå±é žåç©ãšãå¥ã ã®ã«ãã
ã«å ¥ããïŒÃ10-3mmHg以äžã®ç空床ã«æŒãŠåæ
ã«èžçºããèžçãè¡ãããŸãäžèšç空èžçå·¥çšã§
èžçºç²åãã€ãªã³åããåå°äœå±€è¡šé¢ã«è¡çªãã
ãã€ãªã³åèžçæ³ããŸãã¯ã€ãªã³åãšåæã«åºæ¿
åŽã«çŽæµé»å§ãå°å ããŠã€ãªã³åç²åãå éãã
ãã€ãªã³ãã¬ãŒãã€ã³ã°æ³ãçšããããšãã§ã
ãããŸãéå±ãããã¯åå°äœã®ã¿ãŒã²ãããšéå±
é žåç©ã®ã¿ãŒã²ãããçšããŠåæã¹ããã¿ãè¡ã
ããšã«ãã€ãŠè€åå±€ã圢æãããããšãã§ããã
ãããã®å Žåãè€åå±€ã®åœ¢ææã«ã¯ãåèžçºæºã
ã¿ãŒã²ããã®æ¯èŒçè¿åã«æ°Žæ¶èåã»ã³ãµçã®ã»
ã³ãµããããèšçœ®ããéå±ãããã¯åå°äœåã³é
å±é žåç©ã®èžçé床ãã¹ããã¿ãªã³ã°é床ãå¥ã
ã«æ€ç¥ãå¶åŸ¡ããããšã«ãããæå®ã®éå±ããã
ã¯åå°äœã®å å¡«çåã³åãã®è€åå±€ãåŸãããã 第ïŒå³ã«ç€ºãæ§æã®èšé²åªäœã¯ãåºæ¿ïŒã®äžã«
è€åå±€ïŒã圢æãããåŸããã®è€åå±€ïŒã®äžã«å
å°äœå±€ïŒã圢æããã次ãã§ãã®æäœãããè¿ã
ããšã«ããè€åå±€ãïœå±€ãåå°äœå±€ãïœå±€ç©å±€ã
ããããšã«ãã€ãŠåŸãããã第ïŒå³ã«ç€ºãæ§æã®
èšé²åªäœã¯ã第ïŒå³ã«ç€ºãæ§æã®èšé²åªäœã補é
ããå Žåãšåæ§ã®æäœãè¡ããåºæ¿ïŒã®äžã«åå°
äœå±€ïŒãïœå±€ãè€åå±€ïŒãïœå±€ç©å±€ãããããšã«
ãã€ãŠåŸãããã第ïŒå³ã«ç€ºãæ§æã®èšé²åªäœ
ã¯ã第ïŒå³ã«ç€ºãæ§æã®èšé²åªäœã補é ããå Žå
ãšåæ§ã®æäœãè¡ããåºæ¿ïŒã®äžã«è€åå±€ïŒãïœ
å±€ãåå°äœå±€ïŒãïœâïŒå±€ç©å±€ãããããšã«ãã€
ãŠåŸãããã 第ïŒå³ã第ïŒå³ã«ç€ºãæ§æã®æ¬çºæã®å èšé²åª
äœã«æŒãŠã¯ãèšé²å±€ã®åãïŒè€åå±€åã³åå°äœå±€
ãç©å±€ããå šäœã®åãïŒã50â«ä»¥äžã2000â«ä»¥äž
ã§ããããšãæãŸãããèšé²å±€ã®åãã2000â«ä»¥
äžã«ãªããšãèšé²å±€ã®ãšãã«ã®ãŒç·ç §å°éšã®äœç©
ã倧ãããªãããããšãã«ã®ãŒç·ãç §å°ããå Žå
ã«åžåããããšãã«ã®ãŒã®å¯åºŠãäœäžããããã
èšé²åªäœã®èšé²æ床ãäœäžããããã«åœ¢æããã
ãããåšèŸºã®åœ¢ç¶ãä¹±ãæããªããåçä¿¡å·ã®
SNæ¯ã«æªåœ±é¿ãäžãããèšé²å±€ã®åãã50â«ä»¥
äžã§ãããšãèšé²åªäœã®èšé²éšãšæªèšé²éšã®åå°
çåã³ééçã®å·®ãå°ãããªããã³ã³ãã©ã¹ãã
äœããªããããåçä¿¡å·ã®SNæ¯ãé«ãããããš
ãã§ããªããæ¬çºæã®å èšé²åªäœãåå°åå ãã€
ã¹ã¯ã«äœ¿çšããå Žåãèšé²å±€ã®ãã奜ãŸããåã
ã®ç¯å²ã¯70â«ä»¥äžã500â«ä»¥äžã§ããã 第ïŒå³ã第ïŒå³ã«ç€ºãæ§æã®æ¬çºæã®å èšé²åª
äœã«æŒãŠã¯ãè€åå±€ã®äžå±€ã®åãã10â«ã500â«ã
åå°äœå±€ã®åãã10â«ã200â«ãè€åå±€ãšåå°äœ
å±€ãç©å±€ãããèšé²å±€ã®åãã50â«ã2000â«ã®ç¯
å²å ã§ããã°ãïœã®å€ã¯ïŒä»¥äžã®ä»»æã®æŽæ°ã§è¯
ããç¹ã«åå°äœå±€ã«Geã䜿çšãã第ïŒå³ã«ç€ºã
æ§æã§ïœãïŒä»¥äžã®å Žåã空æ°äžã§ã®å®å®æ§åã³
è湿æ§ã®ç¹ã«ããããå èšé²åªäœãåŸãããã æ¬çºæã®å èšé²åªäœã«æŒããèšé²å±€ã¯ãéåžžã®
ç°å¢äžã§ã¯æ¥µããŠå®å®ã§ãããç¹ã«ä¿è·å±€ãèšã
ãå¿ èŠã¯ç¡ãããæ©æ¢°çè¡æçã«å¯Ÿããä¿è·ãã
塵åçã®ä»çã«ãããèšé²ãåçã«æ¯éãçãã
ã®ãé²ãããšãç®çãšããŠãä¿è·å±€ãèšé²å±€ã®äž
ã«èšããããšãå¯èœã§ãããä¿è·å±€ãšããŠã¯ã
SiO2ãAl2O3ãTiO2çã®ç¡æ©ææåã³ææ©é«å
åææãçšããããã 第ïŒå³ã第ïŒå³ã«ç€ºãæ¬çºæã®å èšé²åªäœã«æŒ
ãŠã¯ãåºæ¿ïŒãéæãªãã®ãšããå Žåã¯ãèšé²å
åã³åçå ãå³ã®äžæ¹ããå ¥å°ãããŠããäžæ¹ã
ãå ¥å°ãããŠãè¯ãã æ¬çºæã®å èšé²åªäœã¯ãäœæ¯æ§ã§é«æ床ã§ã
ãã空æ°äžã§ã®å®å®æ§åã³è湿æ§ãããããŠãã
ãšåæã«åçä¿¡å·ã®SNæ¯ã極ããŠé«ãç¹ã«ç¹åŸŽ
ããããæ¬çºæã®å èšé²åªäœãäžèšã®åŠãããã
ãç¹åŸŽã瀺ãçç±ã¯çŸæç¹ã§ã¯å¿ ãããæ確ã§ç¡
ããã以äžã®æ§ã«æšå®ããããšãã§ãããæ¬çºæ
ã®å èšé²åªäœã®èšé²å±€ã¯ãããããå åŠå®æ°ã®ç°
ãªãè€åå±€ãšåå°äœå±€ãšã®ç©å±€èããæãç«ã€ãŠ
ãããããèšé²å±€ãããããè€åãããã¯åå°äœ
å±€åç¬ã§æãç«ã€ãŠããå Žåã«æ¯èŒããŠãèšé²å±€
ã®åãã極ããŠå°ããå Žåã§ããšãã«ã®ãŒç·ã®åž
åçåã³åå°çãé«ããªãããã®ããèšé²å±€ã®ãš
ãã«ã®ãŒç·ãç §å°ãããéšåã«æŒãããšãã«ã®ãŒ
å¯åºŠã倧ãããªããèšé²æ床ãé«ããªããšåæ
ã«ãèšé²éšãšæªèšé²éšãšã®ã³ã³ãã©ã¹ãã倧ãã
ãªããåçæã®SNæ¯ãé«ããªããããã«èšé²å±€
ãæ§æããŠããè€åå±€ã¯éå±é žåç©ãšãã®é žåç©
ã«åæ£ããç²åŸãå ã®æ³¢é·ä»¥äžã®æ¥µããŠåŸ®çŽ°ãªé
å±ãããã¯åå°äœã®ç²åããæãç«ã€ãŠããã
ãããã«ã¯ã®éå±ãããã¯åå°äœã«æ¯èŒããŠäœã
枩床ã§é£æ¥ããåå°äœå±€ã䌎ã€ãŠå®¹æã«æµååã
ãããã®èšé²å±€ã®æµååããéšåã¯ãéå±ããã
ã¯åå°äœåç¬ã®æº¶èäœã«æ¯èŒããŠå€§ããªè¡šé¢ãšã
ã«ã®ãŒãæããŠãããæµååããèšé²å±€ãšããã«
æ¥è§Šããåºæ¿ãšã®è¡šé¢ãšã®è¡šé¢ãšãã«ã®ãŒã®å·®ã
倧ãããªããæµååããèšé²å±€ã®ç§»åãã¹ã ãŒãº
ã«èµ·ãããã圢æã容æã«ãªãããã®æµååãã
èšé²å±€ã®ç§»åã¯ãæµååããéšåãšãã®åšå²ã®åº
çžãšã®è¡šé¢ãšãã«ã®ãŒã®å·®ã«ãã€ãŠèµ·ããšèãã
ããŠãããïŒç¹éæ55â132536å·åç §ïŒãæ¬çºæ
ã®å èšé²åªäœã«æŒãŠã¯ãåå°äœå±€ã®ç¡å®åœ¢ããã
ã¯åŸ®çµæ¶æ§é ããšãæããè€åå±€ã§ã¯ãéå±ãã
ãã¯åå°äœã®ç²åã極ããŠå°ããããããããã®
倧ãã圢ç¶ã«å€§ããªåœ±é¿ãäžãããšèããããã
ããäžè¬ã®éå±èèã§å€ãèŠããã倧ããªçµæ¶ã«
ããçµæ¶ç²çã®åœ±é¿ãç¡ããªãããã®çµæãäœã
ç §å°ãšãã«ã®ãŒã§åœ¢ç¶ã倧ããã®æã€ãåšèŸºéšã®
ä¹±ãã®å°ãããããã圢æããããã®ãšèããã
ãã ããã«æ¬çºæã®å èšé²åªäœã«ãããèšé²å±€ãæ§
æããåå°äœå±€ã¯ç±äŒå°çãäœããè€åå±€äžã§
ã¯ãéå±ãããã¯åå°äœã®åŸ®ç²åã¯ãé žåç©äžã«
äºãã«å€ç«ããŠååšããŠãããããè€åå±€ã®ç±äŒ
å°çãäœããªããèšé²åªäœã®æ床ã¯é«ããªãããŸ
ãè€åå±€äžã®éå±ã®å å¡«çãåå°äœå±€ãè€åå±€ã®
åããé©åã«éžæããããšã«ãããæé©ãªåå åž
åçãåå åå°çã®èšé²åªäœãåŸãããã æ¬çºæã®å èšé²åªäœã®èšé²å±€ã«äœ¿çšããéå±ã
ããã¯åå°äœåã³éå±é žåç©çã¯ããããã空æ°
äžåã³æ°Žäžã§æ¥µããŠå®å®ã§ãäžã€æ¯æ§ãäœãã
ããæ¬çºæã®å èšé²åªäœã¯äœæ¯æ§ã§ä¿åå®å®æ§ã
ããããŠããã æ¬çºæã®å èšé²åªäœã¯ãèšé²åççšå ãã€ã¹ã¯
ãšããŠç»åãã¢ã€ã«ãææžãã¢ã€ã«ãããŒã¿ãã¢
ã€ã«åã³ã³ã³ããŠãŒã¿ã®å€éšã¡ã¢ãªãšããŠçšãã
ããã°ããã§ãªããã¬ãŒã¶å ã§çŽæ¥æžã蟌ã¿ãèª
ã¿åããå¯èœãªããŒããã«ãŒãããã€ã¯ããã€ã
ã·ãŠçãšããŠçšããããšãã§ããã 以äžãæ¬çºæã®è©³çŽ°ãå®æœäŸã«ãã€ãŠç€ºããã
æ¬çºæã¯ããçã®äŸã«éå®ããããã®ã§ã¯ãªãã å°ã以äžã®å®æœäŸã§ç€ºãå å¡«çãšã¯ãè€åå±€äž
ã§éå±ãããã¯åå°äœåŸ®ç²åã®å ããäœç©ã®å²å
ã§ããã å®æœäŸ ïŒ åã1.2mmãå€åŸ300mmãå åŸ35mmã®ããªã¡ã¿ã¯
ãªã«é žã¡ãã«ãããªããã€ã¹ã¯ç¶åºæ¿ãç空èžç
è£ çœ®ã®ãã€ã³ããŒã«åãä»ããäžã€ã®ã«ããã«ã
ããããGeïŒãã«ãŠãååŠè£œã30ÏÃ10mmïœãçŽ
床99.999ïŒ ïŒãSnïŒãã«ãŠãååŠè£œã30ÏÃ10mm
ïœãçŽåºŠ99.99ïŒ ïŒãSnO2ïŒãã«ãŠãååŠè£œã18Ï
ÃïŒmmïœãçŽåºŠ99.99ïŒ ïŒãå ¥ãããã®åºæ¿ã
20rpmã®é床ã§å転ãããªãããç空床ïŒÃ10-6
mmHgã®æ¡ä»¶ã«æŒãŠãé»åããŒã èžçæ³ãçšãã
ãŸã¥Geã30â«ã®åãã«èžçãã次ãã§Snåã³
SnO2ã«ããããå¥ã®é»åéããé»åç·ãç §å°ãã
Snåã³SnO2ã®èžçºé床ã調ç¯ããªããèžçãè¡
ããSnã®å å¡«ç0.8ã§èå60â«ã®Snåã³SnO2ã®è€
åå±€ãGeå±€ã®äžã«åœ¢æããç¶ããŠåæ§ã®æäœã
è¡ãããšã«ããããã®SnãšSnO2ã®è€åå±€äžã«å
ã20â«ã®Geå±€ãåã60â«ã®SnãšSnO2ã®è€åå±€å
ã³åã30â«ã®Geå±€ãé 次ç©å±€ãã第ïŒå³ã«æŒãŠ
ïœïŒïŒã«çžåœããæ§æã§åã200â«ã®èšé²å±€ãæ
ãããã€ã¹ã¯ç¶å èšé²åªäœã補äœããã åŸããããã€ã¹ã¯ç¶å èšé²åªäœãæ¯å1800å転
ã®å転é床ã§å転ãããªããããããããåšæ³¢æ°
5MHzã§100nsecã®ãã«ã¹å·Ÿã«å€èª¿ããåå°äœã¬ãŒ
ã¶ïŒæ¥ç«è£œäœæ補HLPâ1600ãçºæ¯æ³¢é·830nïœïŒ
ã®çºæ¯å ãã³ãªã¡ãŒã¿ãŒã¬ã³ãºãéå ã¬ã³ãºåã³
åºæ¿ãéããŠèšé²å±€ã«ããŒã åŸ1ÎŒïœãŸã§éå ã
ãŠç §å°ããããšã«ããèšé²ãè¡ã€ããšãããçåŸ
ãã»ãŒ1ÎŒïœã®ãããã圢æãããã®ã«å¿ èŠãªã
ã€ã¹ã¯ã®èšé²é¢äžã«æŒããã¬ãŒã¶å 匷床ã¯ïŒïœïŒ·
ã§ãã€ãããŸãèšé²ä¿¡å·ãïŒïœïŒ·ã®ã¬ãŒã¶å ã§å
çãè¡ããåºæºä¿¡å·5MHzããã³ãå·Ÿ100KHzã®æ¡
件ã§ã¹ãã¯ãã©ã ã¢ãã©ã€ã¶ã§æž¬å®ããCNæ¯ã¯
56dBã§ãã€ãã äžèšã®åŠãããŠèšé²ãè¡ã€ãèšé²æžã®ãã€ã¹ã¯
ç¶èšé²åªäœã60âã95ïŒ RHã®ææž©æ質局å ã«å ¥
ãã120æ¥éã®è湿ç±æ§è©Šéšãè¡ã€ããšããã
CNæ¯ã«å€åã¯èªããããªãã€ãã æ¯èŒäŸ ïŒ å®æœäŸïŒã«çšããã®ãšåæ§ã®ããªã¡ã¿ã¯ãªã«é ž
ã¡ãã«ã®ãã€ã¹ã¯ç¶åºæ¿ãïŒæçšæããå®æœäŸïŒ
ãšåæ§ã«åºæ¿å転é床20rpmãç空床ïŒÃ10-6mm
Hgã«æŒãŠãé»åããŒã èžçæ³ãçšãããããåº
æ¿äžã«Snåã³SnO2ãåã ãèžçºé床ã調ç¯ããª
ããå ±èžçããSnã®å å¡«çã0.8ã§ãåã èåã
100â«ã180â«åã³300â«ã®SnO2äžã«Sn埮ç²åãå
æ£ããè€åå±€ã®ã¿ãæããïŒçš®é¡ã®è©ŠæãåŸãã åŸãããïŒçš®é¡ã®è©Šæã«ã€ããŠå®æœäŸïŒãšåæ§
ã®æ¹æ³ã§èšé²åçãè¡ã€ãçµæã第ïŒè¡šã«ç€ºãã
ãè¡šã
èŠãªããã€ã¹ã¯é¢äžã«æŒããã¬ãŒã¶å
匷床
æ¯èŒäŸ ïŒ å®æœäŸïŒã«çšããã®ãšåæ§ã®ããªã¡ã¿ã¯ãªã«é ž
ã¡ãã«ã®ãã€ã¹ã¯ç¶åºæ¿ãïŒæçšæããå®æœäŸïŒ
ãšåæ§ã«åºæ¿å転é床20rpmãç空床ïŒÃ10-6mm
Hgã®æ¡ä»¶ã§é»åããŒã èžçæ³ãçšãããããåº
æ¿äžã«GeãèžçããGeã®èåã80â«åã³300â«
ã®èšé²å±€ãGeã®ã¿ã®ïŒçš®é¡ã®è©ŠæãåŸããåŸã
ããïŒçš®é¡ã®è©Šæã«ã€ããŠå®æœäŸïŒãšåæ§ã®æ¡ä»¶
ã§èšé²ããããšãè©Šã¿ããããããã®è©Šæãã¬ãŒ
ã¶å 匷床12ïœïŒ·ã§ã¯ãããã¯åœ¢æããããèšé²ã
ãããšã¯ã§ããªãã€ãã å®æœäŸïŒãšæ¯èŒäŸïŒåã³ïŒããæãããªåŠãã
æ¯èŒäŸïŒã«ç€ºãèšé²å±€ãSnãšSnO2ã®è€åèèã®
ã¿ãããªãè©Šæã¯ãå®æœäŸïŒã«ç€ºãæ¬çºæã®å èš
é²åªäœã«æ¯èŒããŠæ床ãCNæ¯å ±ã«äœãããŸãèš
é²å±€ãGeèèã®ã¿ãããªãæ¯èŒäŸïŒã«ç€ºãè©Šæ
ã¯ãæ¬çºæã®å èšé²åªäœã«æ¯èŒããŠèããæ床ã
äœãã å®æœäŸ ïŒ å®æœäŸïŒãšåæ§ã®æ¹æ³ãçšããŠãããªã¡ã¿ã¯ãª
ã«é žã¡ãã«ã®ãã€ã¹ã¯ç¶åºæ¿äžã«ã第ïŒè¡šã«ç€ºã
éå±åã³éå±é žåç©ãããªãã第ïŒè¡šã«ç€ºãèå
ãæããè€åå±€ãšã第ïŒè¡šã«ç€ºãèåã®Geãã
ãªãåå°äœå±€ãšãã第ïŒè¡šã«ç€ºãå±€æ§æã«ç©å±€ã
ãèšé²å±€ã圢æããããšã«ãã€ãŠã第ïŒè¡šã®è©Šæ
çªå·ïŒâïŒãïŒâ13ã§ç€ºã13çš®é¡ã®å èšé²åªäœã
補äœããã åŸãããäžèš13çš®é¡ã®ãã€ã¹ã¯ç¶å èšé²åªäœã«
ã€ããŠãå®æœäŸïŒãšåæ§ã®æ¹æ³ãçšããŠæž¬å®ãã
èšé²æ床ãšCNæ¯ã第ïŒè¡šã«ç€ºããè湿æ§ã¯ïœã
ïŒä»¥äžã®å Žåç¹ã«ããããçµæã瀺ããã
æ¯èŒäŸ ïŒ å®æœäŸïŒã«çšããã®ãšåæ§ã®ããªã¡ã¿ã¯ãªã«é ž
ã¡ãã«ã®ãã€ã¹ã¯ç¶åºæ¿ãïŒæçšæããå®æœäŸïŒ
ãšåæ§ã«åºæ¿å転é床20rpmãç空床ïŒÃ10-6mm
Hgã®æ¡ä»¶ã§é»åããŒã èžçæ³ãçšãããããåº
æ¿äžã«GeãèžçããGeã®èåã80â«åã³300â«
ã®èšé²å±€ãGeã®ã¿ã®ïŒçš®é¡ã®è©ŠæãåŸããåŸã
ããïŒçš®é¡ã®è©Šæã«ã€ããŠå®æœäŸïŒãšåæ§ã®æ¡ä»¶
ã§èšé²ããããšãè©Šã¿ããããããã®è©Šæãã¬ãŒ
ã¶å 匷床12ïœïŒ·ã§ã¯ãããã¯åœ¢æããããèšé²ã
ãããšã¯ã§ããªãã€ãã å®æœäŸïŒãšæ¯èŒäŸïŒåã³ïŒããæãããªåŠãã
æ¯èŒäŸïŒã«ç€ºãèšé²å±€ãSnãšSnO2ã®è€åèèã®
ã¿ãããªãè©Šæã¯ãå®æœäŸïŒã«ç€ºãæ¬çºæã®å èš
é²åªäœã«æ¯èŒããŠæ床ãCNæ¯å ±ã«äœãããŸãèš
é²å±€ãGeèèã®ã¿ãããªãæ¯èŒäŸïŒã«ç€ºãè©Šæ
ã¯ãæ¬çºæã®å èšé²åªäœã«æ¯èŒããŠèããæ床ã
äœãã å®æœäŸ ïŒ å®æœäŸïŒãšåæ§ã®æ¹æ³ãçšããŠãããªã¡ã¿ã¯ãª
ã«é žã¡ãã«ã®ãã€ã¹ã¯ç¶åºæ¿äžã«ã第ïŒè¡šã«ç€ºã
éå±åã³éå±é žåç©ãããªãã第ïŒè¡šã«ç€ºãèå
ãæããè€åå±€ãšã第ïŒè¡šã«ç€ºãèåã®Geãã
ãªãåå°äœå±€ãšãã第ïŒè¡šã«ç€ºãå±€æ§æã«ç©å±€ã
ãèšé²å±€ã圢æããããšã«ãã€ãŠã第ïŒè¡šã®è©Šæ
çªå·ïŒâïŒãïŒâ13ã§ç€ºã13çš®é¡ã®å èšé²åªäœã
補äœããã åŸãããäžèš13çš®é¡ã®ãã€ã¹ã¯ç¶å èšé²åªäœã«
ã€ããŠãå®æœäŸïŒãšåæ§ã®æ¹æ³ãçšããŠæž¬å®ãã
èšé²æ床ãšCNæ¯ã第ïŒè¡šã«ç€ºããè湿æ§ã¯ïœã
ïŒä»¥äžã®å Žåç¹ã«ããããçµæã瀺ããã
ãè¡šã
ãè¡šã
å®æœäŸ ïŒ
äžå°ã®é»åéãè£
åããç空èžçè£
眮ã®ãã€ã³
ããŒå ã«åã1.2mmãå€åŸ300mmãå åŸ35mmã®ãžãš
ãã¬ã³ã°ãªã³ãŒã«ãã¹ã¢ãªã«ã«ãŒãããŒãéåäœ
ïŒåååCRâ39ïŒãããªããã€ã¹ã¯ç¶åºæ¿ãåã
ä»ãããã€ã³ããŒå ã®åã€ã®ã«ããã«ãããã
GeãSnãAuåã³SnO2ãå ¥ããäžèšåºæ¿ã
20rpmã®å転é床ã§å転ãããªãããç空床ïŒÃ
10-6mmHgã®æ¡ä»¶ã«æŒãŠããŸã¥Geã50â«ã®åãã«
èžçãã次ãã§SnãAuåã³SnO2ã«ããããå¥ã®
é»åéããé»åç·ãç §å°ããSnãAuåã³SuO2ã
ãããã®èžçºé床ã調ç¯ããªãããäžæåãåæ
