JPH0562717B2 - - Google Patents

Info

Publication number
JPH0562717B2
JPH0562717B2 JP6608985A JP6608985A JPH0562717B2 JP H0562717 B2 JPH0562717 B2 JP H0562717B2 JP 6608985 A JP6608985 A JP 6608985A JP 6608985 A JP6608985 A JP 6608985A JP H0562717 B2 JPH0562717 B2 JP H0562717B2
Authority
JP
Japan
Prior art keywords
activated carbon
rare gas
hold
tower
gas hold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP6608985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61225698A (ja
Inventor
Hideki Nagata
Tooru Saito
Shigeru Okada
Yoshihiro Kitahara
Takenao Myagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Industry and Control Solutions Co Ltd
Original Assignee
Hitachi Engineering Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Engineering Co Ltd, Hitachi Ltd filed Critical Hitachi Engineering Co Ltd
Priority to JP6608985A priority Critical patent/JPS61225698A/ja
Publication of JPS61225698A publication Critical patent/JPS61225698A/ja
Publication of JPH0562717B2 publication Critical patent/JPH0562717B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Separation Of Gases By Adsorption (AREA)
JP6608985A 1985-03-29 1985-03-29 活性炭式希ガスホ−ルドアツプ装置の運転方法及びそのための装置 Granted JPS61225698A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6608985A JPS61225698A (ja) 1985-03-29 1985-03-29 活性炭式希ガスホ−ルドアツプ装置の運転方法及びそのための装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6608985A JPS61225698A (ja) 1985-03-29 1985-03-29 活性炭式希ガスホ−ルドアツプ装置の運転方法及びそのための装置

Publications (2)

Publication Number Publication Date
JPS61225698A JPS61225698A (ja) 1986-10-07
JPH0562717B2 true JPH0562717B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-09-09

Family

ID=13305783

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6608985A Granted JPS61225698A (ja) 1985-03-29 1985-03-29 活性炭式希ガスホ−ルドアツプ装置の運転方法及びそのための装置

Country Status (1)

Country Link
JP (1) JPS61225698A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5547928B2 (ja) * 2009-08-27 2014-07-16 大成建設株式会社 排気システム及び排気方法

Also Published As

Publication number Publication date
JPS61225698A (ja) 1986-10-07

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees