JPH0556668B2 - - Google Patents

Info

Publication number
JPH0556668B2
JPH0556668B2 JP59063085A JP6308584A JPH0556668B2 JP H0556668 B2 JPH0556668 B2 JP H0556668B2 JP 59063085 A JP59063085 A JP 59063085A JP 6308584 A JP6308584 A JP 6308584A JP H0556668 B2 JPH0556668 B2 JP H0556668B2
Authority
JP
Japan
Prior art keywords
thin film
film transistor
source
gate
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59063085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60206174A (ja
Inventor
Tsuneo Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP59063085A priority Critical patent/JPS60206174A/ja
Publication of JPS60206174A publication Critical patent/JPS60206174A/ja
Publication of JPH0556668B2 publication Critical patent/JPH0556668B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6757—Thin-film transistors [TFT] characterised by the structure of the channel, e.g. transverse or longitudinal shape or doping profile
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • H10D30/6713—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/673—Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes
    • H10D30/6732—Bottom-gate only TFTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6741—Group IV materials, e.g. germanium or silicon carbide
    • H10D30/6743—Silicon
    • H10D30/6746—Amorphous silicon

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP59063085A 1984-03-30 1984-03-30 薄膜トランジスタ Granted JPS60206174A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59063085A JPS60206174A (ja) 1984-03-30 1984-03-30 薄膜トランジスタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59063085A JPS60206174A (ja) 1984-03-30 1984-03-30 薄膜トランジスタ

Publications (2)

Publication Number Publication Date
JPS60206174A JPS60206174A (ja) 1985-10-17
JPH0556668B2 true JPH0556668B2 (enrdf_load_stackoverflow) 1993-08-20

Family

ID=13219138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59063085A Granted JPS60206174A (ja) 1984-03-30 1984-03-30 薄膜トランジスタ

Country Status (1)

Country Link
JP (1) JPS60206174A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01259565A (ja) * 1988-04-11 1989-10-17 Hitachi Ltd 薄膜トランジスタおよびその製造方法
KR920008834A (ko) * 1990-10-09 1992-05-28 아이자와 스스무 박막 반도체 장치
CN104779301B (zh) 2015-04-24 2017-10-27 京东方科技集团股份有限公司 一种薄膜晶体管及其制作方法、阵列基板、显示装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4461071A (en) * 1982-08-23 1984-07-24 Xerox Corporation Photolithographic process for fabricating thin film transistors

Also Published As

Publication number Publication date
JPS60206174A (ja) 1985-10-17

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term