ã«èžçããããšã«ãã€ãŠãSnO2äžã«Snã90éé
ïŒ ãAuã10ééïŒ ãããªãSnâAuåé埮ç²åã
åæ£ããåé埮ç²åã®å å¡«çã0.7ã§ãåã150â«
ã®è€åå±€ã圢æããç¶ããŠãã®è€åå±€äžã«åã³50
â«ã®åãã«geãèžçããããšã«ãã€ãŠã第ïŒå³
ã«æŒãŠïœïŒïŒã«çžåœããæ§æã§åã250â«ã®èšé²
å±€ãæãããã€ã¹ã¯ç¶å èšé²åªäœã補äœããã åŸãããå èšé²åªäœã«ã€ããŠå®æœäŸïŒãšåæ§ã®
æ¹æ³ã§æž¬å®ããèšé²åçç¹æ§ã第ïŒè¡šã®è©Šæçªå·
ïŒâïŒã«ç€ºãã ãŸã第ïŒè¡šã«ç€ºãè©Šæçªå·ïŒâïŒãïŒâïŒã®å
èšé²åªäœã¯è©Šæçªå·ïŒâïŒãšåæ§ã®æ¹æ³ã§è£œäœ
ããè€åå±€äžã®åéã®çš®é¡åã³åéçµæã第ïŒè¡š
ã«ç€ºããã®ã§ãã以å€ã¯ãåºæ¿ãåå°äœå±€ã®çš®
é¡ãåããè€åå±€äžã®åé埮ç²åã®å å¡«çãè€å
å±€ã®åããèšé²å±€ã®æ§æåã³èšé²å±€ã®åãã¯ãã
ããè©Šæçªå·ïŒâïŒã®å Žåãšåäžã®ãã®ã§ããã
è©Šæçªå·ïŒâïŒãïŒâïŒã®å èšé²åªäœã«ã€ããŠå®
æœäŸïŒãšåæ§ã®æ¡ä»¶ã§æž¬å®ããèšé²åçç¹æ§ã第
ïŒè¡šã«ç€ºãã å®å®æ§ãè湿æ§ã«ã€ããŠå®æœäŸïŒãšåæ§ã«æž¬å®
ãããè¯å¥œã§ãã€ãã
ããŒå ã«åã1.2mmãå€åŸ300mmãå åŸ35mmã®ãžãš
ãã¬ã³ã°ãªã³ãŒã«ãã¹ã¢ãªã«ã«ãŒãããŒãéåäœ
ïŒåååCRâ39ïŒãããªããã€ã¹ã¯ç¶åºæ¿ãåã
ä»ãããã€ã³ããŒå ã®åã€ã®ã«ããã«ãããã
GeãSnãAuåã³SnO2ãå ¥ããäžèšåºæ¿ã
20rpmã®å転é床ã§å転ãããªãããç空床ïŒÃ
10-6mmHgã®æ¡ä»¶ã«æŒãŠããŸã¥Geã50â«ã®åãã«
èžçãã次ãã§SnãAuåã³SnO2ã«ããããå¥ã®
é»åéããé»åç·ãç §å°ããSnãAuåã³SuO2ã
ãããã®èžçºé床ã調ç¯ããªãããäžæåãåæ
ã«èžçããããšã«ãã€ãŠãSnO2äžã«Snã90éé
ïŒ ãAuã10ééïŒ ãããªãSnâAuåé埮ç²åã
åæ£ããåé埮ç²åã®å å¡«çã0.7ã§ãåã150â«
ã®è€åå±€ã圢æããç¶ããŠãã®è€åå±€äžã«åã³50
â«ã®åãã«geãèžçããããšã«ãã€ãŠã第ïŒå³
ã«æŒãŠïœïŒïŒã«çžåœããæ§æã§åã250â«ã®èšé²
å±€ãæãããã€ã¹ã¯ç¶å èšé²åªäœã補äœããã åŸãããå èšé²åªäœã«ã€ããŠå®æœäŸïŒãšåæ§ã®
æ¹æ³ã§æž¬å®ããèšé²åçç¹æ§ã第ïŒè¡šã®è©Šæçªå·
ïŒâïŒã«ç€ºãã ãŸã第ïŒè¡šã«ç€ºãè©Šæçªå·ïŒâïŒãïŒâïŒã®å
èšé²åªäœã¯è©Šæçªå·ïŒâïŒãšåæ§ã®æ¹æ³ã§è£œäœ
ããè€åå±€äžã®åéã®çš®é¡åã³åéçµæã第ïŒè¡š
ã«ç€ºããã®ã§ãã以å€ã¯ãåºæ¿ãåå°äœå±€ã®çš®
é¡ãåããè€åå±€äžã®åé埮ç²åã®å å¡«çãè€å
å±€ã®åããèšé²å±€ã®æ§æåã³èšé²å±€ã®åãã¯ãã
ããè©Šæçªå·ïŒâïŒã®å Žåãšåäžã®ãã®ã§ããã
è©Šæçªå·ïŒâïŒãïŒâïŒã®å èšé²åªäœã«ã€ããŠå®
æœäŸïŒãšåæ§ã®æ¡ä»¶ã§æž¬å®ããèšé²åçç¹æ§ã第
ïŒè¡šã«ç€ºãã å®å®æ§ãè湿æ§ã«ã€ããŠå®æœäŸïŒãšåæ§ã«æž¬å®
ãããè¯å¥œã§ãã€ãã
ãè¡šã
æ¯èŒäŸ ïŒ
å®æœäŸïŒã§çšãããã®ãšåæ§ã®åã1.2mmãå€
圢300mmãå åŸ35mmã®ããªã¡ã¿ã¯ãªã«é žã¡ãã«ã
ãæããã€ã¹ã¯ç¶åºæ¿ãç空èžçè£ çœ®ã®ãã€ã³ã
ãŒã«åãä»ããè£ çœ®å ã®ïŒã€ã®ã«ããã«ãããã
BiãSnãAuåã³MgOãå ¥ããåºæ¿ã120rpmã§
å転ãããªãããç空床ïŒÃ10-6Torrã®æ¡ä»¶ã§
MgOãšAuãåã500â«ãAuã®å å¡«ç0.2ã«æãã
ãã«å ±èžçãã次ãã§Biã250â«ãSnã100â«ã®
åãã§èžçãããåŸãåã³ãMgOãšAuãåã
500â«ãAuã®å å¡«ç0.5ãšæãããã«å ±èžçããŠã
ïŒç¹éæ57â41997å·å ¬å ±ã®å®æœäŸïŒã«ç€ºãããã
ã®ãšåæ§ã®ïŒãã€ã¹ã¯ç¶ã®è©ŠæãåŸãã åŸããããã€ã¹ã¯ç¶ã®è©Šæããæ¬é¡å®æœäŸïŒãš
åæ§ã«ããŠã1800rpmã®å転é床ã§å転ãããªã
ããç¹°ãè¿ãåšæ³¢æ°5MHzã§100nsecã®ãã«ã¹å·Ÿã«
å€èª¿ããåå°äœã¬ãŒã¶ã®çºæ¯å ãã³ãªã¡ãŒã¿ãŒã¬
ã³ãºãéå ã¬ã³ãºåã³åºæ¿ãéããŠèšé²å±€ã«ããŒ
ã åŸ1ÎŒïœãŸã§éå ããŠç §å°ãè¡ãªã€ãããèšé²
é¢ã«ãããã¬ãŒã¶å 匷床ã12ïœïŒ·ãŸã§äžæãããŠ
ãèšé²ããããšã¯ã§ããªãã€ãã äžæ¹ãäžèšã®ãã€ã¹ã¯ç¶ã®è©Šæãã450rpmã®
å転é床ã§å転ãããªããç¹°ãè¿ãåšæ³¢æ°1MHz
ã§ã500nsecã®ãã«ã¹å·Ÿã«å€èª¿ããåå°äœã¬ã¶ã®
çºæ¯å ãã³ãªã¡ãŒã¿ãŒã¬ã³ãºåã³éå ã¬ã³ãºãé
ããŠçŽæ¥èšé²å±€äžã«ããŒã åŸ1ÎŒïœã«éå ãç §å°
ãè¡ãªã€ããšãããçåŸãã»ãŒ1ÎŒïœã®ãããã
圢æãããã®ã«å¿ èŠãªèšé²å±€äžã«ãããã¬ãŒã¶å
匷床ã¯ïŒïœïŒ·ã§ãã€ãããŸããèšé²ä¿¡å·ãïŒïœïŒ·
