JPH0570944B2 - - Google Patents

Info

Publication number
JPH0570944B2
JPH0570944B2 JP58168166A JP16816683A JPH0570944B2 JP H0570944 B2 JPH0570944 B2 JP H0570944B2 JP 58168166 A JP58168166 A JP 58168166A JP 16816683 A JP16816683 A JP 16816683A JP H0570944 B2 JPH0570944 B2 JP H0570944B2
Authority
JP
Japan
Prior art keywords
pattern
solid
image sensor
light
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58168166A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6060756A (ja
Inventor
Toshio Nakano
Ken Tsutsui
Akira Sasano
Toshihisa Tsukada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58168166A priority Critical patent/JPS6060756A/ja
Publication of JPS6060756A publication Critical patent/JPS6060756A/ja
Publication of JPH0570944B2 publication Critical patent/JPH0570944B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/40—Optical elements or arrangements
    • H10F77/413—Optical elements or arrangements directly associated or integrated with the devices, e.g. back reflectors

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP58168166A 1983-09-14 1983-09-14 マイクロレンズ付固体撮像素子の製造方法 Granted JPS6060756A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58168166A JPS6060756A (ja) 1983-09-14 1983-09-14 マイクロレンズ付固体撮像素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58168166A JPS6060756A (ja) 1983-09-14 1983-09-14 マイクロレンズ付固体撮像素子の製造方法

Publications (2)

Publication Number Publication Date
JPS6060756A JPS6060756A (ja) 1985-04-08
JPH0570944B2 true JPH0570944B2 (enrdf_load_stackoverflow) 1993-10-06

Family

ID=15863026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58168166A Granted JPS6060756A (ja) 1983-09-14 1983-09-14 マイクロレンズ付固体撮像素子の製造方法

Country Status (1)

Country Link
JP (1) JPS6060756A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61203663A (ja) * 1985-02-13 1986-09-09 Nec Corp 固体撮像装置の製造方法
US4694185A (en) * 1986-04-18 1987-09-15 Eastman Kodak Company Light sensing devices with lenticular pixels
JPH02309674A (ja) * 1989-05-24 1990-12-25 Sony Corp 固体撮像装置
US5239412A (en) * 1990-02-05 1993-08-24 Sharp Kabushiki Kaisha Solid image pickup device having microlenses
JP2518955B2 (ja) * 1990-06-07 1996-07-31 シャープ株式会社 固体撮像素子のマイクロレンズ形成方法
JP4792671B2 (ja) * 2001-07-24 2011-10-12 凸版印刷株式会社 固体撮像素子の製造方法
US12405355B2 (en) 2019-03-05 2025-09-02 Hamamatsu Photonics K.K. Light-receiving device and method for manufacturing light-receiving device
JP7531408B2 (ja) * 2021-01-08 2024-08-09 株式会社東芝 光検出器、光検出システム、ライダー装置、移動体及び車

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6059752B2 (ja) * 1976-12-15 1985-12-26 松下電器産業株式会社 固体撮像装置およびその製造方法
JPS55124366A (en) * 1979-03-19 1980-09-25 Fuji Photo Film Co Ltd Pickup device
JPS5775431A (en) * 1980-10-28 1982-05-12 Fujitsu Ltd Formation of pattern
JPS5855909A (ja) * 1981-09-29 1983-04-02 Takeomi Suzuki 光学像検出装置
JPS5990467A (ja) * 1982-11-15 1984-05-24 Mitsubishi Electric Corp 固体撮像素子
JPS6038989A (ja) * 1983-08-12 1985-02-28 Nec Corp 固体撮像装置の製造方法

Also Published As

Publication number Publication date
JPS6060756A (ja) 1985-04-08

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