JPH0566905B2 - - Google Patents

Info

Publication number
JPH0566905B2
JPH0566905B2 JP62182400A JP18240087A JPH0566905B2 JP H0566905 B2 JPH0566905 B2 JP H0566905B2 JP 62182400 A JP62182400 A JP 62182400A JP 18240087 A JP18240087 A JP 18240087A JP H0566905 B2 JPH0566905 B2 JP H0566905B2
Authority
JP
Japan
Prior art keywords
aluminum nitride
group
oxide
weight
sintered body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62182400A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6428280A (en
Inventor
Akira Yamakawa
Hitoshi Sakagami
Hisao Takeuchi
Koichi Sogabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP62182400A priority Critical patent/JPS6428280A/ja
Publication of JPS6428280A publication Critical patent/JPS6428280A/ja
Publication of JPH0566905B2 publication Critical patent/JPH0566905B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP62182400A 1987-07-23 1987-07-23 Sintered aluminum nitride and production thereof Granted JPS6428280A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62182400A JPS6428280A (en) 1987-07-23 1987-07-23 Sintered aluminum nitride and production thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62182400A JPS6428280A (en) 1987-07-23 1987-07-23 Sintered aluminum nitride and production thereof

Publications (2)

Publication Number Publication Date
JPS6428280A JPS6428280A (en) 1989-01-30
JPH0566905B2 true JPH0566905B2 (cs) 1993-09-22

Family

ID=16117648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62182400A Granted JPS6428280A (en) 1987-07-23 1987-07-23 Sintered aluminum nitride and production thereof

Country Status (1)

Country Link
JP (1) JPS6428280A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6017485A (en) * 1996-03-28 2000-01-25 Carborundum Corporation Process for making a low electrical resistivity, high purity aluminum nitride electrostatic chuck

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60127267A (ja) * 1983-12-12 1985-07-06 株式会社東芝 高熱伝導性窒化アルミニウム焼結体の製造方法
JPS61117161A (ja) * 1984-11-09 1986-06-04 株式会社東芝 窒化アルミニウムセラミツクスの製造方法
JPS62105960A (ja) * 1985-10-30 1987-05-16 株式会社トクヤマ 窒化アルミニウム焼結体の製造方法
JPS6259575A (ja) * 1985-09-11 1987-03-16 電気化学工業株式会社 窒化アルミニウム焼結体の製法

Also Published As

Publication number Publication date
JPS6428280A (en) 1989-01-30

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term