ã®ã¬ãŒã¶å ã§åçãè¡ãªããã¹ãã¯ãã©ã ã¢ãã©
ã€ã¶ã§æž¬å®ããCNæ¯ã¯ã45dBã§ãã€ãã ãããã®äºå®ãããæ¯èŒäŸïŒã§åŸãããæ å ±èš
é²åªäœã¯ãæ¯èŒçäœãå転é床ã§äœåšæ³¢æ°ã®ä¿¡å·
ã®èšé²åçã«ã¯çšããããšãã§ããããæ¬é¡çºæ
ã®å®æœäŸã«ç€ºãããããªé«éå転ã§é«åšæ³¢æ°ã®ä¿¡
å·ã®èšé²ã«ã¯æ床ãäžè¶³ããŠããããšãç解ã§ã
ãã æ¯èŒäŸ ïŒ åã1.2mmãå€åŸ300mmãå åŸ35mmã®ããªã¡ã¿ã¯
ãªã«é žã¡ãã«ããæããã€ã¹ã¯ç¶åºæ¿ãç空èžç
è£ çœ®ã®ãã€ã³ããŒã«åãä»ããïŒã€ã®ã«ããã«ã
ãããTiO2ãAl2O3ãGeåã³Biãå ¥ããåºæ¿ã
120rpmã§å転ãããªããç空床ïŒÃ10-6Torrã®
æ¡ä»¶ã§ãTiO2ãåã60â«ãGeã30â«ãTiO2ãã
30â«ãGeã30â«ãBiã30â«åã³Al2O3ã50â«ã®é
ã«èžçãè¡ãªããïŒç¹éæ57â135197å·å ¬å ±ã®å®
æœäŸïŒã®ãµã³ãã«ïŒ¡ãšåæ§ã®ïŒãã€ã¹ã¯ç¶ã®è©Šæ
ãåŸãã åŸããããã€ã¹ã¯ç¶ã®è©Šæããæ¬é¡å®æœäŸïŒãš
åæ§ã«ããŠã1800rpmã®å転é床ã§å転ãããªã
ããç¹°ãè¿ãåšæ³¢æ°5MHzã§100nsecã®ãã«ã¹å·Ÿã«
å€èª¿ããåå°äœã¬ãŒã¶ã®çºæ¯å ãã³ãªã¡ãŒã¿ãŒã¬
ã³ãºãéå ã¬ã³ãºåã³åºæ¿ãéããŠèšé²å±€é¢ã§ã
ãŒã åŸ1ÎŒïœã«éå ããŠç §å°ãè¡ãªã€ãããèšé²
é¢ã«ãããã¬ãŒã¶å 匷床ã12mWãŸã§äžæãããŠ
ãèšé²ããããšãã§ããªãã€ãã äžæ¹ãæ¯èŒäŸïŒã§åŸããããã€ã¹ã¯ç¶ã®è©Šæã
å転é床450rpmã§å転ãããªãããç¹°ãè¿ãåš
æ³¢æ°1MHzã§500nsecã®ãã«ã¹å·Ÿã«å€èª¿ããåå°äœ
ã¬ãŒã¶ã®çºæ¯å ãåºæ¿ãéããŠèšé²å±€é¢ã§ããŒã
åŸ1ÎŒïœã«éå ããŠç §å°ãè¡ãªã€ããšãããçåŸ
ãã»ãŒ1ÎŒïœã®ãããã圢æãããã®ã«å¿ èŠãªèš
é²å±€äžã«ãããã¬ãŒã¶å 匷床ã¯ïŒïœïŒ·ã§ãã€ãã
ãŸããèšé²ä¿¡å·ãïŒïœïŒ·ã®ã¬ãŒã¶å ã§åçãè¡ãª
ããã¹ãã¯ãã©ã ã¢ãã©ã€ã¶ã§æž¬å®ããCNæ¯
ã¯ã46dBã§ãã€ãã ãããã®äºå®ãããæ¯èŒäŸïŒã§åŸãããæ å ±èš
é²åªäœã¯ãæ¯èŒçäœãå転é床ã§äœåšæ³¢æ°ã®ä¿¡å·
ã®èšé²åçã«ã¯çšããããšãã§ããããæ¬é¡çºæ
ã®å®æœäŸã«ç€ºãããããªé«éå転ã§é«åšæ³¢æ°ã®ä¿¡
å·ã®èšé²ã«ã¯æ床ãäžè¶³ããŠããããšãç解ã§ã
ãã æ¯èŒäŸ ïŒ åã100ÎŒïœãå€åŸ300mmãå åŸ35mmã®ããªãšã
ã¬ã³ãã¬ãã¿ã¬ãŒããã€ã«ã ãåã1.2mmãå€åŸ
300mmãå åŸ35mmã®ã¬ã©ã¹æ¿ã«è¡šé¢ãå¹³æ»ã«ãªã
ããã«è²Œãä»ããåºæ¿ãç空èžçè£ çœ®ã®ãã€ã³ã
ãŒã«åãä»ããïŒã€ã®ã«ããã«ããããSnãSnS
åã³Inãå ¥ããåºæ¿ã20rpmã®é床ã§å転ãããª
ãããïŒÃ10-6Torrã®ç空床ã«ãããŠãããªãš
ãã¬ã³ãã¬ãã¿ã¬ãŒãè¡šé¢äžã«SnãšSnSãåã
500â«ãSnãšSnSãšã®äœç©æ¯ãïŒïŒïŒãšæããã
ã«å ±èžçãã次ãã§Inã100â«ã«èžçããŠãïŒç¹é
æ57â189894å·å ¬å ±ã®å®æœäŸã«ç€ºããããã®ãšå
æ§ã®ïŒãã€ã¹ã¯ç¶ã®è©ŠæãåŸãã åŸããããã€ã¹ã¯ç¶ã®è©Šæãæ¬é¡å®æœäŸïŒãšå
æ§ã«ããŠ1800rpmã®å転é床ã§å転ãããªããã
ç¹°ãè¿ãåšæ³¢æ°5MHzã§100nsecã®ãã«ã¹å·Ÿã«å€èª¿
ããåå°äœã¬ãŒã¶ã®çºæ¯å ãã³ãªã¡ãŒã¿ãŒã¬ã³
ãºãéå ã¬ã³ãºåã³åºæ¿ãéããŠèšé²å±€ã«ããŒã
åŸ1ÎŒïœãŸã§éå ããŠç §å°ãè¡ãªã€ããšãããç
åŸãã»ãŒ1ÎŒïœã®ãããã圢æãããã®ã«å¿ èŠãª
èšé²å±€äžã«ãããã¬ãŒã¶å 匷床ã¯6mWã§ãã€ãã
äžæ¹ãã¬ãŒã¶å ã§åçãè¡ãªãã¹ãã¯ãã©ã ã¢ã
ã©ã€ã¶ãŒã§åçä¿¡å·ã®CNæ¯ã枬å®ãããšãã
40dBã§ãã€ãã æ¯èŒäŸ ïŒ åã1.2mmãå€åŸ300mmãå åŸ35mmã®ããªã¡ãã«
ã¡ã¿ã¯ãªã«é žã¡ãã«ããæããã€ã¹ã¯ç¶åºæ¿ãç
空èžçè£ çœ®ã®ãã€ã³ããŒã«åãä»ããïŒã€ã®ã«ã
ãã«ããããInãSnåã³SnO2ãå ¥ããåºæ¿ã
20rpmã§å転ãããªãããæ¬é¡çºæã®å®æœäŸïŒãš
åæ§ã®æ¡ä»¶åã³æ¹æ³ã§èžçãè¡ãªããåºæ¿äžã«å
ã30â«ã®Inå±€ãSnã®å å¡«ç0.8ã§åã60â«ãšSnãš
SnO2ã®è€åå±€ãåã20â«ã®Inå±€ãSnã®å å¡«ç0.8
ã§åã60â«ã®SnãšSnO2ã®è€åå±€åã³åã30â«ã®
Geå±€ãé 次ç©å±€ããåã200â«ã®èšé²å±€ãæãã
ãã€ã¹ã¯ç¶ã®è³æãåŸãã åŸããããã€ã¹ã¯ç¶ã®è©Šæã®ã®èšé²åçç¹æ§ã
æ¬é¡å®æœäŸïŒãšåæ§ã®æ¡ä»¶ã§æž¬å®ãããšãããå
åŸãã»ãŒ1ÎŒïœã®ãããã圢æãããã®ã«å¿ èŠãª
è©Šæã®èšé²é¢äžã«ãããã¬ãŒã¶å 匷床ã¯ïŒïœïŒ·ã§
ãã€ãããŸããåçä¿¡å·ã®CNæ¯ã¯ã42dBã§ãã€
ãã æ¯èŒäŸïŒåã³æ¯èŒäŸïŒã®è©äŸ¡çµæãããæ¯èŒäŸ
