JPH0571151B2 - - Google Patents

Info

Publication number
JPH0571151B2
JPH0571151B2 JP61054488A JP5448886A JPH0571151B2 JP H0571151 B2 JPH0571151 B2 JP H0571151B2 JP 61054488 A JP61054488 A JP 61054488A JP 5448886 A JP5448886 A JP 5448886A JP H0571151 B2 JPH0571151 B2 JP H0571151B2
Authority
JP
Japan
Prior art keywords
tin oxide
transparent conductive
conductive film
oxide film
fluorine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61054488A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62211966A (ja
Inventor
Masahiro Hirata
Masao Misonoo
Hideo Kawahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Priority to JP61054488A priority Critical patent/JPS62211966A/ja
Publication of JPS62211966A publication Critical patent/JPS62211966A/ja
Publication of JPH0571151B2 publication Critical patent/JPH0571151B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H10F77/244—Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers

Landscapes

  • Photovoltaic Devices (AREA)
  • Non-Insulated Conductors (AREA)
  • Electrodes Of Semiconductors (AREA)
JP61054488A 1986-03-12 1986-03-12 透明導電膜付き基板 Granted JPS62211966A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61054488A JPS62211966A (ja) 1986-03-12 1986-03-12 透明導電膜付き基板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61054488A JPS62211966A (ja) 1986-03-12 1986-03-12 透明導電膜付き基板

Publications (2)

Publication Number Publication Date
JPS62211966A JPS62211966A (ja) 1987-09-17
JPH0571151B2 true JPH0571151B2 (enExample) 1993-10-06

Family

ID=12972028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61054488A Granted JPS62211966A (ja) 1986-03-12 1986-03-12 透明導電膜付き基板

Country Status (1)

Country Link
JP (1) JPS62211966A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02210715A (ja) * 1989-02-08 1990-08-22 Nippon Sheet Glass Co Ltd 二層構造を有する透明導電基体
WO2001026161A1 (en) * 1999-10-05 2001-04-12 Matsushita Battery Industrial Co., Ltd. Compound semiconductor solar cell and method of manufacture thereof
US7585567B2 (en) 2003-06-17 2009-09-08 Nippon Sheet Glass Company, Limited Transparent conductive substrate, method of manufacturing the same, and photoelectric conversion element
NL1024437C2 (nl) * 2003-10-02 2005-04-05 Tno Coating welke is aangebracht op een substraat, een zonnecel, en werkwijze voor het aanbrengen van de coating op het substraat.

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62198169A (ja) * 1986-02-25 1987-09-01 Fuji Electric Corp Res & Dev Ltd 太陽電池

Also Published As

Publication number Publication date
JPS62211966A (ja) 1987-09-17

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