JPH055640B2 - - Google Patents

Description

[Detailed Description of the Invention] [Object of the Invention] (Industrial Field of Application) The present invention relates to a transport robot for a dust-free chamber that transports manufactured parts, etc. in a dust-free chamber used, for example, in the manufacture of semiconductor devices. .

(Prior art) For example, in a dust-free room where semiconductor devices such as VLSIs are manufactured, clean air that has been purified by passing through a filter is circulated by flowing it downward from above in a laminar flow state. Dust removal is being carried out.

Human bodies are a major source of dust in such dust-free rooms, so the interior is unmanned. For example, transport robots for dust-free rooms are used to transport manufacturing parts such as semiconductor wafers. It is considered to do.

(Problem to be solved by the invention) However, the transport robot for a dust-free room requires a moving drive unit, a work drive unit, etc., which are a source of dust generation, and dust from such drive units This may cause problems such as contaminating the conveyed items or other items in the dust-free room.

The present invention was made in response to such problems, and it is possible to keep the transported objects stored in the transported object storage section clean, and also to prevent dust from contaminating other objects in the dust-free chamber. The purpose is to provide a room-use transportation robot.

[Structure of the Invention] (Means for Solving the Problems) That is, the transport robot for a dust-free room of the present invention is a transport robot for a dust-free room that is used in a dust-free room in which a flow of clean air flows down from the ceiling to the floor. A transfer robot for a dust room includes an object storage section that is equipped with an air purifying filter and an air delivery fan that supply clean air to the objects to be stored, and is maintained at a higher pressure than the outside, and a container that is formed below the object storage section. The present invention is characterized by comprising a moving drive section and a working drive section disposed in a space maintained at a lower pressure than the outside by an air exhaust fan disposed at the bottom of the space.

(Function) In the transport robot for a dust-free room of the present invention, a clean air flow is formed in the transport object storage section by the air cleaning filter and the air delivery fan, and this clean air flow allows the transport robot to accommodate the transport objects. The internal pressure is kept higher than the external pressure. Therefore, dust does not enter the transported object storage section from the outside, and the inside of the transported object storage section is kept in a clean atmosphere, so that dust does not adhere to objects such as semiconductor wafers stored inside. It is possible to transport while preventing this.

In addition, a space is formed at the bottom of the conveyed object storage section that is kept at a lower pressure than the outside by an air exhaust fan installed at the bottom. A work drive unit that drives the drive unit, work arm, etc. is arranged. Therefore, it is possible to prevent dust generated from these drive parts from scattering to the outside.
In addition, even if dust leaks outside, these drive parts are located at the bottom of the conveyed object storage area, so the leaked dust will be immediately discharged outside the clean room due to the downflow inside the clean room. This prevents the particles from adhering to the transported objects in the transported object storage section or other articles in the clean room.

(Example) The details of the present invention will be described below with reference to an example shown in the drawings.

The figure shows a dust-free room transport robot according to an embodiment of the present invention for transporting semiconductor wafers in a dust-free room. A conveyance object storage section 1 for storing semiconductor wafers is arranged at the top, and a work arm 3 for loading and unloading the semiconductor wafers is provided in the transport robot main body 2 disposed at the bottom thereof. A work drive unit 4 for driving the work arm 3 and a movement drive unit 6 for rotating wheels 5 for moving between work locations are arranged.

Further, the conveyed object storage section 1 has a conical upper part, which is shaped so as not to disturb the air flow in the dust-free chamber flowing downward from above, and clean air is sent into the inside thereof through a filter 7. A fan 8 is arranged to keep the inside of the conveyance object storage section 1 at a higher pressure than the outside with clean air.

A fan 10 is disposed at the bottom of the transport robot main body 2 to exhaust the air inside the transport robot main body 2 downward to the outside via a filter 9.
The inside of the transfer robot main body 2 is kept at a lower pressure than the outside.

The transfer robot for a dust-free chamber of this embodiment with the above-mentioned configuration moves in a dust-free chamber in which a clean air flow flows from the top to the bottom, and carries the semiconductor wafer into the transfer object storage section 1 with the working arm 3. Semiconductor wafers are transported by being stored in the transport object storage section 1 or taken out from the transport object storage section 1.

At this time, the movement drive unit 6 and the work drive unit 4, which are the sources of dust generation, are housed within the transfer robot main body 2, which is maintained at a lower pressure than the outside, making it difficult for the dust generated here to scatter to the outside. It is configured like this. Even in the unlikely event that the dust generated here scatters to the outside, the conveyed object storage section 1 will be able to accommodate the conveying robot body 2.
The clean air inside the dust-free chamber flowing from the top to the bottom carries this dust downward, contaminating the semiconductor wafers in the conveyed object storage section 1 and other items in the dust-free chamber. Never.

[Effects of the Invention] As described above, in the dust-free room transport robot of the present invention, a clean air flow is formed in the transport object storage section by the air purifying filter and the air delivery fan, and the air flow is maintained at a higher pressure than the outside. Therefore, dust does not enter the conveyance object storage section from the outside, and the inside of the conveyance object storage section is maintained in a clean atmosphere, and dust is prevented from adhering to objects such as semiconductor wafers housed inside. I can do it.

In addition, since the moving drive unit and the work drive unit are located in a space that is kept at a lower pressure than the outside by the air exhaust fan at the bottom of the conveyed object storage unit, dust generated from these drive units is removed. It is possible to prevent dust from scattering outside, and even if dust leaks outside, the downflow inside the clean room will immediately discharge the leaked dust outside the clean room and prevent it from being carried on objects, etc. Can prevent adhesion.

[Brief explanation of the drawing]

The figure is a longitudinal sectional view showing the configuration of a transport robot for a dust-free room according to an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Conveyance object storage part, 2...Transportation robot main body, 4...Working drive part, 6...Movement drive part.

Claims (1)

[Scope of Claims] 1. A transport robot for a dust-free room used in a dust-free room in which a clean air flow is formed flowing down from the ceiling to the floor, comprising: an air purifying filter that supplies clean air to objects to be stored; A conveyed object storage section is provided with an air delivery fan and maintained at a higher pressure than the outside, and a space formed below this conveyed object storage section is maintained at a lower pressure than the outside by an air exhaust fan disposed at the bottom of the space. A transport robot for a dust-free room, characterized by comprising a movement drive unit and a work drive unit arranged in a sagging space.