JPS56107141A - Pressure sensor - Google Patents

Pressure sensor

Info

Publication number
JPS56107141A
JPS56107141A JP1078380A JP1078380A JPS56107141A JP S56107141 A JPS56107141 A JP S56107141A JP 1078380 A JP1078380 A JP 1078380A JP 1078380 A JP1078380 A JP 1078380A JP S56107141 A JPS56107141 A JP S56107141A
Authority
JP
Japan
Prior art keywords
metal diaphragm
melting point
electric insulation
pressure sensor
insulation film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1078380A
Other languages
Japanese (ja)
Inventor
Yasuo Kudo
Koji Matsuo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1078380A priority Critical patent/JPS56107141A/en
Publication of JPS56107141A publication Critical patent/JPS56107141A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To economically form a pressure sensor whose performance is stable by forming an electric insulation film with specific low-melting point glass at a pressure sensor consisting of a bias gauge provided on a metal diaphragm through the intermediary of an electric insulation film. CONSTITUTION:For instance, on a metal diaphragm 2 of circular plane shape consisting of an alloy circular-structured support base 1 with a peripheral part fixed, a bias gauge 4 is evaporated through an electric insulation film 3. In addition, at a pressure sensor equipped with an electrode 5, an electric insulation film 3 is formed with a low-melting point glass which is as close to metal diaphragm as possible in terms of coefficient of thermal expansion. That is, low-melting point glass of average grain diameter approx. 2 microns is blended with a caking agent into a paste form and the said paste is applied on the metal diaphragm 2. After this process, a caking agent heated at over melting temperture is volatilized to form a film. When titanium is used as a material for the afore-mentioned metal diaphragm, a low-melting point glass having a coefficient of thermal expansion approx 8.3X10<-6>- 9.3X10<-6> suffices.
JP1078380A 1980-01-30 1980-01-30 Pressure sensor Pending JPS56107141A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1078380A JPS56107141A (en) 1980-01-30 1980-01-30 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1078380A JPS56107141A (en) 1980-01-30 1980-01-30 Pressure sensor

Publications (1)

Publication Number Publication Date
JPS56107141A true JPS56107141A (en) 1981-08-25

Family

ID=11759927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1078380A Pending JPS56107141A (en) 1980-01-30 1980-01-30 Pressure sensor

Country Status (1)

Country Link
JP (1) JPS56107141A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5930034A (en) * 1982-08-13 1984-02-17 Tokyo Keiki Co Ltd Pressure receiver for pressure gage
JPS6147532A (en) * 1984-08-11 1986-03-08 Sumitomo Electric Ind Ltd Strain sensor
JPH09494U (en) * 1986-03-10 1997-09-19 マレリ・オートロニカ・ソシエタ・ペル・アチオニ Thick film sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50130375A (en) * 1974-04-01 1975-10-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50130375A (en) * 1974-04-01 1975-10-15

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5930034A (en) * 1982-08-13 1984-02-17 Tokyo Keiki Co Ltd Pressure receiver for pressure gage
JPS6147532A (en) * 1984-08-11 1986-03-08 Sumitomo Electric Ind Ltd Strain sensor
JPH0566537B2 (en) * 1984-08-11 1993-09-22 Sumitomo Electric Industries
JPH09494U (en) * 1986-03-10 1997-09-19 マレリ・オートロニカ・ソシエタ・ペル・アチオニ Thick film sensor

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