JPH055640B2 - - Google Patents

Info

Publication number
JPH055640B2
JPH055640B2 JP61135629A JP13562986A JPH055640B2 JP H055640 B2 JPH055640 B2 JP H055640B2 JP 61135629 A JP61135629 A JP 61135629A JP 13562986 A JP13562986 A JP 13562986A JP H055640 B2 JPH055640 B2 JP H055640B2
Authority
JP
Japan
Prior art keywords
dust
object storage
storage section
outside
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61135629A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62292391A (ja
Inventor
Teruo Asakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP13562986A priority Critical patent/JPS62292391A/ja
Publication of JPS62292391A publication Critical patent/JPS62292391A/ja
Publication of JPH055640B2 publication Critical patent/JPH055640B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
JP13562986A 1986-06-11 1986-06-11 無塵室用搬送ロボット Granted JPS62292391A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13562986A JPS62292391A (ja) 1986-06-11 1986-06-11 無塵室用搬送ロボット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13562986A JPS62292391A (ja) 1986-06-11 1986-06-11 無塵室用搬送ロボット

Publications (2)

Publication Number Publication Date
JPS62292391A JPS62292391A (ja) 1987-12-19
JPH055640B2 true JPH055640B2 (enExample) 1993-01-22

Family

ID=15156274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13562986A Granted JPS62292391A (ja) 1986-06-11 1986-06-11 無塵室用搬送ロボット

Country Status (1)

Country Link
JP (1) JPS62292391A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2604012B2 (ja) * 1988-07-29 1997-04-23 株式会社東芝 クリーンロボット

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5924292U (ja) * 1982-08-05 1984-02-15 東京エレクトロン株式会社 腕状機構
JPS6294291A (ja) * 1985-10-21 1987-04-30 フアナツク株式会社 産業用ロボツトの防塵構造

Also Published As

Publication number Publication date
JPS62292391A (ja) 1987-12-19

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