JPH0557657B2 - - Google Patents

Info

Publication number
JPH0557657B2
JPH0557657B2 JP21477786A JP21477786A JPH0557657B2 JP H0557657 B2 JPH0557657 B2 JP H0557657B2 JP 21477786 A JP21477786 A JP 21477786A JP 21477786 A JP21477786 A JP 21477786A JP H0557657 B2 JPH0557657 B2 JP H0557657B2
Authority
JP
Japan
Prior art keywords
resist master
resist
master
temperature
baking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP21477786A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6370940A (ja
Inventor
Kazumi Kuryama
Yutaka Takasu
Shigeru Kono
Chiharu Koshio
Kazuhiko Osada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Video Corp
Pioneer Corp
Original Assignee
Pioneer Video Corp
Pioneer Electronic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Video Corp, Pioneer Electronic Corp filed Critical Pioneer Video Corp
Priority to JP21477786A priority Critical patent/JPS6370940A/ja
Publication of JPS6370940A publication Critical patent/JPS6370940A/ja
Publication of JPH0557657B2 publication Critical patent/JPH0557657B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP21477786A 1986-09-11 1986-09-11 レジスト原盤の熱処理装置 Granted JPS6370940A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21477786A JPS6370940A (ja) 1986-09-11 1986-09-11 レジスト原盤の熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21477786A JPS6370940A (ja) 1986-09-11 1986-09-11 レジスト原盤の熱処理装置

Publications (2)

Publication Number Publication Date
JPS6370940A JPS6370940A (ja) 1988-03-31
JPH0557657B2 true JPH0557657B2 (fr) 1993-08-24

Family

ID=16661361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21477786A Granted JPS6370940A (ja) 1986-09-11 1986-09-11 レジスト原盤の熱処理装置

Country Status (1)

Country Link
JP (1) JPS6370940A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015020004A1 (fr) 2013-08-07 2015-02-12 旭硝子株式会社 Composition élastomère fluorée réticulable et produit réticulé associé

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0749910B2 (ja) * 1988-09-02 1995-05-31 パイオニア株式会社 光ディスク原盤の加熱乾燥装置
JPH0749911B2 (ja) * 1988-09-02 1995-05-31 パイオニア株式会社 光ディスク原盤の加熱乾燥装置
DE19543354A1 (de) * 1995-11-21 1997-05-22 Leybold Ag Vorrichtung zum Trocknen einer Lackschicht
DE19821237C1 (de) * 1998-05-12 2000-03-02 Fraunhofer Ges Forschung Verfahren und Vorrichtung zur Trocknung von Photoresistschichten

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015020004A1 (fr) 2013-08-07 2015-02-12 旭硝子株式会社 Composition élastomère fluorée réticulable et produit réticulé associé

Also Published As

Publication number Publication date
JPS6370940A (ja) 1988-03-31

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees