JPH0568853B2 - - Google Patents

Info

Publication number
JPH0568853B2
JPH0568853B2 JP57037991A JP3799182A JPH0568853B2 JP H0568853 B2 JPH0568853 B2 JP H0568853B2 JP 57037991 A JP57037991 A JP 57037991A JP 3799182 A JP3799182 A JP 3799182A JP H0568853 B2 JPH0568853 B2 JP H0568853B2
Authority
JP
Japan
Prior art keywords
wiring layer
wiring
layer
multilayer
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57037991A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58155741A (ja
Inventor
Ryoji Oritsuki
Susumu Saito
Hiromi Kanai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3799182A priority Critical patent/JPS58155741A/ja
Publication of JPS58155741A publication Critical patent/JPS58155741A/ja
Publication of JPH0568853B2 publication Critical patent/JPH0568853B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP3799182A 1982-03-12 1982-03-12 多層配線構造の製造方法 Granted JPS58155741A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3799182A JPS58155741A (ja) 1982-03-12 1982-03-12 多層配線構造の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3799182A JPS58155741A (ja) 1982-03-12 1982-03-12 多層配線構造の製造方法

Publications (2)

Publication Number Publication Date
JPS58155741A JPS58155741A (ja) 1983-09-16
JPH0568853B2 true JPH0568853B2 (en:Method) 1993-09-29

Family

ID=12513030

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3799182A Granted JPS58155741A (ja) 1982-03-12 1982-03-12 多層配線構造の製造方法

Country Status (1)

Country Link
JP (1) JPS58155741A (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961147A (ja) * 1982-09-30 1984-04-07 Toshiba Corp 半導体装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5640260A (en) * 1979-09-11 1981-04-16 Mitsubishi Electric Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS58155741A (ja) 1983-09-16

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