JPH0566353B2 - - Google Patents
Info
- Publication number
- JPH0566353B2 JPH0566353B2 JP60152340A JP15234085A JPH0566353B2 JP H0566353 B2 JPH0566353 B2 JP H0566353B2 JP 60152340 A JP60152340 A JP 60152340A JP 15234085 A JP15234085 A JP 15234085A JP H0566353 B2 JPH0566353 B2 JP H0566353B2
- Authority
- JP
- Japan
- Prior art keywords
- solution
- temperature
- melt
- growth
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15234085A JPS6217097A (ja) | 1985-07-12 | 1985-07-12 | 液相エピタキシヤル成長法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15234085A JPS6217097A (ja) | 1985-07-12 | 1985-07-12 | 液相エピタキシヤル成長法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6217097A JPS6217097A (ja) | 1987-01-26 |
| JPH0566353B2 true JPH0566353B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-09-21 |
Family
ID=15538396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15234085A Granted JPS6217097A (ja) | 1985-07-12 | 1985-07-12 | 液相エピタキシヤル成長法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6217097A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS589794B2 (ja) * | 1979-05-16 | 1983-02-22 | 富士通株式会社 | 半導体の液相多層薄膜成長法および成長装置 |
| JPS56114897A (en) * | 1980-02-07 | 1981-09-09 | Mitsubishi Electric Corp | Method for liquid-phase epitaxial growth |
-
1985
- 1985-07-12 JP JP15234085A patent/JPS6217097A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6217097A (ja) | 1987-01-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |