JPH0566537B2 - - Google Patents
Info
- Publication number
- JPH0566537B2 JPH0566537B2 JP59168467A JP16846784A JPH0566537B2 JP H0566537 B2 JPH0566537 B2 JP H0566537B2 JP 59168467 A JP59168467 A JP 59168467A JP 16846784 A JP16846784 A JP 16846784A JP H0566537 B2 JPH0566537 B2 JP H0566537B2
- Authority
- JP
- Japan
- Prior art keywords
- strain
- diaphragm
- sensitive resistor
- layer
- sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010410 layer Substances 0.000 claims description 31
- 239000004020 conductor Substances 0.000 claims description 16
- 229910000679 solder Inorganic materials 0.000 claims description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 5
- 229920006015 heat resistant resin Polymers 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 239000002344 surface layer Substances 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 239000007769 metal material Substances 0.000 claims 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 9
- 239000007788 liquid Substances 0.000 description 7
- 239000002184 metal Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910005540 GaP Inorganic materials 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229920006149 polyester-amide block copolymer Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16846784A JPS6147532A (ja) | 1984-08-11 | 1984-08-11 | 歪センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16846784A JPS6147532A (ja) | 1984-08-11 | 1984-08-11 | 歪センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6147532A JPS6147532A (ja) | 1986-03-08 |
| JPH0566537B2 true JPH0566537B2 (fr) | 1993-09-22 |
Family
ID=15868649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16846784A Granted JPS6147532A (ja) | 1984-08-11 | 1984-08-11 | 歪センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6147532A (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5167158A (en) * | 1987-10-07 | 1992-12-01 | Kabushiki Kaisha Komatsu Seisakusho | Semiconductor film pressure sensor and method of manufacturing same |
| JP2651492B2 (ja) * | 1989-11-08 | 1997-09-10 | セイコー電子工業 株式会社 | 相対圧圧力センサの製造方法 |
| WO2011078043A1 (fr) * | 2009-12-25 | 2011-06-30 | アルプス電気株式会社 | Capteur de force et procédé de fabrication de celui-ci |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5123179A (ja) * | 1974-08-20 | 1976-02-24 | Matsushita Electric Ind Co Ltd | Atsuryokuhenkanki |
| JPS54150987A (en) * | 1978-05-18 | 1979-11-27 | Gulton Ind Inc | Strain gauge transducer and method of fabricating same |
| JPS56107141A (en) * | 1980-01-30 | 1981-08-25 | Matsushita Electric Ind Co Ltd | Pressure sensor |
-
1984
- 1984-08-11 JP JP16846784A patent/JPS6147532A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5123179A (ja) * | 1974-08-20 | 1976-02-24 | Matsushita Electric Ind Co Ltd | Atsuryokuhenkanki |
| JPS54150987A (en) * | 1978-05-18 | 1979-11-27 | Gulton Ind Inc | Strain gauge transducer and method of fabricating same |
| JPS56107141A (en) * | 1980-01-30 | 1981-08-25 | Matsushita Electric Ind Co Ltd | Pressure sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6147532A (ja) | 1986-03-08 |
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