ïŒã§åŸãããæ å ±èšé²åªäœã¯ãæ床ã¯é«ãå€ã瀺
ããã®ã®ãCNæ¯ã40dBãšäœãããŸããæ¬é¡çºæ
ã®å®æœäŸïŒã«ãããŠçšããGeããInã«ä»£ãã以
å€ã¯ãèšé²å±€ã®çµæãæ§é ãèæ§æãå®æœäŸïŒãš
åäžã§ããæ¯èŒäŸïŒã§åŸãããæ å ±èšé²åªäœãã
æ床ã¯é«ãå€ã瀺ãããCNæ¯ã42dBãšäœããæ¯
èŒäŸïŒåã³æ¯èŒäŸïŒã§åŸãããæ å ±èšé²åªäœã¯ã
ãããããæ¬é¡çºæã®ç®çã§ããé«CNæ¯ãæªé
æã§ããããšãç解ã§ããã
圢300mmãå åŸ35mmã®ããªã¡ã¿ã¯ãªã«é žã¡ãã«ã
ãæããã€ã¹ã¯ç¶åºæ¿ãç空èžçè£ çœ®ã®ãã€ã³ã
ãŒã«åãä»ããè£ çœ®å ã®ïŒã€ã®ã«ããã«ãããã
BiãSnãAuåã³MgOãå ¥ããåºæ¿ã120rpmã§
å転ãããªãããç空床ïŒÃ10-6Torrã®æ¡ä»¶ã§
MgOãšAuãåã500â«ãAuã®å å¡«ç0.2ã«æãã
ãã«å ±èžçãã次ãã§Biã250â«ãSnã100â«ã®
åãã§èžçãããåŸãåã³ãMgOãšAuãåã
500â«ãAuã®å å¡«ç0.5ãšæãããã«å ±èžçããŠã
ïŒç¹éæ57â41997å·å ¬å ±ã®å®æœäŸïŒã«ç€ºãããã
ã®ãšåæ§ã®ïŒãã€ã¹ã¯ç¶ã®è©ŠæãåŸãã åŸããããã€ã¹ã¯ç¶ã®è©Šæããæ¬é¡å®æœäŸïŒãš
åæ§ã«ããŠã1800rpmã®å転é床ã§å転ãããªã
ããç¹°ãè¿ãåšæ³¢æ°5MHzã§100nsecã®ãã«ã¹å·Ÿã«
å€èª¿ããåå°äœã¬ãŒã¶ã®çºæ¯å ãã³ãªã¡ãŒã¿ãŒã¬
ã³ãºãéå ã¬ã³ãºåã³åºæ¿ãéããŠèšé²å±€ã«ããŒ
ã åŸ1ÎŒïœãŸã§éå ããŠç §å°ãè¡ãªã€ãããèšé²
é¢ã«ãããã¬ãŒã¶å 匷床ã12ïœïŒ·ãŸã§äžæãããŠ
ãèšé²ããããšã¯ã§ããªãã€ãã äžæ¹ãäžèšã®ãã€ã¹ã¯ç¶ã®è©Šæãã450rpmã®
å転é床ã§å転ãããªããç¹°ãè¿ãåšæ³¢æ°1MHz
ã§ã500nsecã®ãã«ã¹å·Ÿã«å€èª¿ããåå°äœã¬ã¶ã®
çºæ¯å ãã³ãªã¡ãŒã¿ãŒã¬ã³ãºåã³éå ã¬ã³ãºãé
ããŠçŽæ¥èšé²å±€äžã«ããŒã åŸ1ÎŒïœã«éå ãç §å°
ãè¡ãªã€ããšãããçåŸãã»ãŒ1ÎŒïœã®ãããã
圢æãããã®ã«å¿ èŠãªèšé²å±€äžã«ãããã¬ãŒã¶å
匷床ã¯ïŒïœïŒ·ã§ãã€ãããŸããèšé²ä¿¡å·ãïŒïœïŒ·
ã®ã¬ãŒã¶å ã§åçãè¡ãªããã¹ãã¯ãã©ã ã¢ãã©
ã€ã¶ã§æž¬å®ããCNæ¯ã¯ã45dBã§ãã€ãã ãããã®äºå®ãããæ¯èŒäŸïŒã§åŸãããæ å ±èš
é²åªäœã¯ãæ¯èŒçäœãå転é床ã§äœåšæ³¢æ°ã®ä¿¡å·
ã®èšé²åçã«ã¯çšããããšãã§ããããæ¬é¡çºæ
ã®å®æœäŸã«ç€ºãããããªé«éå転ã§é«åšæ³¢æ°ã®ä¿¡
å·ã®èšé²ã«ã¯æ床ãäžè¶³ããŠããããšãç解ã§ã
ãã æ¯èŒäŸ ïŒ åã1.2mmãå€åŸ300mmãå åŸ35mmã®ããªã¡ã¿ã¯
ãªã«é žã¡ãã«ããæããã€ã¹ã¯ç¶åºæ¿ãç空èžç
è£ çœ®ã®ãã€ã³ããŒã«åãä»ããïŒã€ã®ã«ããã«ã
ãããTiO2ãAl2O3ãGeåã³Biãå ¥ããåºæ¿ã
120rpmã§å転ãããªããç空床ïŒÃ10-6Torrã®
æ¡ä»¶ã§ãTiO2ãåã60â«ãGeã30â«ãTiO2ãã
30â«ãGeã30â«ãBiã30â«åã³Al2O3ã50â«ã®é
ã«èžçãè¡ãªããïŒç¹éæ57â135197å·å ¬å ±ã®å®
æœäŸïŒã®ãµã³ãã«ïŒ¡ãšåæ§ã®ïŒãã€ã¹ã¯ç¶ã®è©Šæ
ãåŸãã åŸããããã€ã¹ã¯ç¶ã®è©Šæããæ¬é¡å®æœäŸïŒãš
åæ§ã«ããŠã1800rpmã®å転é床ã§å転ãããªã
ããç¹°ãè¿ãåšæ³¢æ°5MHzã§100nsecã®ãã«ã¹å·Ÿã«
å€èª¿ããåå°äœã¬ãŒã¶ã®çºæ¯å ãã³ãªã¡ãŒã¿ãŒã¬
ã³ãºãéå ã¬ã³ãºåã³åºæ¿ãéããŠèšé²å±€é¢ã§ã
ãŒã åŸ1ÎŒïœã«éå ããŠç §å°ãè¡ãªã€ãããèšé²
é¢ã«ãããã¬ãŒã¶å 匷床ã12mWãŸã§äžæãããŠ
ãèšé²ããããšãã§ããªãã€ãã äžæ¹ãæ¯èŒäŸïŒã§åŸããããã€ã¹ã¯ç¶ã®è©Šæã
å転é床450rpmã§å転ãããªãããç¹°ãè¿ãåš
æ³¢æ°1MHzã§500nsecã®ãã«ã¹å·Ÿã«å€èª¿ããåå°äœ
ã¬ãŒã¶ã®çºæ¯å ãåºæ¿ãéããŠèšé²å±€é¢ã§ããŒã
åŸ1ÎŒïœã«éå ããŠç §å°ãè¡ãªã€ããšãããçåŸ
ãã»ãŒ1ÎŒïœã®ãããã圢æãããã®ã«å¿ èŠãªèš
é²å±€äžã«ãããã¬ãŒã¶å 匷床ã¯ïŒïœïŒ·ã§ãã€ãã
ãŸããèšé²ä¿¡å·ãïŒïœïŒ·ã®ã¬ãŒã¶å ã§åçãè¡ãª
ããã¹ãã¯ãã©ã ã¢ãã©ã€ã¶ã§æž¬å®ããCNæ¯
ã¯ã46dBã§ãã€ãã ãããã®äºå®ãããæ¯èŒäŸïŒã§åŸãããæ å ±èš
é²åªäœã¯ãæ¯èŒçäœãå転é床ã§äœåšæ³¢æ°ã®ä¿¡å·
ã®èšé²åçã«ã¯çšããããšãã§ããããæ¬é¡çºæ
ã®å®æœäŸã«ç€ºãããããªé«éå転ã§é«åšæ³¢æ°ã®ä¿¡
å·ã®èšé²ã«ã¯æ床ãäžè¶³ããŠããããšãç解ã§ã
ãã æ¯èŒäŸ ïŒ åã100ÎŒïœãå€åŸ300mmãå åŸ35mmã®ããªãšã
ã¬ã³ãã¬ãã¿ã¬ãŒããã€ã«ã ãåã1.2mmãå€åŸ
300mmãå åŸ35mmã®ã¬ã©ã¹æ¿ã«è¡šé¢ãå¹³æ»ã«ãªã
ããã«è²Œãä»ããåºæ¿ãç空èžçè£ çœ®ã®ãã€ã³ã
