JPH0569312B2 - - Google Patents

Info

Publication number
JPH0569312B2
JPH0569312B2 JP60215320A JP21532085A JPH0569312B2 JP H0569312 B2 JPH0569312 B2 JP H0569312B2 JP 60215320 A JP60215320 A JP 60215320A JP 21532085 A JP21532085 A JP 21532085A JP H0569312 B2 JPH0569312 B2 JP H0569312B2
Authority
JP
Japan
Prior art keywords
film
barrier film
resistance
atoms
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60215320A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6273756A (ja
Inventor
Shuji Kishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP21532085A priority Critical patent/JPS6273756A/ja
Publication of JPS6273756A publication Critical patent/JPS6273756A/ja
Publication of JPH0569312B2 publication Critical patent/JPH0569312B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP21532085A 1985-09-27 1985-09-27 半導体装置 Granted JPS6273756A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21532085A JPS6273756A (ja) 1985-09-27 1985-09-27 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21532085A JPS6273756A (ja) 1985-09-27 1985-09-27 半導体装置

Publications (2)

Publication Number Publication Date
JPS6273756A JPS6273756A (ja) 1987-04-04
JPH0569312B2 true JPH0569312B2 (cs) 1993-09-30

Family

ID=16670354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21532085A Granted JPS6273756A (ja) 1985-09-27 1985-09-27 半導体装置

Country Status (1)

Country Link
JP (1) JPS6273756A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04114464A (ja) * 1990-09-04 1992-04-15 Matsushita Electron Corp 半導体装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5437360A (en) * 1977-08-29 1979-03-19 Kansai Paint Co Ltd Method of treating drainage at electrodepositing step
US4380259A (en) * 1981-01-12 1983-04-19 The Coe Manufacturing Company Veneer lathe apparatus and method using independently adjustable powered back-up roll

Also Published As

Publication number Publication date
JPS6273756A (ja) 1987-04-04

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