ãŒã«åãä»ããïŒã€ã®ã«ããã«ããããSnãSnS
åã³Inãå ¥ããåºæ¿ã20rpmã®é床ã§å転ãããª
ãããïŒÃ10-6Torrã®ç空床ã«ãããŠãããªãš
ãã¬ã³ãã¬ãã¿ã¬ãŒãè¡šé¢äžã«SnãšSnSãåã
500â«ãSnãšSnSãšã®äœç©æ¯ãïŒïŒïŒãšæããã
ã«å ±èžçãã次ãã§Inã100â«ã«èžçããŠãïŒç¹é
æ57â189894å·å ¬å ±ã®å®æœäŸã«ç€ºããããã®ãšå
æ§ã®ïŒãã€ã¹ã¯ç¶ã®è©ŠæãåŸãã åŸããããã€ã¹ã¯ç¶ã®è©Šæãæ¬é¡å®æœäŸïŒãšå
æ§ã«ããŠ1800rpmã®å転é床ã§å転ãããªããã
ç¹°ãè¿ãåšæ³¢æ°5MHzã§100nsecã®ãã«ã¹å·Ÿã«å€èª¿
ããåå°äœã¬ãŒã¶ã®çºæ¯å ãã³ãªã¡ãŒã¿ãŒã¬ã³
ãºãéå ã¬ã³ãºåã³åºæ¿ãéããŠèšé²å±€ã«ããŒã
åŸ1ÎŒïœãŸã§éå ããŠç §å°ãè¡ãªã€ããšãããç
åŸãã»ãŒ1ÎŒïœã®ãããã圢æãããã®ã«å¿ èŠãª
èšé²å±€äžã«ãããã¬ãŒã¶å 匷床ã¯6mWã§ãã€ãã
äžæ¹ãã¬ãŒã¶å ã§åçãè¡ãªãã¹ãã¯ãã©ã ã¢ã
ã©ã€ã¶ãŒã§åçä¿¡å·ã®CNæ¯ã枬å®ãããšãã
40dBã§ãã€ãã æ¯èŒäŸ ïŒ åã1.2mmãå€åŸ300mmãå åŸ35mmã®ããªã¡ãã«
ã¡ã¿ã¯ãªã«é žã¡ãã«ããæããã€ã¹ã¯ç¶åºæ¿ãç
空èžçè£ çœ®ã®ãã€ã³ããŒã«åãä»ããïŒã€ã®ã«ã
ãã«ããããInãSnåã³SnO2ãå ¥ããåºæ¿ã
20rpmã§å転ãããªãããæ¬é¡çºæã®å®æœäŸïŒãš
åæ§ã®æ¡ä»¶åã³æ¹æ³ã§èžçãè¡ãªããåºæ¿äžã«å
ã30â«ã®Inå±€ãSnã®å å¡«ç0.8ã§åã60â«ãšSnãš
SnO2ã®è€åå±€ãåã20â«ã®Inå±€ãSnã®å å¡«ç0.8
ã§åã60â«ã®SnãšSnO2ã®è€åå±€åã³åã30â«ã®
Geå±€ãé 次ç©å±€ããåã200â«ã®èšé²å±€ãæãã
ãã€ã¹ã¯ç¶ã®è³æãåŸãã åŸããããã€ã¹ã¯ç¶ã®è©Šæã®ã®èšé²åçç¹æ§ã
æ¬é¡å®æœäŸïŒãšåæ§ã®æ¡ä»¶ã§æž¬å®ãããšãããå
åŸãã»ãŒ1ÎŒïœã®ãããã圢æãããã®ã«å¿ èŠãª
è©Šæã®èšé²é¢äžã«ãããã¬ãŒã¶å 匷床ã¯ïŒïœïŒ·ã§
ãã€ãããŸããåçä¿¡å·ã®CNæ¯ã¯ã42dBã§ãã€
ãã æ¯èŒäŸïŒåã³æ¯èŒäŸïŒã®è©äŸ¡çµæãããæ¯èŒäŸ
ïŒã§åŸãããæ å ±èšé²åªäœã¯ãæ床ã¯é«ãå€ã瀺
ããã®ã®ãCNæ¯ã40dBãšäœãããŸããæ¬é¡çºæ
ã®å®æœäŸïŒã«ãããŠçšããGeããInã«ä»£ãã以
å€ã¯ãèšé²å±€ã®çµæãæ§é ãèæ§æãå®æœäŸïŒãš
åäžã§ããæ¯èŒäŸïŒã§åŸãããæ å ±èšé²åªäœãã
æ床ã¯é«ãå€ã瀺ãããCNæ¯ã42dBãšäœããæ¯
èŒäŸïŒåã³æ¯èŒäŸïŒã§åŸãããæ å ±èšé²åªäœã¯ã
ãããããæ¬é¡çºæã®ç®çã§ããé«CNæ¯ãæªé
æã§ããããšãç解ã§ããã
第ïŒå³ã第ïŒå³ã第ïŒå³ã第ïŒå³åã³ç¬¬ïŒå³ã¯
æ¬çºæã®å èšé²åªäœã®æé¢å³ã§ããã åå³ã«ãããŠãïŒã¯è€åå±€ãïŒã¯åå°äœå±€ãïŒ
ã¯åºæ¿ã瀺ãã
æ¬çºæã®å èšé²åªäœã®æé¢å³ã§ããã åå³ã«ãããŠãïŒã¯è€åå±€ãïŒã¯åå°äœå±€ãïŒ
ã¯åºæ¿ã瀺ãã
Claims (1)
- ãç¹èš±è«æ±ã®ç¯å²ã ïŒ åºæ¿äžã«ãéå±é žåç©èèäžã«éå±ãããã¯
åå°äœã®åŸ®ç²åãåæ£ããè€åå±€ãšã該è€åå±€ã®
å°ãªããšãäžæ¹ã®è¡šé¢ã«æ¥è§Šããåã20â«ä»¥äžã
100â«ä»¥äžã®Geå±€ãšãããªãèšé²å±€ã圢æãããŠ
ããããšãç¹åŸŽãšããå èšé²åªäœã ïŒ éå±ãããã¯åå°äœã®åŸ®ç²åããSnãInã
SbãPbãAlãZnãCuãAgãAuåã³Geããæã
矀ããéžã°ããéå±ãŸãã¯ãããéå±ãããã¯å
å°äœãäž»æåãšããåéã®åŸ®ç²åã§ããç¹èš±è«æ±
ã®ç¯å²ç¬¬ïŒé ã«èšèŒã®å èšé²åªäœã ïŒ éå±é žåç©ãSnãInãAlãZråã³Znããæ
ã矀ããéžã°ããéå±ã®é žåç©ããéžã°ããå°ãª
ããšãäžçš®ã®éå±é žåç©ã§ããç¹èš±è«æ±ã®ç¯å²ç¬¬
ïŒé ã«èšèŒã®å èšé²åªäœã
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58099577A JPS59225992A (ja) | 1983-06-06 | 1983-06-06 | å èšé²åªäœ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58099577A JPS59225992A (ja) | 1983-06-06 | 1983-06-06 | å èšé²åªäœ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59225992A JPS59225992A (ja) | 1984-12-19 |
JPH0575595B2 true JPH0575595B2 (ja) | 1993-10-20 |
Family
ID=14250955
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58099577A Granted JPS59225992A (ja) | 1983-06-06 | 1983-06-06 | å èšé²åªäœ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59225992A (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0829616B2 (ja) * | 1984-10-05 | 1996-03-27 | æ ªåŒäŒç€Ÿæ¥ç«è£œäœæ | æ å ±ã®èšé²çšéšæ |
JPS63155436A (ja) * | 1986-12-19 | 1988-06-28 | Toshiba Corp | æ å ±èšé²åçæ¶å»æ¹æ³ |
JP2827201B2 (ja) * | 1987-03-18 | 1998-11-25 | æ±ã¬æ ªåŒäŒç€Ÿ | å èšé²åªäœ |
CN1220195C (zh) | 2002-04-30 | 2005-09-21 | Tdkè¡ä»œæéå ¬åž | å åŠè®°åœåªäœä»¥ååšå ¶äžå åŠè®°åœæ°æ®çæ¹æ³ |
US7231649B2 (en) | 2002-05-31 | 2007-06-12 | Tdk Corporation | Optical recording medium and method for optically recording data in the same |
JP4059714B2 (ja) | 2002-07-04 | 2008-03-12 | ïœïœæ ªåŒäŒç€Ÿ | å èšé²åªäœ |
JP2005044395A (ja) | 2003-07-23 | 2005-02-17 | Tdk Corp | å æ å ±èšé²åªäœ |
JP2005071402A (ja) | 2003-08-25 | 2005-03-17 | Tdk Corp | å æ å ±èšé²åªäœ |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5741997A (en) * | 1980-08-27 | 1982-03-09 | Asahi Chem Ind Co Ltd | Information recording member |
JPS57135197A (en) * | 1981-02-16 | 1982-08-20 | Asahi Chem Ind Co Ltd | Information recording medium |
JPS57189894A (en) * | 1981-05-20 | 1982-11-22 | Fuji Photo Film Co Ltd | Thermal recording material |
-
1983
- 1983-06-06 JP JP58099577A patent/JPS59225992A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5741997A (en) * | 1980-08-27 | 1982-03-09 | Asahi Chem Ind Co Ltd | Information recording member |
JPS57135197A (en) * | 1981-02-16 | 1982-08-20 | Asahi Chem Ind Co Ltd | Information recording medium |
JPS57189894A (en) * | 1981-05-20 | 1982-11-22 | Fuji Photo Film Co Ltd | Thermal recording material |
Also Published As
Publication number | Publication date |
---|---|
JPS59225992A (ja) | 1984-12-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4769311A (en) | Information recording member | |
EP0410704B1 (en) | Optical recording apparatus | |
KR100746263B1 (ko) | ë¶ëŠ¬ë êž°ë¡ìžµì ê°ë êŽ ì 볎맀첎 | |
KR20000062984A (ko) | ì 볎Ʞë¡ë§€ì²Žì ê·ž ì ì¡°ë°©ë² ë° ê·ž êž°ë¡ì¬ìë°©ë² | |
JPS62152786A (ja) | çžå€åèšé²åªäœ | |
JP2001344824A (ja) | å èšé²åªäœã®è£œé æ¹æ³ããã³å èšé²åªäœ | |
US4668573A (en) | Thin film for recording data | |
JPH0575595B2 (ja) | ||
JP2834131B2 (ja) | æ å ±èšé²çšèè | |
JP2679995B2 (ja) | æ å ±èšé²çšèè | |
JP2661293B2 (ja) | å åŠçæ å ±èšé²åªäœ | |
JP2002190139A (ja) | å èšé²åªäœ | |
JPS6339387A (ja) | å èšé²åªäœ | |
US20050064132A1 (en) | Phase-change optical recording media | |
JP2664207B2 (ja) | æ å ±èšé²çšèè | |
JP2782910B2 (ja) | å åŠçæ å ±èšé²æ¹æ³ãåçæ¹æ³åã³æ¶å»æ¹æ³ | |
JPS5959492A (ja) | å èšé²åªäœ | |
JPH04316887A (ja) | å èšé²åªäœåã³ã¹ããã¿ãªã³ã°ã¿ãŒã²ãã䞊ã³ã«ãããã®è£œé æ¹æ³ | |
JPS6247839A (ja) | æ å ±èšé²çšèè | |
US5196284A (en) | Erasable phase change optical recording elements and methods | |
JPS58118293A (ja) | å èšé²åªäœ | |
JPS63167440A (ja) | æ å ±ãèšé²ãããã¯èšé²åã³æ¶å»ããæ¹æ³ | |
JPH0829616B2 (ja) | æ å ±ã®èšé²çšéšæ | |
JPS62125552A (ja) | å èšé²åªäœ | |
JPH02219689A (ja) | æ å ±èšé²åªäœ |